公开(公告)号：KR1020050039458A

公开(公告)日：2005-04-29

申请号：KR1020030074927

申请日：2003-10-25

Applicant: 한국전자통신연구원

Inventor： 최상국 ,  김대용

IPC: G02B3/00

CPC classification number: H01J9/02 ,  H01J3/18 ,  H01J9/14 ,  H01J37/12 ,  H01J2237/1205 ,  H01J2237/3175 ,  H01J2237/31754 ,  Y10T29/49117

Abstract: 마이크로칼럼 전자빔 장치의 전자빔 렌즈 및 그 제작방법에 관한 것이다. 본 발명에 따른 마이크로칼럼 전자빔 렌즈 제작방법에서는 격리 기판 재료로서 감광성 유리 기판을 사용하고, 금속 박막은 도금 공정으로 성장시킨다. 그리고, 전자빔이 통과하는 홀들은 격리 기판 상에 홀 형상의 레지스트 패턴을 형성한 후 금속 박막의 도금 공정을 실시하여 리프트 오프 방법으로 형성한다. 본 발명에 의하면, 금속 박막의 평행과 홀간의 정렬이 비교적 단순한 공정에 의해 자체적으로 이루어진다. 제작비가 저가이며 특히 우수한 성능의 렌즈를 제작할 수 있다.

公开(公告)号：KR100459536B1

公开(公告)日：2004-12-03

申请号：KR1020020063226

申请日：2002-10-16

Applicant: 한국전자통신연구원

Inventor： 곽창수 ,  임율균 ,  정해빈 ,  김대용

IPC: H01J9/24

Abstract: PURPOSE: A mosaic type chuck is provided to achieve a desired flatness without limitation of size of processing machine by assembling a plurality of part chucks. CONSTITUTION: A mosaic type chuck comprises a plurality of part chuck(1), a base plate(3), a plurality of height adjusting pins(5), and a plurality of part chuck height adjusting devices(7). The base plate is arranged at the lower part of the part chuck and supports and fixes the part chuck. The height adjusting pins are assembled to the base plate and positioned at a screw hole mounted on the base plate in such a manner that the height adjusting pins are adjusted to have the same height each other. The part chuck height adjusting devices fix the part chuck to the base plate and adjust the height and angle of the part chuck.

Abstract translation: 目的：提供马赛克型卡盘以通过组装多个零件卡盘来实现期望的平坦度而不限制加工机器的尺寸。 一种镶嵌式卡盘，包括多个零件卡盘（1），底板（3），多个高度调节销（5）和多个零件卡盘高度调节装置（7）。 底盘安装在零件卡盘的下部，并支撑和固定零件卡盘。 高度调节销组装到底板上，并且定位在安装在底板上的螺纹孔处，使得高度调节销被调节成彼此具有相同的高度。 零件卡盘高度调整装置将零件卡盘固定在底板上，并调整零件卡盘的高度和角度。

公开(公告)号：KR100456237B1

公开(公告)日：2004-11-09

申请号：KR1020020072975

申请日：2002-11-22

Applicant: 한국전자통신연구원

Inventor： 최상국 ,  김대용 ,  강동열

IPC: H01J37/147

CPC classification number: H01J9/02 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/26 ,  H01J37/1477 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2237/1516 ,  H01J2237/31793

Abstract: The present invention relates to a deflector of a micro-column electron beam apparatus and method for fabricating the same, which forms a seed metal layer and a mask layer on both sides of a substrate, and exposes some of the seed metal layer on which deflecting plates, wirings and pads are to be formed by lithography process using a predetermined mask. The wirings and pads are formed by plating metal on the exposed portion, and some of the metal layer is also exposed on which the deflecting plates are to be formed using a predetermined mask, and then the metal is plated with desired thickness, thereby the deflecting plates are completed. Therefore, by forming plurality of deflecting plates on both sides of the substrate at the same time through plating process, alignment between the deflecting plates formed on both sides of the substrate can be exactly made, and by fabricating a deflector integrated with the substrate and deflecting plates in a batch process, productivity and reproducibility is improved. In addition, since the deflecting plates, wirings and pads are directly formed on the substrate, structural safety is improved and thereby durability is also improved.

