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公开(公告)号:US20170350763A1
公开(公告)日:2017-12-07
申请号:US15524119
申请日:2015-11-05
Applicant: Carl Zeiss Microscopy GmbH
Inventor: David SHAFER , Tiemo ANHUT , Matthias WALD
CPC classification number: G01J3/4406 , G01J3/0208 , G01J3/021 , G01J3/14 , G01J3/18 , G01J3/36 , G01N21/6458 , G01N2021/6421 , G01N2201/068 , G02B21/0064 , G02B21/0076 , G02B21/16 , G02B21/361 , G02B27/0025 , G02B27/1013 , G02B27/126
Abstract: A detection device (113) for a microscope comprises a dispersive element (211) in the beam path (290) of light and a selection element (212). The selection element (212) separates a beam path (291) of a spectral portion of the light from the beam path (290) of the light. The detector device (113) furthermore comprises a focusing optical unit (213) configured to focus the beam path (291) of the spectral portion of the light onto a sensor (214). By way of example, the microscope may be a confocal microscope.
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公开(公告)号:US09829380B2
公开(公告)日:2017-11-28
申请号:US14427481
申请日:2014-06-20
Inventor: Tatsuo Itoh , Koichi Kusukame , Aki Yoneda
IPC: G01J4/00 , G01J3/46 , G01J3/427 , G01N21/359 , G01J3/02 , G01J3/433 , G01J3/10 , G01J3/28 , G01J3/32 , G01J3/42 , G01J3/06 , G01J1/42
CPC classification number: G01J3/427 , G01J3/0208 , G01J3/021 , G01J3/0224 , G01J3/0237 , G01J3/0243 , G01J3/0278 , G01J3/0289 , G01J3/10 , G01J3/2803 , G01J3/32 , G01J3/42 , G01J3/433 , G01J2001/4242 , G01J2003/064 , G01J2003/102 , G01J2003/104 , G01J2003/106 , G01N21/359
Abstract: A light radiating portion radiates light with wavelength λ1 having predetermined absorptivity for an object and light with wavelength λ2 having smaller absorptivity for the object than the wavelength λ1, to a target, so as to scan in 2-dimensional directions. A light receiving portion receives scattered lights reflected by the target based on light with wavelength λ1 and light with wavelength λ2. A measuring portion generates information used for detection of the object at the target, based on difference between the two scattered lights with wavelength λ1 and wavelength λ2 received by the light receiving portion. An output portion outputs whether or not the object is present at the target, by 2-dimensional area information, based on scanning by the light radiating portion and information generated by the measuring portion.
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公开(公告)号:US09804029B2
公开(公告)日:2017-10-31
申请号:US15120792
申请日:2015-01-16
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor: Tsuyoshi Sonehara , Hiromi Kusaka , Akira Fujii , Shuhei Yamamoto , Takeshi Ooura , Michiru Fujioka
IPC: G01J3/30 , G01J3/42 , G01J3/24 , G01J3/44 , G02B7/28 , G02B7/32 , G01N21/65 , G02B21/36 , G01N21/64 , G01J3/02 , G01J3/10 , G02B21/00 , G02B21/16 , G02B21/24 , G02B27/14
CPC classification number: G01J3/44 , G01J3/0208 , G01J3/021 , G01J3/0229 , G01J3/0248 , G01J3/10 , G01J3/4406 , G01N21/6458 , G01N21/65 , G02B7/28 , G02B7/32 , G02B21/0004 , G02B21/16 , G02B21/244 , G02B21/36 , G02B21/365 , G02B27/141
Abstract: With a microspectroscopy device provided with an objective lens with a high numerical aperture, a defocus arises from thermal drift, etc., necessitating auto-focusing. Conventional auto-focus based on through-focus image acquisition takes time, and thus, it cannot be applied to continuous measurement over a long time wherein high-speed sampling is carried out. The present invention addresses this problem by having a defocus-sensing beam that has either defocus or astigmatism fall incident on the objective lens. Since how the image of the spot of the beam for defocus sensing blurs differs depending on the orientation of the defocus, real-time detection of the amount and orientation of defocus becomes possible, and high-speed realtime auto-focus becomes possible.
