公开(公告)号：US09287089B2

公开(公告)日：2016-03-15

申请号：US14687890

申请日：2015-04-15

Applicant: Dov Shachal

Inventor： Dov Shachal

IPC: G01N23/00 ,  H01J37/28 ,  H01J37/06

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

公开(公告)号：US20150284907A1

公开(公告)日：2015-10-08

申请号：US14435026

申请日：2013-10-10

Applicant: XYLECO, INC.

Inventor： Marshall Medoff ,  Thomas Craig Masterman ,  Robert Paradis

IPC: D21B1/02 ,  H01J37/20

CPC classification number: G21F3/00 ,  A61L2/087 ,  B01J19/082 ,  B01J19/085 ,  B01J19/12 ,  B01J19/123 ,  B01J19/125 ,  B01J19/22 ,  B01J2219/0869 ,  B01J2219/0871 ,  B01J2219/0879 ,  B01J2219/12 ,  B01J2219/1203 ,  B65G27/04 ,  C08H8/00 ,  C10B19/00 ,  C10B53/02 ,  C10G1/02 ,  C10G32/04 ,  C10L5/403 ,  C10L5/442 ,  C10L5/445 ,  C10L5/46 ,  C10L2200/0469 ,  C10L2290/24 ,  C10L2290/28 ,  C10L2290/36 ,  C10L2290/52 ,  C13K1/02 ,  C13K13/002 ,  D21B1/02 ,  G21K5/04 ,  G21K5/10 ,  H01J5/18 ,  H01J33/04 ,  H01J37/20 ,  H01J37/317 ,  H01J2237/2002 ,  H01J2237/202 ,  Y02E50/10 ,  Y02E50/14 ,  Y02E50/16 ,  Y02E50/30 ,  Y02E50/32 ,  Y02P20/145

Abstract: Biomass (e.g., plant biomass, animal biomass, and municipal waste biomass) is processed to produce useful intermediates and products, such as energy, fuels, foods or materials. For example, systems and methods are described that can be used to treat feedstock materials, such as cellulosic and/or lignocellulosic materials, while cooling equipment and the biomass to prevent overheating and possible distortion and/or degradation. The biomass is conveyed by a conveyor, which conveys the biomass under an electron beam from an electron beam accelerator. The conveyor can be cooled with cooling fluid. The conveyor can also vibrate to facilitate exposure to the electron beam. The conveyor can be configured as a trough that can be optionally cooled.

Abstract translation: 加工生物质（例如，植物生物质，动物生物质和城市废物生物质）以产生有用的中间体和产品，例如能量，燃料，食品或材料。 例如，描述了可用于处理原料如纤维素和/或木质纤维素材料的系统和方法，同时冷却设备和生物质以防止过热和可能的变形和/或降解。 生物质通过输送机输送，该输送机在电子束加速器的电子束下传送生物质。 输送机可以用冷却液冷却。 输送机也可以振动以便于暴露于电子束。 输送机可以被配置为可以任选地冷却的槽。

公开(公告)号：US09129772B2

公开(公告)日：2015-09-08

申请号：US14289092

申请日：2014-05-28

Applicant: Hitachi High-Technologies Corporation

Inventor： Eiko Nakazawa ,  Hiroyuki Kobayashi ,  Susumu Kuwabata

IPC: G01N23/00 ,  G21K5/08 ,  H01J37/20 ,  G01N23/225 ,  H01J37/26 ,  G01N23/04 ,  G01N1/28 ,  G01N1/40 ,  H01J37/30

CPC classification number: H01J37/20 ,  G01N1/2813 ,  G01N23/04 ,  G01N23/2251 ,  G01N2001/4027 ,  H01J37/26 ,  H01J37/261 ,  H01J37/3007 ,  H01J2237/2002 ,  H01J2237/20214 ,  H01J2237/204 ,  H01J2237/206

Abstract: Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid. Note that the specimen-holding member is designed to be rotatable.

Abstract translation: 提供能够在不使样本变形的情况下观察样本的形状的装置。 通过允许具有开口的样本保持构件（例如，微网和网格）来保持离子液体并向其中充入试样以允许样品悬浮在离子液体中进行观察。 此外，在试样保持构件附近设置有注入离子液体（离子液体导入机构）和/或电极的机构。 当电极施加电压时，样品在离子液体中移动或变形。 可以观察样品移动或变形。 此外，在试样保持构件附近，设置蒸发装置，以使得能够在蒸发时将试样充入离子液体中。 此外，在样本保持部件附近，设置微毛细管，以将液态标本充入离子液体。 注意，试样保持构件被设计成可旋转。

公开(公告)号：US20150228447A1

公开(公告)日：2015-08-13

申请号：US14422552

申请日：2013-06-28

Applicant: Hitachi High-Technologies Corporation

Inventor： Yusuke Ominami ,  Sukehiro Ito

IPC: H01J37/16 ,  H01J37/26 ,  H01J37/244

CPC classification number: H01J37/16 ,  H01J37/00 ,  H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/24455 ,  H01J2237/2605

Abstract: A sample observation method includes irradiating a sample with a primary charged particle beam, detecting a secondary charged particle signal obtained by the irradiating, and observing the sample. The method is characterized by causing the primary charged particle beam generated in a charged particle optical lens barrel, which is maintained in a vacuum state, to be transmitted or passed through a separating film disposed to isolate a space in which the sample is placed from the charged particle optical lens barrel; and detecting a transmitted charged particle beam obtained by irradiating the sample, placed in an atmospheric pressure or a predetermined gas atmosphere of a slightly negative pressure state compared with the atmospheric pressure, with the primary charged particle beam.

