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公开(公告)号:FR2959868A1
公开(公告)日:2011-11-11
申请号:FR1053552
申请日:2010-05-06
Applicant: ST MICROELECTRONICS CROLLES 2 , ST MICROELECTRONICS SA
Inventor: FIORI VINCENT , DELPECH PHILIPPE , SABOURET ERIC
IPC: H01L23/50
Abstract: Dispositif semi-conducteur comprenant un circuit intégré et des plots de connexion électrique extérieure, dans lequel les plots (3) présentent des évidements (E) au moins partiellement remplis par une matière différente de celle les constituant, de façon à former des inserts (I).
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公开(公告)号:FR2839581A1
公开(公告)日:2003-11-14
申请号:FR0205712
申请日:2002-05-07
Applicant: ST MICROELECTRONICS SA
Inventor: CATHELIN ANDREA , BERNARD CHRISTOPHE , DELPECH PHILIPPE , TROADEC PIERRE , SALAGER LAURENT , GARNIER CHRISTOPHE
IPC: H01L23/52 , H01G17/00 , H01L21/3205 , H01L21/4763 , H01L21/76 , H01L21/822 , H01L23/48 , H01L23/522 , H01L23/58 , H01L23/66 , H01L27/04 , H04Q7/20
Abstract: An electronic circuit includes a substrate. A capacitor and at least one semiconductor component are supported by a surface of the substrate. A substantially planar screen, oriented parallel to the surface of the substrate and made of metallic material, is placed between the capacitor and the semiconductor component. Preferably, the semiconductor component is placed in proximity to the surface of the substrate and several superposed layers of insulating material cover the surface of the substrate and the semiconductor component. The capacitor is then placed within at least one layer of insulating material above the semiconductor component, and the screen is placed within an intermediate layer of insulating material between the layer incorporating the capacitor and the surface of the substrate.
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公开(公告)号:FR2801421B1
公开(公告)日:2003-10-24
申请号:FR9914484
申请日:1999-11-18
Applicant: ST MICROELECTRONICS SA
Inventor: DELPECH PHILIPPE , COTTIN DIDIER
IPC: H01L21/336 , H01L29/78
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公开(公告)号:FR2797999B1
公开(公告)日:2003-08-08
申请号:FR9911139
申请日:1999-08-31
Applicant: ST MICROELECTRONICS SA
Inventor: DELPECH PHILIPPE , OBERLIN JEAN CLAUDE
IPC: H01L21/02 , H01L21/3105 , H01L21/314 , H01L21/316 , H01L21/3205 , H01G4/08 , H01L21/3065
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公开(公告)号:FR2801421A1
公开(公告)日:2001-05-25
申请号:FR9914484
申请日:1999-11-18
Applicant: ST MICROELECTRONICS SA
Inventor: DELPECH PHILIPPE , COTTIN DIDIER
IPC: H01L21/336 , H01L29/78
Abstract: MOS transistor (40) comprises gate (20) formed on Si substrate (21), drain (23) and source (24) regions and their extension regions extending to transistor channel (19), and spacers (25, 28) isolating gate sides from drain and source regions. Drain region is further away from the gate than the source region, and drain extension region (LDD1) is more extended than source extension region (LDD2). The spacer (25) on the drain side extends from the side of the gate to the drain (23) region and entirely covers the drain extension region (LDD1) An Independent claim is given for a method used for production of the above MOS transistor. Production of the MOS transistor involves forming a gate (20) on a silicon substrate (21) and implantation of drain (23) and source (24) extension regions on both sides of the gate (20). Disymmetric isolating spacers (25, 28) are formed on the sides of the gate (2) in a process that includes: (i) forming spacers of the same length by deposition and etching of a first insulating layer; (ii) extending the spacers by deposition and etching of a second insulating layer; and (iii) removing the second insulating layer on the source side spacer without removing the second insulating layer from the spacer on the drain side.
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公开(公告)号:FR2917231B1
公开(公告)日:2009-10-02
申请号:FR0755553
申请日:2007-06-07
Applicant: ST MICROELECTRONICS SA
Inventor: CREMER SEBASTIEN , DELPECH PHILIPPE , BRUYERE SYLVIE
Abstract: The method involves realizing components and superposed interconnections metallic level (M5) on a substrate (100), and realizing an insulating layer (104) formed above the interconnections metallic level. A horizontal metallic zone e.g. metallic band (108), of the interconnection metallic level is formed such that isolating blocks e.g. isolating pins (106), resulting from the insulating layer are incorporated in the metallic zones, where the metallic zone forms an lower reinforcement part of a metal insulation metal condenser/capacitor. An independent claim is also included for microelectronic device.
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公开(公告)号:FR2839811A1
公开(公告)日:2003-11-21
申请号:FR0205965
申请日:2002-05-15
Applicant: ST MICROELECTRONICS SA
Inventor: DELPECH PHILIPPE , CREMER SEBASTIEN , MARTY MICHEL
IPC: H01L21/02 , H01L23/522 , H01L21/334 , H01L29/94
Abstract: Capacitor is manufactured in substrate (1) by digging recess into substrate; forming first conformal layer of insulating material; forming second conductive layer; forming third layer of conductive or insulating material filling up recess; digging trenches into third layer, across entire height; depositing fourth layer of conductive material; forming fifth layer of dielectric material; and depositing sixth layer of conductive material. An Independent claim is also included for a capacitor formed in a substrate comprising: (a) a recess (2) dug into a substrate; (b) a first layer of a dielectric material covering the walls, the bottom and the edges of the recess; (c) a second layer of a conductive material covering the first layer; (d) a third layer of a conductive or insulating material filling the recess; (e) trenches crossing the third layer; (f) a fourth layer of a conductive material covering the walls, the bottoms as well as the intervals between these trenches and the edges; (g) a fifth layer of a dielectric material covering the fourth layer; and (h) a sixth layer of a conductive material covering the fifth layer.
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公开(公告)号:FR2801426B1
公开(公告)日:2002-10-11
申请号:FR9914486
申请日:1999-11-18
Applicant: ST MICROELECTRONICS SA
Inventor: DELPECH PHILIPPE , ARNAL VINCENT , LIS SANDRA
IPC: H01L21/02 , H01L21/314 , H01L29/92 , H01G4/08 , H01G4/33
Abstract: An integrated circuit capacitor includes a substrate, a first metal electrode on the substrate, and a dielectric layer on the first metal electrode. The dielectric layer includes a homogeneous combination of at least two dielectric materials having permittivities varying in an opposite way based upon an electric field, with a proportion of each dielectric material being chosen so that the integrated circuit capacitor has a desired voltage linearity. A second metal electrode is on the dielectric layer.
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公开(公告)号:FR2801425A1
公开(公告)日:2001-05-25
申请号:FR9914480
申请日:1999-11-18
Applicant: ST MICROELECTRONICS SA
Inventor: DELPECH PHILIPPE , ARNAL VINCENT
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公开(公告)号:FR2783093A1
公开(公告)日:2000-03-10
申请号:FR9811221
申请日:1998-09-04
Applicant: ST MICROELECTRONICS SA
Inventor: DELPECH PHILIPPE , ROBILLIART ETIENNE , DUTARTRE DIDIER
Abstract: Built-in capacitance (C1) on a silicon substrate (7) comprises a first highly doped polysilicon electrode (1), a thin layer (3) of silicon oxide, a second polysilicon electrode (10) and a silicide layer (4) over the second electrode. The second electrode has a high dopant concentration at the interface with the silicon oxide and a relatively low dopant concentration at the interface with the silicide layer. An Independent claim is also included for an integrated circuit, comprising at least one capacitance as above.
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