APPARATUS FOR OPTICAL EMISSION SPECTROSCOPY AND PLASMA TREATMENT APPARATUS
    24.
    发明申请
    APPARATUS FOR OPTICAL EMISSION SPECTROSCOPY AND PLASMA TREATMENT APPARATUS 有权
    用于光发射光谱和等离子体处理装置的装置

    公开(公告)号:US20160300699A1

    公开(公告)日:2016-10-13

    申请号:US15089520

    申请日:2016-04-02

    Abstract: Disclosed is an apparatus for optical emission spectroscopy which includes a light measuring unit measuring light in a process chamber performing a plasma process on a substrate, a light analyzing unit receiving light collected from the light measuring unit to analyze a plasma state, a control unit receiving an output signal of the light analyzing unit to process the output signal, and a light collecting controller disposed between the process chamber and the light measuring unit so as to be combined with the light measuring unit. The light collecting controller controls the light collected to the light measuring unit.

    Abstract translation: 本发明公开了一种用于光发射光谱的装置,其包括:测量在基板上执行等离子体处理的处理室中的光的光测量单元;光分析单元,接收从光测量单元收集的光以分析等离子体状态;控制单元, 所述光分析单元的输出信号处理所述输出信号;以及集光控制器,设置在所述处理室和所述光测量单元之间,以便与所述光测量单元组合。 集光控制器将收集的光控制到光测量单元。

    Optical Characteristic Measuring Apparatus and Method
    26.
    发明申请
    Optical Characteristic Measuring Apparatus and Method 审中-公开
    光学特性测量装置及方法

    公开(公告)号:US20140022535A1

    公开(公告)日:2014-01-23

    申请号:US14008992

    申请日:2012-03-26

    Inventor: Shinji Yamamoto

    Abstract: An optical characteristic measuring apparatus and an optical characteristic measuring method of the invention are an optical characteristic measuring apparatus and method for obtaining a predetermined optical characteristic such as a color value or a total spectral radiation factor of a measurement object. A spectral intensity distribution of predetermined ambient light entering through a measurement opening is measured and stored prior to measurement of the optical characteristic. In measuring the optical characteristic, an optical characteristic in a condition that actually measured ambient light is used as an observation light source is obtained, with use of the stored spectral intensity distribution of ambient light.

    Abstract translation: 本发明的光学特性测量装置和光学特性测量方法是用于获得诸如测量对象的颜色值或总光谱辐射系数的预定光学特性的光学特性测量装置和方法。 在测量光学特性之前,测量并存储预定的通过测量开口进入的环境光的光谱强度分布。 在测量光学特性时,使用存储的环境光的光谱强度分布,获得了将实际测量的环境光用作观察光源的条件下的光学特性。

    SWIR targeted agile raman (STAR) system for on-the-move detection of emplace explosives
    27.
    发明授权
    SWIR targeted agile raman (STAR) system for on-the-move detection of emplace explosives 有权
    SWIR针对敏捷拉曼(S​​TAR)系统进行爆炸物的移动检测

    公开(公告)号:US08379193B2

    公开(公告)日:2013-02-19

    申请号:US12802994

    申请日:2010-06-17

    Abstract: The present disclosure provides for a system and method for detecting explosives and other materials in a sample scene. First interacted photons are produced from a target area wherein the first interacted photons are generated via solar radiation. The first interacted photons are assessed to thereby generate a SWIR hyperspectral image. The SWIR hyperspectral image is analyzed to identify an area of interest likely of comprising an explosive material. The area of interest is illuminated using laser light illumination to generate second interacted photons from the area of interest. These second interacted photons are assessed to determine whether it not an explosive material is present in the area of interest. The system and method may be configured in standoff, OTM, static and UGV configurations.

    Abstract translation: 本公开提供了用于在样本场景中检测爆炸物和其他材料的系统和方法。 从目标区域产生第一相互作用的光子,其中通过太阳辐射产生第一相互作用的光子。 评估第一相互作用的光子,从而产生SWIR高光谱图像。 分析SWIR高光谱图像以识别可能包含爆炸物质的感兴趣区域。 使用激光照明来照亮感兴趣区域,以从感兴趣区域产生第二相互作用的光子。 评估这些第二个相互作用的光子,以确定在感兴趣区域中是否存在爆炸物质。 系统和方法可以配置为隔离,OTM,静态和UGV配置。

    Method and apparatus for microlens array/fiber optic imaging
    28.
    发明授权
    Method and apparatus for microlens array/fiber optic imaging 有权
    用于微透镜阵列/光纤成像的方法和装置

