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    DEVICE FOR THE FIELD EMISSION OF PARTICLES AND PRODUCTION METHOD
    21.
    发明申请
    DEVICE FOR THE FIELD EMISSION OF PARTICLES AND PRODUCTION METHOD 有权
    用于颗粒的场发射和生产方法的装置

    公开(公告)号：US20100090579A1

    公开(公告)日：2010-04-15

    申请号：US12449919

    申请日：2008-02-28

    Applicant: Josef Sellmair

    Inventor： Josef Sellmair

    IPC: H01J1/50 ,  H01J9/00

    CPC classification number: H01J37/073 ,  H01J37/063 ,  H01J37/08 ,  H01J37/141 ,  H01J37/143 ,  H01J37/28 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/0807 ,  H01J2237/0815 ,  H01J2237/142

    Abstract: The invention relates to an apparatus and a method for production of a device for thermally induced field emission of particles for particle optical devices such as in particular electron or ion microscopes,having at least one particle emitter (3) arranged in or pointing into a vacuum space (2) with at least one field emitter tip (4) for the emission of the particles,and having a magnetic field generator (6) attributed to the particle emitter (3) for focussing of the emitted particle beam (5),with the particle emitter (3) with its field emitter tip (4) is built by emitter structures (9) positioned on the surface (7) of a substrate (8) which is turned away from the magnetic field generator (6),and the substrate (8) formed as separating wall between vacuum space (2) and the atmospheric space (10) situated outside the vacuum space (2) at the side (14) of the substrate (8) which is turned away from the emitter structures (9).

    Abstract translation: 本发明涉及一种用于制造用于颗粒光学器件（例如电子或离子显微镜）的颗粒光学器件的热感应场发射装置的装置和方法，所述装置和方法具有布置在或指向真空中的至少一个粒子发射器（3） 具有用于发射颗粒的至少一个场发射器尖端（4）的空间（2），并且具有归因于用于聚焦发射的粒子束（5）的粒子发射体（3）的磁场发生器（6），与 具有其场发射极尖端（4）的粒子发射器（3）由位于离开磁场发生器（6）的衬底（8）的表面（7）上的发射器结构（9）构成，并且 基板（8），其形成为位于真空空间（2）和位于真空空间（2）外侧的大气空间（10）之间的分离壁，所述空间（2）位于离开发射器结构的基板（8）的侧面（14） 9）。

    Magnetic lens apparatus for a low-voltage high-resolution electron microscope
    22.
    发明授权
    Magnetic lens apparatus for a low-voltage high-resolution electron microscope 失效
    用于低电压高分辨率电子显微镜的磁性透镜装置

    公开(公告)号：US5563415A

    公开(公告)日：1996-10-08

    申请号：US487926

    申请日：1995-06-07

    Applicant: Albert V. Crewe

    Inventor： Albert V. Crewe

    IPC: G01Q30/02 ,  H01J37/141 ,  H01J37/14

    CPC classification number: H01J37/141 ,  H01J2237/1035 ,  H01J2237/142

    Abstract: A lens apparatus in which a beam of charged particles of low accelerating voltage is brought to a focus by a magnetic field, the lens being situated behind the target position. The lens comprises an electrically-conducting coil arranged around the axis of the beam and a magnetic pole piece extending along the axis of the beam at least within the space surrounded by the coil. The lens apparatus comprises the sole focusing lens for high-resolution imaging in a low-voltage scanning electron microscope.

    Abstract translation: 一种透镜装置，其中通过磁场将低加速电压的带电粒子束聚焦，透镜位于目标位置之后。 透镜包括围绕光束的轴线布置的导电线圈和至少在由线圈包围的空间内沿着光束的轴线延伸的磁极片。 透镜装置包括用于在低电压扫描电子显微镜中进行高分辨率成像的唯一聚焦透镜。

    Magnetic lenses
    24.
    发明授权
    Magnetic lenses 失效
    磁性镜片

    公开(公告)号：US3659097A

    公开(公告)日：1972-04-25

    申请号：US3659097D

    申请日：1971-02-16

    Applicant: NAT RES DEV

    Inventor： BASSETT RICHARD ,  MULVEY THOMAS

    IPC: H01J29/66 ,  H01J37/02 ,  H01J37/141 ,  H01J37/252 ,  H01J37/26

    CPC classification number: H01J37/02 ,  H01J29/66 ,  H01J37/141 ,  H01J37/252 ,  H01J2237/002 ,  H01J2237/142

    Abstract: Apparatus having a generator of a beam of charged particles and magnetic focusing means in which a beam of charged particles is brought to a focus between the source and the focusing means so that radiation from a target placed at the focus can be received by a radiation detector within a substantial solid angle, bounded by said magnetic focusing means and the beam of charged particles. Preferably the focusing means is an electrically conducting coil of substantially flat or shallow conical form having a conical half-angle of not less than 75*.

