公开(公告)号：US20160349228A1

公开(公告)日：2016-12-01

申请号：US15166092

申请日：2016-05-26

Applicant: REBELLION PHOTONICS, INC.

Inventor： Robert Timothy Kester ,  Nathan Adrian Hagen

IPC: G01N33/00 ,  H04N5/225 ,  G01N21/3504 ,  H04N5/33

CPC classification number: G01N33/0044 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/32 ,  G01J3/36 ,  G01J3/42 ,  G01J5/0014 ,  G01J5/0806 ,  G01J5/0809 ,  G01J5/0896 ,  G01J5/522 ,  G01J5/602 ,  G01J2003/1247 ,  G01J2003/2826 ,  G01J2003/2869 ,  G01J2005/0077 ,  G01J2005/604 ,  G01N21/3504 ,  G01N2021/3531 ,  H04N5/2254 ,  H04N5/33 ,  H04N17/002

Abstract: Various embodiments disclosed herein describe an infrared (IR) imaging system for detecting a gas. The imaging system can include an optical filter that selectively passes light having a wavelength in a range of 1585 nm to 1595 nm while attenuating light at wavelengths above 1600 nm and below 1580 nm. The system can include an optical detector array sensitive to light having a wavelength of 1590 that is positioned rear of the optical filter.

Abstract translation: 本文公开的各种实施例描述了用于检测气体的红外（IR）成像系统。 成像系统可以包括滤光器，其选择性地透过波长在1585nm至1595nm范围内的光，同时衰减波长高于1600nm和低于1580nm的光。 该系统可以包括对位于光学滤波器后面的波长为1590的光敏感的光学检测器阵列。

公开(公告)号：US20160305881A1

公开(公告)日：2016-10-20

申请号：US15065834

申请日：2016-03-09

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Steven J. BOEGE ,  Mark F. OLDHAM ,  Eugene F. YOUNG

IPC: G01N21/64

CPC classification number: G01N21/64 ,  F21K9/00 ,  F21K9/64 ,  F21V29/54 ,  F21V29/677 ,  F21V29/74 ,  F21Y2115/10 ,  G01J3/0286 ,  G01J3/10 ,  G01N21/645 ,  G01N21/6452 ,  G01N2021/6439 ,  G01N2201/06113 ,  G01N2201/062 ,  G01N2201/0638 ,  G01N2201/1211 ,  G05D23/1919 ,  G05D23/20

Abstract: An optical instrument is provided for simultaneously illuminating two or more spaced-apart reaction regions with an excitation beam generated by a light source. A collimating lens can be disposed along a beam path between the light source and the reaction regions to form bundles of collimated excitation beams, wherein each bundle corresponds to a respective reaction region. Methods of analysis using the optical instrument are also provided.

公开(公告)号：US20160245696A1

公开(公告)日：2016-08-25

申请号：US15031780

申请日：2014-10-31

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Katsumi SHIBAYAMA ,  Takashi KASAHARA ,  Masaki HIROSE ,  Toshimitsu KAWAI

IPC: G01J3/26 ,  G01J3/45

CPC classification number: G01J3/26 ,  G01J3/0286 ,  G01J3/45 ,  G01J5/04 ,  G01J5/20 ,  G02B26/001

Abstract: A spectral sensor 1A includes a Fabry-Perot interference filter 10 which has a light transmission region 11; a light detector 3 which detects light having transmitted the light transmission region 11; spacers 4A and 4B which support the Fabry-Perot interference filter 10 in a surrounding region of the light transmission region 11; and a die bond resin 5 which adheres the Fabry-Perot interference filter 10 and the spacers 4A and 4B to each other. The die bond resin 5 has one opening A2 communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region 11.

