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公开(公告)号：KR100964971B1
公开(公告)日：2010-06-21
申请号：KR1020070125467
申请日：2007-12-05
Applicant: 한국전자통신연구원
IPC: H01L29/84
CPC classification number: G01L9/0042 , Y10T29/42 , Y10T29/49
Abstract: 본 발명은 초소형 반도체식 압력센서 및 그 제조 방법에 관한 것으로서, 기판의 공동 형성 영역을 트랜치 식각하여 복수의 트랜치를 형성하고, 상기 복수의 트랜치를 열적 산화 공정을 통해 산화시켜, 캐비티 형성용 산화막을 형성한 후, 상기 캐비티 형성용 산화막 및 기판의 상부에 맴브레인 모재용 물질막을 형성하고, 상기 맴브레인 모재용 물질막에 복수의 식각홀을 형성하여, 상기 복수의 식각홀을 통해 상기 캐비티 형성용 산화막을 제거함에 의해, 상기 기판에 매몰된 공동을 형성하며, 상기 맴브레인 모재용 물질막의 상부에 맴브레인 보강층을 형성하여, 공동을 밀폐하는 맴브레인막을 형성하고, 상기 맴브레인막의 상부에 압저항형 소재로 이루어진 감지막을 형성함에 의해 구현된다.
MEMS, 압력 센서, 압저항형, CMOS, 공동, 맴브레인-
公开(公告)号：KR1020100050238A
公开(公告)日：2010-05-13
申请号：KR1020080109438
申请日：2008-11-05
Applicant: 한국전자통신연구원
CPC classification number: F28D15/04 , F28D15/0233
Abstract: PURPOSE: A thin type cooling device is provided to overcome the limit of the electric heat performance related to the thickness by laminating a first or a third thin plate. CONSTITUTION: A first thin plate(100) comprises an evaporator and a condenser. A capillary tube area is located in the evaporator. A plurality of grooves are formed in the capillary tube area. The evaporator vaporizes the working fluid. The condenser has the vapor condensation space for condensing the vaporized working fluid. A second thin plate(200) has the vapor moving path for transferring the vaporized working fluid to the condenser. A third thin plate(300) has the liquid channel for transferring the condensed working fluid to the evaporator.
Abstract translation: 目的：提供一种薄型冷却装置，通过层压第一或第三薄板来克服与厚度相关的电热性能的极限。 构成：第一薄板（100）包括蒸发器和冷凝器。 毛细管区域位于蒸发器中。 在毛细管区域中形成多个槽。 蒸发器蒸发工作流体。 冷凝器具有用于冷凝蒸发的工作流体的蒸气冷凝空间。 第二薄板（200）具有用于将蒸发的工作流体转移到冷凝器的蒸气移动路径。 第三薄板（300）具有用于将冷凝的工作流体传送到蒸发器的液体通道。
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公开(公告)号：KR100446092B1
公开(公告)日：2004-08-30
申请号：KR1020010081907
申请日：2001-12-20
Applicant: 한국전자통신연구원
IPC: F28D15/02
Abstract: PURPOSE: A cooling system with a wick manufactured by a photo-etching process is provided to obtain greater capillary force and improve heat transfer efficiency by minimizing the width of fine channels. CONSTITUTION: A cooling system with a wick(3) manufactured by a photo-etching process comprises a frame(1) forming an uneven part in the middle and the wick forming plural fine channels(4). The wick is inserted in the uneven part. Flow of fluids is performed through the fine channels and a space part(5) formed to the uneven part. The fine channels are formed through the photo-etching process. Thus, the width of the fine channels is minimized and great capillary force is obtained. The simplified manufacturing process improves productivity.
