公开(公告)号：US09945790B2

公开(公告)日：2018-04-17

申请号：US14819179

申请日：2015-08-05

Applicant: Viavi Solutions Inc.

Inventor： Benjamin F. Catching ,  Marc K. Von Gunten ,  Curtis R. Hruska ,  Paula Smith ,  Paul G. Coombs

IPC: G01N21/85 ,  G01J3/02 ,  G01J3/12 ,  G01N21/27

CPC classification number: G01N21/85 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/12 ,  G01J2003/123 ,  G01J2003/1234 ,  G01N21/27 ,  G01N21/8507 ,  G01N2201/061 ,  G01N2201/062 ,  G01N2201/068

Abstract: Increasing the precision of process monitoring may be improved if the sensors take the form of travelling probes riding along with the flowing materials in the manufacturing process rather than sample only when the process moves passed the sensors fixed location. The probe includes an outer housing hermetically sealed from the flowing materials, and a light source for transmitting light through a window in the housing onto the flowing materials. A spatially variable optical filter (SVF) captures light returning from the flowing materials, and separates the captured light into a spectrum of constituent wavelength signals for transmission to a detector array, which provides a power reading for each constituent wavelength signal.

公开(公告)号：US20180073927A1

公开(公告)日：2018-03-15

申请号：US15558165

申请日：2015-03-13

Applicant: Shimadzu Corporation

Inventor： Tadafumi KAMIKAKE

IPC: G01J3/453 ,  G01N21/3563

CPC classification number: G01J3/4535 ,  G01J3/0202 ,  G01J3/027 ,  G01J3/0275 ,  G01J3/0289 ,  G01J3/06 ,  G01J2003/064 ,  G01N21/27

Abstract: A Fourier transform type spectrophotometer capable of stably controlling a speed of a moving mirror comprises a movable unit to which a moving mirror is fixed, outside-force-applying means configured to apply external force larger than movement resistance of the movable unit to the movable unit, a driving source configured to apply positive or negative driving force along the moving direction of the movable unit to the movable unit, a speed measurement unit configured to measure the speed of the movable unit, and a driving force control unit configured to control the driving force of the driving source so that the movable unit is moved in a predetermined manner based on the, wherein a rate of fluctuation of the driving force is suppressed by operating in a state in which the driving force of the driving source is high due to the external force to thereby stabilize the control.

公开(公告)号：US20180031468A1

公开(公告)日：2018-02-01

申请号：US15727291

申请日：2017-10-06

Applicant: Verifood, Ltd.

Inventor： Ori Aphek

IPC: G01N21/25 ,  G01J3/28 ,  G01J3/26 ,  G01J3/36 ,  G01J3/02

CPC classification number: G01N21/255 ,  G01J3/0272 ,  G01J3/0289 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/36 ,  G01N2201/0221 ,  H01L27/14603

Abstract: A compact spectrometer system comprising an improved detector is provided herein. The spectrometer system herein disclosed can comprises a filter, a Fourier transform optical element, and a detector. The detector can comprise a custom detector having a shape that corresponds to the pattern of light incident on the detector. The custom detector may comprise a plurality of separate detection areas, each area configured to detect a portion of the light pattern incident on the detector. The custom detector may comprise a material capable of detecting wavelengths in the short-wavelength infrared (SWIR) range. The custom detector may be configured to require a relatively low number of electrical connections such that it may be implemented using standard, low-cost electronic packaging techniques. An improved, custom detector as described herein can provide the functionality of a two-dimensional pixel array detector while being relatively simple and inexpensive to manufacture.