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公开(公告)号:US20170307791A1
公开(公告)日:2017-10-26
申请号:US15592201
申请日:2017-05-11
Applicant: OTO PHOTONICS INC.
Inventor: Chien-Hsiang Hung
CPC classification number: G02B5/0273 , G01J1/0295 , G01J1/0414 , G01J1/0422 , G01J1/0425 , G01J1/044 , G01J1/0474 , G01J1/42 , G01J3/0205 , G01J3/021 , G01J3/0216 , G01J3/0218 , G01J3/0232 , G01J3/0297 , G01J3/18 , G02B19/0076
Abstract: An optical head for receiving an incident light is provided. The optical head comprises a reflective diffuser and a reflector disposed to face the reflective diffuser. The reflective diffuser is disposed in an optical path of the incident light and shields the reflector from the incident light. The reflective diffuser converts the incident light to scattered light having a Lambertian pattern. The reflector has an optical output section that transmits the scattered light and a reflective section that reflects the scattered light to the reflective diffuser and/or the other portions of the reflective sections. An optical system using the optical head is also provided.
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公开(公告)号:US20170227467A1
公开(公告)日:2017-08-10
申请号:US15501167
申请日:2015-08-26
Applicant: RENISHAW PLC
Inventor: Brian John Edward SMITH , Ian Mac BELL , Ian Paul HAYWARD
CPC classification number: G01N21/65 , G01J3/0208 , G01J3/021 , G01J3/0291 , G01J3/18 , G01J3/2803 , G01J3/2823 , G01J3/36 , G01J3/44 , G01J2003/1828 , G01J2003/2813 , G01N21/31
Abstract: Spectroscopy including a source generating light profile on the sample. The light profile is movable relative to the sample. An optical input for receiving light from sample interaction with light from the source, a detector including two-dimensional array of photodetector elements, a dispersive device between the optical input and detector to spectrally disperse light from the optical input in spectral direction across the detector, an optical splitter in optical path between the optical input and detector to split light based upon wavenumber so, for a spectrum generated by a point on the sample, the spectrum first and second portions are dispersed across photodetector elements of different array row/column. Controller shifting data between photodetector elements in spatial direction, perpendicular to spectral direction, synchronously with relative movement between light profile and sample so data is accumulated on the spectrum first and second portions across different sets of photodetector elements during relative movement.
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公开(公告)号:US09719940B2
公开(公告)日:2017-08-01
申请号:US14875084
申请日:2015-10-05
Applicant: KLA-TENCOR CORPORATION
Inventor: Amnon Manassen , Andrew Hill , Avi Abramov
CPC classification number: G01N21/8806 , G01J1/0228 , G01J3/02 , G01J3/021 , G01J3/0218 , G01J3/0229 , G01J3/2823 , G01N21/47 , G01N21/8851 , G01N21/9501 , G01N21/956 , G01N21/95623 , G01N2021/8848 , G01N2201/06 , G03F7/70633
Abstract: Methods and systems are provided, which pattern an illumination of a metrology target with respect to spectral ranges and/or polarizations, illuminate a metrology target by the patterned illumination, and measure radiation scattered from the target by directing, at a pupil plane, selected pupil plane pixels from a to respective single detector(s) by applying a collection pattern to the pupil plane pixels. Single detector measurements (compressive sensing) has increased light sensitivity which is utilized to pattern the illumination and further enhance the information content of detected scattered radiation with respect to predefined metrology parameters.
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公开(公告)号:US20170211975A1
公开(公告)日:2017-07-27
申请号:US15328523
申请日:2015-06-22
Applicant: CARL ZEISS SPECTROSCOPY GMBH
Inventor: Jörg MARGRAF , Jens MONDRY
CPC classification number: G01J3/0251 , G01J3/0208 , G01J3/021 , G01J3/0218 , G01J3/0237 , G01J3/0291 , G01J3/08 , G01J3/10 , G01J3/50 , G01J2001/0481 , G01N21/27 , G01N21/4738 , G01N21/474 , G01N21/86 , G01N2021/4754 , G01N2021/8618 , G01N2201/065
Abstract: The invention relates to a measuring arrangement for detecting an absolute reflection spectrum of a sample in a process for producing the sample. It comprises a light source for generating measurement light, a homogenizer for generating a uniform spatial illuminance distribution of the measurement light; a movable reflector and a receiver for collecting the measurement light reflected from the sample and/or the reflector. According to the invention, the reflector both for a reference measurement and for a sample measurement is positioned in an observation beam path and arranged on the same side of the sample as the light source in order to feed the reflected measurement light to the receiver.
