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公开(公告)号:MY136302A
公开(公告)日:2008-09-30
申请号:MYPI20021594
申请日:2002-04-30
Applicant: IBM
Inventor: SOLOMON PAUL M , SHAW JANE MARGARET , KAGAN CHERIE R , DIMITRAKOPOULOS CHRISTOS DIMITRIOS , NING TAK HUNG
IPC: D02G3/44 , H01L29/06 , H01L29/786 , H01L41/08 , H01L41/113 , H01L51/00 , H01L51/05
Abstract: ACTIVE DEVICES THAT HAVE EITHER A THREAD OR A RIBBON GEOMETRY. THE THREAD GEOMETRY INCLUDES SINGLE THREAD ACTIVE DEVICES (105,170,190) AND MULTIPLE THREAD DEVICES(50,90,100,120,140). SINGLE THREAD DEVICES HAVE A CENTRAL CORE (154,174,194) THAT MAY CONTAIN DIFFERENT MATERIALS DEPENDING UPON WHETHER THE ACTIVE DEVICE IS RESPONSIVE TO ELECTRICAL, LIGHT, MECHANICAL, HEAT, OR CHEMICAL ENERGY. SINGLE THREAD ACTIVE DEVICES INCLUDE FETS, ELECTRO-OPTICAL DEVICES, STRESS TRANSDUCERS, AND THE LIKE. THE ACTIVE DEVICES INCLUDE A SEMICONDUCTOR BODY (158,176,196) THAT FOR THE SINGLE THREAD DEVICES IS A LAYER ABOUT THE CORE OF THE THREAD. FOR THE MULTIPLE THREAD DEVICES, THE SEMICONDUCTOR BODY IS EITHER A LAYER(72,76,78,80) ON ONE OR MORE OF THE THREADS OR AN ELONGATED BODY(110,130) DISPOSED BETWEEN TWO OF THE THREADS. FOR EXAMPLE, A FET IS FORMED OF THREE THREADS, ONE (54,56) OF WHICH CARRIES A GATE INSULATOR LAYER AND A SEMICONDUCTOR LAYER AND THE OTHER TWO (58,60) OF WHICH ARE ELECTRICALLY CONDUCTIVE AND SERVE AS THE SOURCE AND DRAIN. THE SUBSTRATES OR THREADS ARE PREFERABLY FLEXIBLE AND CAN BE FORMED IN A FABRIC.FIGURE 1
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公开(公告)号:DE69304503D1
公开(公告)日:1996-10-10
申请号:DE69304503
申请日:1993-12-13
Applicant: IBM
Inventor: BAILEY FREDERIC DENIS , BUCHANAN DOUGLAS ANDREW , CALLEGARI ALESSANDRO CESARE , CLEARFIELD HOWARD MARC , DOANY FUAD ELIAS , FLAGELLO DONIS GEORGE , HOVEL HAROLD JOHN , LATULIPE DOUGLAS CHARLES , LUSTIG NAFTALI ELIAHU , POMERENE ANDREW THOMAS STEWART , PURUSHOTHAMAN SAMPATH , SCHERPEREEL CHRISTOPHER MICHAE , SEEGER DAVID EARLE , SHAW JANE MARGARET
IPC: G03F1/08 , C01B31/06 , C08J7/06 , C23C8/26 , C23C8/50 , C23C16/26 , C23C16/27 , C23C16/50 , C30B29/04 , G02B1/10 , G11B5/255 , H01L21/31 , H01L21/314
Abstract: The present invention relates to an improved method of depositing a diamond-like carbon film onto a substrate by low temperature plasma-enhanced chemical vapor deposition (PECVD) from a hydrocarbon/helium plasma. More specifically, the diamond-like carbon films of the present invention are deposited onto the substrate by employing acetylene which is heavily diluted with helium as the plasma gas. The films formed using the process of the present invention are characterized as being amorphous and having dielectric strengths comparable to those normally observed for diamond films. More importantly, however is that the films produced herein are thermally stable, optically transparent, absorbent in the ultraviolet range and hard thus making them extremely desirable for a wide variety of applications.
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公开(公告)号:DE69115106D1
公开(公告)日:1996-01-18
申请号:DE69115106
申请日:1991-02-07
Applicant: IBM
Inventor: BEAMAN BRIAN SAMUEL , FOGEL KEITH EDWARD , KIM JUNGIHL , MAYR WOLFGANG , SHAW JANE MARGARET , WALKER GEORGE FREDERICK
Abstract: An electrical connector is described for making contact with a plurality of convex and deformable contacts (40, 46) on an electronic device (38). The electrical connector comprises a substrate having a plurality of conductors (10, 12, 14) which extend above its surface. A polymeric material (20) is disposed on the surface of the substrate and has openings which expose the conductors, each opening sized to receive one of the convex, deformable contacts, and to enable electrical connection between the exposed conductors and the deformable contacts. A mechanism is provided for urging the deformable contacts on the electronic device against the exposed conductors. The mechanism exerts sufficient force between the device and the conductors to cause some deformation of the convex contact areas by the conductors.
