中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

720 records (took 0.03 seconds)

    Electron Microscope and Method of Controlling Same
    22.
    发明申请
    Electron Microscope and Method of Controlling Same 审中-公开

    公开(公告)号：US20170330723A1

    公开(公告)日：2017-11-16

    申请号：US15591331

    申请日：2017-05-10

    Applicant: JEOL Ltd.

    Inventor： Masaki Mukai

    IPC: H01J37/24 ,  H01J37/06 ,  H01J37/05 ,  H01J37/147 ,  H01J37/26

    CPC classification number: H01J37/24 ,  H01J37/05 ,  H01J37/06 ,  H01J37/147 ,  H01J37/26 ,  H01J37/265 ,  H01J37/3178 ,  H01J2237/0473 ,  H01J2237/04735 ,  H01J2237/057

    Abstract: There is provided an electron microscope in which a crossover position can be kept constant. The electron microscope (100) includes: an electron source (110) for emitting an electron beam; an acceleration tube (170) having acceleration electrodes (170a-170f) and operative to accelerate the electron beam; a first electrode (160) operative such that a lens action is produced between this first electrode (160) and the initial stage of acceleration electrode (170a); an accelerating voltage supply (112) for supplying an accelerating voltage to the acceleration tube (170); a first electrode voltage supply (162) for supplying a voltage to the first electrode (160); and a controller (109b) for controlling the first electrode voltage supply (162). The lens action produced between the first electrode (160) and the initial stage of acceleration electrode (170a) forms a crossover (CO2) of the electron beam. The controller (109b) controls the first electrode voltage supply (162) such that, if the accelerating voltage is modified, the ratio between the voltage applied to the first electrode (160) and the voltage applied to the initial stage of acceleration electrode (170a) is kept constant.

    PLASMA DENSIFICATION METHOD
    23.
    发明申请
    PLASMA DENSIFICATION METHOD 有权

    公开(公告)号：US20170280548A1

    公开(公告)日：2017-09-28

    申请号：US15469636

    申请日：2017-03-27

    Applicant: Scholtz E Fontana Consultoria LTDA-ME

    Inventor： Juliano Sadi Scholtz ,  Luis Cesar Fontana

    IPC: H05H1/46 ,  H01J37/32

    CPC classification number: H05H1/46 ,  H01J37/05 ,  H01J37/32009 ,  H01J37/32091 ,  H01J37/32146 ,  H01J2237/0473 ,  H05H1/24 ,  H05H2001/4675

    Abstract: The plasma is formed between electrodes to be energized from an electric power source, containing a partially ionized mass having a luminescence region including neutral atoms (NA), primary electrons (PE), secondary electrons (SE), and ions.The method comprises the interspersed steps of: accelerating the primary electrons (PE) toward one of said electrodes (10) polarized by a short, positive, high voltage pulse, impacting primary electrons (PE) against said electrode (10) and ejecting secondary electrons (SE) from it; subsequently, accelerating the secondary electrons (SE) toward the luminescence region by polarization of said electrode (10) by a negative voltage with a lower voltage pulse colliding the secondary electrons with neutral atoms (NA) and producing positive ions (PI) and derived electrons (DE); the negative pulse must have a period of time sufficient to accelerate the positive ions (PI) of the luminescent region towards the electrodes 10, striking the surface of said electrodes; repeating the previous steps in order to obtain a steady state plasma with a desired degree of ionization. The control of the intensity and the period of the positive and negative pulses allow the control of the degree of ionization and the volume of the luminescent region of the plasma.

