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    Method and device for measuring unoccupied states of solid
    94.
    发明授权
    Method and device for measuring unoccupied states of solid 有权

    公开(公告)号：US09664564B2

    公开(公告)日：2017-05-30

    申请号：US14381742

    申请日：2013-02-26

    Applicant: KYOTO UNIVERSITY

    Inventor： Hiroyuki Yoshida

    IPC: G01J3/30 ,  G01J3/443 ,  G01N23/225 ,  G01N21/66 ,  H01J37/06

    CPC classification number: G01J3/30 ,  G01J3/443 ,  G01N21/66 ,  G01N23/2251 ,  G01N2223/08 ,  H01J37/06

    Abstract: Intensity of near-ultraviolet light or visible light of 180 to 700 nm emitted from a solid sample, such as an organic semiconductor, irradiated with an electron beam is measured, while kinetic energy (accelerating energy) of the electron beam is changed in a range of 0 to 5 eV so as to obtain a spectrum. Peaks are detected from the spectrum, and the energy thereof is defined as unoccupied-states energy of the sample. The onset energy of the first peak represents electronic affinity energy (electron affinity) of the sample. Since the energy of the electron beam irradiated onto the sample is 5 eV or less, almost no damage is exerted on the sample even when the sample is an organic semiconductor.

    Apparatus of Plural Charged-Particle Beams
    95.
    发明申请
    Apparatus of Plural Charged-Particle Beams 审中-公开
    多次充电粒子束装置

    公开(公告)号：US20170025243A1

    公开(公告)日：2017-01-26

    申请号：US15216258

    申请日：2016-07-21

    Applicant: Hermes Microvision, Inc.

    Inventor： Weiming Ren ,  Xuedong Liu ,  Xuerang Hu ,  Zhongwei Chen

    IPC: H01J37/147 ,  H01J37/10 ,  H01J37/06

    CPC classification number: H01J37/1474 ,  H01J37/06 ,  H01J37/10 ,  H01J37/1477 ,  H01J37/1478 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/0453 ,  H01J2237/0492 ,  H01J2237/103 ,  H01J2237/1205 ,  H01J2237/1516 ,  H01J2237/1534 ,  H01J2237/1536

    Abstract: A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit forms plural and parallel images of one single electron source by deflecting plural beamlets of a parallel primary-electron beam therefrom, and one objective lens focuses the plural deflected beamlets onto a sample surface and forms plural probe spots thereon. A movable condenser lens is used to collimate the primary-electron beam and vary the currents of the plural probe spots, a pre-beamlet-forming means weakens the Coulomb effect of the primary-electron beam, and the source-conversion unit minimizes the sizes of the plural probe spots by minimizing and compensating the off-axis aberrations of the objective lens and condenser lens.

    Abstract translation: 提出了一种用于以高分辨率和高吞吐量观察样品的多光束装置。 在该装置中，源极转换单元通过偏转平行的一次电子束的多个子束形成一个单个电子源的多个并行图像，并且一个物镜将多个偏转的子束聚焦在样本表面上并形成多个探针点 上。 使用可移动聚光透镜来准直一次电子束并改变多个探针点的电流，前束形成装置削弱一次电子束的库仑效应，并且源转换单元使尺寸最小化 通过最小化和补偿物镜和聚光透镜的离轴像差来实现多个探测点。

    APPARATUS FOR IMPINGING BULK MATERIAL WITH ACCELERATED ELECTRONS
    96.
    发明申请
    APPARATUS FOR IMPINGING BULK MATERIAL WITH ACCELERATED ELECTRONS 有权
    用于加入电子材料的装置

    公开(公告)号：US20160374261A1

    公开(公告)日：2016-12-29

    申请号：US15101752

    申请日：2014-11-12

    Applicant: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.

    Inventor： Frank-Holm RÖGNER ,  André WEIDAUER ,  Gösta MATTAUSCH ,  Jörg KUBUSCH

    IPC: A01C1/08 ,  H01J37/06 ,  A61L2/08 ,  A61L2/26 ,  B01J19/08 ,  B01J8/12

    CPC classification number: A01C1/08 ,  A61L2/087 ,  A61L2/26 ,  A61L2202/11 ,  B01J8/12 ,  B01J19/085 ,  B01J2219/0815 ,  B01J2219/0833 ,  B01J2219/0879 ,  H01J37/00 ,  H01J37/06 ,  H01J37/3178 ,  H01J2237/06375 ,  H01J2237/15

    Abstract: An apparatus includes at least one electron beam generator for generating accelerated electrons with which bulk material particles are impingeable during free fall. The electron beam generator has an annular design in which the electrons are emitted and accelerated by an annular cathode. The electrons exit from an electron outlet window in the direction of the ring axis. The annular electron beam generator is arranged in such a way that the ring axis of the electron beam generator is oriented perpendicular to, or at an angle of up to 45° from the horizontal. The apparatus may further include a device for separating bulk material particles arranged above the annular electron beam generator, the bottom wall of said device having at least one opening out of which the bulk material particles fall and, from there, fall through the ring which is formed by the electron beam generator.

