公开(公告)号：US09653258B2

公开(公告)日：2017-05-16

申请号：US15049024

申请日：2016-02-20

Applicant: Krzysztof Grzelakowski

Inventor： Krzysztof Grzelakowski

IPC: H01J37/26 ,  H01J37/285 ,  H01J37/20 ,  H01J37/22

CPC classification number: H01J37/285 ,  G01N23/04 ,  G21K7/00 ,  H01J37/20 ,  H01J37/22 ,  H01J2237/2007 ,  H01J2237/2802 ,  H01J2237/2855

Abstract: The Near-field Optical Transmission Electron Emission Microscope involves the combination, in one instrument, of optical imaging in the near-field regime or close to it (in respect to the transmission electromagnetic radiation when the wavelength exceeds the desired lateral resolution) and the secondary electron imaging of EEM microscope (“Cathode lens objective” based Emission Electron Microscopy). These two microscopic techniques are combined by the application of the photon-electron converter, which converts the optical, transmission image of the object (illuminated by the penetrating electromagnetic radiation) to the correlated photoelectron image, by means of a matrix of one-way closed channels (capillaries). The closed, smooth front face of the converter (comprising channel-bottoms) remains in contact with the object of imaging, whereas its opposite, opened face (consisting of an array (matrix) of channel openings) is exposed to vacuum and emits the secondary electrons.

公开(公告)号：US20170040230A1

公开(公告)日：2017-02-09

申请号：US15303813

申请日：2015-03-31

Applicant: Hitachi High-Technologies Corporation

Inventor： Atsuko Yamaguchi ,  Osamu Inoue ,  Hiroki Kawada

IPC: H01L21/66 ,  H01J37/285 ,  H01J37/244 ,  H01L21/033

CPC classification number: H01L22/12 ,  H01J37/244 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/221 ,  H01J2237/24592 ,  H01J2237/2809 ,  H01J2237/2814 ,  H01J2237/2817 ,  H01L21/0332 ,  H01L21/0335 ,  H01L21/0337 ,  H01L21/0338 ,  H01L22/00

Abstract: Provided is a charged particle beam device which can specify a position of an initial core with high accuracy even when fine line and space patterns are formed by an SADP in plural times. The charged particle beam device includes a detector (810) which detects secondary charged particles discharged from a sample (807) when a charged particle beam is emitted to the sample having a plurality of patterns of line shape, a display unit (817) which displays image data of a surface of the sample on the basis of a signal of the secondary charged particles, a calculation unit (812) which calculates an LER value with respect to the plurality of the patterns of line shape from the image data, and a determination unit (816) which compares the values to determine a position of the initial core.

Abstract translation: 提供一种带电粒子束装置，即使在多次由SADP形成细线和空间图案时，也能够高精度地指定初始芯的位置。 带电粒子束装置包括：检测器（810），当检测器（810）将带电粒子束发射到具有多个线状图案的样品时，检测从样品（807）排出的二次带电粒子;显示单元（817），其显示 基于所述二次带电粒子的信号的所述样本的表面的图像数据，计算单元（812），其根据所述图像数据计算相对于所述多个线状图案的LER值，以及判定 单元（816），其比较该值以确定初始核心的位置。

公开(公告)号：US20170004954A1

公开(公告)日：2017-01-05

申请号：US15045624

申请日：2016-02-17

Applicant: Kabushiki Kaisha Toshiba

Inventor： Haruko AKUTSU ,  Makiko KATANO ,  Akira KURAMOTO

IPC: H01J37/248 ,  H01J37/244 ,  H01J37/28 ,  H01J37/22

CPC classification number: H01J37/248 ,  G01N23/2251 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/2007 ,  H01J2237/2801

Abstract: In accordance with an embodiment, an analytical apparatus includes a member, a voltage source connected to the member and a detecting section. The member has an inserting portion into which a sample holder supporting a sample is insertable and whose shape corresponds to a shape of the sample holder. The detecting section is configured to detect a substance to be emitted from the sample by field evaporation. The shape of the inserting portion in a cross section of a direction perpendicular to an inserting direction of the sample holder is a shape excluding a perfect circle.

