公开(公告)号：US20060232445A1

公开(公告)日：2006-10-19

申请号：US11450382

申请日：2006-06-12

Applicant: Tsuyoshi Inanobe ,  Sho Takami ,  Yoichi Ose ,  Katsuhiro Sasada

Inventor： Tsuyoshi Inanobe ,  Sho Takami ,  Yoichi Ose ,  Katsuhiro Sasada

IPC: H03M1/22

CPC classification number: H01J37/09 ,  H01J37/16 ,  H01J2237/1405 ,  H01J2237/16 ,  H01J2237/2614 ,  H01J2237/2617 ,  H01J2237/28

Abstract: A structure of an electron beam apparatus having shielding properties for shielding against an environmental magnetic field is provided. The electron beam apparatus comprises a mirror barrel for housing a magnetic lens for converging an electron beam onto a specimen and a specimen chamber for housing the specimen, wherein a non-magnetic material having conductivity is used as a material for at least one of the mirror barrel and a main body of the specimen chamber. The material for the mirror barrel or the main body of the specimen chamber is an aluminum alloy and a thickness of a sidewall of the mirror barrel or the main body of the specimen chamber is 10 mm or more. A magnetic plate having a thickness smaller than that of the sidewall of the mirror barrel or the main body of the specimen chamber is provided on an inner sidewall of the mirror barrel or the main body of the specimen chamber.

公开(公告)号：US20060016988A1

公开(公告)日：2006-01-26

申请号：US10897635

申请日：2004-07-23

Applicant: Igor Petrov ,  Igor Krivts (Krayvitz) ,  Albert Karabekov

Inventor： Igor Petrov ,  Igor Krivts (Krayvitz) ,  Albert Karabekov

IPC: H01J37/28 ,  H01J37/145

CPC classification number: H01J37/147 ,  H01J37/026 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/1405 ,  H01J2237/1526

Abstract: A method and system are presented for directing a charged particle beam towards and away from a sample. The system comprises a lens arrangement having an electrode formed with a beam opening for a charged particle beam passage therethrough; and a magnetic deflector. The magnetic deflector has a magnetic circuit formed by a core part for carrying excitation coils and a polepieces part. The polepieces of the magnetic deflector are in electrical communication with the electrode of the lens arrangement and are electrically insulated from the other part of the magnetic circuit.

公开(公告)号：US20190228945A1

公开(公告)日：2019-07-25

申请号：US16255026

申请日：2019-01-23

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada

IPC: H01J37/153 ,  H01J37/26

CPC classification number: H01J37/153 ,  H01J37/261 ,  H01J2237/1405 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/28

Abstract: An aberration corrector for an electron microscope includes a geometric aberration corrector provided with a transfer lens system, wherein the transfer lens system includes an optical system for chromatic aberration correction, the optical system for chromatic aberration correction has a first portion, a second portion, and a third portion disposed along an optical axis, and each of the first portion, the second portion, and the third portion has a thickness in a direction along the optical axis and generates an electromagnetic field having two-fold symmetry in which an electric field having two-fold symmetry and a magnetic field having two-fold symmetry are superimposed.

公开(公告)号：US20160181054A1

公开(公告)日：2016-06-23

申请号：US15056143

申请日：2016-02-29

Applicant: CARL ZEISS MICROSCOPY GMBH ,  APPLIED MATERIALS ISRAEL, LTD.

Inventor： Rainer KNIPPELMEYER ,  Stefan SCHUBERT

IPC: H01J37/145

CPC classification number: H01J37/141 ,  H01J37/145 ,  H01J37/20 ,  H01J37/21 ,  H01J37/24 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/04922 ,  H01J2237/04926 ,  H01J2237/12 ,  H01J2237/1215 ,  H01J2237/14 ,  H01J2237/1405 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/2817

Abstract: An objective lens arrangement includes a first, second and third pole pieces, each being substantially rotationally symmetric. The first, second and third pole pieces are disposed on a same side of an object plane. An end of the first pole piece is separated from an end of the second pole piece to form a first gap, and an end of the third pole piece is separated from an end of the second pole piece to form a second gap. A first excitation coil generates a focusing magnetic field in the first gap, and a second excitation coil generates a compensating magnetic field in the second gap. First and second power supplies supply current to the first and second excitation coils, respectively. A magnetic flux generated in the second pole piece is oriented in a same direction as a magnetic flux generated in the second pole piece.

