中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

325 records (took 0.028 seconds)

    Cryogenic specimen holder
    11.
    发明授权
    Cryogenic specimen holder 有权
    低温试样架

    公开(公告)号：US09010202B2

    公开(公告)日：2015-04-21

    申请号：US13560647

    申请日：2012-07-27

    Applicant: Halina Stabacinskiene ,  Jeffrey J. Gronsky ,  Christine M. Thomas ,  Pushkarraj V. Deshmukh ,  Alan C. Robins ,  Paul E. Fischione

    Inventor： Halina Stabacinskiene ,  Jeffrey J. Gronsky ,  Christine M. Thomas ,  Pushkarraj V. Deshmukh ,  Alan C. Robins ,  Paul E. Fischione

    IPC: B01L3/00 ,  G01N21/00 ,  G01N23/20 ,  H01J37/20 ,  H01J37/26 ,  B01L7/00

    CPC classification number: G01N23/20033 ,  B01L7/50 ,  G01N2223/612 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/0216 ,  H01J2237/2001 ,  H01J2237/20207 ,  H01J2237/204

    Abstract: An improved cryogenic specimen holder for imaging and analysis facilitates imaging at very high tilt angles with a large field of view. A retractable specimen holder tip protects the specimen during transport. An optimized Dewar design is positioned at a fixed, tilted angle with respect to the axis of the holder, providing a means of continuously cooling the specimen irrespective of the high tilt angle and amount of liquid nitrogen present in the vessel. The Dewar neck design reduces entrapment of nitrogen gas bubbles and its shape prevents the spilling of liquid nitrogen at high tilt angles. The specimen holder has a retractable tip that completely encapsulates the specimen within a shielded environment internal to the specimen holder body. The cooling and specimen transfer mechanisms reduce thermal drift and the detrimental effects of vibrations generated by both the evaporation of liquid nitrogen present in the Dewar and other environmental effects.

    Abstract translation: 用于成像和分析的改进的低温试样保持器便于在具有大视场的非常高的倾斜角下进行成像。 可伸缩的样品架头在运输过程中保护样品。 优化的杜瓦设计相对于保持器的轴线定位成固定的倾斜角度，提供连续冷却样品的手段，而不管存在于容器中的高的倾斜角和液氮量。 杜瓦瓶颈设计减少了氮气气泡的夹带，其形状可以防止液氮在高倾角下溢出。 样品架具有可收缩的尖端，其将样品完全包封在样品保持体内部的屏蔽环境内。 冷却和样品转移机制降低了热漂移和由杜瓦瓶中存在的液氮蒸发和其他环境影响产生的振动的不利影响。

    Inspection or observation apparatus and sample inspection or observation method
    12.
    发明授权
    Inspection or observation apparatus and sample inspection or observation method 有权
    检验或观察仪器和样品检查或观察方法

    公开(公告)号：US08933400B2

    公开(公告)日：2015-01-13

    申请号：US14349630

    申请日：2012-09-03

    Applicant: Yusuke Ominami ,  Mami Konomi ,  Sukehiro Ito ,  Tomohisa Ohtaki ,  Shinsuke Kawanishi

    Inventor： Yusuke Ominami ,  Mami Konomi ,  Sukehiro Ito ,  Tomohisa Ohtaki ,  Shinsuke Kawanishi

    IPC: H01J37/30 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/22 ,  H01J37/28

    CPC classification number: H01J37/18 ,  H01J37/16 ,  H01J37/20 ,  H01J37/22 ,  H01J37/226 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/166 ,  H01J2237/182 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/2602 ,  H01J2237/2608

    Abstract: Provided is an inspection apparatus or observation apparatus enabling appropriate inspection or observation of a sample in an easy-to-use manner, using a charged-particle technique and an optical technique. Specifically, provided is an inspection or observation apparatus including: a first casing forming at least part of a first space constituting at least part of a region through which a primary charged-particle beam emitted from a charged-particle irradiation section reaches a sample, the first space capable of being maintained in a vacuum state; a second casing provided on the first casing to form at least part of a second space capable of storing the sample therein; a partition wall section for partitioning the first space and the second space from each other, the partition wall section disposed so as to be coaxial with the charged-particle irradiation section when the sample is irradiated with the primary charged-particle beam from the charged-particle irradiation section; and an optical observation section for casting light onto the sample and detecting light from the sample from the same direction as the charged-particle irradiation section.