Abstract translation: 微柱电子束装置的偏转器及其制造方法技术领域本发明涉及一种微柱电子束装置的偏转器及其制造方法，其在衬底的两侧上形成种金属层和掩模层，并且暴露出部分偏转的籽晶金属层 板，布线和焊盘将通过使用预定掩模的光刻工艺形成。 通过在暴露部分上电镀金属而形成布线和焊盘，并且使用预定掩模将一些金属层也暴露在其上将形成偏转板的金属层上，然后金属以所需厚度电镀，由此偏转 板完成。 因此，通过电镀工艺同时在衬底的两侧形成多个偏转板，可以准确地形成在衬底两侧形成的偏转板之间的对准，并且通过制造与衬底整合的偏转器并偏转 在批量生产过程中，生产力和再现性得到提高。 另外，由于偏转板，配线和衬垫直接形成在衬底上，所以结构安全性得到改善，从而也提高了耐久性。

公开(公告)号：KR1020040076643A

公开(公告)日：2004-09-03

申请号：KR1020030011949

申请日：2003-02-26

Applicant: 한국전자통신연구원

Inventor： 강동열 ,  신용우 ,  최상국 ,  김대용

IPC: H01J37/04

Abstract: PURPOSE: A micro column and a method for manufacturing the same are provided to make the thickness of the micro column constant and remove a complex etching process. CONSTITUTION: A micro column comprises a plurality of micro lenses for controlling electron beams or ion beams. The micro lenses include a conductive sheet(101) having holes and a glass plate(103) having holes contacted to the bottom or top surface of the conductive sheet. The conductive sheet is a metal thin film or a semiconductor substrate having doped impurity. The hole of the glass plate is larger than the hole of the conductive sheet.

Abstract translation: 目的：提供微柱及其制造方法，使微柱的厚度恒定并去除复杂的蚀刻工艺。 构成：微柱包括用于控制电子束或离子束的多个微透镜。 微透镜包括具有孔的导电片（101）和具有与导电片的底表面或顶表面接触的孔的玻璃板（103）。 导电片是具有掺杂杂质的金属薄膜或半导体衬底。 玻璃板的孔比导电片的孔大。

公开(公告)号：KR1020040033934A

公开(公告)日：2004-04-28

申请号：KR1020020063226

申请日：2002-10-16

Applicant: 한국전자통신연구원

Inventor： 곽창수 ,  임율균 ,  정해빈 ,  김대용

IPC: H01J9/24

Abstract: PURPOSE: A mosaic type chuck is provided to achieve a desired flatness without limitation of size of processing machine by assembling a plurality of part chucks. CONSTITUTION: A mosaic type chuck comprises a plurality of part chuck(1), a base plate(3), a plurality of height adjusting pins(5), and a plurality of part chuck height adjusting devices(7). The base plate is arranged at the lower part of the part chuck and supports and fixes the part chuck. The height adjusting pins are assembled to the base plate and positioned at a screw hole mounted on the base plate in such a manner that the height adjusting pins are adjusted to have the same height each other. The part chuck height adjusting devices fix the part chuck to the base plate and adjust the height and angle of the part chuck.

Abstract translation: 目的：通过组装多个部件卡盘，提供镶嵌式卡盘以实现所需的平面度，而不受加工机尺寸的限制。 构成：马赛克型卡盘包括多个部件卡盘（1），基板（3），多个高度调节销（5）和多个部件卡盘高度调节装置（7）。 基板布置在部件卡盘的下部，并支撑并固定部件卡盘。 将高度调节销组装到基板上并定位在安装在基板上的螺钉孔中，使得高度调节销被调节为具有相同的高度。 零件卡盘高度调节装置将零件卡盘固定在基板上，调整零件卡盘的高度和角度。

公开(公告)号：KR100394275B1

公开(公告)日：2003-08-09

申请号：KR1019990029627

申请日：1999-07-21

Applicant: 한국전자통신연구원

Inventor： 김충환 ,  김천수 ,  유현규 ,  박민 ,  김대용

IPC: H03F1/32

Abstract: PURPOSE: A differential amplifier circuit for RF signals for improvement of linearity of small signals is provided to improves linearity of the third-order intermodulation signal by using characteristic of an FET. CONSTITUTION: A differential amplifier circuit for RF signals for improvement of linearity of small signals includes a differential amplifier(10) for differential-amplifying an input signal at a normal operation point with an external DC gate voltage, a differential amplifier(20) for generating the third-order intermodulation signal, which non-linearly differential-amplifies the input signal with an external DC gate voltage to generate the third-order intermodulation signal, and an insulator(30) for differently applying the DC gate voltages supplied to the two differential amplifiers for insulation from a DC power supply.

