公开(公告)号：US20110114850A1

公开(公告)日：2011-05-19

申请号：US12621689

申请日：2009-11-19

Applicant: Kenneth H. Purser ,  William H. Park, JR.

Inventor： Kenneth H. Purser ,  William H. Park, JR.

IPC: G21K1/093

CPC classification number: G21K1/093 ,  H01J37/12 ,  H01J37/153 ,  H01J37/3171 ,  H01J2237/1405 ,  H01J2237/1534 ,  H01J2237/30477

Abstract: A ribbon-shaped ion beam is modified using multiple coil structures on a pair of opposed ferromagnetic bars. The coil structures comprise continuous windings which have predetermined variations along the length of the bar of turns per unit length. In an example, one coil structure may have uniform turns per unit length along the bar, so that energizing the coil structures forms a magnetic field component extending across the gap between the bars with a quadrupole intensity distribution. A second coil structure may have turns per unit length varying to produce a hexapole magnetic field intensity distribution. Further coil structures may be provided to produce octopole and decapole magnetic field distributions. The coil structures may be energized to produce magnetic fields parallel to the bars which vary along the length of the bars, to twist or flatten the ribbon-shaped beam.

Abstract translation: 在一对相对的铁磁条上使用多个线圈结构修改带状离子束。 线圈结构包括沿着每单位长度的匝数的长度具有预定变化的连续绕组。 在一个示例中，一个线圈结构可以具有沿着棒的每单位长度的均匀匝数，使得对线圈结构的通电形成一个以四极强度分布延伸穿过棒之间的间隙的磁场分量。 第二线圈结构可以具有每单位长度的转弯以产生六极磁场强度分布。 可以提供另外的线圈结构以产生八极和十极磁场分布。 线圈结构可以被激励以产生平行于棒的磁场，其沿着杆的长度变化，以扭曲或平坦化带形梁。

公开(公告)号：US07928405B2

公开(公告)日：2011-04-19

申请号：US12181199

申请日：2008-07-28

Applicant: Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

Inventor： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

IPC: H01J1/50

CPC classification number: H01J37/141 ,  H01J2237/1405 ,  Y10T29/4902

Abstract: A lens assembly having a magnetic lens assembly for a charged particle beam system is provided. The lens assembly includes: a first pole piece having a connecting portion of the first pole piece and a gap portion of the first pole piece, a second pole piece having a connecting portion of the second pole piece and a gap portion of the second pole piece, wherein the first pole piece and the second pole piece provide a gap at the respective gap portions, a coil for exciting the magnetic lens assembly, a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece, wherein the pole pieces are connected with each other at the respective connecting portions and have a centering element receiving portion towards the respective gap portion ends of the pole pieces.

Abstract translation: 提供了一种具有用于带电粒子束系统的磁性透镜组件的透镜组件。 透镜组件包括：第一极片，其具有第一极靴的连接部分和第一极靴的间隙部分，第二极靴具有第二极靴的连接部分和第二极靴的间隙部分 ，其中所述第一极靴和所述第二极靴在相应的间隙部分处提供间隙，用于激发所述磁性透镜组件的线圈;定心元件，包括具有比所述第一材料和材料的材料更小的杨氏模量的材料 所述极片在相应的连接部分处彼此连接并且具有朝向所述极片的相应间隙部分端部的定心元件接收部分。

公开(公告)号：US07906762B2

公开(公告)日：2011-03-15

申请号：US12303611

申请日：2007-06-07

Applicant: Mart Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Ben Jacobus Marie Bormans ,  Steven Berger ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus Wilhelmus Gerardus Persoon

Inventor： Mart Petrus Maria Bierhoff ,  Bart Buijsse ,  Cornelis Sander Kooijman ,  Hugo Van Leeuwen ,  Hendrik Gezinus Tappel ,  Colin August Sanford ,  Sander Richard Marie Stoks ,  Ben Jacobus Marie Bormans ,  Steven Berger ,  Koen Arnoldus Wilhelmus Driessen ,  Johannes Antonius Hendricus Wilhelmus Gerardus Persoon

IPC: H01J37/08 ,  H01J37/18 ,  H01J5/02

CPC classification number: H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

Abstract translation: 紧凑型电子显微镜使用具有形成样品所在的真空区域的一部分的壁的可移除的样品保持器。 通过使用可拆卸的样品架来容纳真空，在成像之前需要排空的空气的体积大大减少，并且显微镜可以被快速排空。 在优选实施例中，滑动真空密封允许样品保持器位于电子柱下方，并且样品保持器首先在真空缓冲器下通过以除去样品保持器中的空气。

公开(公告)号：US07893406B1

公开(公告)日：2011-02-22

申请号：US11476411

申请日：2006-06-27

Applicant: Xu Zhang ,  Zhong-Wei Chen

Inventor： Xu Zhang ,  Zhong-Wei Chen

IPC: H01J1/50

CPC classification number: H01J37/141 ,  H01J37/063 ,  H01J2237/065 ,  H01J2237/083 ,  H01J2237/1035 ,  H01J2237/1405