公开(公告)号：US20170356799A1

公开(公告)日：2017-12-14

申请号：US15620323

申请日：2017-06-12

Applicant: PARROT DRONES

Inventor： Antoine BEYELER ,  Eng Hong SRON

IPC: G01J3/02 ,  B64C39/02 ,  B64D47/08

CPC classification number: G01J3/0229 ,  B64C39/024 ,  B64C2201/021 ,  B64C2201/123 ,  B64C2201/127 ,  B64D47/08 ,  G01J1/0411 ,  G01J1/0474 ,  G01J1/0488 ,  G01J1/06 ,  G01J1/4204 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/36 ,  G01J2001/4266

Abstract: The imaging assembly includes: a multi-band sensor (5), comprising a plurality of light sensors (7) each for measuring a light intensity returned by a target (8) in a predetermined frequency band; a sunlight detector (9), comprising a plurality of control sensors (11) each for measuring an ambient light intensity in one of the predetermined bands of frequencies of the multi-band sensor (5) each associated with a band-pass filtre; an electronic module (13) configured so as to calculate at least one characteristic variable value of the light intensity returned by the target (8) in each predetermined frequency band; the sunlight detector (9) comprising a box casing (21), the control sensors (11) being attached to the box casing (21), the band-pass filtres (17) being attached to the box casing (21) each one so as to be facing the photosensitive surface of the associated control sensor.

公开(公告)号：US20170343413A1

公开(公告)日：2017-11-30

申请号：US15667686

申请日：2017-08-03

Applicant: Ocean Optics, Inc.

Inventor： Paul W. Ave

IPC: G01J3/04 ,  G01J3/02

CPC classification number: G01J3/04 ,  G01J3/0229 ,  G01J3/0289 ,  G01J3/0297

Abstract: A device for improving the removal of stray light interference in a spectrometer using an aperture slit with a predefined grid pattern incorporated into it and a mounting assembly for proper alignment to the spectrometer's 2D detector to create periodic shadowing allowing the identification of the desired signal and removal of stray light is disclosed.

公开(公告)号：US20170336317A1

公开(公告)日：2017-11-23

申请号：US15600841

申请日：2017-05-22

Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Inventor： Wladimir TSCHEKALINSKIJ ,  Stephan JUNGER ,  Nanko VERWAAL ,  Norbert WEBER

IPC: G01N21/25 ,  G01N21/27

CPC classification number: G01N21/255 ,  G01J3/0289 ,  G01J3/2803 ,  G01J3/513 ,  G01N21/251 ,  G01N21/27

Abstract: The present invention relates to a colour sensor having at least one photosensitive element, in front of which a layer stack of dielectric layers and structured metal layers is constructed, and at least one colour filter, through which optical radiation incident on a light input side of the colour sensor is filtered before it reaches a photosensitive surface of the photosensitive element. In the suggested colour sensor, an array of angle-selective passageways is provided for the optical radiation between the light input side and the photosensitive surface, and each passageway only allows parts of the optical radiation incident on the light input side of the colour sensor within a limited angle of incidence range relative to an axis extending perpendicularly to the colour filter to pass through to the photosensitive surface. When the colour sensor is manufactured with semiconductor technology, it enables the angle-selective structures to be integrated in the CMOS layer stack. In this way, ultra-flat colour sensors can be made.

公开(公告)号：US09797774B2

公开(公告)日：2017-10-24

申请号：US14580848

申请日：2014-12-23

Applicant: Seiko Epson Corporation

Inventor： Akira Sano ,  Takashi Nagate ,  Kazunori Sakurai ,  Nozomu Hirokubo

IPC: G01J3/28 ,  G01J3/02 ,  G01J3/45 ,  G01J3/26 ,  G01J3/32

CPC classification number: G01J3/2823 ,  G01J3/0202 ,  G01J3/0235 ,  G01J3/027 ,  G01J3/0272 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/26 ,  G01J3/28 ,  G01J3/32

Abstract: A spectrometry system includes an imaging apparatus that includes an imaging element which captures an image, and a spectroscopic module that includes a wavelength variable interference filter and an attachment unit which holds the wavelength variable interference filter, is provided to be attachable to and detachable from the imaging apparatus, and can dispose the wavelength variable interference filter on an optical path of incident light to the imaging element during attachment to the imaging apparatus.

公开(公告)号：US20170272666A1

公开(公告)日：2017-09-21

申请号：US15476832

申请日：2017-03-31

Applicant: Hypermed Imaging, Inc.