Abstract translation: 物镜配置包括第一，第二和第三极片，每个极片基本上是旋转对称的。 第一，第二和第三极片设置在物平面的同一侧。 第一极靴的端部与第二极靴的端部分离以形成第一间隙，并且第三极靴的端部与第二极靴的端部分离以形成第二间隙。 第一激励线圈在第一间隙中产生聚焦磁场，第二激励线圈在第二间隙中产生补偿磁场。 第一和第二电源分别向第一和第二励磁线圈提供电流。 在第二极靴中产生的磁通量在与第二极靴中产生的磁通量相同的方向上定向。

公开(公告)号：US09208995B2

公开(公告)日：2015-12-08

申请号：US14379291

申请日：2013-02-15

Applicant: Hitachi High-Technologies Corporation

Inventor： Yusuke Ominami ,  Takashi Ohshima ,  Hiroyuki Ito ,  Mitsugu Sato ,  Sukehiro Ito

IPC: G21K5/00 ,  H01J37/28 ,  H01J37/16 ,  H01J37/18 ,  H01J37/09

CPC classification number: H01J37/28 ,  H01J37/09 ,  H01J37/16 ,  H01J37/18 ,  H01J2237/0451 ,  H01J2237/06341 ,  H01J2237/10 ,  H01J2237/1405 ,  H01J2237/164 ,  H01J2237/2608 ,  H01J2237/2801

Abstract: Provided is a charged particle beam apparatus (111) to and from which a diaphragm (101) can be easily attached and detached, and in which a sample (6) can be arranged under vacuum and under high pressure. The charged particle beam apparatus includes: a lens barrel (3) holding a charged particle source (110) and an electron optical system (1,2,7); a first housing (4) connected to the lens barrel (3); a second housing (100) recessed to inside the first housing (4); a first diaphragm (10) separating the space inside the lens barrel (3) and the space inside the first housing (4), and through which the charged particle beam passes; a second diaphragm (101) separating the spaces inside and outside the recessed section (100a) in the second housing (100), and through which the charged particle beam passes; and a pipe (23) connected to a third housing (22) accommodating the charged particle source (110). The first diaphragm (10) is attached to the pipe (23), and the pipe (23) and the third housing (22) can be attached to and detached from the lens barrel (3) in the direction of the optical axis (30). A space (105) surrounded by the first housing (4) and the second housing (100) is depressurized, and the sample (6) arranged inside the recessed section (100a) is irradiated with a charged particle beam.

Abstract translation: 提供了一种带电粒子束装置（111），隔膜（101）可以从其中容易地附接和拆卸，并且其中样品（6）可以在真空和高压下布置。 带电粒子束装置包括：保持带电粒子源（110）和电子光学系统（1,2,7）的镜筒（3）; 连接到镜筒（3）的第一壳体（4）; 第二壳体（100），其凹入到所述第一壳体（4）的内部; 分离透镜筒（3）内的空间与第一壳体（4）内的空间的第一隔膜（10），带电粒子束通过该第一隔膜 第二隔膜（101），其分离所述第二壳体（100）中的所述凹部（100a）的内部和外部的空间，并且所述带电粒子束穿过所述第二隔膜; 以及连接到容纳所述带电粒子源（110）的第三壳体（22）的管道（23）。 第一隔膜（10）附接到管道（23），并且管道（23）和第三壳体（22）可以沿着光轴（30）的方向附接到镜筒（3）并从镜筒 ）。 由第一壳体（4）和第二壳体（100）围绕的空间（105）被减压，并且将配置在凹部（100a）内部的样品（6）照射带电粒子束。

公开(公告)号：US20150332891A1

公开(公告)日：2015-11-19

申请号：US14704453

申请日：2015-05-05

Applicant: MART PETRUS MARIA BIERHOFF ,  BART BUIJSSE ,  CORNELIS SANDER KOOIJMAN ,  HUGO VAN LEEUWEN ,  HENDRIK GEZINUS TAPPEL ,  COLIN AUGUST SANFORD ,  SANDER RICHARD MARIE STOKS ,  STEVEN BERGER ,  BEN JACOBUS MARIE BORMANS ,  KOEN ARNOLDUS WILHELMUS DRIESSEN ,  JOHANNES ANTONIUS HENDRICUS W. G. PERSOON

