Abstract:
PROBLEM TO BE SOLVED: To provide a printed wiring board which improves connection reliability between a via conductor and a conductor circuit on the bottom side of the via conductor. SOLUTION: A resin filler 38 in a through hole conductor 36 has a larger thermal expansion coefficient than a core substrate 30 provided with a core, and a via conductor 62 on a cover plating layer (through hole land) 42 is given a large separating force by heat cycle. The via conductor 62 is reversely tapered from the front surface side to the bottom side, and the area of the bottom 62D is made large. Thus, the connection reliability between the bottom 62D of the via conductor 62 and the cover plating layer 42 is improved, thereby improving the reliability of the printed wiring board. COPYRIGHT: (C)2011,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a wiring board which can be reduced in manufacturing cost and made simple in manufacturing processes. SOLUTION: A molding die having a hemispherical protrusion is pressed down on an interlayer resin layer 180 while another molding die having a hemispherical protrusion is pressed down on an interlayer resin layer 190. By this setup, a hemispherical opening 200 is formed in a via forming region on the interlayer resin layer 180 so as to expose a part of a wiring pattern 160. Similarly, a hemispherical opening 210 is formed in a via forming region on the interlayer resin layer 190 so as to expose a part of a wiring pattern 170. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
A wiring board (3) in accordance with an embodiment of the invention includes: an inorganic insulating layer (13) having a via hole (V) formed so as to penetrate the inorganic insulating layer (13) in a thickness direction thereof; a conductive layer (11) disposed on the inorganic insulating layer (13); and a via conductor (12) which adheres to an inner wall (W) of the via hole (V) and is connected with the conductive layer (11). The inorganic insulating layer (13) includes a first section (33) including a plurality of inorganic insulating particles (16) partly connected to each other, and a resin portion (18) located in gaps (17) between the inorganic insulating particles (16), and a second section (34) which is interposed between the first section (33) and the via conductor (12), including a plurality of inorganic insulating particles (16) partly connected to each other, and a conducting portion (19) composed of part of the via conductor (12) which is located in gaps (17) between the inorganic insulating particles (16).
Abstract:
There are provided a multi-piece-array in which it is difficult for chipping, cracking, or breaking to occur from the vicinity of dividing grooves at the time of division or after division and which has high reliability, and a method of manufacturing the multi-piece-array. A multi-piece-array 1 is formed by laminating a plurality of ceramic layers s1 and s2 and has a front surface 2 and a back surface 3. The multi-piece-array 1 includes a product region 4a where a plurality of wiring board portions 4 having a rectangular shape in plan view and including cavities 5 are arranged in a matrix, an edge portion 6 that is positioned along the periphery of the product region 4a, and dividing grooves 8 and 9 that are formed on at least one of the front surface 2 and the back surface 3 along boundaries between the wiring board portions 4 and 4 and boundaries between the wiring board portions 4 and the edge portion 6. The deepest portions 8b of the dividing grooves 8 and 9 have an arc shape and each of the dividing grooves 8 and 9 includes a middle portion 8a between the deepest portion 8b and a groove inlet 8c on a cross-section orthogonal to an extending direction. The width w2 of the deepest portion 8b is greater than the width w3 of the groove inlet 8c and the width w1 of the middle portion 8a is equal to or less than the width w3 of the groove inlet 8c.
Abstract:
A Capacitive Micromachined Ultrasonic Transducer (CMUT) device includes at least one CMUT cell including a first substrate of a single crystal material having a top side including a patterned dielectric layer thereon including a thick and a thin dielectric region, and a through-substrate via (TSV) extending a full thickness of the first substrate. The TSV is formed of the single crystal material, is electrically isolated by isolation regions in the single crystal material, and is positioned under a top side contact area of the first substrate. A membrane layer is bonded to the thick dielectric region and over the thin dielectric region to provide a movable membrane over a micro-electro-mechanical system (MEMS) cavity. A metal layer is over the top side substrate contact area and over the movable membrane including coupling of the top side substrate contact area to the movable membrane.
Abstract:
A wiring board (3) in accordance with an embodiment of the invention includes: an inorganic insulating layer (13) having a via hole (V) formed so as to penetrate the inorganic insulating layer (13) in a thickness direction thereof; a conductive layer (11) disposed on the inorganic insulating layer (13); and a via conductor (12) which adheres to an inner wall (W) of the via hole (V) and is connected with the conductive layer (11). The inorganic insulating layer (13) includes a first section (33) including a plurality of inorganic insulating particles (16) partly connected to each other, and a resin portion (18) located in gaps (17) between the inorganic insulating particles (16), and a second section (34) which is interposed between the first section (33) and the via conductor (12), including a plurality of inorganic insulating particles (16) partly connected to each other, and a conducting portion (19) composed of part of the via conductor (12) which is located in gaps (17) between the inorganic insulating particles (16).
Abstract:
There are provided a multi-piece-array in which it is difficult for chipping, cracking, or breaking to occur from the vicinity of dividing grooves at the time of division or after division and which has high reliability, and a method of manufacturing the multi-piece-array. A multi-piece-array 1 is formed by laminating a plurality of ceramic layers s1 and s2 and has a front surface 2 and a back surface 3. The multi-piece-array 1 includes a product region 4a where a plurality of wiring board portions 4 having a rectangular shape in plan view and including cavities 5 are arranged in a matrix, an edge portion 6 that is positioned along the periphery of the product region 4a, and dividing grooves 8 and 9 that are formed on at least one of the front surface 2 and the back surface 3 along boundaries between the wiring board portions 4 and 4 and boundaries between the wiring board portions 4 and the edge portion 6. The deepest portions 8b of the dividing grooves 8 and 9 have an arc shape and each of the dividing grooves 8 and 9 includes a middle portion 8a between the deepest portion 8b and a groove inlet 8c on a cross-section orthogonal to an extending direction. The width w2 of the deepest portion 8b is greater than the width w3 of the groove inlet 8c and the width w1 of the middle portion 8a is equal to or less than the width w3 of the groove inlet 8c.