    Abstract translation: 具有带电粒子束的发生器和磁聚焦装置的装置，其中带电粒子束被带到源和聚焦装置之间的焦点，使得放置在焦点处的来自靶的辐射可以被辐射检测器 在大致立体角内，由所述磁性聚焦装置和带电粒子束限定。

    DEVICE FOR THE FIELD EMISSION OF PARTICLES AND PRODUCTION METHOD
    25.
    发明申请
    DEVICE FOR THE FIELD EMISSION OF PARTICLES AND PRODUCTION METHOD 审中-公开
    设备用于生产场发射粒子和方法

    公开(公告)号：WO2008104393A3

    公开(公告)日：2009-03-26

    申请号：PCT/EP2008001583

    申请日：2008-02-28

    Applicant: SELLMAIR JOSEF

    Inventor： SELLMAIR JOSEF

    IPC: H01J1/304 ,  H01J1/50 ,  H01J37/14

    CPC classification number: H01J37/073 ,  H01J37/063 ,  H01J37/08 ,  H01J37/141 ,  H01J37/143 ,  H01J37/28 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/0807 ,  H01J2237/0815 ,  H01J2237/142

    Abstract: The invention relates to a device and method for producing a device for the thermally induced field emission of particles for particle-optical devices such as electron or ion microscopes. The device comprises at least one particle emitter (3), which is arranged in a vacuum space (2) or is pointing thereto and has at least one field emitter tip (4) for the emission of particles, and a magnetic field generator (6) allocated to the at least one particle emitter (3) for focussing the emitted particle stream (5). According to the invention, the particle emitter (3) with its field emitter tip (4) is composed of emitter structures (9) which are produced on or in the surface (7) of the side of a substrate (8), facing away from the magnetic field generator (6). The substrate (8) is configured as a dividing wall (2) between the vacuum space (2) and the atmospheric space (10) which is located outside the vacuum space (2). The magnetic field generator (6) is arranged outside the vacuum space (2) on the side (14) of the substrate (8) facing away from the emitter structures (9).

    Abstract translation: 本发明涉及一种装置和一种用于制造用于粒子光学设备的颗粒的热诱导的场致发射装置例如特别是电子或离子显微镜的方法，在真空空间布置有至少一个（2）或在真空室（2）示出了粒子发射器（3 ）与至少一个场致发射体尖端（4），用于所述颗粒的排放，和相关联的所述至少一个粒子发射器（3）的磁场发生器（6），用于聚焦发射的粒子流（5），其中，所述粒子发射器（3）与其场发射体尖端（4）上 或在磁场发生器的基板（8）的侧（6）的面向远离所述表面（7）由发射极结构上形成（9），并且基板（8）作为真空腔室之间的分隔壁（2）和（真空空间的外 2）位于大气室（10）形成，并且所述磁场发生器（6）的真空空间的外部（2）脱 背向所述基板（8）的侧（14）R发射极结构（9）被布置。

    VORRICHTUNG ZUR FELDEMISSION VON TEILCHEN UND VERFAHREN ZUR HERSTELLUNG
    26.
    发明申请
    VORRICHTUNG ZUR FELDEMISSION VON TEILCHEN UND VERFAHREN ZUR HERSTELLUNG 审中-公开
    设备用于生产场发射粒子和方法

    公开(公告)号：WO2008104393A2

    公开(公告)日：2008-09-04

    申请号：PCT/EP2008/001583

    申请日：2008-02-28

    Applicant: SELLMAIR, Josef

    Inventor： SELLMAIR, Josef

    IPC: H01J1/304 ,  H01J1/50 ,  H01J37/14

    CPC classification number: H01J37/073 ,  H01J37/063 ,  H01J37/08 ,  H01J37/141 ,  H01J37/143 ,  H01J37/28 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/0807 ,  H01J2237/0815 ,  H01J2237/142