    公开(公告)号:US08068222B2

    公开(公告)日:2011-11-29

    申请号:US11757146

    申请日:2007-06-01

    Applicant: Jingyun Zhang

    Inventor: Jingyun Zhang

    Abstract: A novel approach for chemical imaging is disclosed. In one embodiment, the disclosure relates to a system for producing a spatially accurate wavelength-resolved image of a sample from photons scattered from the sample, comprising an optical lens; a first optical fiber bundle of M fibers; a second optical fiber bundle of N fibers; an optical fiber switch; and a charge coupled device, wherein the image comprises plural sub-images, and wherein each sub-image is formed from photons scattered from a predetermined two spatial dimension portion of the sample, and wherein the scattered photons forming each sub-image have a predetermined wavelength different from a predetermined wavelength of scattered photons forming the other sub-images, and wherein the scattered photons for each sub-image are collected substantially simultaneously.

    Abstract translation: 公开了一种新颖的化学成像方法。 在一个实施例中,本公开涉及一种用于从包含光学透镜的样品散射的光子产生样品的空间上准确的波长分辨图像的系统; M纤维的第一光纤束; N纤维的第二光纤束; 光纤交换机; 以及电荷耦合器件,其中所述图像包括多个子图像,并且其中每个子图像由从样本的预定的两个空间维度部分散射的光子形成,并且其中形成每个子图像的散射光子具有预定的 波长不同于形成其他子图像的散射光子的预定波长,并且其中基本上同时收集每个子图像的散射光子。

    METHOD AND APPARATUS FOR MICROLENS ARRAY/FIBER OPTIC IMAGING
    29.
    发明申请
    METHOD AND APPARATUS FOR MICROLENS ARRAY/FIBER OPTIC IMAGING 有权
    微阵列/光纤成像的方法与装置

    公开(公告)号:US20100265498A1

    公开(公告)日:2010-10-21

    申请号:US11757146

    申请日:2007-06-01

    Applicant: Jingyun ZHANG

    Inventor: Jingyun ZHANG

    Abstract: A novel approach for chemical imaging is disclosed. In one embodiment, the disclosure relates to a system for producing a spatially accurate wavelength-resolved image of a sample from photons scattered from the sample, comprising an optical lens; a first optical fiber bundle of M fibers; a second optical fiber bundle of N fibers; an optical fiber switch; and a charge coupled device, wherein the image comprises plural sub-images, and wherein each sub-image is formed from photons scattered from a predetermined two spatial dimension portion of the sample, and wherein the scattered photons forming each sub-image have a predetermined wavelength different from a predetermined wavelength of scattered photons forming the other sub-images, and wherein the scattered photons for each sub-image are collected substantially simultaneously.

    Abstract translation: 公开了一种新颖的化学成像方法。 在一个实施例中,本公开涉及一种用于从包含光学透镜的样品散射的光子产生样品的空间上准确的波长分辨图像的系统; M纤维的第一光纤束; N纤维的第二光纤束; 光纤交换机; 以及电荷耦合器件,其中所述图像包括多个子图像,并且其中每个子图像由从样本的预定的两个空间维度部分散射的光子形成,并且其中形成每个子图像的散射光子具有预定的 波长不同于形成其他子图像的散射光子的预定波长,并且其中基本上同时收集每个子图像的散射光子。

    System and method for image reconstruction in a fiber array spectral translator system
    30.
    发明授权
    System and method for image reconstruction in a fiber array spectral translator system 有权
    光纤阵列光谱转换系统中图像重建的系统和方法

    公开(公告)号:US07474395B2

    公开(公告)日:2009-01-06

    申请号:US11674552

    申请日:2007-02-13

    Abstract: The disclosure relates generally to methods and apparatus for spectral calibration of a spectroscopic system which includes a fiber array spectral translator. One embodiment relates to a method for obtaining a first image of a known substance using a photon detector and a fiber array spectral translator having plural fibers, wherein the first image comprises at least one pixel; providing a second image of the substance wherein the second image comprises at least one pixel; comparing the first image with the second image; and adjusting at least one pixel of the first image based on the comparison of images to thereby obtain an adjusted image.

    Abstract translation: 本公开一般涉及包括光纤阵列光谱转换器的光谱系统的光谱校准的方法和装置。 一个实施例涉及一种使用光子检测器和具有多个光纤的光纤阵列光谱转换器获得已知物质的第一图像的方法,其中第一图像包括至少一个像素; 提供所述物质的第二图像,其中所述第二图像包括至少一个像素; 将第一图像与第二图像进行比较; 以及基于图像的比较来调整第一图像的至少一个像素,从而获得调整后的图像。

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