-
公开(公告)号：KR1020050033737A
公开(公告)日：2005-04-13
申请号：KR1020030069585
申请日：2003-10-07
Applicant: 한국화학연구원
IPC: C07F15/04
CPC classification number: C07F15/045 , C23C16/18
Abstract: Volatile nickel aminoalkoxide complexes, a preparation method thereof and a process for formation of a nickel thin film by using the same compounds are provided, which compounds have high volatility and sufficient thermal stability, and are reduced to nickel by self-pyrolysis without a reducing agent. so that the compounds are useful as a MOCVD(metal organic chemical vapor deposition) precursor for formation of the nickel thin film. The volatile nickel aminoalkoxide complexes represented by formula (1) are provided, wherein m is an integer of 1 to 3; and R and R' are C1-C4 linear or branched alkyl. The volatile nickel aminoalkoxide complexes represented by formula (2) are provided, wherein m is an integer of 1 to 3; n is an integer of 2 to 4; and R and R' are C1-C4 linear or branched alkyl. The method for preparing the volatile nickel aminoalkoxide complexes of formula (1) or (2) comprises a halogenized hexamine nickel compound of Ni(NH3)6X2 with an alkali metal salt of aminoalkoxide of MOCR'2(CH2)mNR2 or MOCR'2(CH2)mO(CH2)nNR2, wherein X is Cl, Br or I; and M is Li or Na. The process for formation of the nickel thin film comprises growing the nickel thin film by using the volatile nickel aminoalkoxide complexes of formula (1) or (2) as a precursor at 250 to 350 deg. C.
Abstract translation: 提供挥发性镍氨基醇氧化物络合物，其制备方法和通过使用相同化合物形成镍薄膜的方法，该化合物具有高挥发性和足够的热稳定性，并且通过自热解而不用还原剂还原成镍 。 使得这些化合物可用作用于形成镍薄膜的MOCVD（金属有机化学气相沉积）前体。 提供由式（1）表示的挥发性镍氨基醇氧化物络合物，其中m为1至3的整数; 并且R和R'是C 1 -C 4直链或支链烷基。 提供由式（2）表示的挥发性镍氨基醇盐络合物，其中m为1至3的整数; n为2〜4的整数， 并且R和R'是C 1 -C 4直链或支链烷基。 制备式（1）或（2）的挥发性镍氨基醇氧化物配合物的方法包括Ni（NH 3）6 X 2的卤化六甲基镍化合物与MOCR'2（CH2）mNR2或MOCR'2（CH2）mNR2的氨基醇盐的碱金属盐 CH2）mO（CH2）nNR2，其中X是Cl，Br或I; M为Li或Na。 形成镍薄膜的方法包括使用式（1）或（2）的挥发性镍氨基醇氧化物配合物作为前体在250至350℃下生长镍薄膜。 C。
-
72.发明公开
公开(公告)号：KR1020050019400A
公开(公告)日：2005-03-03
申请号：KR1020030057134
申请日：2003-08-19
Applicant: 한국화학연구원
IPC: C23C16/00
CPC classification number: C23C16/409 , C07F3/003 , C07F7/28 , C23C16/4485 , C23C16/56 , Y10S261/65
Abstract: PURPOSE: To provide a method for preparing stoichiometric barium strontium titanate thin films of high quality by direct liquid injection metal organic chemical vapor deposition under the milder conditions using organic complexes of Ba, Sr and Ti that are capable of being vaporized together as raw materials for mixing since they have similar thermal stability, decomposition characteristics and solubility. CONSTITUTION: In a method for preparing barium strontium titanate(BaxSr1-xTiO3) thin films by direct liquid injection metal organic chemical vapor deposition, the method is characterized in that a mixture of Ba(th)2(tmeea), Sr(thd)2(tmeea) and Ti(thd)2(O¬i Pr)2 $ûthd=2,2,6,6-tetramethylheptanedionate, tmeea=tris£2-(2-methoxyethoxy)ethyl|amine, O¬i Pr=isoproxy$ý is used as raw materials of barium, strontium and titanium, wherein the method comprises the steps of: dissolving the raw materials of barium, strontium and titanium into an organic solvent; transferring the solution to an instantaneous vaporizer heated to a temperature of 200 to 250 deg.C so that the solution is vaporized; and injecting the vaporized solution into a deposition container having pressure of 0.5 to 2.0 torr so that the vaporized solution is deposited on a matrix heated to a temperature of 300 to 500 deg.C, wherein the method further comprises a step of heat treating the deposited matrix in a temperature range of 600 to 800 deg.C, and wherein the raw materials of barium, strontium and titanium are mixed in a ratio of 1 ¢¦ 2:1:5 ¢¦ 10.
