公开(公告)号：US12104957B2

公开(公告)日：2024-10-01

申请号：US17620408

申请日：2020-06-25

Applicant: Protea Ltd

Inventor： Chris Daw ,  Robin Hutchinson

IPC: G01J3/427 ,  G01J3/02 ,  G01J3/10 ,  G01J3/12 ,  G01N21/33 ,  G01N21/3504 ,  G01N33/00 ,  G01N21/31

CPC classification number: G01J3/427 ,  G01J3/0218 ,  G01J3/108 ,  G01J3/12 ,  G01N21/33 ,  G01N21/3504 ,  G01N33/0037 ,  G01N33/0042 ,  G01J2003/102 ,  G01J2003/1213 ,  G01N2021/3155 ,  G01N2201/08

Abstract: The invention relates to a photometer (30) for analysing the composition of a sample gas. The photometer comprises an infra-red (IR) source (20) configured to direct a first plurality of pulses (40) of IR radiation through the sample gas to an IR detector (26), at least two of the first plurality of pulses being of different wavelength. The photometer further comprises an ultraviolet (UV) source (32) configured to generate a second plurality of pulses (38) of UV radiation for conveyance to a UV detector (36), at least two of the second plurality of pulses being of different wavelength. A path selection arrangement (22, 42-50) is configured to selectively convey different ones of the second plurality of pulses (38) to one of the sample gas and the UV detector (36). The photometer further comprises processing circuitry coupled to the IR source (20), the UV source (32), the IR detector (26), the UV detector (36) and the path selection arrangement (22, 42-50). The processing circuitry is configured to (i) select the wavelength to be used for a given UV pulse of the second plurality of pulses (38), (ii) receive a plurality of detection signals from each of the IR detector (26) and the UV detector (36) and (iii) based on the detection signals, determine a concentration of at least one component of the sample gas. A method for analysing the composition of a sample gas is also disclosed.

公开(公告)号：US20240068866A1

公开(公告)日：2024-02-29

申请号：US18237594

申请日：2023-08-24

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuo DOUGAKIUCHI

IPC: G01J3/02 ,  G01J3/427

CPC classification number: G01J3/021 ,  G01J3/0208 ,  G01J3/0289 ,  G01J3/427 ,  G01J2003/423

Abstract: The spectrometer includes: a light source unit emitting a laser beam; a mirror unit including a first plane mirror having a first mirror surface and a second plane mirror having a second mirror surface, wherein a measurement target is introduced between the first mirror surface and the second mirror surface; and a light detector detecting the laser beam returned by multiple reflection between the first mirror surface and the second mirror surface. The first mirror surface and the second mirror surface are arranged non-parallel to each other when viewed from the Z-axis direction so as to form an optical path of the laser beam reciprocating in the Y-axis direction while performing multiple reflection between the first mirror surface and the second mirror surface. The optical path of the laser beam between the first mirror surface and the second mirror surface is inclined with respect to the Z-axis direction.

公开(公告)号：US11668608B2

公开(公告)日：2023-06-06

申请号：US17063816

申请日：2020-10-06

Applicant: Tokyo Electron Limited

Inventor： Tong Wu ,  Kenji Nagai

IPC: G01J3/427 ,  G01K11/125 ,  G01N21/41 ,  G01K7/02 ,  G01N21/71

CPC classification number: G01K7/02 ,  G01J3/427 ,  G01K11/125 ,  G01N21/41 ,  G01N21/71 ,  G01N2201/1211

Abstract: A temperature measurement system configured to measure a temperature of a target object having a first main surface and a second main surface includes a light source unit configured to emit output light penetrating the target object and including a first wavelength range and a second wavelength range; a measurement unit configured to measure a spectrum of reflected light; an optical path length ratio calculator configured to calculate an optical path length ratio between the output light of the first wavelength range and the output light of the second wavelength range; and a temperature calculator configured to calculate the temperature of the target object based on the optical path length ratio and a previously investigated relationship between the temperature of the target object and a refractive index ratio between the output light of the first wavelength range and the output light of the second wavelength range.

