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    SPECTRUM DISPLAY METHOD AND SYSTEM WITH PHOTOGRAPHIC FUNCTION
    52.
    发明申请
    SPECTRUM DISPLAY METHOD AND SYSTEM WITH PHOTOGRAPHIC FUNCTION 审中-公开

    公开(公告)号：US20180097998A1

    公开(公告)日：2018-04-05

    申请号：US15817194

    申请日：2017-11-18

    Applicant: Glit Technologies (Shenzhen) Pte Ltd

    Inventor： Gaoqiang Yuan ,  Xiang Pan

    IPC: H04N5/232 ,  H04N5/76 ,  G01N21/27

    CPC classification number: H04N5/23293 ,  G01J3/0248 ,  G01J3/0264 ,  G01J3/027 ,  G01N21/27 ,  G01N2201/126 ,  H04N5/76

    Abstract: A spectrum display method with photographic function includes collecting spectrum data and image data of a sample measurement device, controlling to display the spectrum data and the image data, recording the image data of the sample measurement device according to commands of shooting or recording the sample measurement device, associating the image data with the spectrum data, putting the associated data into an experiment image storage window, and performing operations of viewing, comparing, or editing the associated data; or saving the associated data as a record file; and loading the saved record file for performing the operations of viewing, comparing, or editing the record file. The image data includes photo data generated by shooting the sample measurement device or recorded video data generated by recording of the sample measurement device. A spectrum display system with photographic function is also provided.

    Accuracy and precision in raman spectroscopy
    54.
    发明授权
    Accuracy and precision in raman spectroscopy 有权

    公开(公告)号：US09689743B2

    公开(公告)日：2017-06-27

    申请号：US13559211

    申请日：2012-07-26

    Applicant: Huiwen Liu ,  Peter Gunderson

    Inventor： Huiwen Liu ,  Peter Gunderson

    IPC: G01J3/44 ,  G01J3/00 ,  G01J3/02 ,  G01N21/65

    CPC classification number: G01J3/0248 ,  G01J3/0237 ,  G01J3/0278 ,  G01J3/44 ,  G01N21/65

    Abstract: The disclosure is related systems and method for improved accuracy and precision in Raman spectroscopy. In one embodiment, a device may comprise a Raman spectroscopic apparatus configured to determine a property of a sample by directing photons at the sample and measuring a resulting Raman scattering, a positioning apparatus capable of manipulating a position of the sample, and the device being configured to selectively adjust a focus of the Raman spectroscopic apparatus to adjust an intensity of the Raman scattering. Another embodiment may be a method comprising performing a depth focus Raman spectra screening on a sample to determine a depth focus with a maximum-intensity Raman spectra, wherein the depth focus spectra screening comprises performing Raman spectra scans on the sample at a plurality of depth foci, and modifying a process based on a result of the Raman spectra scan at the depth focus with the maximum-intensity Raman spectra.

    SPECTROMETER AND INTEGRATING SPHERE
    55.
    发明申请
    SPECTROMETER AND INTEGRATING SPHERE 审中-公开

    公开(公告)号：US20170146398A1

    公开(公告)日：2017-05-25

    申请号：US15300329

    申请日：2014-04-01

    Applicant: SHIMADZU CORPORATION

    Inventor： Takahide HIRAMATSU

    IPC: G01J3/02 ,  G01J3/42

    CPC classification number: G01J3/0254 ,  G01J3/0248 ,  G01J3/0278 ,  G01J3/42

    Abstract: An integrating sphere for a spectrometer, including: an integrating spherical body with a light entrance window for allowing an entry of light emitted from a sample, a first light detection window, and a second light detection window; a first detector attachment section located on the outside of the first light detection window; and a second detector attachment section located on the outside of the second light detection window in such a manner that the detection field of a detector to be attached to the second detector attachment section coincides with the detection field of a detector to be attached to the first detector attachment section.

    High speed spectroscopic sensor assembly and system
    57.
    发明授权
    High speed spectroscopic sensor assembly and system 有权
    高速光谱传感器组装及系统

    公开(公告)号：US09557216B2

    公开(公告)日：2017-01-31

    申请号：US14909213

    申请日：2014-07-31

    Applicant: TSI, Inc.

    Inventor： Steven G. Buckley ,  Kenneth R. Farmer ,  Darrick L. Niccum

    IPC: G01N21/00 ,  G01J3/02 ,  B07C5/342 ,  G01J3/443 ,  G01N21/71 ,  G01D5/26 ,  G01D5/48 ,  G01J3/12

    CPC classification number: G01J3/0275 ,  B07C5/342 ,  G01D5/26 ,  G01D5/48 ,  G01J3/0248 ,  G01J3/0289 ,  G01J3/12 ,  G01J3/443 ,  G01N21/718 ,  G01N21/85

    Abstract: A laser-based spectroscopy system that combines a distance/proximity standoff sensor, a high-repetition rate laser spectroscopy system, and software with a decision-making algorithm embedded in a processing unit which in combination performs selective firing of the laser when the target object is within an interrogation zone. In a related embodiment, the system provides selective sorting of spectroscopic signals based on information from the standoff signal and from information contained in the spectral signals themselves. The laser emission can be actively controlled while keeping the laser firing, thereby preserving the thermal stability and hence the power of the laser; and the standoff sensor information and the spectral information can be combined to determine the proper relative weighting or importance of each piece of spectral information.