Abstract: An electron gun comprises an electron emitter, an electrode surrounding the electron emitter, an extraction electrode, and a double condenser lens assembly, the double condenser lens assembly comprising a magnetic immersion pre-condenser lens and a condenser lens. In combination with a probe forming objective lens, the electron gun apparatus can provide an electron beam of independently adjustable probe size and probe current, as is desirable in electron beam applications. The electron emitter is immersed in the magnetic field generated by a magnetic type pre-condenser lens. When activated, the pre-condenser lens collimates the beam effectively to increase its angular intensity while at the same time enlarging the virtual source as compared with non-immersion case, due to geometric magnification and aberrations of its lens action. The pre-condenser lens is followed by a condenser lens. If the condenser lens is of the magnetic type, its peak magnetic field is far enough away and thus its action does not significantly affect the size of the virtual source. Independent adjustment of the lenses, combined with suitable selection of final probe forming objective aperture size, allows various combination of the final probe size and probe current to be obtained in a range sufficient for most electron beam applications.

Abstract translation: 电子枪包括电子发射器，围绕电子发射体的电极，引出电极和双重聚光透镜组件，双重聚光透镜组件包括磁性浸入式预聚光透镜和聚光透镜。 与形成物镜的探针组合，如在电子束应用中所希望的那样，电子枪装置可以提供独立可调的探针尺寸和探针电流的电子束。 将电子发射器浸入由磁式预聚光透镜产生的磁场中。 当激活时，由于几何放大和其透镜作用的像差，预聚焦透镜有效地准直光束以增加其角度强度，同时与非浸没情况相比放大虚拟光源。 预聚光透镜之后是聚光透镜。 如果聚光透镜是磁性的，则其峰值磁场足够远，因此其作用不会显着影响虚拟源的尺寸。 透镜的独立调整结合适当选择最终探针形成物镜孔径的尺寸允许在足以满足大多数电子束应用的范围内获得最终探针尺寸和探针电流的各种组合。

公开(公告)号：US07759652B2

公开(公告)日：2010-07-20

申请号：US11749181

申请日：2007-05-16

Applicant: Takashi Ohshima ,  Mitsugu Sato ,  Yutaka Kaneko ,  Souichi Katagiri ,  Koichiro Takeuchi

Inventor： Takashi Ohshima ,  Mitsugu Sato ,  Yutaka Kaneko ,  Souichi Katagiri ,  Koichiro Takeuchi

IPC: H01J1/50

CPC classification number: H01J37/143 ,  H01J37/28 ,  H01J2237/1405 ,  H01J2237/2813 ,  H01J2237/31749

Abstract: The present invention provides a compact electron lens causing little aberration, and a charged particle beam apparatus such as a scanning electron microscope that is super compact and offers a high resolution. An upper magnetic pole and a sample-side magnetic pole are magnetically coupled to the respective poles of a permanent magnet that is made of a highly strong magnetic material such as a rare-earth cobalt system or a neodymium-iron-boron system, that is axially symmetrical, and that has a hole in the center thereof. An inner gap is created on the side of a center axis. Thus, a magnetic lens is formed axially. Moreover, a semi-stationary magnetic path that shields an outside magnetic field and has the magnetic reluctance thereof regulated is disposed outside. The sample-side magnetic pole and magnetic path defines a region where magnetic reluctance is the highest outside the permanent magnet. A space defined by the permanent magnet, upper magnetic pole, sample-die magnetic pole, and semi-stationary magnetic path is filled with a filling made of a non-magnetic material. Thus, an objective lens is constructed.

Abstract translation: 本发明提供一种产生很小像差的小型电子透镜，以及诸如扫描电子显微镜的带电粒子束装置，其具有超级紧凑并且提供高分辨率。 上磁极和样本侧磁极磁耦合到由诸如稀土钴体系或钕铁硼体系的高强度磁性材料制成的永磁体的各极上，即， 轴向对称，并且在其中心具有孔。 在中心轴的一侧产生内部间隙。 因此，磁性透镜轴向形成。 此外，将外部磁场屏蔽并具有调节磁阻的半静态磁路设置在外部。 样品侧磁极和磁路限定永磁体外磁阻最高的区域。 由永磁体，上磁极，样品芯磁极和半静态磁路限定的空间填充有由非磁性材料制成的填充物。 因此，构成物镜。

公开(公告)号：US20090108200A1

公开(公告)日：2009-04-30

申请号：US11926791

申请日：2007-10-29

Applicant: Shixin Wang

Inventor： Shixin Wang

IPC: H01J37/28 ,  H01J3/22

CPC classification number: H01J37/14 ,  H01J29/64 ,  H01J37/09 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/045 ,  H01J2237/0492 ,  H01J2237/103 ,  H01J2237/1405 ,  H01J2237/1534

Abstract: A method and electron microscope system of performing three-dimensional imaging using an electron microscope. At least some of the illustrative embodiments are methods comprising generating an electron beam, and creating a hollow-cone electron beam (by passing the electron beam through an annular aperture), focusing the hollow-cone electron beam to form a probe, scanning a specimen using the probe; and performing three-dimensional imaging based on the scanning.

