Abstract:
PURPOSE: A semiconductor device and a manufacturing method thereof are provided to form a contact hole or pattern with an interval below an exposure limit value by using a double patterning process. CONSTITUTION: A first semiconductor pattern is formed between a first mold film pattern(141) and a second mold film pattern. A second semiconductor pattern is formed between the second mold film pattern and a third mold film pattern(161). A first trench is formed between the first mold film pattern and the third mold film pattern. A first spacer(171) and a second spacer(173) are formed on both sidewalls of the first trench. A first bottom electrode(191) and a second bottom electrode(193) are formed on the first semiconductor pattern and the second semiconductor pattern.
Abstract:
PURPOSE: A nonvolatile memory device is provided to maximize current drive performance of a lower electrode by providing a nitride spacer and a conductive spacer for covering a sidewall of the lower electrode. CONSTITUTION: A lower electrode includes an upper part(43N) and a lower part(43) on a substrate. A conductive spacer(35) is formed on a lower sidewall of the lower electrode. A nitride spacer(35N) is formed on an upper sidewall of the lower electrode and the upper surface of the conductive spacer. A resistance change part(55) is formed on the upper part of the lower electrode and the nitride spacer. The upper part of the lower electrode includes nitrogen.
Abstract:
PURPOSE: A non-volatile memory device and a manufacturing method thereof are provided to from a plurality of program areas which stores data in one memory filler by extending a memory filler to a first direction. CONSTITUTION: A conductive pillar(630) is formed by extending to a first direction from a substrates. A variable resistor(620) surrounds the conductive filler. A switching material layer(610) surrounds the variable resistor. A first conductive layer(410_1) is formed to a second direction which crosses with the first direction. A first electrode(510_1) touches with the first conductive layer and the switching material layer.
Abstract:
A ferroelectric capacitor and a manufacturing method thereof are provided to improve the electrical characteristic such as the polarization or the data integrity. A ferroelectric capacitor comprises a lower substructure(105) formed on a substrate(100); a bottom electrode(135) having the first and second bottom electrode film patterns(125,130) and electrically connected to the lower substructure; a ferroelectric layer pattern(140) having the surface which is treated by the neutral beam and is formed on the bottom electrode; an upper electrode having the first and second upper electrode layer patterns(145,150) and is formed on the surface-treated ferroelectric layer.
Abstract:
A contact structure having a barrier layer containing noble metal, a ferroelectric random access memory device employing the same, and a method for fabricating the same are provided to prevent a lowering effect of polarization characteristics of ferroelectric capacitors by using a noble metal barrier. An interlayer dielectric(116) is formed on an upper surface of a semiconductor substrate(100). A plurality of contact plug(118s',118s",118d) are electrically connected through the interlayer dielectric to the semiconductor substrate. A lower barrier pattern is formed to surround a sidewall and a lower surface of the contact plug. An upper barrier pattern comes in contact with an upper surface of the contact plug. The lower barrier pattern and the upper barrier pattern include noble metal. The contact plug is formed with tungsten.
Abstract:
A portable information device is provided to enable a user to input a cursor operation signal without covering a display part, and automatically switch direction of the cursor or pointer operation signal by making a signal switch detect a rotation position of the touch pad. A portable information device includes a body(110), the display part(120) displaying an image in the body, and the touch pad part(180) receiving the cursor or pointer operation signal, and placed to a position separated from the display part to prevent viewing the display part. The touch pad part is rotated to the body to select a first position exposed to a rear direction of the display part and a second position exposed to a front direction of the display part. The signal switch switches the direction of the cursor or pointer operation signal according to selection of the first and second positions. A supporter supports the portable information device in a stand state after the touch pad is rotated to the second position. A button part(160,170) inputs click or scrolling information, and is installed to the position separated from the display and touch pad part.
Abstract:
향상된 특성을 갖는 강유전체 구조물, 강유전체 구조물의 제조 방법, 강유전체 구조물을 포함하는 강유전체 캐패시터, 강유전체 캐패시터의 제조 방법, 강유전체 캐패시터를 구비하는 반도체 장치 및 그 제조 방법이 개시된다. 제1 금속 산화물을 사용하여 제1 하부 전극막을 형성한 후, 제1 하부 전극막 상에 제2 하부 전극막을 형성한다. 제2 하부 전극막은 제1 금속, 제1 금속 산화물 및/또는 제1 합금을 사용하여 형성된다. 제1 하부 전극막 아래에는 제2 금속 또는 제2 금속 질화물로 이루어진 접착층이 형성된다. 제2 하부 전극막 상에 강유전체층을 형성한 다음, 강유전체층 상에 제2 금속 산화물을 사용하여 제1 상부 전극막을 형성한다. 제1 상부 전극막 상에 제2 합금을 사용하여 제2 상부 전극막을 형성한다. 제1 및 제2 상부 전극막을 포함하는 강유전체 구조물의 분극 또는 데이터 보존력의 향상, 피로 저항 증가, 센싱 마진의 증가 등과 같이 강유전적 및 전기적 특성을 크게 개선할 수 있으며, 이러한 강유전체 구조물을 갖는 강유전체 캐패시터의 강유전적 및 전기적 특성을 현저하게 향상시킬 수 있다.
Abstract:
향상된 특성을 갖는 강유전체 커패시터를 포함하는 반도체 장치의 제조 방법이 개시된다. 기판 상에 하부 구조물 및 절연 구조물을 형성한다. 상기 절연 구조물을 관통하는 패드와 상기 패드와 연결되는 실린더 형상의 하부 전극을 형성한다. 상기 절연 구조물 및 하부 전극 상에 실리적으로 균일한 두께를 갖는 강유전체층, 상부 전극층 및 식각 마스크를 형성한다. 상기 상부 전극층 및 강유전체층을 식각하여 상기 상부 전극 및 강유전체 패턴을 형성한 후 상부 전극을 절연시키는 절연막 패턴을 형성함으로서 강유전체 커패시터를 완성한다. 상술한 방법은 절연막 패턴을 형성할 때 강유전체 패턴의 식각 손상을 방지할 수 있어 강유전체 패턴의 열화를 방지할 수 있다.