Abstract translation: 目的：提供一种通过直接液体注入金属有机化学气相沉积在较温和的条件下制备化学计量的钛酸锶钛酸盐薄膜的方法，使用能够作为原料蒸发的Ba，Sr和Ti的有机络合物 因为它们具有相似的热稳定性，分解特性和溶解度。 构成：在通过直接液体注入金属有机化学气相沉积制备钛酸锶钡（BaxSr1-xTiO3）薄膜的方法中，该方法的特征在于Ba（th）2（tmeea），Sr（thd）2 （tmeea）和Ti（thd）2（OiI Pr）2 $ûth= 2,2,6,6-四甲基庚二酮，tmeea =三（2-甲氧基乙氧基）乙基|胺，O-Pr =异丙氧基 ý用作钡，锶和钛的原料，其中所述方法包括以下步骤：将钡，锶和钛的原料溶解在有机溶剂中; 将溶液转移到加热至200〜250℃的瞬时蒸发器，使溶液蒸发; 并将蒸发的溶液注入具有0.5至2.0托的压力的沉积容器中，使得蒸发的溶液沉积在加热至300至500℃的基质上，其中该方法还包括热沉处理沉积 基质在600〜800℃的温度范围内，其中钡，锶和钛的原料以1¢| 2：1：5¢| 10的比例混合。
-
73.发明公开
公开(公告)号：KR1020030002015A
公开(公告)日：2003-01-08
申请号：KR1020010038745
申请日：2001-06-30
Applicant: 한국화학연구원
IPC: C07F15/00
CPC classification number: C07F15/0046
Abstract: PURPOSE: Provided is a preparation method of a ruthenium complex with enhanced yield using a small amount of zinc catalyst, thereby mass-producing the ruthenium complex. CONSTITUTION: The preparation process characteristically comprises the steps of: reaction of ruthenium trichloride with 3-25 equivalents of 1,3-cyclohexadiene and 5-20 equivalents of zinc powder base on the chloride at room temperature for 10-15 hours; and extracting the reaction product with an organic solvent, then removing the organic acid therefrom.
Abstract translation: 目的：提供使用少量锌催化剂的钌络合物的制备方法，其具有提高的产率，从而大量生产钌络合物。 构成：制备方法特征在于包括以下步骤：在室温下将三氯化钌与3-25当量的1,3-环己二烯和5-20当量的锌粉底物在氯化物上反应10-15小时; 并用有机溶剂萃取反应产物，然后从其中除去有机酸。
-
-
公开(公告)号：KR102226791B1
公开(公告)日：2021-03-11
申请号：KR1020190013114
申请日：2019-01-31
Applicant: 한국화학연구원
IPC: H01L45/00
Abstract: 본발명은소거동작을제거한저항스위칭메모리를공개한다. 이장치는하부전극층, 가변저항막및 상부전극층의적층을포함하는저항스위칭메모리에있어서, 멀티비트동작구간동안상기상부전극층과상기가변저항막의인터페이스근처에서산소부족층이형성되어저항스위칭메모리동작중 소거동작이제거되는것을특징으로한다. 본발명에의할경우, 상부전극층이부분적으로산화되어, 저항스위칭메모리에서요구되는저항스위칭성능을수행하기위하여필요한양호한산소저장소및 적절한부하저항기능을할 수있게된다.
-
Patent Agency Ranking
-
-
-
公开(公告)号：KR101744923B1
公开(公告)日：2017-06-08
申请号：KR1020150081459
申请日：2015-06-09
Applicant: 한국화학연구원
Abstract: 본발명은개스킷을사용하지않고도고온및 고압의조건에서도기밀을유지할수 있는단결정성장용압력용기에대한것으로, 보다구체적으로는개구를가지며내열합금으로제조되는압력용기본체; 상기압력용기본체개구의내부에삽입되는내식성소재의라이너; 상기압력용기본체의상부에구성되는압력용기헤드; 상기압력용기헤드의중심부에구성되는유니온;을구비하며, 상기라이너와유니온간의기밀밀착에의하여압력용기의밀봉이유지되는단결정성장용압력용기에대한것이다. 또한, 본발명에따른압력반응용기는귀금속개스킷을사용하지않음에따른유지비용의절감과온도와압력의변화에도불구하고안정적으로반응기의압력을유지할수 있는장점이있다.
Abstract translation: 本发明的压力容器体具有，更具体地，涉及用于euroneun高温和晶体生长的压力容器能够保持在高压的条件下的气密性，而无需使用由耐热合金制成的垫片开口; 插入压力容器本体开口中的耐腐蚀材料的衬套; 压力容器头部，其形成在压力容器主体的上部; 压力套管在容器头部的中心配置;包括，涉及一种用于将被密封在压力容器由衬套和Union之间的紧密接触被保持在容器的单晶生长压力。 此外，根据本发明的反应压力容器的优点在于，可以在尽管存在维护成本的降低和温度和压力由于不使用贵金属垫圈改变和可靠地维持反应器的压力。
-
-
-
-
-
-
-
-
-
Search Results
325
records
(took 0.021 seconds)