    Abstract translation: 一种装置包括至少一个用于产生加速电子的电子束发生器，在自由落体期间，散装材料颗粒可以被冲击。 电子束发生器具有环形设计，其中电子被环形阴极发射和加速。 电子从电子出口窗口沿环轴方向离开。 环形电子束发生器被布置成使得电子束发生器的环轴垂直于或与水平方向成45度的角度定向。 该装置还可以包括用于分离布置在环形电子束发生器上方的散装材料颗粒的装置，所述装置的底壁具有至少一个开口，其中大块材料颗粒从该开口突出，并且从那里落下， 由电子束发生器形成。

    APPARATUS FOR GHz RATE HIGH DUTY CYCLE PULSING AND MANIPULATION OF LOW AND MEDIUM ENERGY DC ELECTRON BEAMS
    98.
    发明申请
    APPARATUS FOR GHz RATE HIGH DUTY CYCLE PULSING AND MANIPULATION OF LOW AND MEDIUM ENERGY DC ELECTRON BEAMS 有权
    低频和中等能量直流电子束的GHz频率高周期循环脉冲和调节装置

    公开(公告)号：US20160293377A1

    公开(公告)日：2016-10-06

    申请号：US15091639

    申请日：2016-04-06

    Applicant: Euclid TechLabs, LLC

    Inventor： Sergey V. Baryshev ,  Chunguang Jing ,  Jiaqi Qiu ,  Sergey Antipov ,  Gwanghui Ha ,  June W. Lau ,  Yimei Zhu

    IPC: H01J37/06 ,  H01J37/147 ,  H01J31/00

    CPC classification number: H01J37/06 ,  H01J37/045 ,  H01J37/1472 ,  H01J2237/04 ,  H01J2237/0432 ,  H01J2237/061 ,  H01J2237/1508

    Abstract: An ElectroMagnetic-Mechanical Pulser can generate electron pulses at rates up to 50 GHz, energies up to 1 MeV, duty cycles up to 10%, and pulse widths between 100 fs and 10 ps. A modulating Transverse Deflecting Cavity (“TDC”) imposes a transverse modulation on a continuous electron beam, which is then chopped into pulses by an adjustable Chopping Collimating Aperture. Pulse dispersion due to the modulating TDC is minimized by a suppressing section comprising a plurality of additional TDC's and/or magnetic quadrupoles. In embodiments the suppression section includes a magnetic quadrupole and a TDC followed by four additional magnetic quadrupoles. The TDC's can be single-cell or triple-cell. A fundamental frequency of at least one TDC can be tuned by literally or virtually adjusting its volume. TDC's can be filled with vacuum, air, or a dielectric or ferroelectric material. Embodiments are easily switchable between passive, continuous mode and active pulsed mode.

    Abstract translation: 电磁机械脉冲发生器可以以高达50GHz的速率产生电子脉冲，能量高达1MeV，占空比高达10％，脉冲宽度在100fs和10ps之间。 调制横向偏转腔（“TDC”）对连续电子束施加横向调制，然后通过可调节的切割准直孔将其切成脉冲。 由调制TDC引起的脉冲色散由包括多个附加TDC和/或磁四极管的抑制部分最小化。 在实施例中，抑制部分包括磁性四极杆和TDC，随后是四个额外的四极杆。 TDC可以是单电池或三电池。 至少一个TDC的基本频率可以通过字面或实际调整其音量进行调节。 TDC可以填充真空，空气或电介质或铁电材料。 实施例可在无源连续模式和有源脉冲模式之间容易切换​​。

    Current regulation method of multiple beams
    99.
    发明授权
    Current regulation method of multiple beams 有权
    多梁电流调节方法

    公开(公告)号：US09455123B2

    公开(公告)日：2016-09-27

    申请号：US14199110

    申请日：2014-03-06

    Applicant: NuFlare Technology, Inc.

    Inventor： Kenichi Saito

    IPC: H01J3/14 ,  H01J37/317 ,  H01J37/06 ,  H01J37/304

    CPC classification number: H01J37/3177 ,  H01J37/06 ,  H01J37/304 ,  H01J2237/06308 ,  H01J2237/0653 ,  H01J2237/24535 ,  H01J2237/24542 ,  H01J2237/30477

    Abstract: A current regulation method of multiple beams includes acquiring a current density distribution; selecting at least one beam whose current density is equal to or more than a threshold; measuring a current value of the at least one beam respectively by varying a voltage applied to the Wehnelt electrode and acquiring a correlation between the voltage and the current value; moving a stage to a position where the at least one beam is allowed to enter a current detector each time writing of a stripe region is completed; measuring, after moving the stage, a current value of the at least one beam while beams of the multiple beams whose current density is less than the threshold are blocked; operating a target voltage value applied to the Wehnelt electrode to cause the current value measured to be a target current value; and applying the target voltage value to the Wehnelt electrode.

    Abstract translation: 多光束的电流调节方法包括获取电流密度分布; 选择电流密度等于或大于阈值的至少一个光束; 通过改变施加到Wehnelt电极的电压并获得电压和电流值之间的相关性，分别测量至少一个光束的电流值; 每次完成条纹区域的写入时，将舞台移动到允许至少一个光束进入电流检测器的位置; 在移动所述台后，测量所述至少一个光束的电流值，同时阻止所述多个光束的电流密度小于所述阈值的光束; 操作施加到所述Wehnelt电极的目标电压值，以将所测量的电流值作为目标电流值; 并将目标电压值施加到Wehnelt电极。

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