Abstract translation: 光谱传感器1A包括具有透光区域11的法布里 - 珀罗干涉滤光器10; 光检测器3，其检测透射光透射区域11的光; 在光透射区域11的周围区域中支撑法布里 - 珀罗干涉滤光器10的间隔件4A和4B; 以及将法布里 - 珀罗干涉滤光器10和隔离物4A和4B彼此粘合的芯片接合树脂5。 当在光透射区域11中从透光方向观察时，裸片接合树脂5具有与周围区域的内侧连通的一个开口A2和周围区域的外侧。

公开(公告)号：US20160238528A1

公开(公告)日：2016-08-18

申请号：US14623488

申请日：2015-02-16

Applicant: BAH HOLDINGS LLC

Inventor： Michael Tkachuk ,  SERGEY SUCHALKIN

IPC: G01N21/61 ,  H01L33/06 ,  H01L33/30 ,  H01L25/16

CPC classification number: G01N21/61 ,  G01J3/0286 ,  G01J3/10 ,  G01J3/108 ,  G01J3/42 ,  G01N21/255 ,  G01N21/3504 ,  G01N2201/062 ,  G01N2201/0625 ,  H01L25/167 ,  H01L31/03046 ,  H01L31/101 ,  H01L31/105 ,  H01L31/167 ,  H01L33/06 ,  H01L33/30 ,  Y02E10/544 ,  Y02P70/521

Abstract: Optopair for use in sensors and analyzers of gases such as methane, and a fabrication method therefor is disclosed. It comprises: a) an LED, either cascaded or not, having at least one radiation emitting area, whose spectral maximum is de-tuned from the maximum absorption spectrum line of the gas absorption spectral band; and b) a Photodetector, whose responsivity spectral maximum can be either de-tuned from, or alternatively completely correspond to the maximum absorption spectrum line of the absorption spectral band of the gas. Modeling the LED emission and Photodetector responsivity spectra and minimizing the temperature sensitivity of the optopair based on the technical requirements of the optopair signal registration circuitry, once the spectral characteristics of the LED and Photodetector materials and the temperature dependencies of said spectral characteristics are determined, provides the LED de-tuned emission and Photodetector responsivity target peaks respectively.

公开(公告)号：US09417126B2

公开(公告)日：2016-08-16

申请号：US14317193

申请日：2014-06-27

Applicant: International Business Machines Corporation

Inventor： Nestor A. Bojarczuk ,  Talia S. Gershon ,  Teodor K. Todorov ,  Theodore G. van Kessel

IPC: G01J3/46 ,  G01J3/02 ,  G01N21/03 ,  G01N21/3563

CPC classification number: G01N21/0332 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0286 ,  G01J3/46 ,  G01J3/524 ,  G01N21/31 ,  G01N21/3563 ,  G01N2021/3568

Abstract: In one aspect, a spectrometer insert is provided. The spectrometer insert includes: an enclosed housing; a first transparent window on a first side of the enclosed housing; a second transparent window on a second side of the enclosed housing, wherein the first side and the second side are opposing sides of the enclosed housing; and a sample mounting and heating assembly positioned within an interior cavity of the enclosed housing in between, and in line of sight of, the first transparent window and the second transparent window. A method for using the spectrometer insert to locally heat a sample so as to measure temperature-dependent optical properties of the sample is also provided.

Abstract translation: 在一个方面，提供了光谱仪插件。 光谱仪插件包括：封闭的外壳; 在封闭壳体的第一侧上的第一透明窗口; 在所述封闭壳体的第二侧上的第二透明窗口，其中所述第一侧面和所述第二侧面是所述封闭壳体的相对侧面; 以及样品安装和加热组件，其位于所述封闭壳体的内部空腔内，位于所述第一透明窗口和所述第二透明窗口之间且在所述第一透明窗口和所述第二透明窗口之间。 还提供了使用光谱仪插入件来局部加热样品以测量样品的温度依赖性光学性质的方法。

公开(公告)号：US09316532B2

公开(公告)日：2016-04-19

申请号：US14327932

申请日：2014-07-10

Applicant: Mitsubishi Electric Corporation

Inventor： Keita Mochizuki

IPC: G01B9/02 ,  G01J1/42 ,  G01J3/26 ,  G01J3/02 ,  G01J1/04 ,  H01S5/00 ,  H01S5/0687 ,  H01S5/40

CPC classification number: G01J1/4257 ,  G01J1/0411 ,  G01J1/0414 ,  G01J1/0488 ,  G01J3/0286 ,  G01J3/26 ,  H01S5/0014 ,  H01S5/0687 ,  H01S5/4031