Abstract translation: 根据实施例，分析装置包括构件，连接到构件的电压源和检测部。 构件具有插入部分，支撑样品的样品架可插入该插入部分中，并且其形状对应于样品架的形状。 检测部被配置为通过场蒸发来检测从样品发射的物质。 在垂直于样品架的插入方向的方向的横截面中的插入部分的形状是除了正圆之外的形状。

公开(公告)号：US20160379797A1

公开(公告)日：2016-12-29

申请号：US14902436

申请日：2014-06-25

Applicant: HITACHI HIGH-TECNOLOGIES CORPORATION

Inventor： Tsunenori NOMAGUCHI ,  Toshihide AGEMURA ,  Zulihuma YASENJIANG

IPC: H01J37/244 ,  H01J37/141 ,  H01J37/285 ,  H01J37/22

CPC classification number: H01J37/244 ,  H01J37/141 ,  H01J37/145 ,  H01J37/1471 ,  H01J37/22 ,  H01J37/226 ,  H01J37/285 ,  H01J2237/12 ,  H01J2237/14

Abstract: Disclosed is a charged particle beam apparatus wherein charged particles emitted from a sample are efficiently acquired at a position as close as possible to the sample, said position being in the objective lens. This charged particle beam apparatus is provided with: a charged particle beam receiving surface that is provided with a scintillator that emits light by means of charged particles; a photodetector that detects light emitted from the scintillator; a mirror that guides, to the photodetector, the light emitted from the scintillator; and an objective lens for focusing the charged particle beam to a sample. A distance (Lsm) between the charged particle beam receiving surface and the mirror is longer than a distance (Lpm) between the photodetector and the mirror, and the charged particle beam receiving surface, the mirror, and the photodetector are stored in the objective lens.

Abstract translation: 公开了一种带电粒子束装置，其中从样品发射的带电粒子在尽可能靠近样品的位置被有效地获取，所述位置在物镜中。 该带电粒子束装置具有：带电粒子束接收面，其具有通过带电粒子发光的闪烁器; 检测从闪烁体发出的光的光检测器; 向所述光电检测器引导从所述闪烁体发射的光的反射镜; 以及用于将带电粒子束聚焦到样品的物镜。 带电粒子束接收表面和反射镜之间的距离（Lsm）长于光电检测器和反射镜之间的距离（Lpm），并且带电粒子束接收表面，反射镜和光电检测器被存储在物镜 。

公开(公告)号：US20160211115A1

公开(公告)日：2016-07-21

申请号：US14915288

申请日：2014-08-28

Applicant: ASELTA NANOGRAPHICS

Inventor： Nader JEDIDI ,  Patrick SCHIAVONE ,  Jean-Hervé TORTAI ,  Thiago FIGUEIRO

IPC: H01J37/304 ,  H01J37/317 ,  H01J37/285

CPC classification number: H01J37/304 ,  G03F7/70441 ,  G03F7/705 ,  H01J37/285 ,  H01J37/3174 ,  H01J37/3175 ,  H01J2237/2487

Abstract: A method for projecting an electron beam onto a target includes correction of the scattering effects of the electrons in the target. This correction is made possible by a calculation step of a point spread function having a radial variation according to a piecewise polynomial function.

Abstract translation: 用于将电子束投射到目标上的方法包括校正目标中的电子的散射效应。 通过具有根据分段多项式函数的径向变化的点扩展函数的计算步骤，可以进行该校正。

公开(公告)号：US20160211109A1

公开(公告)日：2016-07-21

申请号：US14912553

申请日：2014-05-19

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yasuhira NAGAKUBO ,  Isao NAGAOKI ,  Hiroaki MATSUMOTO ,  Takeshi SATO

IPC: H01J37/20 ,  H01J37/285 ,  H01J37/18

CPC classification number: H01J37/20 ,  G01N23/22 ,  G01N23/2204 ,  H01J37/18 ,  H01J37/285 ,  H01J2237/006 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2802 ,  H01J2237/2806 ,  H01M8/04671