Inventor： MART PETRUS MARIA BIERHOFF ,  BART BUIJSSE ,  CORNELIS SANDER KOOIJMAN ,  HUGO VAN LEEUWEN ,  HENDRIK GEZINUS TAPPEL ,  COLIN AUGUST SANFORD ,  SANDER RICHARD MARIE STOKS ,  STEVEN BERGER ,  BEN JACOBUS MARIE BORMANS ,  KOEN ARNOLDUS WILHELMUS DRIESSEN ,  JOHANNES ANTONIUS HENDRICUS W. G. PERSOON

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/21 ,  H01J37/16 ,  H01J37/18 ,  H01J37/20

CPC classification number: H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

Abstract: A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.

Abstract translation: 用于操作扫描电子显微镜装置的用户界面，其将较低倍率参考图像和较高放大倍率的图像组合在同一屏幕上，使得不被用于电子显微镜的高放大倍数的用户容易地确定样品在哪里更容易 正在获取图像并了解该图像与其余样本之间的关系。 此外，其他屏幕（例如存档屏幕和设置屏幕）允许用户比较保存的图像并分别调整系统的设置。

公开(公告)号：US09000370B2

公开(公告)日：2015-04-07

申请号：US14512672

申请日：2014-10-13

Applicant: Hermes Microvision Inc.

Inventor： Weiming Ren ,  Zhongwei Chen

IPC: H01J37/02 ,  H01J37/28

CPC classification number: H01J37/026 ,  H01J37/14 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/0045 ,  H01J2237/0262 ,  H01J2237/1405 ,  H01J2237/2801 ,  H01J2237/2803

Abstract: The present invention provides means and corresponding embodiments to control charge-up in an electron beam apparatus, which can eliminate the positive charges soon after being generated on the sample surface within a frame cycle of imaging scanning. The means are to let some or all of secondary electrons emitted from the sample surface return back to neutralize positive charges built up thereon so as to reach a charge balance within a limited time period. The embodiments use control electrodes to generate retarding fields to reflect some of secondary electrons with low kinetic energies back to the sample surface.

Abstract translation: 本发明提供了用于控制电子束装置中的充电的装置和相应的实施例，其可以在成像扫描的帧周期内在样品表面上产生后不久就消除正电荷。 该方法是使从样品表面发射的二次电子的一些或全部返回到中和积聚在其上的正电荷，从而在有限的时间段内达到电荷平衡。 这些实施例使用控制电极产生延迟场，以将具有低动能的一些二次电子反射回样品表面。

公开(公告)号：US20150014530A1

公开(公告)日：2015-01-15

申请号：US14379291

申请日：2013-02-15

Applicant: Hitachi High-Technologies Corporation

Inventor： Yusuke Ominami ,  Takashi Ohshima ,  Hiroyuki Ito ,  Mitsugu Sato ,  Sukehiro Ito

IPC: H01J37/28 ,  H01J37/09 ,  H01J37/18

CPC classification number: H01J37/28 ,  H01J37/09 ,  H01J37/16 ,  H01J37/18 ,  H01J2237/0451 ,  H01J2237/06341 ,  H01J2237/10 ,  H01J2237/1405 ,  H01J2237/164 ,  H01J2237/2608 ,  H01J2237/2801

Abstract: Provided is a charged particle beam apparatus (111) to and from which a diaphragm (101) can be easily attached and detached, and in which a sample (6) can be arranged under vacuum and under high pressure. The charged particle beam apparatus includes: a lens barrel (3) holding a charged particle source (110) and an electron optical system (1,2,7); a first housing (4) connected to the lens barrel (3); a second housing (100) recessed to inside the first housing (4); a first diaphragm (10) separating the space inside the lens barrel (3) and the space inside the first housing (4), and through which the charged particle beam passes; a second diaphragm (101) separating the spaces inside and outside the recessed section (100a) in the second housing (100), and through which the charged particle beam passes; and a pipe (23) connected to a third housing (22) accommodating the charged particle source (110). The first diaphragm (10) is attached to the pipe (23), and the pipe (23) and the third housing (22) can be attached to and detached from the lens barrel (3) in the direction of the optical axis (30). A space (105) surrounded by the first housing (4) and the second housing (100) is depressurized, and the sample (6) arranged inside the recessed section (100a) is irradiated with a charged particle beam.

