公开(公告)号：US20180143141A1

公开(公告)日：2018-05-24

申请号：US15816674

申请日：2017-11-17

Applicant: Tokyo Electron Limited

Inventor： Thomas Omstead ,  Ke-Hung Chen ,  Deepak Vedhachalam

IPC: G01N21/73 ,  G01J3/443

CPC classification number: G01N21/73 ,  G01J3/443

Abstract: Described herein are architectures, platforms and methods for detecting and analyzing anomalous events (i.e., arcing events) from spectral data gathered during a wafer fabrication process.

公开(公告)号：US20180130647A1

公开(公告)日：2018-05-10

申请号：US15865171

申请日：2018-01-08

Applicant: Applied Materials, Inc.

Inventor： Sairaju Tallavarjula ,  Kailash Pradhan ,  Huy Q. Nguyen ,  Jian Li

IPC: H01J37/32 ,  G01J3/443 ,  G01J3/28 ,  G01N21/27 ,  G01N21/66

CPC classification number: H01J37/32972 ,  G01J3/28 ,  G01J3/443 ,  G01N21/274 ,  G01N21/66 ,  H01J37/32935 ,  H01J2237/2482

Abstract: Methods for matching semiconductor processing chambers using a calibrated spectrometer are disclosed. In one embodiment, plasma attributes are measured for a process in a reference chamber and a process in an aged chamber. Using a calibrated light source, an optical path equivalent to an optical path in a reference chamber and an optical path in an aged chamber can be compared by determining a correction factor. The correction factor is applied to adjust a measured intensity of plasma radiation through the optical path in the aged chamber. Comparing a measured intensity of plasma radiation in the reference chamber and the adjusted measured intensity in the aged chamber provide an indication of changed chamber conditions. A magnitude of change between the two intensities can be used to adjust the process parameters to yield a processed substrate from the aged chamber which matches that of the reference chamber.

公开(公告)号：US09952159B2

公开(公告)日：2018-04-24

申请号：US15235170

申请日：2016-08-12

Applicant: Sean Xiaolu Wang ,  Qun Li

Inventor： Sean Xiaolu Wang ,  Qun Li

IPC: G01J3/30 ,  G01N21/71 ,  G01J3/10 ,  G01J3/28 ,  G01J3/443 ,  G01J3/02

CPC classification number: G01N21/718 ,  G01J3/0208 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2803 ,  G01J3/443 ,  G01N2201/0612 ,  G01N2201/129

Abstract: This invention discloses a laser induced breakdown spectroscopy (LIBS) apparatus based on high repetition rate pulsed laser. The laser produces a train of laser pulses at a high repetition rate in the kHz (or even higher) range. When the laser beam hits the biological sample, it generates several thousands of micro-plasmas per second. Synchronized miniature CCD array optical spectrometer modules collect the LIBS signal from these micro-plasmas. By adjusting the integration time of the spectrometer to cover a plurality of periods of the laser pulse train, the spectrometer integrates the LIBS signal produced by this plurality of laser pulses. Hence the intensity of the obtained LIBS spectrum can be greatly improved to increase the signal-to-noise ratio (SNR) and lower the level of detection (LOD).

公开(公告)号：US09874475B2

公开(公告)日：2018-01-23

申请号：US14795954

申请日：2015-07-10

Applicant: SciAps, Inc.

Inventor： David Day

IPC: G01J3/02 ,  G01J3/443 ,  G01J3/06 ,  H01L21/66 ,  G01J3/44

CPC classification number: G01J3/443 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0272 ,  G01J3/06 ,  G01J3/44 ,  H01L22/26

Abstract: An analysis system (e.g., LIBS) includes a laser source generating a laser beam, a movable optic configured to move said laser beam to multiple locations on a sample, and a spectrometer responsive to photons emitted by the sample at those locations and having an output. A controller is responsive to a trigger signal and is configured in a moving spot cycle to adjust the moveable optic, activate the laser source sequentially generating photons at multiple locations on the sample, and process the spectrometer output at each location.

公开(公告)号：US09847217B2

公开(公告)日：2017-12-19

申请号：US14551039

申请日：2014-11-23

Applicant: PerkinElmer Health Sciences, Inc.

Inventor： Peter Morrisroe

IPC: G01J3/30 ,  H01J49/10 ,  F23C99/00 ,  F23G5/10 ,  G01J3/443 ,  H01J49/04 ,  G01N21/68

CPC classification number: H01J49/105 ,  F23C99/003 ,  F23G5/10 ,  F23G2209/18 ,  G01J3/443 ,  G01N21/68 ,  H01J49/0431

Abstract: A device for mass spectroscopy comprising a chamber configured to provide an atomization source, a boost device configured to provide radio frequency energy to the chamber, and a mass analyzer in fluid communication with the chamber and configured to separate species based on mass-to-charge ratios is disclosed. In certain examples, a boost device may be used with a flame or plasma to provide additional energy to a flame or plasma to enhance desolvation, atomization, and/or ionization.

