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公开(公告)号：KR20180043294A
公开(公告)日：2018-04-27
申请号：KR20187006952
申请日：2016-07-29
Applicant: AXCELIS TECH INC
Inventor： BAGGET JOHN , BERINGER JASON
CPC classification number: H01J37/08 , H01J3/04 , H01J2237/061 , H01J2237/31701
Abstract: 이온소스필라멘트클램프(100)는제1 단부(104)와제2 단부(106)를갖는클램프부재(102)를갖는다. 상기제1 단부는캠 표면(132) 및캠 공이(134) 중하나를가지며, 서로대향하고이온소스필라멘트의리드를수용하기위해규정된리드개구(116)를가지는슬롯(114)에의해분리되는제1 부분(110) 및제2 부분(112)을가진다. 액추에이터핀(120)은액추에이터핀 축(126)을따라연장되고제1(122) 및제2 섹션을가진다. 상기제1 섹션(122)은상기클램프부재의상기제1 부분(110)에결합된다. 상기액추에이터핀은상기클램프부재의상기제2 부분의관통홀(128)을통해연장하고슬라이딩체결된다. 캠부재(108)는상기액추에이터핀 (120)의제2 섹션(124)에작동가능하게결합된다. 상기캠 부재는핸들(130)을가지며, 상기캠 표면(132)과캠 공이(134) 중하나를포함하고클램프위치와언클램프위치사이에서회전하도록구성된다. 상기캠 공이(134)는상기캠 표면(132)과슬라이딩접촉한다. 상기클램프위치에서, 상기캠 공이는제1의미리결정된방식으로상기캠 표면과체결되어상기클램프부재의상기제1 및제2 부분(110, 112)을서로를향해선택적으로압축하고상기리드개구(116) 내의리드에클램핑압력을가하며, 상기클램프부재의상기제1 부분과제2 부분사이에스프링장력을유도한다. 상기언클램프위치에서, 상기캠 공이는제2의미리결정된방식으로상기캠 표면과체결되고, 상기클램프부재의상기제1 및제2 부분(110, 112)을서로이격시켜상기리드개구내의리드에대한클램핑압력을해제한다.
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公开(公告)号：KR101903519B1
公开(公告)日：2018-10-04
申请号：KR1020120128336
申请日：2012-11-13
Applicant: 한국전자통신연구원
CPC classification number: H01J3/04 , A61N5/10 , A61N2005/1088 , H01J27/02 , H01J27/022 , H01J27/24
Abstract: 이온빔 치료장치가제공된다. 이치료장치는양이온발생용박막및 양이온발생용박막의적어도일면상에제공된나노선들을포함하는양이온발생용타깃, 및양이온발생용박막으로부터양이온을발생시켜환자의종양부위로투사하기위해, 나노선들로레이저빔을입사시키기위한레이저를포함한다. 나노선들각각은금속나노코어및 금속나노코어를둘러싸는폴리머쉘을포함할수 있다. 나노선들로입사된레이저빔은표면플라즈몬공명을형성하고, 표면플라즈몬공명에의해레이저빔의세기보다증강된근접장이형성되고, 근접장에의해양이온발생용박막으로부터양이온이방출된다.
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公开(公告)号：KR20180006442A
公开(公告)日：2018-01-17
申请号：KR20177035952
申请日：2016-05-11
Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
Inventor： CHANG SHENGWU , BURGESS JEFF , LEAVITT WILLIAM , ST PETER MICHAEL , MOSHER MATTHEW , OLSON JOSEPH C , SINCLAIR FRANK
CPC classification number: H01J27/08 , H01J3/04 , H01J5/02 , H01J9/18 , H01J9/385 , H01J27/024 , H01J37/08
Abstract: 이온추출시스템에대한이온빔 추출안정성및 이온빔 전류를개선시키기위한접근법들이본 출원에제공된다. 일접근법에서, 소스하우징어셈블리는아크챔버를포함하는이온소스를둘러싸는소스하우징을포함할수 있고, 소스하우징은그것의근위단부에마운트된추출개구플레이트를갖는다. 소스하우징어셈블리는소스하우징의내부에배치된진공라이너를더 포함하여진공펌핑개구들의세트주변에장벽을형성한다. 구성된대로, 추출개구플레이트에구멍외에소스하우징어셈블리에구멍들은, 추출개구플레이트및 진공라이너에봉입되어서, 아크챔버외측에생산된부속아크들또는외부에발생한이온들이소스하우징내에잔존하는것을보장한다. 단지아크챔버내에서생산된해당이온들만이추출개구플레이트의구멍을통과하여소스하우징을빠져나간다.
