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1.发明公开公开(公告)号：US20240203685A1
公开(公告)日：2024-06-20
申请号：US18068769
申请日：2022-12-20
Applicant: FEI Company
Inventor： Bart Buijsse , Pleun Dona
CPC classification number: H01J37/20 , H01J37/261 , H01J37/28
Abstract: Systems, methods, and components of charged particle microscopes affording improved contrast in dose sensitive samples are described. A pole piece for an electron microscope can include a body, being substantially concentric with a central axis. The body can define an upper surface, substantially normal to the central axis, a lower surface, substantially normal to the central axis, a central aperture formed in the body from the upper surface to the lower surface. The central aperture can be substantially rotationally symmetrical about the central axis. The body can define a lateral surface, inclined relative to the central axis and tapering toward the upper surface and a plurality of lateral apertures formed in the body from the lateral surface to the central aperture. The plurality of lateral apertures can be arrayed substantially symmetrically about the central axis.
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公开(公告)号：US20210020400A1
公开(公告)日：2021-01-21
申请号：US16929752
申请日：2020-07-15
Applicant: FEI Company
Inventor： Bart Jozef Janssen , Pleun Dona
IPC: H01J37/28 , H01J37/244
Abstract: The invention relates to a method of manufacturing a charged particle detector, comprising the steps of providing a sensor device, such as an Active Pixel Sensor (APS). Said sensor device at least comprises a substrate layer and a sensitive layer. The method further comprises the step of providing a mechanical supporting layer and connecting said mechanical supporting layer to said sensor device. After connection, the sensitive layer is situated in between said substrate layer and said mechanical supporting layer. By connecting the mechanical supporting layer, it is possible to thin said substrate layer for forming said charged particle detector. The mechanical supporting layer forms part of the manufactured detector. The detector can be used in a charged particle microscope, such as a Transmission Electron Microscope for direct electron detection.
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公开(公告)号：US09741529B2
公开(公告)日：2017-08-22
申请号：US15221510
申请日：2016-07-27
Applicant: FEI Company
Inventor： Luigi Mele , Pleun Dona , Gerard Nicolaas Anne van Veen
CPC classification number: H01J37/20 , B01L3/502723 , B01L2200/0605 , B01L2300/0654 , B01L2300/0887 , B01L2300/123 , B01L2400/0406 , B01L2400/0694 , G01N1/04 , G01N21/03 , G01N21/11 , G01N2021/0346 , G01N2021/6482 , G01N2223/307 , H01J37/26 , H01J2237/2002 , H01J2237/2003 , H01J2237/2005 , H01J2237/2006
Abstract: A micro-chamber for inspecting sample material can be filled with sample material immersed in a liquid without the need of applying vacuum tubing's to the micro-chamber. The micro-chamber includes an inspection volume for holding the sample material for observation. The inspection volume is defined by a first rigid layer, a second rigid layer spaced from the first rigid layer, and a hermetic seal between the first and the second rigid layers. One of the rigid layers includes thin part can be punctured. The liquid with immersed sample material, when placed upon the thin part, is sucked into the evacuated inspection volume when the thin part is punctured.