公开(公告)号：US10060793B2

公开(公告)日：2018-08-28

申请号：US15000488

申请日：2016-01-19

Applicant: Xerox Corporation

Inventor： David C. Craig ,  Robert P. Herloski ,  David A. Mantell ,  Douglas E. Proctor ,  Jonathan B. Hunter ,  Stuart Schweid

IPC: G01J3/02 ,  G01J3/427 ,  G01J3/10 ,  G01J3/28

CPC classification number: G01J3/0297 ,  G01J3/027 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2803 ,  G01J3/427 ,  G01J3/513 ,  G01J3/524 ,  G01J2003/2806

Abstract: A method of spatially and spectrally calibrating a spectrophotometer including: a) emitting a white light illumination output from a full width illumination source; b) illuminating a test patch with the white light illumination output; c) reflecting a portion of the white light illumination output from the test patch to form a white light reflected illumination output; d) receiving the white light reflected illumination output at first, second and third rows of photosensitive elements to form a first calibration data set; e) emitting a cyan light illumination output from the full width illumination source; f) illuminating the test patch with the cyan light illumination output; g) reflecting a portion of the cyan light illumination output from the test patch to form a cyan light reflected illumination output; and, h) receiving the cyan light reflected illumination output at the second and third rows of photosensitive elements to form a second calibration data set.

公开(公告)号：US09970813B1

公开(公告)日：2018-05-15

申请号：US15704075

申请日：2017-09-14

Applicant: Biosense Webster (Israel) Ltd.

Inventor： Vadim Gliner ,  Assaf Govari ,  Yaron Ephrath ,  Andres Claudio Altmann

IPC: G01J1/42 ,  A61L2/28 ,  A61L2/20 ,  C02F1/32 ,  H05B3/00 ,  B01J19/12

CPC classification number: G01J1/429 ,  A61L2/208 ,  A61L2/28 ,  B01J19/123 ,  C02F1/32 ,  G01J3/10 ,  G01J3/2803 ,  G01J3/427 ,  G01N21/33 ,  G01N2021/8411 ,  H05B3/0052

Abstract: A method and system for UV detection of sterilant concentration and dissipation in a volume of a chamber may comprise focusing cameras on at least one point of an object in the chamber; transmitting UV light and sterilant into the chamber; scanning, using the cameras, the at least one point of the object and determining an amount of absorbance at the points; calculating, using the amount of absorbance, a concentration of the sterilant for each of the one or more points; and when the concentration is greater than a threshold, removing the sterilant from the volume. The sterilant may be hydrogen peroxide. The cameras may be stereoscopic cameras. The chamber may be partitioned into a grid of voxels for scanning.

公开(公告)号：US09921152B2

公开(公告)日：2018-03-20

申请号：US15336705

申请日：2016-10-27

Applicant: KLA-Tencor Corporation

Inventor： Shankar Krishnan ,  David Y. Wang

IPC: G01J3/40 ,  G01N21/3563 ,  G01N21/21 ,  G01J3/18 ,  G01J3/427

CPC classification number: G01N21/3563 ,  G01J3/0224 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/427 ,  G01J2003/4275 ,  G01N21/211 ,  G01N21/31 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2021/3568

Abstract: Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures at ultraviolet, visible, and infrared wavelengths are presented herein. In another aspect, wavelength errors are reduced by orienting the direction of wavelength dispersion on the detector surface perpendicular to the projection of the plane of incidence onto the detector surface. In another aspect, a broad range of infrared wavelengths are detected by a detector that includes multiple photosensitive areas having different sensitivity characteristics. Collected light is linearly dispersed across the surface of the detector according to wavelength. Each different photosensitive area is arranged on the detector to sense a different range of incident wavelengths. In this manner, a broad range of infrared wavelengths are detected with high signal to noise ratio by a single detector. These features enable high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.

公开(公告)号：US20180059003A1

公开(公告)日：2018-03-01

申请号：US15446878

申请日：2017-03-01

Applicant: EcoTec Solutions, Inc.

Inventor： Laurent Jourdainne

IPC: G01N21/01 ,  G01N33/00 ,  G01N21/31 ,  G01K13/00

CPC classification number: G01N21/01 ,  G01J3/427 ,  G01J2003/423 ,  G01J2003/4334 ,  G01K13/00 ,  G01M3/202 ,  G01M3/22 ,  G01N21/031 ,  G01N21/31 ,  G01N21/3504 ,  G01N21/359 ,  G01N21/39 ,  G01N33/0037 ,  G01N33/004 ,  G01N33/0044 ,  G01N33/0054 ,  G01N2021/399 ,  G01N2201/0221 ,  G01N2201/0612 ,  G01N2201/062 ,  G01N2201/066 ,  G01N2201/1241

Abstract: A system and method to discriminate between a first preselected gas and at least one other preselected gas use of an absorption spectroscopy analyzer that includes a Herriott cell and a temperature sensitive light source. The light source operates at a temperature that emits a beam at a wavelength that corresponds to high absorption by a first preselected gas. When a predetermined level of this gas is detected in a gas sample, the analyzer changes the operating temperature of the light source to emit a beam at a wavelength that corresponds to high absorption by a second preselected gas. The second preselected gas can be a different isotope of the first preselected gas.