    Abstract translation: 提供了使用带电粒子技术和光学技术，以易于使用的方式对样品进行适当的检查或观察的检查装置或观察装置。 具体地，提供一种检查或观察装置，包括：第一壳体，其形成构成从带电粒子照射部分发射的初级带电粒子束到达样品的区域的至少一部分的至少一部分的第一空间， 能够保持在真空状态的第一空间; 设置在所述第一壳体上以形成能够将所述样品存储在其中的至少一部分第二空间的第二壳体; 用于将第一空间和第二空间彼此分隔开的分隔壁部分，当从带电粒子束照射样品的初级带电粒子束时，分隔壁部分设置成与带电粒子照射部分同轴， 粒子照射部; 以及光学观察部，用于将光线投射到样品上，并从与带电粒子照射部相同的方向检测来自样品的光。

    Charged Particle Beam Instrument
    15.
    发明申请
    Charged Particle Beam Instrument 审中-公开
    带电粒子束仪

    公开(公告)号：US20140209193A1

    公开(公告)日：2014-07-31

    申请号：US14166997

    申请日：2014-01-29

    Applicant: JEOL Ltd.

    Inventor： Mitsuhide Matsushita

    IPC: H01J37/18

    CPC classification number: H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/184 ,  H01J2237/188 ,  H01J2237/204 ,  Y10T137/86002

    Abstract: A charged particle beam instrument is offered which has a specimen pre-evacuation chamber. An outflow flow rate adjusting valve (70) adjusts the flow rate of gas exhausted from the specimen pre-evacuation chamber (20) under control of controller (82). The controller (82) for making a decision as to whether the difference between a first pressure in the pre-evacuation chamber (20) before the adjusting valve (70) is controlled to the first degree of opening and a second pressure in the pre-evacuation chamber (20) after the adjusting valve (70) has been controlled to the first degree of opening is greater than a first reference value.

    Abstract translation: 提供带有样品预抽真空室的带电粒子束仪器。 流出流量调节阀（70）在控制器（82）的控制下调节从样本预抽真空室（20）排出的气体的流量。 所述控制器（82）用于判断所述调节阀（70）之前的所述预抽空室（20）中的第一压力之间的差是否被控制到所述第一开度， 在调节阀（70）已被控制到第一开度之后的排气室（20）大于第一参考值。

    Specimen Positioning Device, Charged Particle Beam System, and Specimen Holder
    16.
    发明申请
    Specimen Positioning Device, Charged Particle Beam System, and Specimen Holder 有权
    标本定位装置，带电粒子束系统和标本支架

    公开(公告)号：US20140158907A1

    公开(公告)日：2014-06-12

    申请号：US14101460

    申请日：2013-12-10

    Applicant: JEOL Ltd.

    Inventor： Mitsuru Hamochi

    IPC: H01J37/20

    CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/0216 ,  H01J2237/2006 ,  H01J2237/202 ,  H01J2237/204

    Abstract: A specimen positioning device (100) is for use in or with a charged particle beam system having a specimen chamber (1) and has: a base (10) provided with a hole (12) in operative communication with the specimen chamber (1); a specimen holder (20) movably mounted in the hole (12) and having a first portion (22) and a second portion (24); and a first portion support portion (40) supporting the first portion (22) in the specimen chamber (1). The second portion (24) supports the first portion (22) via a resilient member (34).

    Abstract translation: 一种试样定位装置（100）用于具有试样室（1）的带电粒子束系统中或与其一起使用，具有：具有与试样室（1）可操作连通的孔（12）的基座（10） ; 可移动地安装在孔（12）中并且具有第一部分（22）和第二部分（24）的样本保持器（20）; 以及支撑所述标本室（1）中的所述第一部分（22）的第一部分支撑部分（40）。 第二部分（24）经由弹性构件（34）支撑第一部分（22）。

    IN-VACUUM HIGH SPEED PRE-CHILL AND POST-HEAT STATIONS
    18.
    发明申请
    IN-VACUUM HIGH SPEED PRE-CHILL AND POST-HEAT STATIONS 有权
    真空高速预冷和后加热站

    公开(公告)号：US20140034846A1

    公开(公告)日：2014-02-06

    申请号：US13566013

    申请日：2012-08-03

    Applicant: William D. Lee ,  William P. Reynolds ,  Stanley W. Stone

    Inventor： William D. Lee ,  William P. Reynolds ,  Stanley W. Stone

    IPC: G21K5/08

    CPC classification number: H01J37/18 ,  H01J37/20 ,  H01J37/3171 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/31705 ,  H01L21/02002 ,  H01L21/67109 ,  H01L21/67201 ,  H01L21/67213 ,  H01L21/67742 ,  H01L21/67766