Abstract translation: 在本申请中提供了用于改善离子提取系统的离子束提取稳定性和离子束电流的方法。 在一种方法中，源外壳组件可以包括围绕包括电弧室的离子源的源外壳，并且源外壳具有安装在其近端的抽取孔板。 源壳体组件还包括设置在源壳体内的真空衬里，以在该组真空泵孔周围形成屏障。 提取打开源壳体组件中，除了孔在板作为配置的孔，被填充到提取孔径板和所述真空衬管，以确保电弧室外侧的生产外产生的附加弧或离子源壳体剩余。 只有在电弧室中产生的感兴趣的离子才能通过提取孔板的孔并离开源壳体。
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公开(公告)号：KR1020140061125A
公开(公告)日：2014-05-21
申请号：KR1020120128336
申请日：2012-11-13
Applicant: 한국전자통신연구원
CPC classification number: H01J3/04 , A61N5/10 , A61N2005/1088 , H01J27/02 , H01J27/022 , H01J27/24
Abstract: Provided is an ion beam treatment device. The treatment device includes a positive ion generation target which includes a positive ion generation thin film and nanowires on at least on side of the positive ion generation target, and a laser which irradiates laser beams to the nanowires by projecting positive ions to the tumor region of a patient by generating positive ions on the positive ion generation thin film. The nanowires can include a metal nanocore and a polymeric shell which surrounds the metal nanocore. A laser beam irradiated to the nanowires forms surface plasmon resonance. A proximity field reinforced with surface plasmon resonance more than the intensity of a laser beam is formed. Positive ion are released from the positive ion generation thin film by the proximity field.
Abstract translation: 提供了一种离子束处理装置。 处理装置包括正离子产生靶，其包括在正离子产生靶的至少一侧上的正离子产生薄膜和纳米线;以及激光，其通过将正离子投射到所述纳米线的肿瘤区域向所述纳米线照射 患者通过在正离子产生薄膜上产生正离子。 纳米线可以包括金属纳米孔和围绕金属纳米孔的聚合物壳。 照射到纳米线的激光束形成表面等离子体共振。 形成表面等离子体共振的强度大于激光束强度的近场。 正离子通过邻近场从正离子产生薄膜释放。
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公开(公告)号：EP3022760A1
公开(公告)日：2016-05-25
申请号：EP14742687.8
申请日：2014-07-03
Applicant: Services Pétroliers Schlumberger , Schlumberger Holdings Limited , Schlumberger Technology B.V.
Inventor： UMBACH, Brian
CPC classification number: H01J1/94 , H01J1/16 , H01J1/18 , H01J3/027 , H01J3/04 , H01J9/18 , H01J27/022 , H01J35/06 , H01J43/00 , H05H3/06
Abstract: A cathode assembly is for use in a radiation generator and includes an ohmically heated cathode, and a support having formed therein a hole and a recess at least partially surrounding the hole. In addition, there is a mount coupled to the support. The mount includes a larger outer frame positioned within the recess, a smaller inner frame carrying the ohmically heated cathode and spaced apart from the larger outer frame, and a plurality of members coupling the smaller inner frame to the larger outer frame.
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Patent Agency Ranking
公开(公告)号：EP2488918A1
公开(公告)日：2012-08-22
申请号：EP10823969.0
申请日：2010-10-12
Applicant: Xyleco, Inc.
Inventor： MEDOFF, Marshall
CPC classification number: G06K5/02 , B32B29/002 , B32B2262/0276 , B32B2554/00 , C08B15/00 , C08J7/123 , C12M45/00 , C12M45/06 , C12P19/00 , D21H21/48 , D21H25/04 , G01N33/346 , G01N2223/1013 , G01N2223/102 , G03C11/02 , G06K5/00 , G21K5/00 , H01J3/02 , H01J3/04
Abstract: Methods of marking paper products and marked paper products are provided. Some methods include irradiating the paper product to alter the functionalization of the paper.
