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    Charged particle source with integrated energy filter
    12.
    发明公开
    Charged particle source with integrated energy filter 审中-公开
    Quellefürgeladene Teilchen mit integriertem Energiefilter

    公开(公告)号：EP2128885A1

    公开(公告)日：2009-12-02

    申请号：EP08156906.3

    申请日：2008-05-26

    Applicant: FEI COMPANY

    Inventor： Henstra, Alexander

    IPC: H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/153 ,  H01J37/04

    CPC classification number: H01J37/05 ,  H01J3/027 ,  H01J3/04 ,  H01J37/063 ,  H01J2237/045 ,  H01J2237/057 ,  H01J2237/061 ,  H01J2237/08 ,  H01J2237/15 ,  H01J2237/1534

    Abstract: The invention describes a particle source in which energy selection occurs. The energy selection occurs by sending a beam of electrically charged particles 103 eccentrically through a lens 107. As a result of this, energy dispersion will occur in an image formed by the lens. By projecting this image onto a slit 109 in an energy selecting diaphragm 108, it is possible to allow only particles in a limited portion of the energy spectrum to pass. Consequently, the passed beam 113 will have a reduced energy spread. Deflection unit 112 deflects the beam to the optical axis 101. One can also elect to deflect a beam 105 going through the middle of the lens toward the optical axis and having, for example, greater current.
    The energy dispersed spot is imaged on the slit by a deflector 111. When positioning the energy dispersed spot on the slit, central beam 105 is deflected from the axis to such an extent that it is stopped by the energy selecting diaphragm. Hereby reflections and contamination resulting from this beam in the region after the diaphragm are avoided. Also electron-electron interaction resulting from the electrons from the central beam interacting with the energy filtered beam in the area of deflector 112 is avoided.

    Abstract translation: 本发明描述了发生能量选择的粒子源。 通过透过透镜107偏心地发送带电粒子103的束来进行能量选择。其结果是，由透镜形成的图像中会发生能量分散。 通过将该图像投影到能量选择膜108中的狭缝109上，可以仅允许能量谱的有限部分中的粒子通过。 因此，通过的梁113将具有减小的能量扩展。 偏转单元112将光束偏转到光轴101.还可以选择将穿过透镜中间的光束105偏转到光轴并具有例如更大的电流。 能量分散点通过偏转器111在狭缝上成像。当将能量分散点定位在狭缝上时，中心光束105从轴线偏转到由能量选择膜片停止的程度。 因此避免了在隔膜之后的区域中由该光束产生的反射和污染。 避免了在偏转器112的区域中与来自中心光束的电子与能量过滤光束相互作用的电子 - 电子相互作用。

    SOFT IONIZATION DEVICE AND APPLICATIONS THEREOF
    15.
    发明申请
    SOFT IONIZATION DEVICE AND APPLICATIONS THEREOF 审中-公开
    软离子化装置及其应用

    公开(公告)号：WO2003038086A1

    公开(公告)日：2003-05-08

    申请号：PCT/US2002/020353

    申请日：2002-06-25

    Applicant: IONFINITY LLC ,  HARTLEY, Frank, T.

    Inventor： HARTLEY, Frank, T.

    IPC: C12N13/00

    CPC classification number: H01J49/168 ,  G01N2223/612 ,  H01J3/027 ,  H01J3/04 ,  H01J27/02 ,  H01J27/26 ,  H01J37/08 ,  H01J49/0018 ,  H01J49/0427 ,  H01J2237/061 ,  H01J2237/0815 ,  H01J2237/317

    Abstract: A soft ionization device is disclosed that comprises a series of electrodes (120, 122) having spacing less than the means free path of the molecules to be ionized. In some embodiments, the soft ionization device (99) is used in various applications that require ion or electron sources such as biological or chemical reactors, ion milling, and numerous replacements for conventional hot cathode systems. In another embodiment, a valence spectrometer is disclosed that is configured to variably ionize molecules (301) by their valiancy. In other embodiments, the ionization device is coupled to a spectrometer for the characterization of biological matter. Also disclosed is a preconditioner for preparing biological matter to be ionized.