Inventor： Mark Anthony Darty ,  Michael Tilleman ,  Peter Meenen ,  Dmitry Yudovsky

IPC: H04N5/33 ,  G01J3/28 ,  H04N5/225 ,  G01J3/02

CPC classification number: H04N5/332 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0272 ,  G01J3/0278 ,  G01J3/0283 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/10 ,  G01J3/108 ,  G01J3/2823 ,  G01J3/36 ,  G01J2003/106 ,  G01J2003/1213 ,  G01J2003/2826 ,  G06T2207/10016 ,  H04N5/2254 ,  H04N5/2256 ,  H04N5/2354

Abstract: Provided are methods and systems for concurrent imaging at multiple wavelengths. In one aspect, a hyperspectral/multispectral imaging device includes a lens configured to receive light backscattered by an object, a plurality of photo-sensors, a plurality of bandpass filters covering respective photo-sensors, where each bandpass filter is configured to allow a different respective spectral band to pass through the filter, and a plurality of beam splitters in optical communication with the lens and the photo-sensors, where each beam splitter splits the light received by the lens into a plurality of optical paths, each path configured to direct light to a corresponding photo-sensor through the bandpass filter corresponding to the respective photo-sensor.

公开(公告)号：US20170265749A1

公开(公告)日：2017-09-21

申请号：US15446196

申请日：2017-03-01

Applicant: CANON KABUSHIKI KAISHA

Inventor： Nobuhito Suehira

IPC: A61B5/00 ,  G01J3/02 ,  G01J3/44 ,  A61B5/02 ,  G01N29/24 ,  G01N29/46 ,  G01N29/06 ,  G01J3/28 ,  G01J3/42

CPC classification number: A61B5/0095 ,  A61B5/02007 ,  A61B5/046 ,  A61B5/4312 ,  A61B5/489 ,  A61B2560/0228 ,  A61B2560/0233 ,  A61B2562/046 ,  A61B2576/02 ,  G01J3/0289 ,  G01J3/2889 ,  G01J3/42 ,  G01J3/4412 ,  G01J2003/283 ,  G01N21/1702 ,  G01N29/0654 ,  G01N29/2418 ,  G01N29/46 ,  G01N2021/1706 ,  G01N2291/02475

Abstract: A processing apparatus, comprises: a first acquirer configured to acquire a first specific information distribution of an object based on acoustic waves propagating from the object onto which light is irradiated; a second acquirer configured to acquire a characteristic value of the first specific information distribution of the object; a third acquirer configured to acquire information indicating a correspondence between an optical coefficient and the characteristic value of the first specific information distribution; and a fourth acquirer configured to acquire the optical coefficient of the object using the characteristic value of the first specific information distribution of the object and the information indicating the correspondence.

公开(公告)号：US20170254755A1

公开(公告)日：2017-09-07

申请号：US15061769

申请日：2016-03-04

Applicant: Applied Materials, Inc.

Inventor： Tae Seung CHO ,  Junghoon KIM ,  Soonwook JUNG ,  Soonam PARK ,  Dmitry LUBOMIRSKY

IPC: G01N21/68 ,  H01J37/32 ,  H01J37/10

CPC classification number: G01N21/68 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/0237 ,  G01J3/0289 ,  G01J3/06 ,  G01J3/443 ,  G01N21/73 ,  G01N2201/0638 ,  G01N2201/068 ,  H01J37/10 ,  H01J37/32458 ,  H01J37/32935 ,  H01J37/32963 ,  H01J37/32972 ,  H01J2237/103 ,  H01J2237/3341

Abstract: Implementations of the present disclosure relate to a plasma chamber having an optical device for measuring emission intensity of plasma species. In one implementation, the plasma chamber includes a chamber body defining a substrate processing region therein, the chamber body having a sidewall, a viewing window disposed in the sidewall, and a plasma monitoring device coupled to the viewing window. The plasma monitoring device includes an objective lens and an aperture member having a pinhole, wherein the aperture member is movable relative to the objective lens by an actuator to adjust the focal point in the plasma using principles of optics, allowing only the light rays from the focal point in the plasma to reach the pinhole. The plasma monitoring device therefore enables an existing OES (coupled to the plasma monitoring device through an optical fiber) to monitor emission intensity of the species at any specific locations of the plasma.