公开(公告)号：US20050231724A1

公开(公告)日：2005-10-20

申请号：US11146488

申请日：2005-06-06

Applicant: Wayne Jung ,  Russell Jung ,  Walter Sloan ,  Alan Loudermilk

Inventor： Wayne Jung ,  Russell Jung ,  Walter Sloan ,  Alan Loudermilk

IPC: G01J3/02 ,  G01J3/36 ,  G01J3/51 ,  G01N21/57 ,  G01J3/28

CPC classification number: G01N21/25 ,  A61C19/04 ,  G01J1/0271 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0278 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/36 ,  G01J3/46 ,  G01J3/462 ,  G01J3/463 ,  G01J3/508 ,  G01J3/51 ,  G01J3/513 ,  G01J3/524 ,  G01J2003/466 ,  G01N21/57

Abstract: A miniaturized spectrometer/spectrophotometer system and methods are disclosed. A probe tip including one or more light sources and a plurality of light receivers is provided. A first spectrometer system receives light from a first set of the plurality of light receivers. A second spectrometer system receives light from a second set of the plurality of light receivers. A processor, wherein the processor receives data generated by the first spectrometer system and the second spectrometer system, wherein an optical measurement of a sample under test is produced based on the data generated by the first and second spectrometer systems.

公开(公告)号：US06753958B2

公开(公告)日：2004-06-22

申请号：US10102833

申请日：2002-03-22

Applicant: Orazio Berolo ,  Jian-Jun He ,  Emil S. Koteles ,  Bryant Hichwa ,  John Wade

Inventor： Orazio Berolo ,  Jian-Jun He ,  Emil S. Koteles ,  Bryant Hichwa ,  John Wade

IPC: G01J328

CPC classification number: G02B6/4215 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/0294 ,  G01J3/18 ,  G02B6/12007

Abstract: A waveguide optical monitor is disclosed. The device has an optical input port coupled through a switch to a plurality of input waveguides. A dispersive element disperses light within the input optical waveguides toward a plurality of output waveguides. There are a plurality of photodetectors each optically coupled to an output waveguide. The photodectors are for sensing an intensity of light within the waveguide with which it is optically coupled. An optical switch in optical communication with the optical input port and for switching light received at the optical input port to one of the plurality of input waveguides. Also, an angular dispersive element is present for receiving light from any one of the waveguides and for dispersing the light toward a plurality of output waveguides in dependence upon the input waveguide position and a wavelength of the light such that light directed from the first of the plurality of input waveguides toward the plurality of output waveguides has a first centre wavelength within each of the output waveguides and light directed from the second of the plurality of input waveguides toward the plurality of output waveguides has a second different centre wavelength within each of the output waveguides, the second different centre wavelength different form any first centre wavelength.

Abstract translation: 公开了一种波导光学监视器。 该装置具有通过开关耦合到多个输入波导的光输入端口。 分散元件将光输送到输入光波导内朝向多个输出波导。 存在多个光电检测器，每个光电检测器光耦合到输出波导。 光电探测器用于感测与光学耦合的波导内的光强度。 光开关，其与所述光输入端口光通信并将在所述光输入端口处接收的光切换到所述多个输入波导中的一个。 此外，存在用于从任何一个波导接收光的角度色散元件，并且用于根据输入波导位置和光的波长将光分散到多个输出波导，使得从第一个 朝向多个输出波导的多个输入波导具有在每个输出波导内的第一中心波长，并且从多个输入波导中的第二个朝着多个输出波导引导的光在每个输出波导内具有第二不同的中心波长 波导，第二不同的中心波长不同形成任何第一中心波长。

公开(公告)号：US20040031906A1

公开(公告)日：2004-02-19

申请号：US10258917

申请日：2003-06-10

Inventor： Anthony D Glecker

IPC: H01L027/00

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/0294 ,  G01J3/04 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/2889 ,  G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01J9/00 ,  G01J11/00 ,  G01N21/21 ,  G01N21/31 ,  G01N21/6408 ,  G01N21/6456 ,  G01N2021/1793 ,  G01N2021/6417 ,  G01N2021/6423 ,  G01S7/481 ,  G01S7/4817 ,  G01S17/89 ,  G04F13/02 ,  G04F13/026 ,  H01J43/00

Abstract: Plural electronic or optical images are provided in a streak optical system, as for instance by use of plural slits instead of the conventional single slit, to obtain a third, fourth, etc. dimensionnullrather than only the conventional two, namely range or time and azimuth. Such additional dimension or dimensions are thereby incorporated into the optical information that is to be streaked and thereby time resolved. The added dimensions may take any of an extremely broad range of forms, including wave-length, polarization state, or one or more spatial dimensionsnullor indeed virtually any optical parameter that can be impressed upon a probe beam. Resulting capabilities remarkably include several new forms of lidar spectroscopy, fluorescence analysis, polarimetry, spectropolarimetry, and combinations of these, as well as a gigahertz wavefront sensor.

