METHOD FOR FORMING SEMICONDUCTOR DEVICE

    公开(公告)号:JP2001007223A

    公开(公告)日:2001-01-12

    申请号:JP2000160941

    申请日:2000-05-30

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To provide a dual work function gate conductor having a self-aligned insulating cap, and a method for forming the dual work function gate conductor. SOLUTION: Two diffusion regions 36 are formed on a substrate 20, and gate stacks 33 and 34 are formed on the substrate 20 between these regions 36. The stacks 33 and 34 have a gate insulating layer 24, and polysilicon layers 26 and 26a on the layer 24, respectively. The layers 26 and 26a are n-type doped and remain intrinsic. A barrier layer 28 is formed on each of the layers 26 and 26a. A dopant source 30 is formed on the layer 28 for both stacks 33 and 34. The layer 28 has a p-type dopant. The stacks 33 and 34 are covered with an insulating cap 32 so that diffusion contacts can be formed on the gates in a borderless manner. When to start activating the source 30 for doping the layers 26 and 26a can be postponed until the desired timing.

    STRUCTURES AND METHODS OF ANTI-FUSE FORMATION IN SOI

    公开(公告)号:MY134452A

    公开(公告)日:2007-12-31

    申请号:MYPI20054051

    申请日:2001-05-23

    Applicant: IBM

    Abstract: AN ANTI-FUSE STRUCTURE THAT CAN BE PROGRAMMED AT LOW VOLTAGE AND CURRENT AND WHICH POTENTIALLY CONSUMES VERY LITTLE CHIP SPACES AND CAN BE FORMED INTERSTITIALLY BETWEEN ELEMENTS SPACED BY A MINIMUM LITHOGRAPHIC FEATURE SIZE IS FORMED ON A COMPOSITE SUBSTRATE SUCH AS A SILICON-ONINSULATOR WAFER BY ETCHING A CONTACT THROUGH AN INSULATOR TO A SUPPORT SEMICONDUCTOR LAYER, PREFERABLY IN COMBINATION WITH FORMATION OF A CAPACITOR-LIKE STRUCTURE REACHING TO OR INTO THE SUPPORT LAYER. THE ANTI-FUSE MAY BE PROGRAMMED EITHER BY THE SELECTED LOCATION OF CONDUCTOR FORMATION AND/OR DAMAGING A DIELECTRIC OF THE CAPACITOR-LIKE STRUCTURE. AN INSULATING COLLAR (38, 90) IS USED TO SURROUND A PORTION OF EITHER THE CONDUCTOR (42, 100) OR THE CAPACITOR-LIKE STRUCTURE TO CONFINE DAMAGE TO THE DESIRED LOCATION.HEATING EFFECTS VOLTAGE AND NOISE DUE TO PROGRAMMING CURRENTS ARE EFFECTIVELY ISOLATED TO THE BULK SILICON LAYER, PERMITTING PROGRAMMING DURING NORMAL OPERATION OF THE DEVICE. THUS THE POTENTIAL FOR SELF-REPAIR WITHOUT INTERRUPTION OF OPERATION IS REALIZED.(FIG 6)

    PROGRAMMABLE SEMICONDUCTOR DEVICE
    25.
    发明专利

    公开(公告)号:AU2003304110A1

    公开(公告)日:2004-11-26

    申请号:AU2003304110

    申请日:2003-04-30

    Applicant: IBM

    Abstract: A programmable device includes a substrate (10); an insulator (13) on the substrate; an elongated semiconductor material (12) on the insulator, the elongated semiconductor material having first and second ends, and an upper surface S; the first end (12a) is substantially wider than the second end (12b), and a metallic material is disposed on the upper surface; the metallic material being physically migratable along the upper surface responsive to an electrical current I flowable through the semiconductor material and the metallic material.

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