Abstract translation: 使用电子显微镜进行三维成像的方法和电子显微镜系统。 至少一些说明性实施例是包括产生电子束并产生中空锥形电子束（通过使电子束通过环形孔）的方法，聚焦中空锥形电子束以形成探针，扫描样品 使用探针; 并基于扫描进行三维成像。

公开(公告)号：US20070215812A1

公开(公告)日：2007-09-20

申请号：US11587234

申请日：2005-02-24

Applicant: Hans-Joachim Doering ,  Thomas Elster

Inventor： Hans-Joachim Doering ,  Thomas Elster

IPC: H01J1/50

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3175 ,  H01J2237/1405 ,  H01J2237/153

Abstract: A correction lens system for a particle beam projection device with at least a first magnetic lens and a second magnetic lens is disclosed. A plurality of correction lens pairs is arranged between the first magnetic lens and second magnetic lens and the particle beam.

Abstract translation: 公开了一种用于具有至少第一磁性透镜和第二磁性透镜的粒子束投影装置的校正透镜系统。 在第一磁透镜和第二磁透镜与粒子束之间布置有多个校正透镜对。

公开(公告)号：US07112803B2

公开(公告)日：2006-09-26

申请号：US10897635

申请日：2004-07-23

Applicant: Igor Petrov ,  Igor Krivts (Krayvitz) ,  Albert Karabekov

Inventor： Igor Petrov ,  Igor Krivts (Krayvitz) ,  Albert Karabekov

IPC: H01J37/10 ,  H01J37/147

CPC classification number: H01J37/147 ,  H01J37/026 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/1405 ,  H01J2237/1526

Abstract: A method and system are presented for directing a charged particle beam towards and away from a sample. The system comprises a lens arrangement having an electrode formed with a beam opening for a charged particle beam passage therethrough; and a magnetic deflector. The magnetic deflector has a magnetic circuit formed by a core part for carrying excitation coils and a polepieces part. The polepieces of the magnetic deflector are in electrical communication with the electrode of the lens arrangement and are electrically insulated from the other part of the magnetic circuit.

Abstract translation: 提出了一种用于将带电粒子束朝向和远离样品引导的方法和系统。 该系统包括透镜装置，其具有形成有用于带电粒子束通过的光束开口的电极; 和磁偏转器。 磁偏转器具有由用于承载励磁线圈的芯部和极靴部分形成的磁路。 磁偏转器的极点与透镜装置的电极电连通，并且与磁路的另一部分电绝缘。

公开(公告)号：US20060151713A1

公开(公告)日：2006-07-13

申请号：US11323017

申请日：2005-12-30

Applicant: Pavel Adamec

Inventor： Pavel Adamec

IPC: H01J1/50

CPC classification number: H01J37/12 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/1205 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/1501 ,  H01J2237/2611 ,  H01J2237/2817

Abstract: The invention provides a multiple lens assembly 1 for a charged particle beam device which comprises at least two lens sub units 2, each sub unit having an optical axis 3, wherein at least two of the optical axes of the lens sub units are inclined to each other. Further, the invention provides a charged particle beam device which comprises at least one multiple lens assembly and a method for operating a charged particle beam device.

Abstract translation: 本发明提供了一种用于带电粒子束装置的多透镜组件1，其包括至少两个透镜子单元2，每个子单元具有光轴3，其中透镜子单元的至少两个光轴倾斜于每个 其他。 此外，本发明提供一种带电粒子束装置，其包括至少一个多透镜组件和用于操作带电粒子束装置的方法。

公开(公告)号：US20050035291A1

公开(公告)日：2005-02-17

申请号：US10889967

申请日：2004-07-13

Applicant: Raymond Hill ,  Colin Sanford ,  Lawrence Scipioni ,  Mark DiManna ,  Michael Tanguay

Inventor： Raymond Hill ,  Colin Sanford ,  Lawrence Scipioni ,  Mark DiManna ,  Michael Tanguay

IPC: H01J37/141 ,  H01J37/02 ,  H01J37/08 ,  H01J37/26 ,  H01J37/28 ,  H01J37/30

CPC classification number: H01J37/141 ,  H01J37/026 ,  H01J37/08 ,  H01J2237/0042 ,  H01J2237/0805 ,  H01J2237/1405 ,  H01J2237/28 ,  H01J2237/317 ,  H01J2237/31749

Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.

Abstract translation: 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。 离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。 可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。 磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。