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    ELECTROMAGNETIC LENS FOR ELECTRON BEAM EXPOSURE APPARATUS
    82.
    发明申请
    ELECTROMAGNETIC LENS FOR ELECTRON BEAM EXPOSURE APPARATUS 有权
    电子束曝光装置电磁镜

    公开(公告)号：US20140166893A1

    公开(公告)日：2014-06-19

    申请号：US14090943

    申请日：2013-11-26

    Applicant: ADVANTEST CORPORATION

    Inventor： Akio Yamada

    IPC: H01J37/141

    CPC classification number: H01J37/141 ,  H01J2237/1405 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/31774

    Abstract: There is provided an electromagnetic lens which includes an electromagnetic coil wound to be rotationally symmetrical about an optical axis of an electron beam, and a pole piece covering the electromagnetic coil, in which: a gap is integrally formed in either one of an inner wall formed at an inner circumference side of the pole piece and a lower end wall formed in an end portion at an emission side of the electron beam, or a boundary portion between the two walls; the inner wall is formed to be thinnest at a portion close to the gap and to gradually become thicker as a distance from the gap increases; and the electromagnetic lens is formed such that a width in a radial direction thereof is more increased as being closer to the gap along with the change of the thickness of the inner wall.

    Abstract translation: 提供了一种电磁透镜，其包括卷绕成围绕电子束的光轴旋转对称的电磁线圈和覆盖电磁线圈的极片，其中：在形成的内壁中的任一个中一体形成间隙 在极片的内周侧和形成在电子束的发射侧的端部中的下端壁或两个壁之间的边界部分; 内壁形成为在靠近间隙的部分处最薄，并且随着与间隙的距离增加而逐渐变厚; 并且电磁透镜形成为使得随着内壁的厚度的变化，其径向方向上的宽度更靠近间隙而增加。

    Method and apparatus for modifying a ribbon-shaped ion beam
    83.
    发明授权
    Method and apparatus for modifying a ribbon-shaped ion beam 有权
    用于改变带状离子束的方法和装置

    公开(公告)号：US08089050B2

    公开(公告)日：2012-01-03

    申请号：US12621689

    申请日：2009-11-19

    Applicant: Kenneth Harry Purser ,  William H. Park

    Inventor： Kenneth Harry Purser ,  William H. Park

    IPC: H01J3/36

    CPC classification number: G21K1/093 ,  H01J37/12 ,  H01J37/153 ,  H01J37/3171 ,  H01J2237/1405 ,  H01J2237/1534 ,  H01J2237/30477

    Abstract: A ribbon-shaped ion beam is modified using multiple coil structures on a pair of opposed ferromagnetic bars. The coil structures comprise continuous windings which have predetermined variations along the length of the bar of turns per unit length. In an example, one coil structure may have uniform turns per unit length along the bar, so that energizing the coil structures forms a magnetic field component extending across the gap between the bars with a quadrupole intensity distribution. A second coil structure may have turns per unit length varying to produce a hexapole magnetic field intensity distribution. Further coil structures may be provided to produce octopole and decapole magnetic field distributions. The coil structures may be energized to produce magnetic fields parallel to the bars which vary along the length of the bars, to twist or flatten the ribbon-shaped beam.

    Abstract translation: 在一对相对的铁磁条上使用多个线圈结构修改带状离子束。 线圈结构包括沿着每单位长度的匝数的长度具有预定变化的连续绕组。 在一个示例中，一个线圈结构可以具有沿着棒的每单位长度的均匀匝数，使得对线圈结构的通电形成一个以四极强度分布延伸穿过棒之间的间隙的磁场分量。 第二线圈结构可以具有每单位长度的转弯以产生六极磁场强度分布。 可以提供另外的线圈结构以产生八极和十极磁场分布。 线圈结构可以被激励以产生平行于棒的磁场，其沿着杆的长度变化，以扭曲或平坦化带形梁。

    Electrostatic lens assembly
    84.
    发明授权
    Electrostatic lens assembly 有权
    静电透镜组件

    公开(公告)号：US07872239B2

    公开(公告)日：2011-01-18

    申请号：US12181171

    申请日：2008-07-28

    Applicant: Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

    Inventor： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

    IPC: H01J37/28 ,  H01J37/244 ,  G01R31/305

    CPC classification number: H01J37/12 ,  H01J37/145 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/28

    Abstract: A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.

