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    Forming electron microscope sample from high-pressure frozen material
    71.
    发明专利
    Forming electron microscope sample from high-pressure frozen material 有权
    从高压冷冻材料成型电子显微镜样品

    公开(公告)号：JP2014021109A

    公开(公告)日：2014-02-03

    申请号：JP2013143193

    申请日：2013-07-09

    Applicant: Fei Co ,  エフ イー アイ カンパニFei Company

    Inventor： SCHAMPERS RUDOLF JOHANNES PETER GERARDUS ,  HAYLES MICHAEL FREDERICK ,  DIRK ARIE MATTHEUS DE WINTER ,  CHRISTIANUS THOMAS WILHELMUS MARIA SCHNEIJDENBERG

    IPC: G01N1/28

    CPC classification number: B23K15/08 ,  G01N1/06 ,  G01N1/42 ,  G01N2001/2873

    Abstract: PROBLEM TO BE SOLVED: To provide a method of forming a sample from a capillary with high-pressure frozen material.SOLUTION: The method comprises: a step 102 of providing a high-pressure capillary with vitrified sample material at a temperature Tbelow the glass transition temperature T; a step 104 of cutting the capillary; a step of warming the capillary to a temperature Twithin the range from the temperature Tto the temperature Tinclusive; a step of cooling the capillary to a temperature Tbelow the temperature Tto extrude the material from the capillary; and a step of freeing a sample from the extruded sample material at a temperature below temperature T. From the thus extruded material, the sample may be cut in thin slices, e.g., by ion-beam milling.

    Abstract translation: 要解决的问题：提供一种用高压冷冻材料从毛细管形成样品的方法。解决方案：该方法包括：步骤102，其在玻璃化转变温度下提供具有玻璃化样品的高压毛细管 温度T 切割毛细管的步骤104; 将毛细管温度升高到温度的一个步骤，在温度T到温度范围内Tinclusive; 将毛细管冷却至温度T低于毛细管挤出材料的步骤; 以及在低于温度T的温度下将样品从挤出的样品材料中释放的步骤。从这样挤出的材料中，可以例如通过离子束研磨以薄片切割样品。

    Method of forming vitrified sample for electron microscopy
    74.
    发明专利
    Method of forming vitrified sample for electron microscopy 有权
    形成电子显微镜维修样品的方法

    公开(公告)号：JP2013164419A

    公开(公告)日：2013-08-22

    申请号：JP2013024533

    申请日：2013-02-12

    Applicant: Fei Co ,  エフ イー アイ カンパニFei Company

    Inventor： JOHANNES JACOB LAMBERTUS MULDERS ,  RUDOLF JOHANNES PETER GERARDUS SCHAMPERS ,  TROMPENAARS PETRUS HUBERTUS FRANCISCUS

    IPC: G01N1/28

    CPC classification number: H01J37/28 ,  G01N1/42 ,  H01J2237/006 ,  H01J2237/31745

    Abstract: PROBLEM TO BE SOLVED: To provide a method of forming a vitrified sample on a sample holder (112) for inspection in an electron microscope (100, 106).SOLUTION: It is known to spray a solution on a grid and then immerse the grid in a cryogenic liquid, such as ethane or liquid nitrogen. The invention proposes to spray (via a metal needle 118) small droplets of the liquid on a cryogenic surface (112), such as a sample holder or a grid in a vacuum. The liquid forms vitrified sample material (200, 202) when hitting the surface because of the low temperature of the sample holder or the grid. A lamella may be excavated from the thus formed sample material, to be studied in a TEM, or the vitrified sample material may be directly observed in a SEM. In an embodiment, the material may be sprayed on a cryogenic liquid, to be scooped from the liquid and placed on a grid.

    Abstract translation: 要解决的问题：提供在样品架（112）上形成玻璃化样品以在电子显微镜（100,106）中进行检查的方法。解决方案：已知将溶液喷在网格上，然后将网格沉积 在低温液体如乙烷或液氮中。 本发明提出将液体的小液滴喷射（通过金属针头118）在低温表面（112）上，例如样品架或真空中的格栅。 当由于样品架或电网的低温而撞击表面时，液体形成玻璃化样品材料（200,202）。 可以从如此形成的样品材料中挖出薄片，以在TEM中进行研究，或者可以在SEM中直接观察玻璃化样品材料。 在一个实施例中，材料可以喷在低温液体上，从液体中取出并放置在网格上。

    Charged-particle microscope providing depth-resolved imagery
    78.
    发明专利
    Charged-particle microscope providing depth-resolved imagery 有权
    充电颗粒显微镜提供深度解析的图像

    公开(公告)号：JP2013037001A

    公开(公告)日：2013-02-21

    申请号：JP2012176834

    申请日：2012-08-09

    Applicant: Fei Co ,  エフ イー アイ カンパニFei Company

    Inventor： FAYSAL BOUGHORBEL ,  PAVEL POTOCEK ,  CORNELIS SANDER KOOIJMAN ,  BEREND HELMERUS LICH

    IPC: G01N23/203

    CPC classification number: H01J37/222 ,  G01N23/22 ,  G01N2223/423 ,  H01J37/28 ,  H01J2237/226

    Abstract: PROBLEM TO BE SOLVED: To provide a method used for obtaining a depth-resolved image from a sample with a charged-particle microscope without the need for multiple times of measurement at various beam energy values.SOLUTION: A method of examining a sample using a charged-particle microscope comprises the steps of: mounting the sample on a sample holder; using a particle-optical column to direct a special radiation beam onto a surface of the sample, thereby producing an interaction that causes radiation emitted from the sample; using a detector arrangement to detect at least a portion of the emitted radiation; recording an output Oof the detector arrangement as a function of the emission angle θof the emitted radiation measured relative to an axis normal to the surface of the sample, thus compiling a measurement data set M={(O, θ)} for a plurality of values of θ; and using a computer processing apparatus to automatically deconvolve the measurement data set M to resolve it into a result set R={(V, L)}.

