公开(公告)号：US06404115B1

公开(公告)日：2002-06-11

申请号：US09508914

申请日：2000-06-13

Applicant: Allan Sanderson

Inventor： Allan Sanderson

IPC: H01J102

CPC classification number: H01J37/075 ,  H01J37/063 ,  H01J37/065 ,  H01J37/301 ,  H01J2237/3104

Abstract: A charged particle emitting assembly comprises an emitter member (5) for emitting charged particles of one polarity. A tubular shield electrode (6) circumferentially surrounds the emitter member and is held in use at the same polarity as the charged particles. A tubular accelerating electrode (7) is positioned substantially coaxially with the shield electrode (6) and is held in use at the opposite polarity to the shield electrode. The arrangement is such that charged particles from the emitter member (5) initially spread laterally outwardly and then are focused into a beam which passes through the tubular accelerating electrode (7).

Abstract translation: 带电粒子发射组件包括用于发射一个极性的带电粒子的发射器件（5）。 管状屏蔽电极（6）周向地围绕发射器件并且以与带电粒子相同的极性保持在使用中。 管状加速电极（7）与屏蔽电极（6）基本同轴地定位，并以与屏蔽电极相反的极性保持使用。 该布置使得来自发射器件（5）的带电粒子最初横向向外扩展，然后聚焦成穿过管状加速电极（7）的光束。

公开(公告)号：US20020033449A1

公开(公告)日：2002-03-21

申请号：US09891611

申请日：2001-06-27

Inventor： Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Toshifumi Kimba ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Tsutomu Karimata ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima ,  Toru Takagi

IPC: G21K007/00 ,  G01N023/00

CPC classification number: G03F7/70616 ,  G01N23/225 ,  H01J37/05 ,  H01J37/06 ,  H01J37/073 ,  H01J37/075 ,  H01J37/185 ,  H01J37/20 ,  H01J37/222 ,  H01J37/226 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0435 ,  H01J2237/057 ,  H01J2237/06316 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/24564 ,  H01J2237/248 ,  H01J2237/2482 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817

Abstract: An inspection apparatus and a semiconductor device manufacturing method using the same. The inspection apparatus is used for defect inspection, line width measurement, surface potential measurement or the like of a sample such as a wafer. In the inspection apparatus, a plurality of charged particles is delivered from a primary optical system to the sample, and secondary charged particles emitted from the sample are separated from the primary optical system and introduced through a secondary optical system to a detector. Irradiation of the charged particles is conducted while moving the sample. Irradiation spots of the charged particles are arranged by N rows along a moving direction of the sample and by M columns along a direction perpendicular thereto. Every row of the irradiation spots of the charged particles is shifted successively by a predetermined amount in a direction perpendicular to the moving direction of the sample.

Abstract translation: 检查装置及使用该检查装置的半导体装置的制造方法。 检查装置用于诸如晶片的样品的缺陷检查，线宽测量，表面电位测量等。 在检查装置中，多个带电粒子从初级光学系统传送到样品，从样品发射的二次带电粒子与主光学系统分离，并通过二次光学系统引入到检测器。 在移动样品的同时进行带电粒子的照射。 带电粒子的照射点沿着样品的移动方向排列成N行，沿着与其垂直的方向排列成M列。 带电粒子的每一列照射点在垂直于样品的移动方向的方向上连续移动预定量。

公开(公告)号：US4057746A

公开(公告)日：1977-11-08

申请号：US699246

申请日：1976-06-24

Applicant: Paul Dumonte, deceased

Inventor： Paul Dumonte, deceased

IPC: H01J37/075 ,  H01J37/315 ,  H01J1/00

CPC classification number: H01J37/075 ,  H01J37/315

Abstract: The invention concerns an electron gun for the production of an electron beam designed primarily for welding workpieces and including, in a frame, the mechanical facilities required for holding in a coaxial position and electrically insulating a cathode, a filament, a wehnelt and an anode.Gun featured by the fact that the cathode is held by mechanical systems in the coaxial position via several rods made of conductive material, one end of these rods being rigidly fixed with respect to the frame, the other end being applied against the outer wall of the disc shaped cathode, thus forming a positioning clamp for said cathode.The structure allows for the efficient cooling of the internal parts of the gun.