Abstract: The objective of the present invention is to maintain the surrounding of a sample at atmospheric pressure and efficiently detect secondary electrons. In a sample chamber of a charged particle device, a sample holder (4) has: a gas introduction pipe and a gas evacuation pipe for controlling the vicinity of a sample (20) to be an atmospheric pressure environment; a charged particle passage hole (18) and a micro-orifice (18) enabling detection of secondary electrons (15) emitted from the sample (20), co-located above the sample (20); and a charged particle passage hole (19) with a hole diameter larger than the micro-orifice (18) above the sample (20) so as to be capable of actively evacuating gas during gas introduction.

Abstract translation: 本发明的目的是将样品的周围保持在大气压下并有效地检测二次电子。 在带电粒子装置的样本室中，样本保持器（4）具有：气体导入管和用于将样品（20）附近控制为大气压环境的排气管; 带电粒子通孔（18）和微孔（18），其能够检测从样品（20）发射的二次电子（15），共同位于样品（20）上方。 以及孔径大于样品（20）上方的微孔（18）的带电粒子通道孔（19），以便能够在气体引入期间主动排出气体。

公开(公告)号：US20160196952A1

公开(公告)日：2016-07-07

申请号：US14916529

申请日：2014-05-16

Applicant: HIitachi High-Technologies Corporation

Inventor： Hiroaki MATSUMOTO ,  Takeshi SATO ,  Yoshifumi TANIGUCHI ,  Ken HARADA

IPC: H01J37/10 ,  H01J37/147 ,  H01J37/05 ,  H01J37/285

CPC classification number: H01J37/10 ,  G01N23/20058 ,  G01N2223/418 ,  H01J37/04 ,  H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/1472 ,  H01J37/153 ,  H01J37/24 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J37/28 ,  H01J37/285 ,  H01J37/295 ,  H01J2237/21 ,  H01J2237/2614

Abstract: The present invention relates to a lens-less Foucault method wherein a transmission electron microscope objective lens (5) is turned off, an electron beam crossover (11, 13) is matched with a selected area aperture (65), and the focal distance of a first imaging lens (61) can be changed to enable switching between a sample image observation mode and a sample diffraction pattern observation mode, characterized in that a deflector (81) is disposed in a stage following the first imaging lens (61), and conditions for an irradiating optical system (4) can be fixed after conditions for the imaging optical system have been determined. This allows a lens-less Foucault method to be implemented in a common general-use transmission electron microscope with no magnetic shielding lens equipped, without burdening the operator.

Abstract translation: 本发明涉及一种无透镜Foucault方法，其中透射电子显微镜物镜（5）被关闭，电子束交叉（11,13）与所选区域孔径（65）匹配，并且焦距 可以改变第一成像透镜（61）以在样本图像观察模式和样本衍射图案观察模式之间切换，其特征在于，偏转器（81）设置在跟随第一成像透镜（61）的阶段中，以及 可以在确定成像光学系统的条件之后固定照射光学系统（4）的条件。 这样就可以在没有磁屏蔽透镜的公共通用透射电子显微镜中实现无镜头福柯方法，而不会对操作者造成负担。

公开(公告)号：US20160141147A1

公开(公告)日：2016-05-19

申请号：US14934837

申请日：2015-11-06

Applicant: FEI Company

Inventor： Valerie Brogden ,  Jeffrey Blackwood ,  Michael Schmidt ,  Dhruti Trivedi ,  Richard J. Young ,  Thomas G. Miller ,  Brian Roberts Routh, JR. ,  Stacey Stone ,  Todd Templeton

IPC: H01J37/302 ,  H01J37/28 ,  H01J37/31 ,  H01J37/285

CPC classification number: H01J37/3023 ,  G01N1/286 ,  G01N2001/2873 ,  H01J37/28 ,  H01J37/285 ,  H01J37/3045 ,  H01J37/31 ,  H01J2237/208 ,  H01J2237/31745

Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.