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公开(公告)号:US20170209050A1
公开(公告)日:2017-07-27
申请号:US15416876
申请日:2017-01-26
Applicant: Novadaq Technologies Inc.
Inventor: John Josef Paul FENGLER , Robert Anthony STEAD
CPC classification number: A61B5/0071 , A61B1/00186 , A61B1/043 , A61B1/051 , A61B1/0638 , A61B1/0684 , A61B5/0035 , A61B5/0084 , G01J1/00 , G01J1/58 , G01J3/0205 , G01J3/0208 , G01J3/021 , G01J3/0248 , G01J3/10 , G01J3/36 , G01J3/4406 , G02B21/16 , G02B27/1013 , H04N5/2256 , H04N5/23245 , H04N5/2354 , H04N5/238 , H04N5/332 , H04N9/045 , H04N9/097 , H04N13/204 , H04N2209/049
Abstract: A fluorescence imaging system for imaging an object, the system includes a white light provider that emits white light, an excitation light provider that emits excitation light in a plurality of excitation wavebands for causing the object to emit fluorescent light, a component that directs the white light and excitation light to the object and collects reflected white light and emitted fluorescent light from the object, a filter that blocks light in the excitation wavebands and transmits at least a portion of the reflected white light and fluorescent light, and an image sensor assembly that receives the transmitted reflected white light and the fluorescent light.
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公开(公告)号:US09689744B2
公开(公告)日:2017-06-27
申请号:US14327704
申请日:2014-07-10
Applicant: Massachusetts Institute of Technology
Inventor: Michael P. Chrisp
CPC classification number: G01J3/2823 , G01J3/0205 , G01J3/0208 , G01J3/021 , G01J3/0256 , G01J3/1804 , G01J2003/1204 , G01J2003/1273
Abstract: An imaging spectrometer, covering the visible through infrared wavelengths, which disperses the light by a plane diffraction grating behind a wedged optical element. This design uses an achromatic doublet lens with a reflective coating on its convex back surface to produce the spectra on a flat detector. Spatial keystone distortion and spectral smile are controlled to less than one tenth of a pixel over the full wavelength range, facilitating the use of simple retrieval algorithms.
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公开(公告)号:US20170176338A1
公开(公告)日:2017-06-22
申请号:US15384918
申请日:2016-12-20
Applicant: Verily Life Sciences LLC
Inventor: Cheng-Hsun Wu , Victor Marcel Acosta , Ian Peikon , Paul Lebel , Jerrod Joseph Schwartz
CPC classification number: G01N21/6458 , G01J3/0208 , G01J3/021 , G01J3/0224 , G01J3/0229 , G01J3/0237 , G01J3/08 , G01J3/14 , G01J3/18 , G01J3/2823 , G01J3/32 , G01J3/4406 , G01J2003/1213 , G01J2003/2826 , G01N21/6408 , G01N21/6428 , G01N2021/6421 , G01N2021/6441 , G01N2021/6463 , G01N2201/0633 , G01N2201/0675 , G02B5/1828 , G02B21/16 , G02B21/361 , G02B21/367 , G02B26/0808 , G02B26/0833 , G02F1/29 , G02F2201/34 , G02F2203/12 , G06T7/90 , G06T2207/10004 , G06T2207/10056
Abstract: Methods are provided to identify spatially and spectrally multiplexed probes in a biological environment. Such probes are identified by the ordering and color of fluorophores of the probes. The devices and methods provided facilitate determination of the locations and colors of such fluorophores, such that a probe can be identified. In some embodiments, probes are identified by applying light from a target environment to a spatial light modulator that can be used to control the direction and magnitude of chromatic dispersion of the detected light; multiple images of the target, corresponding to multiple different spatial light modulator settings, can be deconvolved and used to determine the colors and locations of fluorophores. In some embodiments, light from a region of the target can be simultaneously imaged spatially and spectrally. Correlations between the spatial and spectral images over time can be used to determine the color of fluorophores in the target.
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