Abstract translation: 本发明涉及一种用于生产主要用于焊接工件的电子束的电子枪，并且在框架中包括保持在同轴位置所需的机械设备并且电绝缘阴极，灯丝，微孔和阳极。

公开(公告)号：US3878424A

公开(公告)日：1975-04-15

申请号：US38010073

申请日：1973-07-17

Applicant: JEOL LTD

Inventor： SUGANUMA TADAO

IPC: H01J3/02 ,  H01J37/06 ,  H01J37/063 ,  H01J37/065 ,  H01J37/075 ,  H01J1/20 ,  H01J19/14

CPC classification number: H01J37/075 ,  H01J37/063 ,  H01J37/065

Abstract: This invention relates to an electron beam generating source comprising a cathode and anode, the opposite and facing surfaces of the cathode and anode being flat and parallel so that the electrostatic field formed between the two electrodes is parallel and perpendicular to the surfaces of both electrodes, thereby preventing the electrons emitted from the electron emitter from being affected by lens effects, for example, spherical aberration.

Abstract translation: 本发明涉及一种包括阴极和阳极的电子束产生源，阴极和阳极的相对且相对的表面是平坦且平行的，使得在两个电极之间形成的静电场平行并垂直于两个电极的表面， 从而防止从电子发射器发射的电子受透镜效应的影响，例如球面像差。

公开(公告)号：US3406305A

公开(公告)日：1968-10-15

申请号：US49344065

申请日：1965-10-06

Applicant: LOKOMOTIVBAU ELEKTROTECHNISCH

Inventor： SIEGFRIED SCHILLER ,  PETER LENK

IPC: H01J3/02 ,  H01J37/075

CPC classification number: H01J3/02 ,  H01J37/075

公开(公告)号：US20240242941A1

公开(公告)日：2024-07-18

申请号：US18618264

申请日：2024-03-27

Applicant: HAMAMATSU PHOTONICS K.K. ,  ENERGETIQ TECHNOLOGY, INC.

Inventor： Akio Suzuki ,  Toru Fujita ,  Akinori Asai ,  Yusei Nagata ,  Shinichi Ohba ,  Matthew Partlow ,  Ron Collins ,  Stephen F. Horne ,  Laura Owens

IPC: H01J37/32 ,  H01J37/075 ,  H05H1/00 ,  C23C16/455

CPC classification number: H01J37/32513 ,  H01J37/075 ,  H01J37/32009 ,  H05H1/00 ,  H05H1/01 ,  C23C16/45544

Abstract: A light emitting sealed body includes a housing which stores a discharge gas and is provided with a first opening to which first light is incident and a second opening from which second light is emitted, a first window portion which includes a first window member allowing the first light to be transmitted therethrough and hermetically seals the first opening, and a second window portion which includes a second window member allowing the second light to be transmitted therethrough and hermetically seals the second opening. Each of the first window member and the second window member is hermetically fixed to the housing by a joining material. A protection layer which covers the joining material is provided at at least one of a first joining position between the first window member and the housing and a second joining position between the second window member and the housing.

公开(公告)号：US11894211B2

公开(公告)日：2024-02-06

申请号：US17621503

申请日：2019-07-02

Applicant: Hitachi High-Tech Corporation

Inventor： Erina Kawamoto ,  Soichiro Matsunaga ,  Souichi Katagiri ,  Keigo Kasuya ,  Takashi Doi ,  Tetsuya Sawahata ,  Minoru Yamazaki

IPC: H01J37/077 ,  H01J37/075 ,  H01J37/18

CPC classification number: H01J37/077 ,  H01J37/075 ,  H01J37/18 ,  H01J2237/006

Abstract: The invention provides an electron beam apparatus that reduces a time required for an electron gun chamber to which a sputter ion pump and a non-evaporable getter pump are connected to reach an extreme high vacuum state. The electron beam apparatus includes an electron gun configured to emit an electron beam and the electron gun chamber to which the sputter ion pump and the non-evaporable getter pump are connected. The electron beam apparatus further includes a gas supply unit configured to supply at least one of hydrogen, oxygen, carbon monoxide, and carbon dioxide to the electron gun chamber.