Abstract: A wavelength monitor monitors wavelengths of laser beams emitted from a laser source and transmitted through a collimating lens. The wavelength monitor comprises an etalon that serves as an optical filter, and an optical detector. The etalon has a transmittance that is periodic with respect to a frequency, and is disposed such that a pair of collimated beams, emitted through a pair of emitting ports of the laser source and then transmitted through the collimating lens, is incident on the optical filter at symmetrically positive and negative angles. The optical detector receives the pair of collimated beams transmitted through the etalon, and detects the intensities of the pair of collimated beams.

Abstract translation: 波长监视器监视从激光源发射并透射通过准直透镜的激光束的波长。 波长监视器包括用作滤光器的标准具和光学检测器。 标准具具有相对于频率周期性的透射率，并且被布置为使得通过激光源的一对发射端口发射然后透射通过准直透镜的一对准直光束入射到滤光器 对称正角和负角。 光检测器接收通过标准具传输的一对准直光束，并检测一对准直光束的强度。

公开(公告)号：US09239265B2

公开(公告)日：2016-01-19

申请号：US12830810

申请日：2010-07-06

Applicant: Charles A. Taylor, II ,  Darryl Barlett ,  Douglas Perry ,  Roy Clarke ,  Jason Williams

Inventor： Charles A. Taylor, II ,  Darryl Barlett ,  Douglas Perry ,  Roy Clarke ,  Jason Williams

IPC: G01J3/00 ,  G01J3/40 ,  G01J3/42 ,  G01J5/00 ,  G01J5/58 ,  C23C16/46 ,  C23C16/52 ,  G01J3/10 ,  G01J5/60 ,  G01J3/02 ,  G01J5/08

CPC classification number: G01J5/0003 ,  C23C16/46 ,  C23C16/52 ,  G01J3/024 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/10 ,  G01J5/0007 ,  G01J5/0821 ,  G01J5/60

Abstract: The invention is an optical method and apparatus for measuring the temperature of semiconductor substrates in real-time, during thin film growth and wafer processing. Utilizing the nearly linear dependence of the interband optical absorption edge on temperature, the present method and apparatus result in highly accurate measurement of the absorption edge in diffuse reflectance and transmission geometry, in real time, with sufficient accuracy and sensitivity to enable closed loop temperature control of wafers during film growth and processing. The apparatus operates across a wide range of temperatures covering all of the required range for common semiconductor substrates.

Abstract translation: 本发明是用于在薄膜生长和晶片处理期间实时测量半导体衬底的温度的光学方法和装置。 利用带间光吸收边缘对温度的近似线性依赖性，本方法和装置实时地实现了对扩散反射和透射几何形状的吸收边的高度精确测量，具有足够的精度和灵敏度以实现闭环温度控制 的薄膜生长和加工中的晶片。 该装置在涵盖普通半导体衬底的所有范围的宽范围的温度范围内工作。

公开(公告)号：US20160011045A1

公开(公告)日：2016-01-14

申请号：US14772970

申请日：2013-12-24

Applicant: EVERFINE PHOTO-E-INFO CO., LTD.

Inventor： Jiangen PAN

IPC: G01J1/44 ,  G01J1/02

CPC classification number: G01J1/44 ,  G01J1/0233 ,  G01J1/42 ,  G01J3/0272 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/28 ,  G01J3/36 ,  G01J2001/444

Abstract: The present invention discloses a handheld optical radiation meter and a correction method thereof. The handheld optical radiation meter has a photometric measurement module, a spectral measurement module and a screen. The spectral quantities of the spectral measurement module are employed to correct the spectral mismatch error of the photometric measurement module. With simple configuration, the present invention can realize high accuracy photometry and chromaticity measurement within a wide-span dynamic range, and has the characteristics of complete test functions, high measurement accuracy, convenient operation, low cost, etc.