Abstract translation: 目的：提供一种用于改善小信号线性的RF信号的差分放大器电路，以通过使用FET的特性来改善三阶互调信号的线性。 用于改善小信号线性的RF信号的差分放大器电路包括：差分放大器（10），用于利用外部DC门电压对正常工作点处的输入信号进行差分放大;差分放大器（20），用于产生 三阶互调信号，其用外部DC栅极电压对输入信号进行非线性差分放大以产生三阶互调信号;以及绝缘体（30），其用于不同地施加提供给两个差分 用于直流电源绝缘的放大器。

公开(公告)号：KR100375828B1

公开(公告)日：2003-03-15

申请号：KR1020000066649

申请日：2000-11-10

Applicant: 한국전자통신연구원

Inventor： 임태영 ,  엄낙웅 ,  이천희 ,  김대용

IPC: G06F17/50

Abstract: PURPOSE: A method for generating a VHDL(Very High-speed integrated circuit Description Language) code by using the waveform transformation of an IP(Internet Protocol) interface is provided to be usefully applied to the designing of an asynchronous circuit excluding a main clock. CONSTITUTION: The method comprises steps of tabulating a truth table by enlarging a rising edge section in an optional sequential circuit waveform and dividing the waveform of input and output signals into many motion sections in a specific sequence(S1), classifying the input signals into a level signal and a pulse signal based on the output signals on the truth table(S2), simplifying the truth table and settling the remaining motion sequence(S3), drawing a flow chart of the remaining motion sequence depending on respective output signals(S4), writing a VHDL source code by referring to the flow chart(S5), and synthesizing an asynchronous electronic circuit with the VHDL source code by using a CAD(Computer-Aided Design) tool(S6).

Abstract translation: 目的：提供一种通过使用IP（互联网协议）接口的波形变换来生成VHDL（甚高速集成电路描述语言）代码的方法，以有用地应用于除主时钟以外的异步电路的设计。 本发明的方法包括以下步骤：通过放大可选顺序电路波形中的上升沿部分并将输入和输出信号的波形以特定顺序划分成许多运动部分（S1），将输入信号分类成 （S2）上输出信号和脉冲信号，简化真值表并建立剩余运动序列（S3），根据各自的输出信号绘制剩余运动序列的流程图（S4） ，通过参考流程图（S5）写入VHDL源代码，并且通过使用CAD（计算机辅助设计）工具（S6）将异步电子电路与VHDL源代码合成。

公开(公告)号：KR1020030013557A

公开(公告)日：2003-02-15

申请号：KR1020010047622

申请日：2001-08-08

Applicant: 한국전자통신연구원

Inventor： 박종문 ,  권성구 ,  유성욱 ,  박건식 ,  김보우 ,  김대용

IPC: H01L21/768

Abstract: PURPOSE: A method for fabricating a metal interconnection of a semiconductor device is provided to prevent a fine pillar-type metal pattern, by making metal layers connected by a pillar-type metal pattern, by forming the metal pattern after a process for patterning a metal layer for forming a lower metal interconnection, by having the lower metal interconnection and the metal pad made of a metal layer, and by making the lower portion of the metal pattern broader than the upper portion. CONSTITUTION: An interlayer dielectric is formed on a semiconductor substrate(301) and patterned to form a contact hole so that a predetermined portion of the substrate is exposed. A metal layer and an anti-reflective coating(ARC) are sequentially formed on the interlayer dielectric to fill the contact hole. The ARC is patterned. The metal layer in the exposed portion is etched to form a lower metal interconnection. After a photoresist layer is formed, a predetermined photoresist layer pattern is formed on the ARC. The photoresist layer is patterned to make the photoresist layer left between the lower metal interconnections. After the ARC is patterned, the metal layer in the exposed portion is etched to form the metal pattern. After a spacer(306) is formed on the sidewall of the metal pattern and the lower metal interconnection, the metal layer in the exposed portion is etched. The second interlayer dielectric(313) is formed and planarized until the surface of the metal pattern is exposed. A metal interconnection is formed on the second interlayer dielectric.

Abstract translation: 目的：提供一种用于制造半导体器件的金属互连的方法，以通过在金属图案化的工艺之后形成金属图案来通过在柱状金属图案上连接金属层来防止细柱型金属图案 通过具有由金属层制成的下金属互连和金属垫，以及通过使金属图案的下部比上部更宽而形成下金属互连的层。 构成：在半导体衬底（301）上形成层间电介质，并构图以形成接触孔，以使衬底的预定部分露出。 在层间电介质上依次形成金属层和抗反射涂层（ARC）以填充接触孔。 ARC图案化。 蚀刻暴露部分中的金属层以形成下部金属互连。 在形成光致抗蚀剂层之后，在ARC上形成预定的光致抗蚀剂层图案。 对光致抗蚀剂层进行图案化以使光致抗蚀剂层留在下部金属互连之间。 在ARC被图案化之后，暴露部分中的金属层被蚀刻以形成金属图案。 在金属图案和下金属互连的侧壁上形成间隔物（306）之后，暴露部分中的金属层被蚀刻。 第二层间电介质（313）形成并平坦化，直到金属图案的表面露出。 在第二层间电介质上形成金属互连。