公开(公告)号：US11887805B2

公开(公告)日：2024-01-30

申请号：US17491039

申请日：2021-09-30

Applicant: FEI Company

Inventor： John Stiller ,  Aaron Torok ,  Kevin Kagarice

IPC: H01J37/075 ,  H01J37/21 ,  H01J37/073

CPC classification number: H01J37/075 ,  H01J37/21 ,  H01J2237/06316

Abstract: Electron sources can include an electron source crystal coupled in series between opposing electrically conductive supports to form an electrically conductive path, wherein the electrical resistance of each of the electrically conductive supports is lower than the electrical resistance of the electron source crystal. Electron source crystals can include an emitting end and opposing shank end, wherein the shank end includes opposing leg portions. Electrically conductive supports can include foil supports spaced apart across a gap, wherein each of the opposing leg portions is attached to a respective foil support such that the foil supports are electrically connected to form the electrically conductive path. Particle focusing system are also disclosed. Electron sources can include an electron source crystal having an emitting end and opposing shank end, wherein the shank end is formed of a pair of opposing leg portions. Methods of manufacturing and operating electron sources are also disclosed.

公开(公告)号：US20230330751A1

公开(公告)日：2023-10-19

申请号：US17761864

申请日：2020-09-23

Applicant: Freemelt AB

Inventor： Ulric LJUNGBLAD ,  Robin STEPHANSEN

IPC: B33Y30/00 ,  H01J37/075 ,  B22F12/41 ,  H01J37/305

CPC classification number: B22F12/41 ,  B33Y30/00 ,  H01J37/075 ,  H01J37/305

Abstract: A metal 3D printer, a cathode holder system, a carrier for an electron emitter, and an electron source piece with a thermal break in a mechanical interface are provided. The metal 3D printer has an electron gun adapted to direct an electron beam generated by a back heated electron emitter of a cathode arrangement onto a metal material via an anode arrangement. The back heated electron emitter is capable of emitting electrons via thermionic emission from an emitting surface when heated on a back surface, and includes a side surface, essentially perpendicular to the emitting surface, between the emitting surface and the back surface. The metal 3D printer 100 includes: an electron source piece, including the electron emitter attached to a carrier in such a way that the carrier covers the side surface of the electron emitter adjoining the emitting surface; a cathode holder system including one or more cathode holder system members adapted to hold the electron source piece in a position in relation to an anode arrangement; and a first thermal break in a first mechanical interface adapted to mate an emitter holder of the cathode holder system with the electron source piece.

公开(公告)号：US09859097B2

公开(公告)日：2018-01-02

申请号：US15224167

申请日：2016-07-29

Applicant: The Board of Trustees of the Leland Stanford Junior University

Inventor： R. Fabian W. Pease ,  Manu Prakash ,  James Stanley Cybulski ,  Alireza Nojeh

IPC: H01J37/26 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J37/065 ,  H01J37/073 ,  H01J37/075 ,  H01J37/141 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/061 ,  H01J2237/06308 ,  H01J2237/06333 ,  H01J2237/1035 ,  H01J2237/14 ,  H01J2237/164 ,  H01J2237/18 ,  H01J2237/20228 ,  H01J2237/2608 ,  H01J2237/262 ,  H01J2237/28 ,  H01J2237/2803

Abstract: A permanently sealed vacuum tube is used to provide the electrons for an electron microscope. This advantageously allows use of low vacuum at the sample, which greatly simplifies the overall design of the system. There are two main variations. In the first variation, imaging is provided by mechanically scanning the sample. In the second variation, imaging is provided by point projection. In both cases, the electron beam is fixed and does not need to be scanned during operation of the microscope. This also greatly simplifies the overall system.