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    26.
    发明申请
    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD 审中-公开
    等离子体加工设备和等离子体处理方法

    公开(公告)号：US20160372299A1

    公开(公告)日：2016-12-22

    申请号：US15121075

    申请日：2015-02-20

    Applicant: TOKYO ELECTRON LIMITED

    Inventor： Kazuhiro KUBOTA ,  Masanobu HONDA

    IPC: H01J37/05 ,  H01J37/32

    CPC classification number: H01J37/05 ,  H01J37/32091 ,  H01J37/32165 ,  H01J37/32174 ,  H01J37/32422 ,  H01J37/3244 ,  H01J37/32559 ,  H01J37/32568 ,  H01J37/32715 ,  H01J2237/332 ,  H01J2237/334 ,  H01L21/31116

    Abstract: Disclosed is a plasma processing apparatus including a processing container, an ion trapping member partitioning the inside of the processing container into a processing space and a non-processing space and transmitting radicals and trap ions, a placing table, a first gas supply unit supplying a first processing gas into the non-processing space, a second gas supply unit supplying a second processing gas into the processing space, a first high frequency power supply supplying a high frequency power to generate radicals and ions in the non-processing space, a second high frequency power supply supplying a high frequency power to generate radicals and ions in the processing space, and a third high frequency power supply supplying a high frequency power of a lower frequency than that of the high frequency power supplied from the second high frequency power supply to draw the ions generated in the processing space into the workpiece.

    Abstract translation: 公开了一种等离子体处理装置，其包括处理容器，将处理容器的内部分隔成处理空间的离子捕获部件和非处理空间以及透射自由基和捕集离子，放置台，第一气体供应单元， 首先将处理气体进入非处理空间，将第二处理气体供应到处理空间中的第二气体供应单元，提供高频功率以在非处理空间中产生自由基和离子的第一高频电源，第二 提供高频功率以在处理空间中产生自由基和离子的高频电源，以及提供比由第二高频电源提供的高频功率低的频率的高频功率的第三高频电源 将处理空间中产生的离子吸入工件。

    Methods and systems for plasma deposition and treatment
    27.
    发明授权
    Methods and systems for plasma deposition and treatment 有权
    用于等离子体沉积和处理的方法和系统

    公开(公告)号：US09520271B2

    公开(公告)日：2016-12-13

    申请号：US14341362

    申请日：2014-07-25

    Applicant: Peter F. Vandermeulen

    Inventor： Peter F. Vandermeulen

    IPC: H01J37/00 ,  H01J37/32 ,  C23C16/511 ,  C23C16/513 ,  H01J37/05 ,  H01J37/08 ,  H01P3/12 ,  H01P3/127

    CPC classification number: H01J37/32229 ,  C23C16/511 ,  C23C16/513 ,  H01J37/05 ,  H01J37/08 ,  H01J37/32192 ,  H01J37/32201 ,  H01J37/3244 ,  H01J37/32669 ,  H01J2237/057 ,  H01J2237/0817 ,  H01J2237/3323 ,  H01P3/12 ,  H01P3/127 ,  H01Q21/0043

    Abstract: An apparatus for separating ions having different mass or charge includes a waveguide conduit coupled to a microwave source for transmitting microwaves through openings in the waveguide conduit. The outlet ends of pipes are positioned at the openings for transporting material from a material source to the openings. A plasma chamber is in communication with the waveguide tube through the openings. The plasma chamber receives through the openings microwaves from the waveguide tube and material from the pipes. The plasma chamber includes magnets disposed in an outer wall thereof for forming a magnetic field in the plasma chamber. The plasma chamber includes a charged cover at a side of the chamber opposite the side containing the openings. The cover includes extraction holes through which ion beams from the plasma chamber are extracted. Deflectors coupled to one of the extraction holes receive the ion beams extracted from the plasma chamber. Each deflector bends an ion beam and provides separate passages for capturing ions following different trajectories from the bending of the ion beam based on their respective mass or charge.

    Abstract translation: 用于分离具有不同质量或电荷的离子的装置包括耦合到微波源的波导导管，用于通过波导管道中的开口传输微波。 管道的出口端位于用于将材料从材料源运输到开口的开口处。 等离子体室通过开口与波导管连通。 等离子体腔室通过开口接收来自波导管的微波和来自管道的材料。 等离子体室包括设置在其外壁中的磁体，用于在等离子体室中形成磁场。 等离子体室包括在室的与包含开口的一侧相对的一侧的带电盖。 盖子包括提取来自等离子体室的离子束的抽吸孔。 与一个提取孔耦合的偏转器接收从等离子体室提取的离子束。 每个偏转器弯曲离子束，并提供单独的通道，用于根据其相应的质量或电荷离开离子束弯曲的不同轨迹之后捕获离子。