公开(公告)号：US09835532B2

公开(公告)日：2017-12-05

申请号：US14646250

申请日：2013-10-30

Applicant: The Penn State Research Foundation

Inventor： Benjamin Hall ,  Jonathan Lynch ,  Edward W. Reutzel ,  Galen Lynch ,  Brian T. Reinhardt

IPC: G01N21/00 ,  G01N1/44 ,  G01J3/28 ,  G01N1/06 ,  G01J3/00 ,  G01N1/04 ,  G01N1/28

CPC classification number: G01N1/44 ,  G01J3/00 ,  G01J3/2823 ,  G01J3/44 ,  G01J3/443 ,  G01J2003/106 ,  G01N1/06 ,  G01N2001/045 ,  G01N2001/2886 ,  G01N2201/06113

Abstract: A laser ablation tomography system includes a specimen stage for supporting a specimen. A specimen axis is defined such that a specimen disposed generally on the axis may be imaged. A laser system is operable to produce a laser sheet in a plane intersecting the specimen axis and generally perpendicular thereto. An imaging system is operable to image the area where the laser sheet intersects the specimen axis.

公开(公告)号：US20170343416A1

公开(公告)日：2017-11-30

申请号：US15607829

申请日：2017-05-30

Applicant: Oxford Instruments Industrial Products Ltd.

Inventor： Jukka HASSI

IPC: G01J3/443 ,  G01J3/02 ,  G01N21/71

CPC classification number: G01J3/443 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0272 ,  G01N21/359 ,  G01N21/65 ,  G01N21/718 ,  G01N2201/0221

Abstract: According to an example embodiment, a detector assembly for use in analysis of elemental composition of a sample by using optical emission spectroscopy is provided, the detector assembly including a rotatable element that is rotatable about an axis and that has attached thereto a laser source for generating laser pulses for invoking optical emission on a surface of the sample, the laser source arranged to generate laser pulses focused at a predefined distance from said axis at a predefined distance from a front end of the detector assembly, and a detector element for capturing optical emission invoked by said laser pulses.

公开(公告)号：US09766182B2

公开(公告)日：2017-09-19

申请号：US14708638

申请日：2015-05-11

Applicant: Xin Jack Zhou ,  Sean Xiaolu Wang ,  Qun Li

Inventor： Xin Jack Zhou ,  Sean Xiaolu Wang ,  Qun Li

IPC: G01J3/30 ,  G01N21/71 ,  G01J3/443

CPC classification number: G01N21/718 ,  G01J3/443

Abstract: This invention discloses a compact laser induced breakdown spectroscopy (LIBS) apparatus suitable for field operations. The LIBS apparatus comprises a Q-switched laser with laser pulse energy between several tens and several thousands of micro joules (μJ), which is significantly lower than that of traditional LIBS lasers. The spectrograph of the LIBS apparatus employs a dual CCD (charge coupled device) design, which maintains compact size and in the meantime offers large spectral coverage and high spectral resolution.

公开(公告)号：US20170205354A1

公开(公告)日：2017-07-20

申请号：US15321143

申请日：2015-06-19

Applicant: TSI, INCORPORATED

Inventor： Steven G. BUCKLEY ,  Darrick L. NICCUM

IPC: G01N21/71 ,  B07C5/342 ,  B07C5/36 ,  G01J3/443

CPC classification number: G01N21/718 ,  B07C5/3425 ,  B07C5/365 ,  B07C2501/0018 ,  B07C2501/0036 ,  G01J3/443

Abstract: A LIBS measurement system is described herein that provides an orifice, aperture or opening in a substantially V-shaped chute or sleeve that allows access to the material to be analyzed from the underside of the chute. The laser beam is aimed through the hole and return light (signal) is collected through the hole by a photodetector assembly. A diverter device, which is located at an output end of the chute, diverts certain particles away from the chute upon receipt of an actuation signal.

公开(公告)号：US20170199131A1

公开(公告)日：2017-07-13

申请号：US15314346

申请日：2015-05-27

Applicant: Japan Science and Technology Agency

Inventor： Hiroyuki Yoshida

IPC: G01N21/71 ,  G01J3/02 ,  H01J37/244 ,  G01J3/443

CPC classification number: G01N21/71 ,  G01J3/0208 ,  G01J3/443 ,  G01N21/62 ,  G01N23/2254 ,  G01N2201/0638 ,  G01N2201/068 ,  G01N2223/6116 ,  H01J3/02 ,  H01J3/18 ,  H01J37/244 ,  H01J37/252 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/2445

Abstract: An inverse photoemission spectroscopy apparatus is configured to detect a light generated by the relaxation of electrons to an unoccupied state of a sample. The apparatus includes an electron source for generating electrons with which a sample is irradiated, a wavelength selector for extracting a light having a certain wavelength from the light generated in the sample, a photodetector for detecting the light extracted by the wavelength selector; and a focusing optics disposed between the sample and the photodetector. The electron source contains yttrium oxide as a thermionic emission material.