    Abstract translation: 要解决的问题：提供一种用于利用带电粒子显微镜从样品获得深度分辨图像的方法，而不需要在各种能量值下进行多次测量。 解决方案：使用带电粒子显微镜检查样品的方法包括以下步骤：将样品安装在样品架上; 使用粒子 - 光学柱将特殊的辐射束引导到样品的表面上，从而产生引起从样品发射的辐射的相互作用; 使用检测器装置来检测所发射的辐射的至少一部分; 记录检测器装置的输出O n ，作为相对于所测量的发射辐射的发射角θ n 的函数 轴的垂直于样品的表面，从而编制测量数据集M =ä（O n ，θ n }} 对于多个θ n 的值; 并且使用计算机处理装置自动地去卷积测量数据集M以将其解析成结果集R =ä（V k ，L k ）}。 版权所有（C）2013，JPO＆INPIT

    Detector for use in charged particle apparatus
    79.
    发明专利
    Detector for use in charged particle apparatus 有权
    用于充电颗粒装置的探测器

    公开(公告)号：JP2013019897A

    公开(公告)日：2013-01-31

    申请号：JP2012152136

    申请日：2012-07-06

    Applicant: Fei Co ,  エフ イー アイ カンパニFei Company

    Inventor： CORNELIS SANDER KOOIJMAN ,  HERALD NICOLAAS ANNE VAN FEEN

    IPC: G01T1/24

    CPC classification number: G01T1/24 ,  G01T1/2928 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/24415 ,  H01J2237/2448 ,  H01L31/115

    Abstract: PROBLEM TO BE SOLVED: To provide a silicon drift diode detector for use in a charged particle apparatus available even for high count rate measurement.SOLUTION: A detector comprises: a SDD 200; an amplifier 206; and a feedback element in a form of, for example, a resistor 208 or a diode, switchably connected to the output of the amplifier 206. When the feedback element is selected via a switch 209, the detector 206 operates in a current measurement mode for determining electron current. When the feedback element is not selected, the detector 206 operates in a pulse height measurement mode for determining the energy of X-ray quanta.

    Abstract translation: 要解决的问题：提供即使对于高计数率测量也可用的带电粒子装置中使用的硅漂移二极管检测器。 解决方案：检测器包括：SDD 200; 放大器206; 以及例如可切换地连接到放大器206的输出的电阻器208或二极管形式的反馈元件。当通过开关209选择反馈元件时，检测器206以当前测量模式工作， 确定电子电流。 当没有选择反馈元件时，检测器206在用于确定X射线量子能量的脉冲高度测量模式中操作。 版权所有（C）2013，JPO＆INPIT

    Method and structure for controlling magnetic field distribution of e×b wien filter
    80.
    发明专利
    Method and structure for controlling magnetic field distribution of e×b wien filter 有权
    用于控制E×B滤波器的磁场分布的方法和结构

    公开(公告)号：JP2012243767A

    公开(公告)日：2012-12-10

    申请号：JP2012111180

    申请日：2012-05-15

    Applicant: Fei Co ,  エフ イー アイ カンパニFei Company

    Inventor： JAMES B MCGINN

    IPC: H01J49/48 ,  H01J37/317

    CPC classification number: H01J37/05 ,  H01J37/15 ,  H01J49/288 ,  H01J2237/057 ,  H01J2237/31749

    Abstract: PROBLEM TO BE SOLVED: To provide a method and structure of adjusting the magnetic field distribution at the incident side and exit side end caps of a mass filter in an E×B mass filter.SOLUTION: Magnetic resistance of a magnetic flux in a return path can be changed by providing a plurality of magnetic shims in a slot provided in the outer diameter of the incident side and exit side end caps, and further providing a plurality of magnetic plug shims in a circular magnetic flux dam surrounding the incident side and exit side apertures. When compared with the conventional adjustment method of an electromagnet, the advantages of adjusting the magnetic field fully mechanically include high reliability, simplification, low cost and saving of power consumption. In order to generate a magnetic field of mass separation, any one of a permanent magnet or an electromagnet can be used.

    Abstract translation: 要解决的问题：提供一种调节E×B质量过滤器中的质量过滤器的入射侧和出口侧端盖的磁场分布的方法和结构。 解决方案：通过在设置在入射侧的外径和出射侧端盖的狭槽中设置多个磁性垫片，可以改变返回路径中的磁通量的磁阻，并且还提供多个磁性 塞子垫片围绕入射侧和出射侧孔径的圆形磁通坝。 与传统的电磁调节方法相比，磁场完全机械调节的优点包括：高可靠性，简化，低成本，节省功耗。 为了产生质量分离的磁场，可以使用永磁体或电磁体中的任何一个。 版权所有（C）2013，JPO＆INPIT

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