Abstract translation: 本发明公开了一种手持式光学辐射计及其校正方法。 手持式光学辐射计具有光度测量模块，光谱测量模块和屏幕。 使用光谱测量模块的光谱量来校正光度测量模块的光谱失配误差。 本发明结构简单，可在宽范围动态范围内实现高精度测光和色度测量，具有测试功能齐全，测量精度高，操作方便，成本低等特点。

公开(公告)号：US20150377699A1

公开(公告)日：2015-12-31

申请号：US14314451

申请日：2014-06-25

Applicant: Ketra, Inc.

Inventor： Horace C. Ho ,  Jason E. Lewis ,  David J. Knapp

IPC: G01J1/44

CPC classification number: H05B33/0851 ,  G01J1/0252 ,  G01J1/32 ,  G01J1/42 ,  G01J3/0286 ,  G01J3/465 ,  G01J3/505 ,  G01J2001/4252 ,  G01J2001/444 ,  G01R31/44 ,  H05B33/0866 ,  H05B33/0869 ,  H05B37/02 ,  H05B37/0227

Abstract: An illumination device and method is provided herein for calibrating individual LEDs in the illumination device, so as to obtain a desired luminous flux and a desired chromaticity of the device over changes in drive current, temperature, and over time as the LEDs age. The calibration method may include subjecting the illumination device to a first ambient temperature, successively applying at least three different drive currents to a first LED to produce illumination at three or more different levels of brightness, obtaining a plurality of optical measurements from the illumination produced by the first LED at each of the at least three different drive currents, obtaining a plurality of electrical measurements from the photodetector and storing results of the obtaining steps within the illumination device to calibrate the first LED at the first ambient temperature. The plurality of optical measurements may generally include luminous flux and chromaticity, the plurality of electrical measurements may generally include induced photocurrents and forward voltages, and the calibration method steps may be repeated for each LED included within the illumination device and upon subjecting the illumination device to a second ambient temperature.

Abstract translation: 本文提供一种用于校准照明装置中的各个LED的照明装置和方法，以便随着LED寿命而获得期望的光通量和装置的驱动电流，温度和随时间的变化的期望色度。 校准方法可以包括使照明装置经受第一环境温度，连续地向第一LED施加至少三个不同的驱动电流以产生三个或更多个不同亮度级别的照明，从由以下的照明产生的照明获得多个光学测量值 在所述至少三个不同驱动电流中的每一个处的所述第一LED，从所述光电检测器获得多个电测量值，并且存储所述照明装置内的所述获得步骤的结果，以在所述第一环境温度下校准所述第一LED。 多个光学测量通常可以包括光通量和色度，多个电测量通常可以包括感应光电流和正向电压，并且可以针对包括在照明装置内的每个LED重复校准方法步骤，并且对照明装置 第二个环境温度。

公开(公告)号：US20150211924A1

公开(公告)日：2015-07-30

申请号：US14677300

申请日：2015-04-02

Applicant: INDUSTRY-ACADEMIC COOPERATION FOUNDATION YONSEI UNIVERSITY

Inventor： Jae Won HAHN

IPC: G01J3/02 ,  H01J49/06 ,  H01J49/04 ,  G01J3/443

CPC classification number: G01J3/0229 ,  G01J3/0286 ,  G01J3/443 ,  H01J49/0422 ,  H01J49/068 ,  H05K9/009

Abstract: A device for a device for preventing the intensity reduction of an optical signal, an optical emission spectrometer, an optical instrument, and a mass spectrometer including the same are provided. The device for preventing the intensity reduction includes a shielding filter which has a mesh structure capable of blocking RF electromagnetic waves radiated from a plasma field for a wafer processing, is installed in the front of an optical window of an optical emission spectrometer for measuring the plasma field from an emission spectrum image of the plasma field, and collects charging particles passing through the mesh.

Abstract translation: 提供了用于防止光信号强度降低的装置的装置，光发射光谱仪，光学仪器和包括其的质谱仪。 用于防止强度降低的装置包括具有能够阻挡从用于晶片处理的等离子体场辐射的RF电磁波的网格结构的屏蔽滤波器，安装在用于测量等离子体的光发射光谱仪的光学窗口的前面 从等离子体场的发射光谱图像中收集通过网格的带电粒子。