OPTICAL ANALYZING DEVICE
    101.
    发明申请

    公开(公告)号:US20180275053A1

    公开(公告)日:2018-09-27

    申请号:US15542447

    申请日:2015-01-26

    CPC classification number: G01N21/553 G01N1/38 G01N2201/0638 G01N2201/08

    Abstract: This optical analyzing device is provided with a light source, a detector, a substrate having a metal film on at least one surface thereof, and an optical element for introducing a light beam from the light source to the substrate and delivering the light beam from the substrate toward the detector. A plurality of sample regions for holding samples are provided on the metal film; and a portion of the light beam from the light source is irradiated to any one of the sample regions, is reflected, at least once, by the surface of the substrate on the opposite side of the side on which the sample regions are provided, and is not irradiated to a sample region other than the aforementioned sample region in the path thereof until the portion of the light beam is delivered by the optical element.

    Method and apparatus for inspecting defects

    公开(公告)号:US09678021B2

    公开(公告)日:2017-06-13

    申请号:US14821075

    申请日:2015-08-07

    Abstract: In optical dark field defect inspection, the present invention provides including: condensing laser emitted from a light source in a line shape; reflecting the laser, with a mirror; irradiating the reflected laser via an objective lens to a sample placed on a table from a vertical direction; condensing reflected scattered light from the sample with the objective lens; shielding diffraction light occurred from a periodical pattern formed on the sample, in the reflected scattered light from the sample and scattered light occurred from the mirror, with a spatial filter; receiving the reflected scattered light from the sample, not shielded with the spatial filter, with an imaging lens, and forming an image of the reflected scattered light; detecting the image of the reflected scattered light; and processing a detection signal obtained by detecting the image of the reflected scattered light and detecting a defect on the sample.

    MULTI-WAVELENGTH LIGHT SOURCE
    109.
    发明申请
    MULTI-WAVELENGTH LIGHT SOURCE 审中-公开
    多波长光源

    公开(公告)号:US20160363568A1

    公开(公告)日:2016-12-15

    申请号:US15241786

    申请日:2016-08-19

    Abstract: A fluid separation system for separating compounds of a sample fluid in a mobile phase comprises a detector adapted to detect separated compounds by providing an optical stimulus signal to the sample fluid and receiving a response signal on the optical stimulus signal. The detector comprises a light source adapted to provide an output light beam as the optical stimulus signal. The light source comprises a plurality of light emitting elements each adapted to emit a light beam having a respective wavelength, and a diffracting element. The plurality of light emitting elements are arranged that emitted light beams impinging on the diffracting element in a respective angle dependent on the respective wavelength are diffracted by the diffracting element into the output light beam.

    Abstract translation: 用于分离流动相中样品流体的化合物的流体分离系统包括适于通过向样品流体提供光刺激信号并且在光刺激信号上接收响应信号来检测分离的化合物的检测器。 检测器包括适于提供输出光束作为光刺激信号的光源。 光源包括多个适于发射具有各自波长的光束的发光元件和衍射元件。 多个发光元件被布置成使得衍射元件以相应的角度照射在衍射元件上的发射光束被衍射元件衍射成输出光束。

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