Abstract translation: 目的：提供一种带光刻制造芯的冷却系统，通过减少细通道的宽度来获得更大的毛细力并提高传热效率。 一种具有通过光刻工艺制造的吸芯（3）的冷却系统，包括在中间形成不平坦部分的框架（1）和形成多个微细通道（4）的吸芯。 灯芯插入不平坦部分。 流体的流动通过精细通道和形成于不平坦部分的空间部分（5）来执行。 精细通道通过光刻工艺形成。 因此，细通道的宽度被最小化并且获得了很大的毛细作用力。 简化的制造过程提高了生产力。
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公开(公告)号：KR1020030052091A
公开(公告)日：2003-06-26
申请号：KR1020010081907
申请日：2001-12-20
Applicant: 한국전자통신연구원
IPC: F28D15/02
Abstract: PURPOSE: A cooling system with a wick manufactured by a photo-etching process is provided to obtain greater capillary force and improve heat transfer efficiency by minimizing the width of fine channels. CONSTITUTION: A cooling system with a wick(3) manufactured by a photo-etching process comprises a frame(1) forming an uneven part in the middle and the wick forming plural fine channels(4). The wick is inserted in the uneven part. Flow of fluids is performed through the fine channels and a space part(5) formed to the uneven part. The fine channels are formed through the photo-etching process. Thus, the width of the fine channels is minimized and great capillary force is obtained. The simplified manufacturing process improves productivity.
Abstract translation: 目的：通过光蚀刻工艺制造出具有灯芯的冷却系统，以通过最小化精细通道的宽度来获得更大的毛细管力并提高传热效率。 构成：具有通过光蚀刻工艺制造的芯（3）的冷却系统包括在中间形成不平坦部分的框架（1）和形成多个细通道（4）的芯。 灯芯插入不平坦部分。 流体通过精细通道和形成于不平坦部分的空间部分（5）进行。 精细通道是通过光刻工艺形成的。 因此，精细通道的宽度被最小化并且获得了很大的毛细管力。 简化的制造过程提高了生产效率。
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公开(公告)号：KR1020010062646A
公开(公告)日：2001-07-07
申请号：KR1020000080925
申请日：2000-12-22
Applicant: 한국전자통신연구원
IPC: B22F7/00
Abstract: PURPOSE: A heat pipe and its production method are provided to improve the returning efficiency of a working fluid from a condensing portion to an evaporating portion and to have the sufficient heat transferring efficiency. CONSTITUTION: A hollow rod member(3) is inserted in the center of a pipe body(1) to secure a steam passage. A copper powder is injected between the pipe body(1) and the hollow rod member(3). The copper powder is sintered in the pipe body(1) by inserting the pipe body(1) in an electric furnace and heating. The hollow rod member(3) is removed from the pipe body(1) after cooling the pipe body(1). Thereby, wick structure is sintered and stuck to the pipe body(1).
Abstract translation: 目的：提供一种热管及其制造方法，以提高工作流体从冷凝部到蒸发部的返回效率，并具有足够的传热效率。 构成：中空杆构件（3）插入管体（1）的中心以固定蒸汽通道。 在管体（1）和中空杆件（3）之间注入铜粉末。 通过将管体（1）插入电炉中并加热，在管体（1）中烧结铜粉末。 在管体（1）冷却后，将空心杆构件（3）从管体（1）中取出。 由此，芯体结构被烧结并粘附到管体（1）。
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Patent Agency Ranking
公开(公告)号：KR1020170099029A
公开(公告)日：2017-08-31
申请号：KR1020160020725
申请日：2016-02-22
Applicant: 한국전자통신연구원
Inventor： 문석환
Abstract: 평판형히트파이프는내부에작동유체가유동하는유로(flow path)를포함하는파이프, 유로의제1 내면상에제공되는와이어구조체, 및유로의제2 내면상에제공되는요철형태의그루브를포함하되, 제1 내면및 제2 내면은서로대향한다.
Abstract translation: 平板型热管包括：管，其包括工作流体流过的流路;设置在流路的第一内表面上的线结构;以及设置在流路的第二内表面上的凹槽 其中第一内表面和第二内表面彼此相对。
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公开(公告)号：KR101758082B1
公开(公告)日：2017-07-17
申请号：KR1020130166516
申请日：2013-12-30
Applicant: 한국전자통신연구원
IPC: H01L29/66 , H01L29/47 , H01L21/02 , H01L21/283 , H01L21/321 , H01L29/20 , H01L29/778
CPC classification number: H01L21/3212 , H01L21/0254 , H01L21/283 , H01L21/28575 , H01L21/28581 , H01L29/2003 , H01L29/41766 , H01L29/452 , H01L29/66462 , H01L29/7786
Abstract: 본발명의질화물반도체소자의제조방법에관한것으로제 1 및제 2 질화물반도체층들이차례로적층된성장기판상에복수의전극들을형성하는것, 상기각각의전극들상에상부금속층들을형성하는것, 상기성장기판을제거하여상기제 1 질화물반도체층의하면을노출하는것 및상기노출된제 1 질화물반도체층의하면상에제 3 질화물반도체층및 하부금속층을차례로형성하는것을포함하는질화물반도체소자의제조방법이제공된다.
