DECONVOLUTION TO REDUCE THE EFFECTIVE SPOT SIZE OF A SPECTROSCOPIC OPTICAL METROLOGY DEVICE

    公开(公告)号:US20180348055A1

    公开(公告)日:2018-12-06

    申请号:US15966918

    申请日:2018-04-30

    CPC classification number: G01J3/28 G01N21/8851 G01N21/956 G03F7/70625

    Abstract: The effective spot size of a spectroscopic metrology device is reduced through deconvolution of a measurement spectra set acquired from a measurement target combined with a training spectra set obtained from a training target. The measurement spectra set may be obtained using sparse sampling of a grid scan of a measurement target. The training spectra set is obtained from a grid scan of a training target that is similar to the measurement target. The training spectra set and the measurement spectra set include spectra from different grid nodes. Deconvolution of the measurement spectra and the training spectra sets produces an estimated spectrum for the measurement target that is an estimate of a spectrum from the measurement target produced with incident light having an effective spot size that is smaller than the actual spot size. One or more characteristics of the measurement target may then be determined using the estimated spectrum.

    OPTICAL MEASURING APPARATUS AND ADAPTER FOR OPTICAL MEASURING APPARATUS

    公开(公告)号:US20180259392A1

    公开(公告)日:2018-09-13

    申请号:US15839872

    申请日:2017-12-13

    Inventor: Masaru HORIE

    Abstract: Disclosed is an optical measuring apparatus and an adapter for the optical measuring apparatus for easily managing calibration data in the optical measuring apparatus in which a sensor head and a controller are separated. The optical measuring apparatus includes the controller including a light projecting part, a light receiving part, and a control part; a head part including an optical system and a cable; and an adapter configured to be electrically or optically connectable to the cable of the head part and the controller and configured to be attachable to and detachable from the cable and the controller. The adapter includes a ROM configured to store calibration data for correcting the measurement value by the head part.

    INCREASING THE USABLE DYNAMIC RANGE IN PHOTOMETRY

    公开(公告)号:US20180252651A1

    公开(公告)日:2018-09-06

    申请号:US15909295

    申请日:2018-03-01

    CPC classification number: G01N21/75 G01J3/28 G01J3/42 G01N21/255

    Abstract: An optical device for determining the presence and/or concentration of analytes in a sample is presented. The optical device comprises a detector and a detection unit comprising optical path components. The detection unit has wavelength-dependent responsivity. The optical device further comprises a light source for emitting light of different respective usable wavelength ranges. The light is guidable through the optical path to the detector to generate baseline signals and response signals relative to the baseline signal indicative of the presence and/or concentration of analytes in the optical path. The intensity of the light reaching the detector is adjusted inverse to the wavelength-dependent responsivity with respect to at least two respective usable wavelength ranges so that a reduction of the ratio between the maximum baseline signal at one of the selected usable wavelength ranges and the minimum baseline signal at another of the selected usable wavelength ranges is obtained.

    CALIBRATION OF A SPECTRAL ANALYSIS MODULE

    公开(公告)号:US20180149522A1

    公开(公告)日:2018-05-31

    申请号:US15362033

    申请日:2016-11-28

    Applicant: Cymer, LLC

    Inventor: Zhongquan Zhao

    Abstract: An apparatus includes a material having an optical transition profile with a known energy transition; and a detector configured to detect a characteristic associated with the interaction between the material and the testing light beam. The testing light beam is either a primary light beam produced by an optical source or a calibration light beam. The apparatus also includes a spectral analysis module placed in a path of the primary light beam; and a control system connected to the detector and to the spectral detection system. The control system is configured to determine a reference spectral profile of the primary light beam based on the detected characteristic; compare the reference spectral profile of the primary light beam with a sensed spectral profile of the primary light beam output from the spectral detection system; and based on this comparison, adjust a scale of the spectral detection system.

Patent Agency Ranking