Abstract translation: 描述了促进薄片的自动提取并将薄片附着到样品网格以便在透射电子显微镜上观察的技术。 本发明的一些实施例涉及使用机器视觉来确定薄片，探针和/或TEM网格的位置，以将探针附着到薄片并将薄片附接到TEM网格。 便于使用机器视觉的技术包括成形探针尖端，使得其位置可以被图像识别软件容易地识别。 图像减法技术可用于确定附着到探针上的薄片的位置，以将薄片移动到TEM网格以进行附着。 在一些实施例中，参考结构在探针上或在薄片上研磨以便于图像识别。

公开(公告)号：US09263229B2

公开(公告)日：2016-02-16

申请号：US14378386

申请日：2013-02-15

Applicant: Arnaud Arbouet ,  Florent Houdellier

Inventor： Arnaud Arbouet ,  Florent Houdellier

IPC: G21K5/04 ,  H01J37/073 ,  H01J37/26 ,  H01J37/285

CPC classification number: H01J37/073 ,  H01J37/26 ,  H01J37/285 ,  H01J2237/022 ,  H01J2237/0432 ,  H01J2237/049 ,  H01J2237/06333 ,  H01J2237/06341 ,  H01J2237/21 ,  H01J2237/2614 ,  H01J2237/2626 ,  H01J2237/2802

Abstract: A device and method for emitting electrons by a field effect. The device (10) includes a vacuum chamber (12) including a tip (14) having an end (18) and forming a cold cathode, an extracting anode (16), components adapted for generating a potential difference between the tip (14) and the anode (16); an electromagnetic wave source (22) outside the chamber (12); a system (24) for forwarding the electromagnetic wave emitted by the electromagnetic wave source from the outside to the inside of the chamber as far as the vicinity of the tip (14); a system (26) for focusing the electromagnetic wave, laid out inside the chamber (12); and a system (28) for aligning the electromagnetic wave outside the chamber and adapted for allowing alignment of the electromagnetic wave focused by the focusing system on the end of the tip.

Abstract translation: 一种通过场效应发射电子的装置和方法。 装置（10）包括一个真空室（12），该真空室包括具有端部（18）并形成冷阴极的尖端（14），提取阳极（16），适于产生尖端（14） 和阳极（16）; 在室（12）外部的电磁波源（22）; 一个系统（24），用于将电磁波源发射的电磁波从外部传送到腔室的内部，直到尖端（14）附近; 用于聚焦放置在腔室（12）内的电磁波的系统（26）; 以及用于将所述电磁波对准所述室外并适于允许由所述聚焦系统聚焦的所述电磁波对准所述尖端的端部的系统（28）。

公开(公告)号：US20150270181A1

公开(公告)日：2015-09-24

申请号：US14612841

申请日：2015-02-03

Applicant: PDF Solutions, Inc.

Inventor： Indranil De ,  Dennis J. Ciplickas ,  Stephen Lam ,  Jonathan Haigh ,  Vyacheslav V. Rovner ,  Christopher Hess ,  Tomasz W. Brozek ,  Andrzej J. Strojwas ,  Kelvin Doong ,  John K. Kibarian ,  Sherry F. Lee ,  Kimon W. Michaels ,  Marcin A. Strojwas ,  Conor O'Sullivan ,  Mehul Jain

IPC: H01L21/66 ,  G01R31/26

CPC classification number: H01J37/222 ,  G01N23/2251 ,  G01R31/26 ,  G01R31/2644 ,  H01J37/147 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/24592 ,  H01L22/12 ,  H01L22/20 ,  H01L22/30

Abstract: Product ICs/wafers include additional diagnostic, test, or monitoring structures opportunistically placed in filler cell positions, within tap cells, within decap cells, within scribe line areas, and/or within dummy fill regions. Improved fabrication processes utilize data from such structure(s) in wafer disposition decisions, rework decisions, process control, yield learning, or fault diagnosis.

Abstract translation: 产品IC /晶片包括机会性放置在填充单元位置，抽头单元内，分解单元内，划线区域内和/或虚拟填充区域内的附加诊断，测试或监视结构。 改进的制造工艺利用晶片配置决定，返工决定，过程控制，产量学习或故障诊断中的这种结构的数据。