    Abstract: An ion implantation system provides ions to a workpiece positioned in a vacuum environment of a process chamber on a cooled chuck. A pre-chill station within the process chamber has a chilled workpiece support configured to cool the workpiece to a first temperature, and a post-heat station within the process chamber, has a heated workpiece support configured to heat the workpiece to a second temperature. The first temperature is lower than a process temperature, and the second temperature is greater than an external temperature. A workpiece transfer arm is further configured to concurrently transfer two or more workpieces between two or more of the chuck, a load lock chamber, the pre-chill station, and the post-heat station.

    Abstract translation: 离子注入系统向位于冷却卡盘上的处理室的真空环境中的工件提供离子。 处理室内的预冷站具有构造成将工件冷却到第一温度的冷冻工件支撑件，并且处理室内的后加热站具有被配置为将工件加热到第二温度的加热工件支撑件。 第一温度低于处理温度，第二温度大于外部温度。 工件传送臂还被构造成在卡盘，加载锁定室，预冷站和后加热站之间的两个或更多个之间同时传送两个或更多个工件。

    ION SOURCES, SYSTEMS AND METHODS
    19.
    发明申请
    ION SOURCES, SYSTEMS AND METHODS 有权
    离子源，系统和方法

    公开(公告)号：US20130256532A1

    公开(公告)日：2013-10-03

    申请号：US13892772

    申请日：2013-05-13

    Applicant: Carl Zeiss Microscopy, LLC

    Inventor： Richard Comunale ,  Alexander Groholski ,  John A. Notte, IV ,  Randall G. Percival ,  Billy W. Ward

    IPC: H01J37/304

    CPC classification number: H01J37/304 ,  H01J37/20 ,  H01J37/265 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/0216 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/2007 ,  H01J2237/204 ,  H01J2237/2482

    Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).

    Abstract translation: 公开了离子源，系统和方法。 在一些实施例中，离子源，系统和方法可以表现出相对较少的不期望的振动和/或可以充分地抑制不需要的振动。 这可以提高性能（例如，增加可靠性，稳定性等）。 在某些实施方案中，离子源，系统和方法可以增强制备具有期望物理属性的尖端的能力（例如尖端顶点上的原子数）。 这可以提高性能（例如，增加可靠性，稳定性等）。

    CHARGED PARTICLE BEAM APPARATUS AND SAMPLE TRANSPORTING APPARATUS
    20.
    发明申请
    CHARGED PARTICLE BEAM APPARATUS AND SAMPLE TRANSPORTING APPARATUS 有权
    充电颗粒光束装置和样品运输装置

    公开(公告)号：US20130240730A1

    公开(公告)日：2013-09-19

    申请号：US13839862

    申请日：2013-03-15

    Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

    Inventor： Masakatsu HASUDA

    IPC: H01J37/20

    CPC classification number: H01J37/20 ,  H01J2237/204 ,  H01J2237/31713

    Abstract: A charged particle beam apparatus includes: a sample chamber; a sample stage; an electron beam irradiation system for irradiating the sample with an electron beam; a focused ion beam irradiation system for irradiating the sample with a focused ion beam; a sample stage drive unit having a rotational axis orthogonal to at least one of an irradiation axis of the electron beam irradiation system and an irradiation axis of the focused ion beam irradiation system; and a sample transporting mechanism for transporting the sample to the sample stage. The sample transporting mechanism includes a transportation path provided in the sample stage drive unit in a direction parallel to the rotational axis of the sample stage drive unit, and is configured to transport the sample to the sample stage through the transportation path.

    Abstract translation: 带电粒子束装置包括：样品室; 样品台 用于用电子束照射样品的电子束照射系统; 聚焦离子束照射系统，用于用聚焦离子束照射样品; 样品台驱动单元，其具有与电子束照射系统的照射轴和聚焦离子束照射系统的照射轴中的至少一个正交的旋转轴; 以及用于将样品输送到样品台的样品传送机构。 样品输送机构包括在与样品台驱动单元的旋转轴平行的方向上设置在样品台驱动单元中的输送路径，并且被配置为通过输送路径将样品输送到样品台。

Patent Agency Ranking