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公开(公告)号：KR101416442B1
公开(公告)日：2014-08-13
申请号：KR1020100080602
申请日：2010-08-20
Applicant: 한국전자통신연구원
IPC: H01L21/205 , H01L21/02
Abstract: 본 발명은 온도 균일화 장치 및 이를 구비한 반도체 제조 장치에 관한 것으로, 반도체 제조 장치는 진공의 내부 환경을 제공하는 챔버와, 상기 챔버 내에 설비된 히터와; 상기 히터와 마주보는 위치에 웨이퍼를 지지할 수 있는 홀더와, 그리고 상기 히터와 웨이퍼 사이에 제공된 열 스프레더를 포함할 수 있다. 본 발명에 의하면, 상기 히터에서 발생된 열이 상기 열 스프레더를 거쳐 상기 웨이퍼로 제공되어 상기 웨이퍼의 온도가 균일화될 수 있다.
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公开(公告)号：KR1020140093161A
公开(公告)日：2014-07-25
申请号：KR1020130124408
申请日：2013-10-18
Applicant: 한국전자통신연구원
IPC: A61B5/06
Abstract: The present invention relates to a terahertz health checking apparatus. The terahertz health checking apparatus of the present invention includes: a terahertz wave transmitter to generate a terahertz wave in a terahertz bandwidth; a lens to output the terahertz wave and to receive a terahertz wave reflected from the outputted terahertz wave; an imaging chip coupled to the lens to detect the received terahertz wave and to generate a digital image signal based on the detected terahertz wave; a readout circuit to readout the digital image signal; and a transceiver to output the read digital image signal to an outside.
Abstract translation: 本发明涉及一种太赫兹健康检查装置。 本发明的太赫兹健康检查装置包括：太赫兹波发射器，用于在太赫兹带宽内产生太赫兹波; 输出太赫兹波并接收从输出的太赫兹波反射的太赫兹波的透镜; 耦合到所述透镜的成像芯片，用于检测所接收的太赫波，并且基于检测到的太赫兹波产生数字图像信号; 用于读出数字图像信号的读出电路; 以及将读取的数字图像信号输出到外部的收发器。
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公开(公告)号：KR1020140073174A
公开(公告)日：2014-06-16
申请号：KR1020120141031
申请日：2012-12-06
Applicant: 한국전자통신연구원
CPC classification number: H01L41/1136 , H02N2/186
Abstract: The present invention discloses an impact type piezoelectric micro power generator. The generator includes: a base having a cavity and at least one stop region adjacent to the cavity; a frame fixed to the base; a plurality of first vibration beams extending from the frame to the cavity; an impact beam connected between first tips of the first vibration beams and extending onto the stop region; a vibration body extending from the impact beam to between the first vibration beams on the cavity and including a second vibration beam having a second tip; a piezoelectric element disposed from the second vibration beam to an upper part or a lower part of the impact beam and generating power by bending of the impact beam and the second vibration beam from impact of the vibration body and the stop region.
Abstract translation: 本发明公开了一种冲击式压电微型发电机。 发电机包括：具有空腔的基座和与腔体相邻的至少一个止动区域; 固定在基座上的框架; 从所述框架延伸到所述空腔的多个第一振动梁; 连接在第一振动梁的第一尖端之间并延伸到停止区域上的冲击梁; 振动体，其从所述冲击梁延伸到所述腔体上的所述第一振动梁之间，并且包括具有第二尖端的第二振动梁; 压电元件，其从所述第二振动梁设置到所述冲击梁的上部或下部，并且通过来自所述振动体和所述止动区域的冲击的所述冲击梁和所述第二振动梁的弯曲产生动力。
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