公开(公告)号：NL2008426A

公开(公告)日：2012-10-09

申请号：NL2008426

申请日：2012-03-07

Applicant: ASML NETHERLANDS BV

Inventor： JAGER PIETER ,  BANINE VADIM ,  ONVLEE JOHANNES ,  STEVENS LUCAS ,  WUISTER SANDER ,  IOSAD NIKOLAY

IPC: G03F7/20

公开(公告)号：NL2007160A

公开(公告)日：2012-02-28

申请号：NL2007160

申请日：2011-07-21

Applicant: ASML NETHERLANDS BV

Inventor： MARK MARTINUS ,  MAUCZOK RUEDIGER ,  GIESBERS JACOBUS ,  BANINE VADIM ,  JEUNINK ANDRE ,  DIJKSMAN JOHAN ,  WUISTER SANDER ,  KLOOTWIJK JOHAN ,  KOOLE ROELOF ,  PEETERS EMIEL ,  HEESCH CHRIS

IPC: G03F7/00

公开(公告)号：NL2007129A

公开(公告)日：2012-02-14

申请号：NL2007129

申请日：2011-07-18

Applicant: ASML NETHERLANDS BV

Inventor： KOEVOETS ADRIANUS ,  RENKENS MICHAEL ,  WUISTER SANDER

IPC: G03F7/00

公开(公告)号：NL2006454A

公开(公告)日：2011-11-07

申请号：NL2006454

申请日：2011-03-23

Applicant: ASML NETHERLANDS BV

Inventor： DIJKSMAN JOHAN ,  BOEF ARIE ,  WUISTER SANDER ,  MARK MARTINUS

IPC: G03F7/00

Abstract: A method of aligning a substrate and an imprint template is disclosed. The method includes directing an alignment radiation beam towards an imprint template alignment mark and an adjacent substrate alignment mark, the imprint template alignment mark and the substrate alignment mark each including a grating which extends in a first direction and a grating which extends in a second direction, providing relative movement between the imprint template and the substrate in the first direction and in the second direction, using an intensity detector to detect the intensity of alignment radiation redirected in the zero-order direction by the imprint template alignment mark and the substrate alignment mark during the relative movement in the first direction and in the second direction, and determining an aligned position of the imprint template alignment mark and the substrate alignment mark based upon the detected intensity.

公开(公告)号：NL2005956A

公开(公告)日：2011-08-29

申请号：NL2005956

申请日：2011-01-06

Applicant: ASML NETHERLANDS BV

Inventor： KOOLE ROELOF ,  BANINE VADIM ,  WUISTER SANDER ,  PEETERS EMIEL

IPC: G03F7/20

公开(公告)号：NL2005254A

公开(公告)日：2011-03-23

申请号：NL2005254

申请日：2010-08-23

Applicant: ASML NETHERLANDS BV

Inventor： WUISTER SANDER ,  BOEF ARIE

IPC: G03F7/00

公开(公告)号：NL2004685A

公开(公告)日：2011-01-31

申请号：NL2004685

申请日：2010-05-07

Applicant: ASML NETHERLANDS BV

Inventor： KOOLE ROLF ,  WUISTER SANDER

IPC: G03F7/00

公开(公告)号：NL2004735A

公开(公告)日：2011-01-10

申请号：NL2004735

申请日：2010-05-18

Applicant: ASML NETHERLANDS BV

Inventor： KRUIJT-STEGEMAN YVONNE ,  KOEVOETS ADRIANUS ,  SCHIFFART CATHARINUS ,  BANINE VADIM ,  BOEF ARIE ,  JEUNINK ANDRE ,  RENKENS MICHAEL ,  SCHOTHORST GERARD ,  DIJKSMAN JOHAN ,  SCHOORMANS CAROLUS ,  WUISTER SANDER

IPC: G03F7/00

公开(公告)号：NL2004409A

公开(公告)日：2010-11-22

申请号：NL2004409

申请日：2010-03-16

Applicant: ASML NETHERLANDS BV

Inventor： SCHIFFART CATHARINUS ,  JEUNINK ANDRE ,  VERMEULEN JOHANNES ,  WUISTER SANDER ,  KRUIJT-STEGEMAN YVONNE ,  JANSEN NORBERT

IPC: G03F7/00

公开(公告)号：NL2002942A

公开(公告)日：2010-03-09

申请号：NL2002942

申请日：2009-05-28

Applicant: ASML NETHERLANDS BV

Inventor： KRUIJT-STEGEMAN YVONNE ,  JEUNINK ANDRE ,  VERMEULEN JOHANNES ,  WUISTER SANDER ,  LAFARRE RAYMOND ,  SCHIFFART CATHARINUS ,  JANSEN NORBERT

IPC: G03F7/00 ,  H01L21/30