    Electron Microscope
    29.
    发明申请
    Electron Microscope 有权
    电子显微镜

    公开(公告)号：US20160196952A1

    公开(公告)日：2016-07-07

    申请号：US14916529

    申请日：2014-05-16

    Applicant: HIitachi High-Technologies Corporation

    Inventor： Hiroaki MATSUMOTO ,  Takeshi SATO ,  Yoshifumi TANIGUCHI ,  Ken HARADA

    IPC: H01J37/10 ,  H01J37/147 ,  H01J37/05 ,  H01J37/285

    CPC classification number: H01J37/10 ,  G01N23/20058 ,  G01N2223/418 ,  H01J37/04 ,  H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/1472 ,  H01J37/153 ,  H01J37/24 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J37/28 ,  H01J37/285 ,  H01J37/295 ,  H01J2237/21 ,  H01J2237/2614

    Abstract: The present invention relates to a lens-less Foucault method wherein a transmission electron microscope objective lens (5) is turned off, an electron beam crossover (11, 13) is matched with a selected area aperture (65), and the focal distance of a first imaging lens (61) can be changed to enable switching between a sample image observation mode and a sample diffraction pattern observation mode, characterized in that a deflector (81) is disposed in a stage following the first imaging lens (61), and conditions for an irradiating optical system (4) can be fixed after conditions for the imaging optical system have been determined. This allows a lens-less Foucault method to be implemented in a common general-use transmission electron microscope with no magnetic shielding lens equipped, without burdening the operator.

    Abstract translation: 本发明涉及一种无透镜Foucault方法，其中透射电子显微镜物镜（5）被关闭，电子束交叉（11,13）与所选区域孔径（65）匹配，并且焦距 可以改变第一成像透镜（61）以在样本图像观察模式和样本衍射图案观察模式之间切换，其特征在于，偏转器（81）设置在跟随第一成像透镜（61）的阶段中，以及 可以在确定成像光学系统的条件之后固定照射光学系统（4）的条件。 这样就可以在没有磁屏蔽透镜的公共通用透射电子显微镜中实现无镜头福柯方法，而不会对操作者造成负担。

    High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope
    30.
    发明授权
    High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope 有权
    使用低压扫描电子显微镜的高压能量色散光谱

    公开(公告)号：US09099276B1

    公开(公告)日：2015-08-04

    申请号：US14162802

    申请日：2014-01-24

    Applicant: Keysight Technologies, Inc.

    Inventor： Lawrence P. Muray ,  Scott W. Indermuehle ,  James P. Spallas ,  Ying Wu ,  Dimitri Klyachko

    IPC: H01J37/04 ,  H01J37/05 ,  H01J37/28 ,  G01T1/36

    CPC classification number: H01J37/04 ,  H01J37/05 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/04735 ,  H01J2237/1205 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/2442 ,  H01J2237/2445

    Abstract: A scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) apparatus that includes a scanning electron microscope, an x-ray detector, and an auxiliary acceleration voltage source. The scanning electron microscope includes a sample holder, and a layered electron beam column arranged to output an electron beam towards the sample holder at an initial beam energy. The auxiliary acceleration voltage source is to apply an auxiliary acceleration voltage between the sample holder and the layered electron beam column to accelerate the electron beam to a final beam energy. At the final beam energy, the electron beam is capable of generating x-rays at multiple wavelengths from a larger range of atomic species than the electron beam at the initial beam energy.

    Abstract translation: 包括扫描电子显微镜，X射线检测器和辅助加速电压源的扫描电子显微镜（SEM）和能量色散光谱（EDS）装置。 扫描电子显微镜包括样品保持器和分层电子束柱，其被布置成以初始光束能量朝向样品保持器输出电子束。 辅助加速电压源是在样品架和分层电子束柱之间施加辅助加速电压，以将电子束加速到最终的束能。 在最终光束能量下，电子束能够在起始光束能量下从原子物质的范围比电子束产生多个波长的x射线。

Patent Agency Ranking