    Abstract translation: 公开了一种软电离装置，其包括具有小于待离子化分子的装置自由路径的间隔的一系列电极（120,122）。 在一些实施例中，软电离装置（99）用于需要离子或电子源（例如生物或化学反应器，离子铣削）和常规热阴极系统的大量替代品的各种应用中。 在另一个实施方案中，公开了一种价态光谱仪，其被配置为可变地以分子（301）离子化分子（301）。 在其它实施方案中，将离子化装置耦合到用于表征生物物质的光谱仪。 还公开了用于制备待离子化的生物物质的预处理剂。

    A SOURCE HOUSING ASSEMBLY FOR CONTROLLING ION BEAM EXTRACTION STABILITY AND ION BEAM CURRENT
    16.
    发明申请
    A SOURCE HOUSING ASSEMBLY FOR CONTROLLING ION BEAM EXTRACTION STABILITY AND ION BEAM CURRENT 审中-公开
    用于控制离子束提取稳定性和离子束电流的源壳体组件

    公开(公告)号：WO2016186913A1

    公开(公告)日：2016-11-24

    申请号：PCT/US2016/031752

    申请日：2016-05-11

    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.

    Inventor： CHANG, Shengwu ,  BURGESS, Jeff ,  LEAVITT, William ,  ST PETER, Michael ,  MOSHER, Matthew ,  OLSON, Joseph, C. ,  SINCLAIR, Frank

    IPC: H01L21/265 ,  H01J37/317

    CPC classification number: H01J27/08 ,  H01J3/04 ,  H01J5/02 ,  H01J9/18 ,  H01J9/385 ,  H01J27/024 ,  H01J37/08

    Abstract: Provided herein are approaches for improving ion beam extraction stability and ion beam current for an ion extraction system. In one approach, a source housing assembly may include a source housing surrounding an ion source including an arc chamber, the source housing having an extraction aperture plate mounted at a proximal end thereof. The source housing assembly further includes a vacuum liner disposed within an interior of the source housing to form a barrier around a set of vacuum pumping apertures. As configured, openings in the source housing assembly, other than an opening in the extraction aperture plate, are enclosed by the extraction aperture plate and the vacuum liner, thus ensuring appendix arcs or extraneous ions produced outside the arc chamber remain within the source housing. Just those ions produced within the arc chamber exit the source housing through the opening of the extraction aperture plate.

    Abstract translation: 本文提供了用于提高离子提取系统的离子束提取稳定性和离子束电流的方法。 在一种方法中，源壳体组件可以包括围绕包括电弧室的离子源的源壳体，源壳体具有安装在其近端处的抽吸孔板。 源壳体组件还包括设置在源壳体的内部中以在一组真空泵浦孔周围形成屏障的真空衬套。 根据构造，源壳体组件中除了提取孔板中的开口之外的开口被提取孔板和真空衬套包围，从而确保在电弧室外产生的附加电弧或外来离子保留在源壳体内。 恰好在电弧室内产生的那些离子通过提取孔板的开口离开源壳体。

    ION WIND FAN DESIGNS
    17.
    发明申请
    ION WIND FAN DESIGNS 审中-公开
    离子风扇设计

    公开(公告)号：WO2012006361A2

    公开(公告)日：2012-01-12

    申请号：PCT/US2011043088

    申请日：2011-07-06

    Applicant: VENTIVA INC ,  GOOCH SCOTT L ,  WANG WEI-MIN JEFF ,  SAWYER BRIAN D ,  HIZER CHRISTOPHER

    Inventor： GOOCH SCOTT L ,  WANG WEI-MIN JEFF ,  SAWYER BRIAN D ,  HIZER CHRISTOPHER

    IPC: H05K7/20 ,  F24H3/02 ,  G06F1/20

    CPC classification number: H01J3/04 ,  H01T23/00 ,  H05H1/48 ,  H05H2001/483 ,  Y10T29/49002

    Abstract: An ion wind fan can be made more resistant to electrical arcing by designing a supporting dielectric further from an emitter electrode, in one embodiment, such an ion wind fan according to one embodiment of the present invention has an emitter electrode and a collector electrode, and an isolator comprising a dielectric to provide electrical isolation for one or both of the emitter electrode and the collector electrode. In one embodiment, the isolator has a tapered sidewall so that the sidewall becomes thinner la the upstream direction over at least a portion of the sidewall. In one embodiment, the taper is a linear taper.

    Abstract translation: 通过从发射电极进一步设计支撑电介质，可以使离子风扇更耐电弧。在一个实施例中，根据本发明的一个实施例的这种离子风扇具有发射电极和集电电极，并且 包括电介质的隔离器，用于为发射电极和集电电极中的一个或两个提供电隔离。 在一个实施例中，隔离器具有锥形侧壁，使得侧壁在至少一部分侧壁上的上游方向上变薄。 在一个实施例中，锥形是线性锥形。

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