Abstract translation: 多个电子或光学图像以条纹光学系统提供，例如通过使用多个狭缝而不是传统的单个狭缝，以获得第三，第四等尺寸，而不是仅传统的两个，即范围或时间 和方位角。 因此，这样的附加尺寸或尺寸被并入要划线的光学信息中，从而被时间分辨。 增加的尺寸可以采取非常宽的形式范围中的任何一种，包括波长，极化状态或一个或多个空间维度，或实际上实际上可以施加到探测光束上的任何光学参数。 所产生的功能显着地包括激光雷达光谱，荧光分析，偏振测量，分光偏振测量及其组合的几种新形式，以及千兆赫兹波前传感器。

公开(公告)号：US20030227628A1

公开(公告)日：2003-12-11

申请号：US09939887

申请日：2001-08-27

Inventor： David I. Kreimer ,  Oleg A. Yevin ,  Robert Weber

IPC: G01N021/25

CPC classification number: G01N21/6452 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/32 ,  G01J3/36 ,  G01J3/44 ,  G01J2003/1213 ,  G01N21/31 ,  G01N21/6428 ,  G01N21/658 ,  G01N2021/3137 ,  G01N2021/3177 ,  G01N2021/6484 ,  G01N2021/656

Abstract: Systems and methods for filter based spectrographic analysis are provided that permit rapid analysis of bioanalytes. Systems include devices for illuminating a sample with electromagnetic radiation and capturing radiation emitted from the sample. Emitted radiation can be collected by a plurality of waveguides each associated with a filter for a particular wavelength of radiation. Focusing devices are associated with filters and waveguides in certain embodiments. Radiation captured by waveguides can then be transmitted to a remote detector, which can determine the intensity of radiation for each waveguide. The use of a plurality of filters having different, band pass characteristics can permits the simultaneous detection of a plurality of different wavelengths of radiation emitted by a sample, thereby providing spectrographic information about the sample under study. Systems can include computers for storing acquired spectrographic information, addressable arrays of samples, and information security measures. Spectrographic information of samples can be diagnostic tools for identifying and quantifying a variety of different materials, including bioanalytes.

Abstract translation: 提供了基于过滤器的光谱分析的系统和方法，可以快速分析生物分析物。 系统包括用于用电磁辐射照射样品并捕获从样品发射的辐射的装置。 发射的辐射可以被多个波导收集，每个波导与用于特定波长的辐射的滤波器相关联。 在某些实施例中，聚焦装置与滤波器和波导相关联。 然后可以将波导捕获的辐射传输到远程检测器，这可以确定每个波导的辐射强度。 使用具有不同带通特性的多个滤光器可以允许同时检测由样品发射的多个不同波长的辐射，从而提供关于正在研究的样品的光谱信息。 系统可以包括用于存储获取的光谱信息的计算机，可寻址的样本阵列和信息安全措施。 样品的光谱信息可以是用于识别和量化各种不同材料（包括生物分析物）的诊断工具。

公开(公告)号：US06573990B1

公开(公告)日：2003-06-03

申请号：US09564298

申请日：2000-05-03

Applicant: Duwayne R. Anderson

Inventor： Duwayne R. Anderson

IPC: G01J328

CPC classification number: G01J3/1804 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0243 ,  G01J3/0294 ,  G01J2003/1828 ,  G01J2003/2866 ,  G02B6/3534 ,  G02B6/3568 ,  G02B6/3586

Abstract: An optical system having a first order spectral range that is usable in an optical spectrum analyzer receives an broadband optical test signal and a optical calibration signal and couples the optical signals via two optically isolated paths to separate optical detectors. First and second pairs of optical fibers, with each pair having an input fiber and an output fiber, are positioned in a focal plane of a collimating optic that has an optical axis. The fiber pairs are symmetrically positioned on either side of the optical axis with the input fibers positioned on one side of the optical axis and the output fibers positioned on the opposite side of the optical axis. The input fibers receive the optical test signal and the optical calibration signal. The output optical fibers are coupled to first and second optical detectors. An optical calibration source generates second order or greater spectral lines that fall within the first order spectral range of the optical system. A diffraction grating receives the optical test signal and the optical calibration signal from the collimating optic and separates the first order spectral components of the broadband optical test signal and passes the second order or greater spectral lines of the optical calibration signal. The first optical detector that is responsive to the first order spectral components of the optical test signal receives the optical test signal from the collimating optic and converts the optical test signal to an electrical signal. A second optical detector that is responsive to the second order or greater spectral lines of the optical calibration signal concurrently receives the optical calibration signal from the collimating optic and converts the calibrations signal to an electrical signal.