    Abstract: Die Erfindung betrifft eine Vorrichtung und ein Verfahren zur Herstellung einer Vorrichtung zur thermisch induzierten Feldemission von Teilchen für teilchenoptische Geräte wie insbesondere Elektronen- oder Ionenmikroskope, mit wenigstens einem in einem Vakuumraum (2) angeordneten bzw. in einen Vakuumraum (2) zeigenden Teilchenemitter (3) mit wenigstens einer Feldemitterspitze (4) zur Emission der Teilchen, und einer dem wenigstens einen Teilchenemitter (3) zugeordneten Magnetfelderzeuger (6) zur Fokussierung des emittierten Teilchenstroms (5), wobei der Teilchenemitter (3) mit seiner Feldemitterspitze (4) durch auf bzw. in der Oberfläche (7) auf der dem Magnetfelderzeuger (6) abgewandten Seite eines Substrates (8) gefertigte Emitterstrukturen (9) ausgebildet ist, und das Substrat (8) als Trennwandung zwischen dem Vakuumraum (2) und dem außerhalb des Vakuumraumes (2) liegenden Atmosphärenraum (10) ausgebildet ist, und der Magnetfelderzeuger (6) außerhalb des Vakuumraums (2) auf der den Emitterstrukturen (9) abgewandten Seite (14) des Substrates (8) angeordnet ist.

    Abstract translation: 本发明涉及一种装置和一种用于制造用于粒子光学设备的颗粒的热诱导的场致发射装置例如特别是电子或离子显微镜的方法，在真空空间布置有至少一个（2）或在真空室（2）示出了粒子发射器（3 ）与至少一个场致发射体尖端（4），用于所述颗粒的排放，和相关联的所述至少一个粒子发射器（3）的磁场发生器（6），用于聚焦发射的粒子流（5），其中，所述粒子发射器（3）与其场发射体尖端（4）上 或在磁场发生器的基板（8）的侧（6）的面向远离所述表面（7）由发射极结构上形成（9），并且基板（8）作为真空腔室之间的分隔壁（2）和（真空空间的外 2）位于大气室（10）形成，并且所述磁场发生器（6）的真空空间的外部（2）脱 背向所述基板（8）的侧（14）R发射极结构（9）被布置。

    Charged particle beam orbit correcting unit and charged particle beam apparatus
    30.
    发明专利
    Charged particle beam orbit correcting unit and charged particle beam apparatus 有权
    充电颗粒光束修正单元和充电颗粒光束装置

    公开(公告)号：JP2012227160A

    公开(公告)日：2012-11-15

    申请号：JP2012161163

    申请日：2012-07-20

    Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

    Inventor： ITO HIROYUKI ,  SASAKI HIROKO ,  ISHITANI TORU ,  NAKAYAMA YOSHINORI

    IPC: H01J37/153 ,  H01J37/09 ,  H01J37/12 ,  H01J37/145 ,  H01J37/18 ,  H01J37/20

    CPC classification number: H01J37/141 ,  H01J37/09 ,  H01J37/12 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/142 ,  H01J2237/1534 ,  H01J2237/303

    Abstract: PROBLEM TO BE SOLVED: To provide an optical converging system for a charged particle beam which is a low-cost, has high-precision, and has high-resolution.SOLUTION: A beam orbit is limited in a ring zone shape to form distribution of an electromagnetic field converging toward a center direction of a beam orbit axis. Consequently, nonlinear action that is augmented outside, typified by spherical aberration of an electron lens, can be cancelled. Specifically, when an electrode is disposed on the axis and voltage is applied to the electrode, concentration of electric field occurs readily. In a case of magnetic field, if a coil, radially distributed and wound on a surface in an equiangular manner divided in a rotating direction, is formed, the concentration of magnetic flux density can be controlled.

    Abstract translation: 解决的问题：提供一种低成本，高精度，高分辨率的带电粒子束的聚光系统。 解决方案：光束轨道被限制在环形区域中以形成朝向光束轨道轴线的中心方向会聚的电磁场的分布。 因此，可以消除以电子透镜的球面像差为代表的外部增强的非线性动作。 具体地，当电极设置在轴上并且电压被施加到电极时，容易发生电场的集中。 在磁场的情况下，如果沿旋转方向以等角度方式径向分布并卷绕在表面上的线圈，则可以控制磁通密度的浓度。 版权所有（C）2013，JPO＆INPIT

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