    Abstract translation: 提供一种具有用于带电粒子束系统的静电透镜部件的透镜组件。 组件包括：具有锥形部分的第一电极，具有锥形部分的第二电极和具有锥形部分的第一绝缘体，其中第一绝缘体包括朝向其每个端部的两个延伸部分，并且其中两个 形成延伸部分以在绝缘体和每个相邻电极之间产生间隙。

    POST-DECEL MAGNETIC ENERGY FILTER FOR ION IMPLANTATION SYSTEMS
    86.
    发明申请
    POST-DECEL MAGNETIC ENERGY FILTER FOR ION IMPLANTATION SYSTEMS 有权
    用于离子植入系统的后胶磁能过滤器

    公开(公告)号：US20090321630A1

    公开(公告)日：2009-12-31

    申请号：US12477631

    申请日：2009-06-03

    Applicant: Geoffrey Ryding ,  Theodore Smick ,  Marvin Farley ,  Takao Sakase ,  Bo Vanderberg

    Inventor： Geoffrey Ryding ,  Theodore Smick ,  Marvin Farley ,  Takao Sakase ,  Bo Vanderberg

    IPC: B01D59/44 ,  A61N5/00 ,  H01J37/08

    CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J2237/0492 ,  H01J2237/103 ,  H01J2237/1405 ,  H01J2237/1501 ,  H01J2237/1523 ,  H01J2237/153 ,  H01J2237/21 ,  H01J2237/24528 ,  H01J2237/31705

    Abstract: A system and method for magnetically filtering an ion beam during an ion implantation into a workpiece is provided, wherein ions are emitted from an ion source and accelerated the ions away from the ion source to form an ion beam. The ion beam is mass analyzed by a mass analyzer, wherein ions are selected. The ion beam is then decelerated via a decelerator once the ion beam is mass-analyzed, and the ion beam is further magnetically filtered the ion beam downstream of the deceleration. The magnetic filtering is provided by a quadrapole magnetic energy filter, wherein a magnetic field is formed for intercepting the ions in the ion beam exiting the decelerator to selectively filter undesirable ions and fast neutrals.

    Abstract translation: 提供了一种用于在离子注入工件期间对离子束进行磁过滤的系统和方法，其中离子从离子源发射并且将离子加速离开离子源以形成离子束。 离子束通过质量分析器进行质量分析，其中选择离子。 一旦离子束被质量分析，离子束然后通过减速器减速，并且离子束进一步对减速度下游的离子束进行磁过滤。 磁滤波由四极磁能滤波器提供，其中形成磁场以截取离开减速器的离子束中的离子，以选择性地过滤不需要的离子和快速中性粒子。

    Scanning electron microscope
    87.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US07619219B2

    公开(公告)日：2009-11-17

    申请号：US11953496

    申请日：2007-12-10

    Applicant: Naomasa Suzuki ,  Hiroyuki Ito ,  Ichiro Tachibana

    Inventor： Naomasa Suzuki ,  Hiroyuki Ito ,  Ichiro Tachibana

    IPC: H01J37/28 ,  H01J37/256

    CPC classification number: H01J37/141 ,  H01J37/28 ,  H01J2237/1405 ,  H01J2237/141 ,  H01J2237/244

    Abstract: The present invention was made in view of a problem of an electron microscope in which a reduction in detection efficiency of electrons detected by a detector should be prevented by eliminating any influence of a leakage magnetic field through a gap in an objective lens onto the electrons emitted from a specimen. To solve the problem, the present invention provides an electron microscope having a configuration with: a pole piece electrode for accelerating primary electrons emitted at an electrons source; and an objective lens including the pole piece electrode. In the objective lens, an electrically and magnetically insulated gap is formed between the pole piece electrode and other pole piece, and an auxiliary coil is concentrically disposed with the objective lens at a middle position between the gap and a detection surface of the electron detector, with an electric current flowing through the auxiliary coil in the opposite direction from that of an electric current flowing through the objective lens coil.