Abstract translation: 具有可用于光谱分析仪中的一阶光谱范围的光学系统接收宽带光学测试信号和光学校准信号，并且经由两个光学隔离路径将光信号耦合到分离的光学检测器。 每对具有输入光纤和输出光纤的第一和第二对光纤被定位在具有光轴的准直光学器件的焦平面中。 光纤对对称地位于光轴的任一侧，其中输入光纤位于光轴的一侧，并且输出光纤位于光轴的相反侧。 输入光纤接收光学测试信号和光学校准信号。 输出光纤耦合到第一和第二光学检测器。 光学校准源产生落在光学系统的一阶光谱范围内的第二级或更多光谱线。 衍射光栅接收来自准直光学器件的光学测试信号和光学校准信号，并分离宽带光学测试信号的一阶光谱分量，并通过光学校准信号的第二级或更多谱线。 响应于光学测试信号的一阶光谱分量的第一光学检测器从准直光学器件接收光学测试信号，并将光学测试信号转换为电信号。 响应于光学校准信号的二阶或更高谱线的第二光学检测器同时从准直光学器件接收光学校准信号，并将校准信号转换为电信号。

公开(公告)号：US20030020912A1

公开(公告)日：2003-01-30

申请号：US10112138

申请日：2002-03-29

Inventor： Adam E. Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke

IPC: G01J004/00

CPC classification number: G01B11/02 ,  G01J3/02 ,  G01J3/0294 ,  G01N21/211 ,  G01N21/25 ,  G01N21/474 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/213

Abstract: An optical measurement system for evaluating a sample has a azimuthally rotatable measurement head. A motor-driven rotating mechanism is coupled to the measurement head to allow the optics to rotate with respect to the sample. In particular, a preferred embodiment is a polarimetric scatterometer (FIG. 1) for measuring optical properties of a periodic structure on a wafer sample (12). This scatterometer has optics (30) directing a polarized illumination beam at non-normal incidence onto the periodic structure. In addition to a polarizer (8), the illumination path can also be provided with an E-O modulator for modulating the polarization. The measurement head optics also collect light reflected from the periodic structure and feed that light to a spectrometer (17) for measurement. A polarization beamsplitter (18) is provided in the collection path so that both S and P polarization from the sample can be separately measured. The entire measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures on the wafer. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.

Abstract translation: 用于评估样品的光学测量系统具有方位角可旋转的测量头。 马达驱动的旋转机构耦合到测量头以允许光学器件相对于样品旋转。 特别地，优选的实施例是用于测量晶片样品（12）上的周期性结构的光学性质的偏振散射仪（图1）。 该散射仪具有将非正常入射的偏振照明光束引导到周期性结构上的光学器件（30）。 除了偏振器（8）之外，照明路径还可以设置有用于调制偏振的E-O调制器。 测量头光学器件还收集从周期性结构反射的光并将该光馈送到用于测量的光谱仪（17）。 偏振分束器（18）设置在收集路径中，从而可以分别测量来自样本的S和P极化。 可以将整个测量头安装成相对于晶片上的周期性结构使入射平面旋转到不同的方位角方向。 仪器可以集成在晶片工艺工具中，其中可以以任意取向提供晶片。

公开(公告)号：US5991024A

公开(公告)日：1999-11-23

申请号：US87395

申请日：1998-05-29

Applicant: Bruno S. Bauer ,  Victor Kantsyrev

Inventor： Bruno S. Bauer ,  Victor Kantsyrev

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/443 ,  G01D3/28

CPC classification number: G01J3/443 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0262 ,  G01J3/0294 ,  G01J3/2889

Abstract: A capillary spectrometer is disclosed for observing radiation from a source. The spectrometer comprises a capillary array, a dispersive element, and a short wavelength imaging detector. The capillary guide comprises a receiving end and an emitting end. The receiving end is positioned so that it may receive radiation from the source. As radiation travels through the capillary guide, the course of the radiation is changed so that it is emitted in a predetermined path or paths from the emitting end. The emitted radiation falls on the dispersing element which disperses the radiation into a predetermined pattern. The radiation then falls on sensors of the short wavelength imaging detector which generate electrical signals in response to the frequency and intensity of radiation. Insulators may be used to prevent discrete rays of radiation from interfering with each other as they pass from the capillary guide to the short wavelength imaging detector. The short wavelength imaging detector may be adapted to gather data for specific periods of time during an emitting event so that changes in the radiation may be observed over time. The present invention is particularly well adapted to observe short wavelength light in the extreme ultraviolet, soft x-ray, and regular x-ray regions.