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公开(公告)号：EP2128886A1
公开(公告)日：2009-12-02
申请号：EP09160973.5
申请日：2009-05-25
Applicant: FEI Company
Inventor： Henstra, Alexander
IPC: H01J37/05 , H01J37/09 , H01J37/147 , H01J37/153 , H01J37/04
CPC classification number: H01J37/05 , H01J3/027 , H01J3/04 , H01J37/063 , H01J2237/045 , H01J2237/057 , H01J2237/061 , H01J2237/08 , H01J2237/15 , H01J2237/1534
Abstract: The invention describes a particle source in which energy selection occurs. The energy selection occurs by sending a beam of electrically charged particles 103 eccentrically through a lens 107. As a result of this, energy dispersion will occur in an image formed by the lens. By projecting this image onto a slit 109 in an energy selecting diaphragm 108, it is possible to allow only particles in a limited portion of the energy spectrum to pass. Consequently, the passed beam 113 will have a reduced energy spread. Deflection unit 112 deflects the beam to the optical axis 101. One can also elect to deflect a beam 105 going through the middle of the lens toward the optical axis and having, for example, greater current.
The energy dispersed spot is imaged on the slit by a deflector 111. When positioning the energy dispersed spot on the slit, central beam 105 is deflected from the axis to such an extent that it is stopped by the energy selecting diaphragm. Hereby reflections and contamination resulting from this beam in the region after the diaphragm are avoided. Also electron-electron interaction resulting from the electrons from the central beam interacting with the energy filtered beam in the area of deflector 112 is avoided.Abstract translation: 本发明描述了发生能量选择的粒子源。 能量选择通过透过透镜107偏心地发送一束带电粒子103来发生。其结果是，能量分散将发生在由透镜形成的图像中。 通过将该图像投影到能量选择膜片108中的狭缝109上，可以仅允许能量谱的有限部分中的粒子通过。 结果，通过的光束113将具有降低的能量分布。 偏转单元112将光束偏转到光轴101.也可以选择将穿过透镜中间的光束105朝向光轴偏转并且具有例如更大的电流。 能量色散斑点由偏转器111在狭缝上成像。当将能量色散斑点定位在狭缝上时，中心光束105从轴偏转到被能量选择光阑停止的程度。 因此避免了在隔膜之后的区域中由该射束引起的反射和污染。 还避免了来自中心束的电子与偏转器112的区域中的能量滤波束相互作用所导致的电子 - 电子相互作用。
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公开(公告)号：EP1020887A3
公开(公告)日：2006-05-03
申请号：EP00109547.0
申请日：1996-03-01
Applicant: OSRAM SYLVANIA INC.
Inventor： Schoenback, Karl H. , Peterkin, Frank E. , Byszewski, Wojciech W. , Dharamsi, Amin N.
CPC classification number: H01J3/025 , H01J1/025 , H01J3/04 , H01J17/04 , H01J17/06 , H01J27/08 , H01J61/067 , H01J61/09 , H01J61/12 , H01J61/305 , H01J61/66 , H01J61/72 , H01J61/78 , H01S3/03 , H01S3/0382 , H01S3/0385 , H01S3/2383
Abstract: The invention is directed to a discharge device and a cathode for use in such a discharge device.