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公开(公告)号:DE3775980D1
公开(公告)日:1992-02-27
申请号:DE3775980
申请日:1987-04-14
Applicant: IBM
Inventor: MCBRIDE DONALD GENE , SHAW JANE MARGARET
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公开(公告)号:DE3673219D1
公开(公告)日:1990-09-13
申请号:DE3673219
申请日:1986-03-11
Applicant: IBM
Inventor: BABICH EDWARD DARKO , HATZAKIS MICHAEL , LIUTKIS JOHN JOSEPH , PARASCZCAK JURI ROSTYSLAV , SHAW JANE MARGARET
IPC: G03C5/00 , C08F2/48 , C08F290/00 , C08F299/00 , C08F299/08 , C08K5/07 , C08L83/07 , G03F7/00 , G03F7/004 , G03F7/038 , G03F7/075 , H01L21/30
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公开(公告)号:AU5260586A
公开(公告)日:1986-09-25
申请号:AU5260586
申请日:1986-01-22
Applicant: IBM
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公开(公告)号:MY117278A
公开(公告)日:2004-06-30
申请号:MYPI9403563
申请日:1994-12-29
Applicant: IBM
Inventor: HEDRICK JEFFREY CURTIS , LEWIS DAVID ANDREW , SHAW JANE MARGARET , VIEHBECK ALFRED , WHITEHAIR STANLEY JOSEPH
Abstract: A MICROWAVE PROCESSING SYSTEM IS PROVIDED WHEREIN THE MATERIAL TO BE PROCESSED IS IN THE FORM OF WEB TYPE QUANTITY CONFIGURATION WITH A THICKNESS THAT IS SMALL IN RELATION TO THE WAVELENGTH OF A PARTICULAR MICROWAVE FREQUENCY. THE MATERIAL IS PASSED THROUGH THE FIELD ASSOCIATED WITH A PLURALITY OF MICROWAVE STANDING WAVES OF THE PARTICULAR FREQUENCY, EACH ADJACENT STANDING WAVE BEING OFFSET 1/4 WAVELENGTH ALONG THE DIRECTION OF MOVEMENT OF THE WEB. A CARRIER GAS REMOVES VOLATILE SOLVENTS FROM THE MATERIAL SURFACES.CONTROL IS PROVIDED FOR THE INTERRELATIONSHIP OF TEMPERATURE,RATE OF MOVEMENT, FLOW OF CARRIER GAS, AND MICROWAVE POWER.
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公开(公告)号:DE69431394T2
公开(公告)日:2003-06-05
申请号:DE69431394
申请日:1994-12-21
Applicant: IBM
Inventor: HEDRICK JEFFREY CURTIS , LEWIS DAVID ANDREW , SHAW JANE MARGARET , VIEHBECK ALFRED , WHITEHAIR STANLEY JOSEPH
Abstract: A microwave processing system is provided wherein the material to be processed is in the form of a web type quantity configuration with a thickness that is small in relation to the wavelength of a particular microwave frequency. The material is passed through the field associated with a plurality of microwave standing waves of the particular frequency, each adjacent standing wave being offset 1/4 wavelength along the direction of movement of the web. A carrier gas removes volatile solvents from the material surfaces. Control is provided for the interrelationship of temperature, rate of movement, flow of carrier gas, and microwave power.
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公开(公告)号:DE69304503T2
公开(公告)日:1997-03-20
申请号:DE69304503
申请日:1993-12-13
Applicant: IBM
Inventor: BAILEY FREDERIC DENIS , BUCHANAN DOUGLAS ANDREW , CALLEGARI ALESSANDRO CESARE , CLEARFIELD HOWARD MARC , DOANY FUAD ELIAS , FLAGELLO DONIS GEORGE , HOVEL HAROLD JOHN , LATULIPE DOUGLAS CHARLES , LUSTIG NAFTALI ELIAHU , POMERENE ANDREW THOMAS STEWART , PURUSHOTHAMAN SAMPATH , SCHERPEREEL CHRISTOPHER MICHAE , SEEGER DAVID EARLE , SHAW JANE MARGARET
IPC: G03F1/08 , C01B31/06 , C08J7/06 , C23C8/26 , C23C8/50 , C23C16/26 , C23C16/27 , C23C16/50 , C30B29/04 , G02B1/10 , G11B5/255 , H01L21/31 , H01L21/314
Abstract: The present invention relates to an improved method of depositing a diamond-like carbon film onto a substrate by low temperature plasma-enhanced chemical vapor deposition (PECVD) from a hydrocarbon/helium plasma. More specifically, the diamond-like carbon films of the present invention are deposited onto the substrate by employing acetylene which is heavily diluted with helium as the plasma gas. The films formed using the process of the present invention are characterized as being amorphous and having dielectric strengths comparable to those normally observed for diamond films. More importantly, however is that the films produced herein are thermally stable, optically transparent, absorbent in the ultraviolet range and hard thus making them extremely desirable for a wide variety of applications.
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