Abstract translation: 公开了一种用于观察来自源的辐射的毛细管光谱仪。 光谱仪包括毛细管阵列，色散元件和短波长成像检测器。 毛细管引导件包括接收端和发射端。 接收端被定位成使得其可以接收来自源的辐射。 当辐射穿过毛细管引导件时，辐射的过程被改变，使得其以预定的路径或从发射端的路径发射。 发射的辐射落在将辐射分散成预定图案的分散元件上。 然后，辐射落在短波长成像检测器的传感器上，该检测器响应于辐射的频率和强度产生电信号。 可以使用绝缘体来防止离散的辐射线在从毛细导管传递到短波长成像检测器时彼此干扰。 短波长成像检测器可以适于在发射事件期间收集特定时间段的数据，使得可以随时间观察辐射的变化。 本发明特别适用于观察极紫外线，软X射线和规则x射线区域中的短波长光。

公开(公告)号：US4875773A

公开(公告)日：1989-10-24

申请号：US191262

申请日：1988-05-06

Applicant: Richard Burns ,  James Defendorf ,  Edward King ,  Cornelius McCarthy

Inventor： Richard Burns ,  James Defendorf ,  Edward King ,  Cornelius McCarthy

IPC: G01J3/18 ,  G01J3/04 ,  G01J3/10 ,  G01J3/12 ,  G01J3/28 ,  G01J3/42 ,  G01J3/44 ,  G01J3/443 ,  G01N21/31

CPC classification number: G01J3/04 ,  G01J3/02 ,  G01J3/0294 ,  G01J3/12 ,  G01J3/2803 ,  G01J2003/045 ,  G01J2003/102 ,  G01J2003/1204 ,  G01J2003/1295 ,  G01J2003/1828 ,  G01J2003/425 ,  G01J3/1838 ,  G01J3/42 ,  G01J3/4406 ,  G01J3/443 ,  G01N2021/174 ,  G01N2021/3129

Abstract: An optical system for a multidetector array spectrophotometer which includes multiple light sources for emitting light of selected wavelength ranges and means for selectively transmitting the selected wavelength ranges of light to respective slits of a multi-slit spectrograph for multiple wavelength range detection. The spectrograph has two or more slits which direct the selected wavelength ranges of the light spectra to fall upon a dispersive and focusing system which collects light from each slit, disperses the light by wavelength and refocuses the light at the positions of a single set of detectors.

公开(公告)号：US4375919A

公开(公告)日：1983-03-08

申请号：US195210

申请日：1980-10-07

Applicant: Kenneth W. Busch

Inventor： Kenneth W. Busch

IPC: G01J3/02 ,  G01J3/04 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/0294 ,  G01J3/04

Abstract: A dispersive optical spectrometer is disclosed which comprises light detection means, dispersion means for separating light radiation into spectral components and for directing the spectral components toward the light detection means, means for admitting light radiation into the entrance focal plane and for directing the light radiation toward the dispersion means, the light radiation admitting means including a plurality of spaced-apart apertures, and light transmission means for transmitting light radiation from a light source to one or more of the apertures.

Abstract translation: 公开了一种分散光学光谱仪，其包括光检测装置，用于将光辐射分离成光谱分量并用于将光谱分量引导到光检测装置的分散装置，用于将光辐射引入入射焦平面并用于将光辐射引向 分散装置，包括多个间隔开的孔的光辐射允许装置和用于将来自光源的光辐射传送到一个或多个孔的光传输装置。

公开(公告)号：US20240288306A1

公开(公告)日：2024-08-29

申请号：US18655689

申请日：2024-05-06

Applicant: Apple Inc.

Inventor： Mark Alan Arbore ,  Gary Shambat ,  Matthew A. Terrel

IPC: G01J3/02 ,  G01J3/10 ,  G01J3/36 ,  G01J3/42 ,  G01N21/25 ,  G01N21/47 ,  G01N21/49

CPC classification number: G01J3/0229 ,  G01J3/0205 ,  G01J3/0216 ,  G01J3/0256 ,  G01J3/0294 ,  G01J3/10 ,  G01J3/108 ,  G01J3/36 ,  G01J3/42 ,  G01N21/25 ,  G01N21/49 ,  G01N2021/4711

Abstract: Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, etalon effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non-simultaneous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.