    Abstract translation: 一种基于激光的光谱系统，其将距离/接近距离传感器，高重复率激光光谱系统和软件与嵌入在处理单元中的决策算法组合，所述处理单元在目标物体上组合执行激光的选择性点火 在询问区内。 在相关实施例中，系统基于来自间隔信号的信息和从包含在频谱信号本身中的信息提供对光谱信号的选择性分类。 可以在保持激光烧制的同时主动地控制激光发射，从而保持激光的热稳定性和因此的功率; 并且可以组合对立传感器信息和光谱信息以确定每条光谱信息的适当的相对权重或重要性。

    APPARATUS FOR OPTICAL EMISSION SPECTROSCOPY AND PLASMA TREATMENT APPARATUS
    59.
    发明申请
    APPARATUS FOR OPTICAL EMISSION SPECTROSCOPY AND PLASMA TREATMENT APPARATUS 有权
    用于光发射光谱和等离子体处理装置的装置

    公开(公告)号：US20160300699A1

    公开(公告)日：2016-10-13

    申请号：US15089520

    申请日：2016-04-02

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： In-Joong KIM ,  Ilgu YUN

    IPC: H01J37/32 ,  G01J3/443

    CPC classification number: H01J37/32972 ,  G01J3/0202 ,  G01J3/0221 ,  G01J3/0248 ,  G01J3/0289 ,  G01J3/443 ,  H01J37/32917

    Abstract: Disclosed is an apparatus for optical emission spectroscopy which includes a light measuring unit measuring light in a process chamber performing a plasma process on a substrate, a light analyzing unit receiving light collected from the light measuring unit to analyze a plasma state, a control unit receiving an output signal of the light analyzing unit to process the output signal, and a light collecting controller disposed between the process chamber and the light measuring unit so as to be combined with the light measuring unit. The light collecting controller controls the light collected to the light measuring unit.

    Abstract translation: 本发明公开了一种用于光发射光谱的装置，其包括：测量在基板上执行等离子体处理的处理室中的光的光测量单元;光分析单元，接收从光测量单元收集的光以分析等离子体状态;控制单元， 所述光分析单元的输出信号处理所述输出信号;以及集光控制器，设置在所述处理室和所述光测量单元之间，以便与所述光测量单元组合。 集光控制器将收集的光控制到光测量单元。

    Measuring instrument, measurement system, measurement position positioning method and measurement position positioning program using the same
    60.
    发明授权
    Measuring instrument, measurement system, measurement position positioning method and measurement position positioning program using the same 有权
    测量仪器，测量系统，测量位置定位方法和测量位置定位程序使用相同

    公开(公告)号：US09070204B2

    公开(公告)日：2015-06-30

    申请号：US14124141

    申请日：2012-06-07

    Applicant: Hideki Kawabata ,  Akira Kijima

    Inventor： Hideki Kawabata ,  Akira Kijima

    IPC: G06K9/36 ,  G06T7/40 ,  G01J3/50 ,  G01J3/02

    CPC classification number: G06T7/408 ,  G01J3/0208 ,  G01J3/0248 ,  G01J3/0264 ,  G01J3/027 ,  G01J3/0278 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/2823 ,  G01J3/50 ,  G01J3/513 ,  G06T7/90

    Abstract: A measurement system is capable of accurately aligning the corresponding measurement points of a plurality of measurement targets to evaluate the measurement targets from measurement results. A measurement system includes a measuring instrument and a PC, the measuring instrument includes a spectroscopic unit that measures a measurement point of a measurement target and a camera that images surroundings in real-time. The PC displays an evaluation image of continuous image information, which is imaged and displayed by the camera on a display screen so as to be superimposed on a reference image of still image information, which has been imaged and stored in memory. By comparing the data obtained by measuring the measurement point in the evaluation image when both images overlap each other and the measurement data of the point in the reference image, it is possible to perform positioning easily and compare the measurement data.

    Abstract translation: 测量系统能够精确地对准多个测量对象的对应测量点，以从测量结果评估测量目标。 测量系统包括测量仪器和PC，测量仪器包括测量测量目标的测量点的分光单元和实时影像环境的摄像机。 PC显示连续图像信息的评估图像，其由相机在显示屏幕上成像和显示，以便叠加在已被成像并存储在存储器中的静止图像信息的参考图像上。 通过比较当两个图像彼此重叠时通过测量评估图像中的测量点获得的数据和参考图像中的点的测量数据，可以容易地执行定位并比较测量数据。

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