By providing a dielectric layer between a first and a second electrode, e.g. between a cathode and an anode, said dielectric layer having an opening aligned with a micro hollow of the first electrode, the light efficiency of the discharge device can be improved.-
公开(公告)号：EP1448769A4
公开(公告)日：2006-02-01
申请号：EP02744678
申请日：2002-06-25
Applicant: IONFINITY LLC
Inventor： HARTLEY FRANK T
IPC: G01N27/62 , C12M1/00 , C12M1/42 , C12N15/09 , G01N1/28 , G01N33/483 , G01N33/50 , H01J27/00 , H01J27/02 , H01J27/08 , H01J37/08 , H01J49/04 , H01J49/10 , H01J49/16 , H01J49/40 , C12N13/00 , G01N24/00 , H01J7/24
CPC classification number: H01J49/168 , G01N2223/612 , H01J3/027 , H01J3/04 , H01J27/02 , H01J27/26 , H01J37/08 , H01J49/0018 , H01J49/0427 , H01J2237/061 , H01J2237/0815 , H01J2237/317
Abstract: A soft ionization device is disclosed that comprises a series of electrodes (120, 122) having spacing less than the means free path of the molecules to be ionized. In some embodiments, the soft ionization device (99) is used in various applications that require ion or electron sources such as biological or chemical reactors, ion milling, and numerous replacements for conventional hot cathode systems. In another embodiment, a valence spectrometer is disclosed that is configured to variably ionize molecules (301) by their valiancy. In other embodiments, the ionization device is coupled to a spectrometer for the characterization of biological matter. Also disclosed is a preconditioner for preparing biological matter to be ionized.
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公开(公告)号：WO2017034758A1
公开(公告)日：2017-03-02
申请号：PCT/US2016/044762
申请日：2016-07-29
Applicant: AXCELIS TECHNOLOGIES, INC.
Inventor： BAGGET, John , BERINGER, Jason
IPC: H01J37/08
CPC classification number: H01J37/08 , H01J3/04 , H01J2237/061 , H01J2237/31701
Abstract: An ion source filament clamp (100) has a clamp member (102) having first (104) and second ends (106). The first end has one of a cam surface (132) and a cam follower (134), and has first (110) and second (112) portions that are opposed to one another and separated by a slot (114) having a lead opening (116) defined therein to receive a lead of an ion source filament. An actuator pin (120) extends along an actuator pin axis (126) and has first (122) and second sections. The first section (122) is coupled to the first portion (110) of the clamp member. The actuator pin extends through, and is in sliding engagement with, a thru-hole (128) in the second portion of the clamp member. A cam member (108) is operably coupled to the second section (124) of the actuator pin (120). The cam member has a handle (130) and the other of the cam surface (132) and cam follower (134) and is configured to rotate between a clamped position and an undamped position. The cam follower (134) slidingly contacts the cam surface (132). In the clamped position, the cam follower engages the cam surface in a first predetermined manner, thus selectively compressing the first and second portions (110,112) of the clamp member toward one another and exerting a clamping pressure on the lead within the lead opening (116) while inducing a spring tension between the first and second portions of the clamp member. In the undamped position, the cam follower engages the cam surface in a second predetermined manner, wherein the spring tension extends the first and second portions (110,112) of the clamp member apart from one another, therein releasing the clamping pressure on the lead within the lead opening.
Abstract translation: 离子源灯丝夹具（100）具有具有第一（104）和第二端（106）的夹紧构件（102）。 第一端具有凸轮表面（132）和凸轮从动件（134）中的一个，并且具有第一（110）和第二（112）部分，其彼此相对并且由具有引导开口的槽（114）分隔开 （116），以接收离子源灯丝的引线。 致动器销（120）沿着致动器销轴线（126）延伸并且具有第一（122）和第二部分。 第一部分（122）联接到夹紧构件的第一部分（110）。 致动器销延伸穿过夹紧构件的第二部分中的通孔（128）并与其滑动接合。 凸轮构件（108）可操作地联接到致动器销（120）的第二部分（124）。 凸轮构件具有手柄（130）和凸轮表面（132）和凸轮从动件（134）中的另一个，并且构造成在夹紧位置和无阻尼位置之间旋转。 凸轮从动件（134）滑动地接触凸轮表面（132）。 在夹紧位置，凸轮从动件以第一预定方式接合凸轮表面，从而选择性地将夹紧构件的第一和第二部分（110,112）压向彼此并且在引线开口（116）内的引线上施加夹紧压力 ），同时在夹紧构件的第一和第二部分之间引起弹簧张力。 在无阻尼位置中，凸轮从动件以第二预定方式接合凸轮表面，其中弹簧张力使夹紧构件的第一和第二部分（110,112）彼此分开延伸，从而将夹紧压力释放在引线内 铅开
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