    Abstract translation: 本发明考虑到电子显微镜的问题，其中通过消除通过物镜中的间隙的泄漏磁场对发射的电子的任何影响来防止检测器检测到的电子的检测效率的降低 从标本。 为了解决该问题，本发明提供一种具有以下结构的电子显微镜：具有用于加速在电子源发射的一次电子的极片电极; 以及包括极片电极的物镜。 在物镜中，在极片电极和其它极片之间形成电磁绝缘的间隙，并且辅助线圈与物镜同心地设置在间隙和电子检测器的检测表面之间的中间位置， 电流以与流过物镜线圈的电流相反的方向流过辅助线圈。

    Electron beam apparatus and method for production of its specimen chamber
    88.
    发明授权
    Electron beam apparatus and method for production of its specimen chamber 有权
    电子束装置及其试样室的制造方法

    公开(公告)号：US07566892B2

    公开(公告)日：2009-07-28

    申请号：US11907375

    申请日：2007-10-11

    Applicant: Tsuyoshi Inanobe ,  Sho Takami ,  Yoichi Ose ,  Katsuhiro Sasada

    Inventor： Tsuyoshi Inanobe ,  Sho Takami ,  Yoichi Ose ,  Katsuhiro Sasada

    IPC: G01N23/00

    CPC classification number: H01J37/09 ,  H01J37/16 ,  H01J2237/1405 ,  H01J2237/16 ,  H01J2237/2614 ,  H01J2237/2617 ,  H01J2237/28

    Abstract: A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.

    Abstract translation: 提供了具有屏蔽性能以防止环境磁场的电子束装置的结构。 电子束装置包括用于容纳用于将电子束会聚在试样上的磁性透镜的反射镜筒和用于容纳样本的试样室，其中具有导电性的非磁性材料用作至少一个反射镜的材料 桶和样品室的主体。 用于镜筒的材料或试样室的主体是铝合金，镜筒的侧壁或试样室的主体的厚度为10mm以上。 厚度小于镜筒侧壁或试样室主体的磁性板设置在镜筒的内侧壁或试样室的主体上。

    Particle-Optical Component
    89.
    发明申请
    Particle-Optical Component 审中-公开
    粒子光学部件

    公开(公告)号：US20090159810A1

    公开(公告)日：2009-06-25

    申请号：US12095198

    申请日：2006-11-28

    Applicant: Rainer Knippelmeyer ,  Stefan Schubert

    Inventor： Rainer Knippelmeyer ,  Stefan Schubert

    IPC: H01J1/50

    CPC classification number: H01J37/141 ,  H01J37/145 ,  H01J37/20 ,  H01J37/21 ,  H01J37/24 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/04922 ,  H01J2237/04926 ,  H01J2237/12 ,  H01J2237/1215 ,  H01J2237/14 ,  H01J2237/1405 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/2817

    Abstract: An objective lens arrangement includes a first, second and third pole pieces, each being substantially rotationally symmetric. The first, second and third pole pieces are disposed on a same side of an object plane. An end of the first pole piece is separated from an end of the second pole piece to form a first gap, and an end of the third pole piece is separated from an end of the second pole piece to form a second gap. A first excitation coil generates a focusing magnetic field in the first gap, and a second excitation coil generates a compensating magnetic field in the second gap. First and second power supplies supply current to the first and second excitation coils, respectively. A magnetic flux generated in the second pole piece is oriented in a same direction as a magnetic flux generated in the second pole piece.

    Abstract translation: 物镜配置包括第一，第二和第三极片，每个极片基本上是旋转对称的。 第一，第二和第三极片设置在物平面的同一侧。 第一极靴的端部与第二极靴的端部分离以形成第一间隙，并且第三极靴的端部与第二极靴的端部分离以形成第二间隙。 第一激励线圈在第一间隙中产生聚焦磁场，第二激励线圈在第二间隙中产生补偿磁场。 第一和第二电源分别向第一和第二励磁线圈提供电流。 在第二极靴中产生的磁通量在与第二极靴中产生的磁通量相同的方向上定向。

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