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公开(公告)号：US08592764B2
公开(公告)日：2013-11-26
申请号：US13855373
申请日：2013-04-02
Applicant: FEI Company
Inventor： Hanno Sebastian von Harrach , Bert Henning Freitag , Pleun Dona
IPC: H01J37/244 , H01J37/26 , H01J49/06 , G01N23/225 , H01J37/28
CPC classification number: H01J37/244 , G01N23/225 , H01J37/26 , H01J37/28 , H01J2237/002 , H01J2237/2442 , H01J2237/28 , H01J2237/2802
Abstract: Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
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公开(公告)号：US20230207254A1
公开(公告)日：2023-06-29
申请号：US18171750
申请日：2023-02-21
Applicant: FEI Company
Inventor： Alexander Henstra , Pleun Dona
IPC: H01J37/153 , H01J37/244 , H01J37/22
CPC classification number: H01J37/153 , H01J37/244 , H01J37/22 , H01J2237/1534
Abstract: Disclosed herein are electron microscopes with improved imaging. An example electron microscope at least includes an illumination system, for directing a beam of electrons to irradiate a specimen, an elongate beam conduit, through which the beam of electrons is directed; a multipole lens assembly configured as an aberration corrector, and a detector for detecting radiation emanating from the specimen in response to said irradiation, wherein at least a portion of said elongate beam conduit extends at least through said aberration corrector and has a composite structure comprising intermixed electrically insulating material and electrically conductive material, wherein the elongate beam conduit has an electrical conductivity σ and a thickness t, with σt
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Patent Agency Ranking
公开(公告)号：US20140077080A1
公开(公告)日：2014-03-20
申请号：US14090855
申请日：2013-11-26
Applicant: FEI Company
Inventor： Hanno Sebastian Von Harrach , Bert Henning Freitag , Pleun Dona
IPC: H01J37/244
CPC classification number: H01J37/244 , G01N23/225 , H01J37/26 , H01J37/28 , H01J2237/002 , H01J2237/2442 , H01J2237/28 , H01J2237/2802
Abstract: Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
Abstract translation: 布置在样品室内的环中的多个检测器提供了大的立体收集角。 检测器优选地包括一个能够减少检测器上的冰的形成的快门和冷藏。 通过提供围绕样品的检测器，提供了大的立体角以用于改进的检测，并且检测X射线，而不管样品倾斜的方向如何。
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公开(公告)号：US20130240731A1
公开(公告)日：2013-09-19
申请号：US13855373
申请日：2013-04-02
Applicant: FEI COMPANY
Inventor： Hanno Sebastian von Harrach , Bert Henning Freitag , Pleun Dona
IPC: H01J37/244
CPC classification number: H01J37/244 , G01N23/225 , H01J37/26 , H01J37/28 , H01J2237/002 , H01J2237/2442 , H01J2237/28 , H01J2237/2802
Abstract: Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
Abstract translation: 布置在样品室内的环中的多个检测器提供了大的立体收集角。 检测器优选地包括一个能够减少检测器上的冰的形成的快门和冷藏。 通过提供围绕样品的检测器，提供了大的立体角以用于改进的检测，并且检测X射线，而不管样品倾斜的方向如何。
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公开(公告)号：US20240161999A1
公开(公告)日：2024-05-16
申请号：US18054880
申请日：2022-11-11
Applicant: FEI Company
Inventor： Rudolf Geurink , Hugo Cornelis Van Leeuwen , Gerard Nicolass Anne Van Veen , Pleun Dona , Stephan Kujawa , Maarten Bischoff
CPC classification number: H01J37/18 , H01J37/20 , H01J37/226 , H01J37/244 , H01J37/265 , H01J37/28 , H01J2237/2802
Abstract: The present disclosure relates to a charged particle microscope in which in-situ thermal laser epitaxy can be performed and the product analysed, methods of performing in-situ thermal laser epitaxy and analysis within the charged particle microscope and the combination of at least one cartridge and a laser for use in a charged-particle microscope to provide in-situ thermal laser epitaxy and analysis are also described.
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公开(公告)号：US11972920B2
公开(公告)日：2024-04-30
申请号：US17533610
申请日：2021-11-23
Applicant: FEI Company
Inventor： Pleun Dona , Casper Smit , Rients Jan de Groot
CPC classification number: H01J37/165 , H01J37/18 , B33Y80/00
Abstract: Methods and apparatus are disclosed for providing an X-ray shield within an ultra-high vacuum enclosure. A shell is fabricated, leak-tested, filled with an X-ray shielding material, and sealed. An elongated twisted X-ray shield can be deployed within a pump-out channel of an electron microscope or similar equipment. The shield can incorporate lead within a stainless steel shell, with optional low-Z cladding outside the shell. Further variations are disclosed.
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公开(公告)号：US20240112878A1
公开(公告)日：2024-04-04
申请号：US17957171
申请日：2022-09-30
Applicant: FEI COMPANY
Inventor： Pleun Dona , Johannes A.H.W.G. Persoon , Hugo Cornelis Van Leeuwen , Peter Tiemeijer
IPC: H01J37/18 , H01J37/141 , H01J37/20
CPC classification number: H01J37/18 , H01J37/141 , H01J37/20
Abstract: A charged particle microscope for imaging a specimen. The charged particle microscope includes a specimen holder movable into an imaging position intersecting an optical axis, a specimen chamber configured to receive the specimen holder in the imaging position, and a sorption pump disposed in the specimen chamber and configured to lower a pressure in the specimen chamber.
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