Optical emission spectroscopic (OES) instrument with automatic top and bottom slit curtains
    263.
    发明授权
    Optical emission spectroscopic (OES) instrument with automatic top and bottom slit curtains 有权
    具有自动顶部和底部狭缝窗帘的光学发射光谱仪(OES)仪器

    公开(公告)号:US09494463B2

    公开(公告)日:2016-11-15

    申请号:US14293405

    申请日:2014-06-02

    Inventor: Mark A. Hamilton

    Abstract: An optical emission spectroscopic (OES) instrument includes a spectrometer, a processor and an adjustable mask controlled by the processor. The adjustable mask defines a portion of an analytical gap imaged by the spectrometer. The instrument automatically adjusts the size and position of an opening in the mask, so the spectrometer images an optimal portion of plasma formed in the analytical gap, thereby improving signal and noise characteristics of the instrument, without requiring tedious and time-consuming manual adjustment of the mask during manufacture or use.

    Abstract translation: 光发射光谱(OES)仪器包括光谱仪,处理器和由处理器控制的可调掩模。 可调节掩模定义了由光谱仪成像的分析间隙的一部分。 仪器自动调整面罩开口的尺寸和位置,因此光谱仪将分析间隙中形成的等离子体的最佳部分图像化,从而提高仪器的信号和噪声特性,而不需要繁琐乏味的手动调节 面具在制造或使用过程中。

    MEASURING DEVICE, SYSTEM AND PROGRAM
    264.
    发明申请
    MEASURING DEVICE, SYSTEM AND PROGRAM 审中-公开
    测量设备,系统和程序

    公开(公告)号:US20160321823A1

    公开(公告)日:2016-11-03

    申请号:US15106175

    申请日:2014-12-22

    Inventor: Fumio KARASAWA

    Abstract: To provide a device, system, and program with which it is possible for photometric information or colorimetric information corresponding to an international industry standard to be accurately measured in a simple manner. In one embodiment, a measurement apparatus (1) includes: an imaging unit (11) that acquires image data of an image; converters (141, 142) that use image data shooting information to convert the image data into data including photometric information or colorimetric information; and an output unit (16) that outputs the photometric information or the colorimetric information obtained by the converters

    Abstract translation: 提供能够以简单的方式准确地测量能够与对应于国际工业标准的测光信息或比色信息相关的设备,系统和程序。 在一个实施例中,一种测量装置(1)包括:获取图像的图像数据的成像单元(11) 转换器(141,142),其使用图像数据拍摄信息将图像数据转换成包括光度信息或比色信息的数据; 以及输出单元(16),其输出由转换器获得的测光信息或比色信息

    Frequency visualization apparatus and method
    268.
    发明授权
    Frequency visualization apparatus and method 有权
    频率可视化装置及方法

    公开(公告)号:US09423300B2

    公开(公告)日:2016-08-23

    申请号:US13925568

    申请日:2013-06-24

    Applicant: Peter Fuhr

    Inventor: Peter Fuhr

    CPC classification number: G01J3/0264 G01R23/17 G01R29/0878 G01R29/0892

    Abstract: A system and apparatus for: (i) receiving an image of a visually perceptible scene; (ii) sensing the presence and intensity of signals in a selected frequency band, which may include one or more of radio frequency, microwave, infrared, visible and ultraviolet, in part or all of the scene; (iii) displaying the frequency band as a visually distinguishable overlay on the visually perceptible scene; and (iv) indicating whether the signal intensity for a selected frequency interval is changing with passage of time.

    Abstract translation: 一种用于:(i)接收视觉可感知场景的图像的系统和装置; (ii)在部分或全部场景中感测所选频带中的信号的存在和强度,其可以包括射频,微波,红外,可见和紫外线中的一个或多个; (iii)在视觉可察觉的场景上将频带显示为视觉上可区分的重叠; 和(iv)指示所选择的频率间隔的信号强度随着时间的推移而改变。

    MEASUREMENT APPARATUS AND MEASUREMENT METHOD
    270.
    发明申请
    MEASUREMENT APPARATUS AND MEASUREMENT METHOD 有权
    测量装置和测量方法

    公开(公告)号:US20160139034A1

    公开(公告)日:2016-05-19

    申请号:US14657209

    申请日:2015-03-13

    Inventor: Toru MIKAMI

    Abstract: In accordance with an embodiment, a measurement apparatus includes a library creation unit, a spectral profile acquiring unit, and a measurement unit. The library creation unit creates a library in which a layer stack model is matched to a theoretical profile regarding a pattern of stacked layers. The spectral profile acquiring unit acquires an actual measured profile by applying light to a measurement target pattern obtained when the pattern is actually created. The measurement unit measures the sectional shape of the measurement target pattern by performing fitting of the theoretical profile to the actual measured profile. The layer stack model is created by calculating a feature value that reflects the intensity of reflected light from an interface for each of the layers, determining a priority order of analysis from the feature value, and sequentially performing fitting of the theoretical profile to the measured profile in the determined priority order.

    Abstract translation: 根据实施例,测量装置包括库创建单元,光谱轮廓获取单元和测量单元。 库创建单元创建库,其中层堆栈模型与关于层叠图案的理论简档相匹配。 光谱轮廓获取单元通过将光施加到当实际创建图案时获得的测量目标图案来获取实际测量的轮廓。 测量单元通过将理论曲线拟合到实际测量曲线来测量测量目标图案的截面形状。 通过计算反映来自每个层的界面的反射光的强度的特征值来创建层堆叠模型,从特征值确定分析的优先级顺序,并且顺序地将理论分布拟合到测量的轮廓 以确定的优先顺序。

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