公开(公告)号：US09829380B2

公开(公告)日：2017-11-28

申请号：US14427481

申请日：2014-06-20

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Tatsuo Itoh ,  Koichi Kusukame ,  Aki Yoneda

IPC: G01J4/00 ,  G01J3/46 ,  G01J3/427 ,  G01N21/359 ,  G01J3/02 ,  G01J3/433 ,  G01J3/10 ,  G01J3/28 ,  G01J3/32 ,  G01J3/42 ,  G01J3/06 ,  G01J1/42

CPC classification number: G01J3/427 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/0243 ,  G01J3/0278 ,  G01J3/0289 ,  G01J3/10 ,  G01J3/2803 ,  G01J3/32 ,  G01J3/42 ,  G01J3/433 ,  G01J2001/4242 ,  G01J2003/064 ,  G01J2003/102 ,  G01J2003/104 ,  G01J2003/106 ,  G01N21/359

Abstract: A light radiating portion radiates light with wavelength λ1 having predetermined absorptivity for an object and light with wavelength λ2 having smaller absorptivity for the object than the wavelength λ1, to a target, so as to scan in 2-dimensional directions. A light receiving portion receives scattered lights reflected by the target based on light with wavelength λ1 and light with wavelength λ2. A measuring portion generates information used for detection of the object at the target, based on difference between the two scattered lights with wavelength λ1 and wavelength λ2 received by the light receiving portion. An output portion outputs whether or not the object is present at the target, by 2-dimensional area information, based on scanning by the light radiating portion and information generated by the measuring portion.

公开(公告)号：US09726601B1

公开(公告)日：2017-08-08

申请号：US15594418

申请日：2017-05-12

Applicant: Airware, Inc.

Inventor： Jacob Y Wong ,  Thomas Campbell

IPC: G01N21/3504

CPC classification number: G01N21/3504 ,  G01J3/10 ,  G01J3/42 ,  G01J3/427 ,  G01N21/3151 ,  G01N21/3577 ,  G01N21/61 ,  G01N33/49 ,  G01N2021/3159 ,  G01N2201/0696

Abstract: NDIR is used to determine a concentration of a chosen molecule M in a liquid sample which contains one or more interfering molecules MJ which absorb radiation at the signal wavelength used in the NDIR process by addition of an interference source. M is calculated by electronics which use Rave(t) from a pulsed signal and reference channel output and a calibration curve which is validated by use of RJave(t2) from a pulsed interference and reference channel output. Signal, interference and reference sources are pulsed at a frequency which is sufficiently fast so that a given molecule of M or MJ will not pass in and out of the liquid sampling matrix within the pulsing frequency.

公开(公告)号：US20170205342A1

公开(公告)日：2017-07-20

申请号：US15336705

申请日：2016-10-27

Applicant: KLA-Tencor Corporation

Inventor： Shankar Krishnan ,  David Y. Wang

IPC: G01N21/3563 ,  G01J3/18 ,  G01J3/427 ,  G01N21/21

CPC classification number: G01N21/3563 ,  G01J3/0224 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/427 ,  G01J2003/4275 ,  G01N21/211 ,  G01N21/31 ,  G01N21/9501 ,  G01N2021/213 ,  G01N2021/3568

Abstract: Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures at ultraviolet, visible, and infrared wavelengths are presented herein. In another aspect, wavelength errors are reduced by orienting the direction of wavelength dispersion on the detector surface perpendicular to the projection of the plane of incidence onto the detector surface. In another aspect, a broad range of infrared wavelengths are detected by a detector that includes multiple photosensitive areas having different sensitivity characteristics. Collected light is linearly dispersed across the surface of the detector according to wavelength. Each different photosensitive area is arranged on the detector to sense a different range of incident wavelengths. In this manner, a broad range of infrared wavelengths are detected with high signal to noise ratio by a single detector. These features enable high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.