公开(公告)号：KR1020020083332A

公开(公告)日：2002-11-02

申请号：KR1020010022860

申请日：2001-04-27

Applicant: 한국전자통신연구원

Inventor： 여순일 ,  임태영 ,  엄낙웅 ,  김대용

IPC: H01M10/48

Abstract: PURPOSE: Provided are a wireless charging controller which can accept an aerial radio wave and convert the radio wave into voltage energy capable of charging, and a portable, wireless charger using the same. CONSTITUTION: The controller comprises a wireless, frequency receiving unit(41) for accepting a radio wave and selectively transmitting a radio wave having best sensitivity while monitoring a state of radio wave in order to prevent the discontinuance of charging due to disconnection of radio wave during charging; a frequency tuner(42) for tuning a radio wave transmitted from the frequency receiving unit in order to increase the utilization; a radio wave capturing unit(43) for transmitting the radio wave tuned by the frequency tuner to voltage converting unit; a voltage converter unit(44) for receiving a radio wave from the radio wave capturing unit and converting the radio wave into voltage energy capable of charging; and a booster unit(45) for boosting the voltage energy converted by the converter unit to voltage capable of charging a battery.

Abstract translation: 目的：提供一种无线充电控制器，可以接受空中无线电波，并将无线电波转换为能够充电的电压能量，以及使用该收音机的便携式无线充电器。 构成：控制器包括一个无线频率接收单元（41），用于接收无线电波并选择性地发送具有最佳灵敏度的无线电波，同时监视无线电波的状态，以防止由于无线电波的断开而中止充电 充电; 频率调谐器（42），用于调谐从频率接收单元发送的无线电波，以便增加利用率; 无线电波捕获单元，用于将由频率调谐器调谐的无线电波发送到电压转换单元; 电压转换器单元（44），用于从无线电波捕获单元接收无线电波，并将无线电波转换为能够充电的电压能量; 以及用于将由转换器单元转换的电压能量升压到能够对电池充电的升压单元（45）。

公开(公告)号：KR1020020054202A

公开(公告)日：2002-07-06

申请号：KR1020000083168

申请日：2000-12-27

Applicant: 한국전자통신연구원

Inventor： 김진규 ,  엄낙웅 ,  김대용

IPC: G06F11/00

Abstract: PURPOSE: An inverse calculation system is provided to calculate an inverse of an arbitrary element by every one frequency of an externally transmitted clock in a Galois field used in an error correction system or an encryption system. CONSTITUTION: The system comprises an 8th power operator(201), multipliers(202, 209, 210, 213) registers(203, 204, 211, 212), a 128th power operator(205), a 2nd power operator(206), a 4th power operator(207) and an 8th power operator(208). The 8th power operator(201) raises an externally input primitive element to the power 8. The multiplier(202) multiplies the externally input primitive element by the number raised to the power 8. The register(203) stores the externally input primitive element. The register(204) stores a result operated by the multiplier(202). The 128th power operator(205) raises the number, stored at the register(203), to the power 128. The power operators(206, 207, 208) raise the number, stored at the register(204), to the power 2, 4, 8, respectively. The multiplier(209) multiplies the number, output by the power operator(205), by the number, output by the power operator(206). The multiplier(210) multiplies the number, output by the power operator(207), by the number, output by the power operator(208). The registers(211, 212) store the numbers output by the multipliers(209, 210), respectively. The multiplier(213) multiplies the number of the register(211) by the number of the register(212).

Abstract translation: 目的：提供一种逆计算系统，用于在纠错系统或加密系统中使用的Galois域中的外部传输时钟的每一个频率计算任意元素的逆。 构成：该系统包括第八功率运算器（201），乘法器（202,209,210,213）寄存器（203,204,211,212），第128功率运算器（205），第二功率运算器（206） 第四电力运营商（207）和第八电力运营商（208）。 第八功率运算器（201）将外部输入的基元元件提升到功率8.乘法器（202）将外部输入的基元元素乘以提高到功率8的数量。寄存器（203）存储外部输入的基元。 寄存器（204）存储由乘法器（202）操作的结果。 第128电力运营商（205）将存储在寄存器（203）中的号码提高到电力128.电力运营商（206,207,208）将存储在寄存器（204）中的电力数量提高到电力2 ，4,8。 乘法器（209）将由电力运算符（205）输出的数乘以由电力运算符（206）输出的数字。 乘法器（210）将由电力运算符（207）输出的数乘以由电力运算符（208）输出的数字。 寄存器（211,212）分别存储由乘法器（209,210）输出的数字。 乘法器（213）将寄存器（211）的数量乘以寄存器（212）的数量。