Abstract translation: 样品观察方法包括用初级带电粒子束照射样品，检测通过照射获得的二次带电粒子信号，并观察样品。 该方法的特征在于使保持在真空状态的带电粒子光学镜筒中产生的初级带电粒子束透过或通过分离膜，以将样品放置的空间从 带电粒子光学镜头镜筒; 并且与初级带电粒子束一起检测放置在与大气压相比的微小负压状态的大气压或预定气体气氛中的样品所获得的透射带电粒子束。

公开(公告)号：US20150137001A1

公开(公告)日：2015-05-21

申请号：US14526582

申请日：2014-10-29

Applicant: JEOL Ltd.

Inventor： Yasushi Hiroki ,  Mitsuaki Ohsaki

IPC: H01J37/18 ,  H01J37/20 ,  H01J41/02

CPC classification number: H01J37/18 ,  H01J37/20 ,  H01J41/02 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2605

Abstract: A charged particle beam instrument is offered which can easily perform an in situ observation in a gaseous atmosphere. The charged particle beam instrument (100) is used to perform an observation of a specimen (S) placed in a gaseous atmosphere and has a specimen chamber (2), a gas supply portion (6) for supplying a gas into the specimen chamber (2), a venting portion (7) for venting the specimen chamber (2), a gaseous environment adjuster (4), and a gas controller (812) for controlling the gaseous environment adjuster (4). This adjuster (4) has a gas inflow rate adjusting valve (40) for adjusting the flow rate of the gas supplied into the specimen chamber (2) and a first vacuum gauge (CG1) for measuring the pressure of the gas supplied into the specimen chamber (2). The gas controller (812) sets a target value of pressure for the gas supplied into the specimen chamber (2) based on a predetermined relational expression indicating a relationship between the reading of the first vacuum gauge (CG1) and the pressure inside the specimen chamber (2) and on a corrective coefficient for correcting the reading of the first vacuum gauge (CG1) according to the species of the gas supplied into the specimen chamber (2) and controls the gas inflow rate adjusting valve (40) such that the reading of the first vacuum gauge (CG1) reaches the target value of pressure.

Abstract translation: 提供了一种带电粒子束仪器，可以在气体气氛中轻松进行原位观察。 带电粒子束仪器（100）用于对放置在气体气氛中的样本（S）进行观察，并具有样本室（2），用于向样本室供给气体的气体供给部（6） 2），用于排出样品室（2）的排气部分（7），气体环境调节器（4）和用于控制气体环境调节器（4）的气体控制器（812）。 该调节器（4）具有用于调节供给到试样室（2）的气体的流量的气体流入量调节阀（40）和用于测定供给到试样室内的气体的压力的第一真空计（CG1） 室（2）。 气体控制器（812）基于表示第一真空计（CG1）的读数与试样室内的压力之间的关系的预定关系式，设定供给到试样室（2）的气体的目标值 （2），以及根据供给到试样室（2）的气体的种类来校正第一真空计（CG1）的读数的校正系数，并控制气体流入速率调节阀（40），使得读数 的第一个真空计（CG1）达到目标压力值。

公开(公告)号：US20140367570A1

公开(公告)日：2014-12-18

申请号：US14326076

申请日：2014-07-08

Applicant: EBARA CORPORATION

Inventor： Toshifumi Kimba ,  Tohru Satake ,  Tsutomu Karimata ,  Kenji Watanabe ,  Nobuharu Noji ,  Takeshi Murakami ,  Masahiro Hatakeyama ,  Mamoru Nakasuji ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito

IPC: H01J37/22 ,  H01J37/18 ,  H01J37/06 ,  H01J37/28

CPC classification number: H01J37/222 ,  G01N23/225 ,  G01N23/2251 ,  H01J37/06 ,  H01J37/073 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/082 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2813 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L2224/48227 ,  H01L2924/01019 ,  H01L2924/01025 ,  H01L2924/01057 ,  H01L2924/01067 ,  H01L2924/01078 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/3025 ,  H01L2924/00

Abstract: There is provided a substrate inspection method. The method includes: maintaining a vacuum in said inspection chamber; isolating said inspection chamber from a vibration; positioning the substrate on a stage in the inspection chamber; selecting an evaluation parameter according to a kind of said processing apparatus; and determining inspection regions of the substrate so that an inspection time required per a lot of the substrate is equal to a processing time spent for said processing step required per a lot of the substrate. The method also includes radiating a primary electron beam from an electron gun; deflecting the primary electron beam with an E*B unit; irradiating said inspection regions of the substrate with the deflected primary electron beam; and projecting secondary electrons emitted from said substrate through the E*B unit onto a detector with a secondary optical system.