Abstract translation: 提供了一种带电粒子束装置（111），隔膜（101）可以从其中容易地附接和拆卸，并且其中样品（6）可以在真空和高压下布置。 带电粒子束装置包括：保持带电粒子源（110）和电子光学系统（1,2,7）的镜筒（3）; 连接到镜筒（3）的第一壳体（4）; 第二壳体（100），其凹入到所述第一壳体（4）的内部; 分离透镜筒（3）内的空间与第一壳体（4）内的空间的第一隔膜（10），带电粒子束通过该第一隔膜 第二隔膜（101），其分离所述第二壳体（100）中的所述凹部（100a）的内部和外部的空间，并且所述带电粒子束通过所述第二隔膜; 以及连接到容纳所述带电粒子源（110）的第三壳体（22）的管道（23）。 第一隔膜（10）附接到管道（23），并且管道（23）和第三壳体（22）可以沿着光轴（30）的方向附接到镜筒（3）并从镜筒 ）。 由第一壳体（4）和第二壳体（100）围绕的空间（105）被减压，并且将配置在凹部（100a）内部的样品（6）照射带电粒子束。

公开(公告)号：US20140145089A1

公开(公告)日：2014-05-29

申请号：US14171357

申请日：2014-02-03

Applicant: Micron Technology, Inc.

Inventor： Shixin WANG

IPC: H01J37/14 ,  H01J29/64

CPC classification number: H01J37/14 ,  H01J29/64 ,  H01J37/09 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/045 ,  H01J2237/0492 ,  H01J2237/103 ,  H01J2237/1405 ,  H01J2237/1534

Abstract: Apparatus having a magnetic lens configured to diverge an electron beam are useful in three-dimensional imaging using an electron microscope. The magnetic lens includes a body member having a core and defining a gap, and a winding surrounding a portion of the core. The body member and winding are configured such that an electrical current through the winding produces a magnetic field proximate to the gap.

Abstract translation: 具有配置成发散电子束的磁性透镜的装置在使用电子显微镜的三维成像中是有用的。 磁性透镜包括具有芯并限定间隙的主体部件和围绕芯部的一部分的绕组。 身体构件和绕组被配置成使得通过绕组的电流产生靠近间隙的磁场。

公开(公告)号：US08698094B1

公开(公告)日：2014-04-15

申请号：US13187019

申请日：2011-07-20

Applicant: Christopher Sears ,  Mehran Nasser-Ghodsi ,  Khashayar Shadman

Inventor： Christopher Sears ,  Mehran Nasser-Ghodsi ,  Khashayar Shadman

IPC: H01J1/50 ,  H01F7/00

CPC classification number: H01J37/143 ,  H01F7/0278 ,  H01J37/28 ,  H01J2237/1405 ,  H01J2237/1534

Abstract: A permanent magnetic lens array for charged-particle focusing includes a first sheet of soft magnetic material, wherein the first sheet of soft magnetic material includes a plurality of snorkel cone protrusions arranged in an array pattern, wherein each snorkel cone is axially symmetric and includes an opening passing from a first surface of the first sheet of soft magnetic material to a second surface of soft magnetic material, and a plurality of permanent magnetic elements, wherein each permanent magnetic element is axially symmetric and arranged concentrically with a snorkel cone of the first sheet of soft magnetic material, wherein the snorkel cones of the first sheet of soft magnetic material and the plurality of permanent magnetic elements are configured to form a plurality of magnetic lenses, wherein each magnetic lens has a magnetic field with an axial component oriented perpendicular to the first surface of the soft magnetic material.

Abstract translation: 用于带电粒子聚焦的永久磁性透镜阵列包括第一片软磁材料，其中第一片软磁材料包括以阵列图案排列的多个浮潜锥体突起，其中每个浮潜锥体是轴对称的，并且包括 开口从第一软磁材料片的第一表面延伸到软磁材料的第二表面，以及多个永久磁性元件，其中每个永久磁性元件轴向对称并与第一片的吸管锥体同心地布置 的软磁性材料，其中，所述第一软磁性材料片的所述通气孔和所述多个永久磁性元件被配置为形成多个磁性透镜，其中每个磁性透镜具有磁场，所述磁场的轴向分量垂直于 软磁材料的第一表面。