Abstract translation: 提供了基板检查方法。 该方法包括：在所述检查室中保持真空; 将所述检查室与振动隔离; 将基板定位在检查室中的台上; 根据所述处理装置的种类选择评估参数; 并且确定基板的检查区域，使得每批次的基板所需的检查时间等于每批基板所需的所述处理步骤所花费的处理时间。 该方法还包括从电子枪辐射一次电子束; 用E * B单元偏转一次电子束; 用偏转的一次电子束照射基板的所述检查区域; 并且通过E * B单元将从所述衬底发射的二次电子投射到具有次级光学系统的检测器上。

公开(公告)号：US20140361166A1

公开(公告)日：2014-12-11

申请号：US14302221

申请日：2014-06-11

Applicant: Dov SHACHAL

Inventor： Dov SHACHAL

IPC: H01J37/28

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

公开(公告)号：US20140353151A1

公开(公告)日：2014-12-04

申请号：US14370763

申请日：2012-12-25

Applicant: Hitachi High-Technologies Corporation

Inventor： Asako Kaneko ,  Hisayuki Takasu ,  Hirobumi Mutou

IPC: H01J37/305 ,  H01J37/16 ,  H01J37/20 ,  H01J37/18

CPC classification number: H01J37/3053 ,  C23C8/40 ,  C23C14/505 ,  C23C16/4586 ,  H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/002 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/28 ,  H01J2237/3151 ,  H01J2237/31749

Abstract: The purpose of the present invention is to provide a charged particle beam irradiation apparatus of a relatively simple structure which performs cooling on a sample or a sample stage. An aspect of the present invention comprises: a charged particle source; a sample stage; and a driving mechanism that comprises a transmission mechanism which transmits a driving force to move the sample stage. The charged particle beam irradiation apparatus comprises a container capable of accommodating an ionic liquid (12), wherein the container is disposed in a vacuum chamber. When the ionic liquid (12) is accommodated in the container, at least a portion of the transmission mechanism is provided at a position submerged in the ionic liquid (12).

Abstract translation: 本发明的目的是提供一种对样品或样品台进行冷却的相对简单结构的带电粒子束照射装置。 本发明的一个方面包括：带电粒子源; 样品台 以及包括传递驱动力以移动样品台的传动机构的驱动机构。 带电粒子束照射装置包括能够容纳离子液体（12）的容器，其中容器设置在真空室中。 当离子液体（12）容纳在容器中时，传播机构的至少一部分设置在浸没在离子液体（12）中的位置处。

公开(公告)号：US08872129B2

公开(公告)日：2014-10-28

申请号：US12599339

申请日：2008-05-09

Applicant: John Damiano, Jr. ,  Stephen E. Mick ,  David P. Nackashi

Inventor： John Damiano, Jr. ,  Stephen E. Mick ,  David P. Nackashi

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/188 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/2602 ,  H01J2237/28 ,  H01J2237/2802

Abstract: Electron microscope support structures and methods of making and using same. The support structures are generally constructed using semiconductor materials and semiconductor manufacturing processes. The temperature of the support structure may be controlled and/or gases or liquids may be confined in the observation region for reactions and/or imaging.

Abstract translation: 电子显微镜支撑结构及其制作和使用方法。 支撑结构通常使用半导体材料和半导体制造工艺构造。 可以控制支撑结构的温度和/或气体或液体被限制在观察区域中用于反应和/或成像。

公开(公告)号：US20140264017A1

公开(公告)日：2014-09-18

申请号：US14289092

申请日：2014-05-28

Applicant: Hitachi High-Technologies Corporation

Inventor： Eiko NAKAZAWA ,  Hiroyuki KOBAYASHI ,  Susumu KUWABATA

IPC: H01J37/20 ,  G01N23/04 ,  H01J37/26

CPC classification number: H01J37/20 ,  G01N1/2813 ,  G01N23/04 ,  G01N23/2251 ,  G01N2001/4027 ,  H01J37/26 ,  H01J37/261 ,  H01J37/3007 ,  H01J2237/2002 ,  H01J2237/20214 ,  H01J2237/204 ,  H01J2237/206

Abstract: Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid. Note that the specimen-holding member is designed to be rotatable.

Abstract translation: 提供能够在不使样本变形的情况下观察样本的形状的装置。 通过允许具有开口的样本保持构件（例如，微网和网格）来保持离子液体并向其中充入试样以允许样品悬浮在离子液体中进行观察。 此外，在试样保持构件附近设置有注入离子液体（离子液体导入机构）和/或电极的机构。 当电极施加电压时，样品在离子液体中移动或变形。 可以观察样品移动或变形。 此外，在试样保持构件附近，设置蒸发装置，以使得能够在蒸发时将试样充入离子液体中。 此外，在样本保持部件附近，设置微毛细管，以将液态标本充入离子液体。 注意，试样保持构件被设计成可旋转。