公开(公告)号：US09620331B1

公开(公告)日：2017-04-11

申请号：US14945902

申请日：2015-11-19

Applicant: Carl Zeiss Microscopy Ltd. ,  Carl Zeiss X-ray Microscopy, Inc.

Inventor： Sreenivas Bhattiprolu ,  Edward Hill

IPC: H01J37/00 ,  H01J37/26

CPC classification number: H01J37/261 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/24585 ,  H01J2237/2803 ,  H01J2237/2813

Abstract: The system described herein relates to analyzing an object using a charged particle beam device generating a beam of charged particles and to the charged particle beam device for analyzing the object. A part of an image of the object corresponding to a volume unit surface of a volume unit is segmented into an area having a first color level and a second color level as well corresponding area fractions are determined. A plurality of particles with color levels are identified by comparing the color levels with the information stored in a database. By comparing the color levels, it is possible to identify the potential particles, for example minerals, which may be included in the volume unit.

公开(公告)号：US20170076902A1

公开(公告)日：2017-03-16

申请号：US15361642

申请日：2016-11-28

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Hiroyasu SHICHI ,  Shinichi MATSUBARA ,  Norihide SAHO ,  Masahiro YAMAOKA ,  Noriaki ARAI

IPC: H01J27/26

CPC classification number: H01J27/26 ,  H01J27/022 ,  H01J37/023 ,  H01J37/067 ,  H01J37/08 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/2803

Abstract: An ion beam device according to the present invention includes a gas field ion source including an emitter tip supported by an emitter base mount, a ionization chamber including an extraction electrode and being configured to surround the emitter tip, and a gas supply tube. A center axis line of the extraction electrode overlaps or is parallel to a center axis line of the ion irradiation light system, and a center axis line passing the emitter tip and the emitter base mount is inclinable with respect to a center axis line of the ionization chamber. Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.

Abstract translation: 根据本发明的离子束装置包括气体离子源，其包括由发射极基座支撑的发射极尖端，包括引出电极并被配置为围绕发射极尖端的电离室和气体供应管。 引出电极的中心轴线与离​​子照射光系统的中心轴线重叠或平行，并且通过发射极尖端和发射极基座的中心轴线相对于电离的中心轴线是可倾斜的 房间。 因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。

公开(公告)号：US20160254118A1

公开(公告)日：2016-09-01

申请号：US15053225

申请日：2016-02-25

Applicant: JEOL Ltd.

Inventor： Yuji Kohno

IPC: H01J37/22 ,  H01J37/28

CPC classification number: H01J37/222 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/24465 ,  H01J2237/2802 ,  H01J2237/2803

Abstract: A measurement method capable of easily measuring the directions of detector segments of a segmented detector relative to a scanning transmission electron microscope (STEM) image is provided. The measurement method is for use in an electron microscope equipped with the segmented detector having a detection surface divided into the detector segments. The measurement method is used to measure the directions of the detector segments relative to the STEM image. The method involves defocusing the STEM image to thereby cause a deviation of the STEM image and measuring the directions of the detector segments relative to the STEM image from the direction of the deviation of the STEM image (step S11).

Abstract translation: 提供了能够容易地测量相对于扫描透射电子显微镜（STEM）图像的分段检测器的检测器段的方向的测量方法。 该测量方法用于装有分段检测器的电子显微镜，该检测器具有被分成检测器段的检测表面。 测量方法用于测量检测器段相对于STEM图像的方向。 该方法包括使STEM图像散焦，从而引起STEM图像的偏差，并从STEM图像的偏离方向测量相对于STEM图像的检测器片段的方向（步骤S11）。

公开(公告)号：US20160240348A1

公开(公告)日：2016-08-18

申请号：US15023936

申请日：2014-06-11

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Toshiyuki YOKOSUKA ,  Chahn LEE ,  Hideyuki KAZUMI ,  Hajime KAWANO ,  Shahedul HOQUE ,  Kumiko SHIMIZU ,  Hiroyuki TAKAHASHI

IPC: H01J37/28

CPC classification number: H01J37/28 ,  H01J37/147 ,  H01J37/20 ,  H01J37/22 ,  H01J2237/2803 ,  H01J2237/2806 ,  H01J2237/2817 ,  H01J2237/2826 ,  H01J2237/3045

Abstract: The scanning charged particle beam microscope according to the present invention is characterized in that, in acquiring an image of the FOV (field of view), interspaced beam irradiation points are set, and then, a deflector is controlled so that a charged particle beam scan is performed faster when the charged particle beam irradiates a position on the sample between each of the irradiation points than when the charged particle beam irradiates a position on the sample corresponding to each of the irradiation points (a position on the sample corresponding to each pixel detecting a signal). This allows the effects from a micro-domain electrification occurring within the FOV to be mitigated or controlled.

Abstract translation: 根据本发明的扫描带电粒子束显微镜的特征在于，在获取FOV（视场）的图像时，设置间隔射束照射点，然后控制偏转器，使得带电粒子束扫描 当带电粒子束照射到每个照射点之间的样品上的位置时，比相对于每个照射点的样品照射样品上的位置（对应于每个像素检测的样品上的位置）更快地执行 一个信号）。 这允许减轻或控制在FOV内发生的微域带电的影响。

公开(公告)号：US09412559B2

公开(公告)日：2016-08-09

申请号：US14311614

申请日：2014-06-23

Applicant: FEI Company

Inventor： Ryan Tanner

IPC: H01J37/304 ,  H01J37/30 ,  H01J37/28 ,  H01J37/305 ,  H01J37/26 ,  G01N1/28

CPC classification number: H01J37/3005 ,  G01N1/286 ,  H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J37/30 ,  H01J37/3045 ,  H01J37/3056 ,  H01J2237/2611 ,  H01J2237/28 ,  H01J2237/2803 ,  H01J2237/2814 ,  H01J2237/30472 ,  H01J2237/3174 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method and apparatus for performing a slice and view technique with a dual beam system. The feature of interest in an image of a sample is located by machine vision, and the area to be milled and imaged in a subsequent slice and view iteration is determined through analysis of data gathered by the machine vision at least in part. A determined milling area may be represented as a bounding box around a feature, which dimensions can be changed in accordance with the analysis step. The FIB is then adjusted accordingly to slice and mill a new face in the subsequent slice and view iteration, and the SEM images the new face. Because the present invention accurately locates the feature and determines an appropriate size of area to mill and image, efficiency is increased by preventing the unnecessary milling of substrate that does not contain the feature of interest.

公开(公告)号：US09406479B1

公开(公告)日：2016-08-02

申请号：US14751087

申请日：2015-06-25

Applicant: Marian Mankos

Inventor： Marian Mankos

IPC: G21K5/04 ,  H01J37/147 ,  H01J37/285 ,  H01J37/28 ,  H01J37/20 ,  H01J37/14

CPC classification number: H01J37/28 ,  G01R31/307 ,  G01R31/44 ,  H01J37/045 ,  H01J37/153 ,  H01J2237/0432 ,  H01J2237/06333 ,  H01J2237/065 ,  H01J2237/1523 ,  H01J2237/1534 ,  H01J2237/2802 ,  H01J2237/2803

Abstract: One embodiment pertains to an apparatus for compressing an electron pulse. An electron source is illuminated by a pulsed laser and generates a pulse of electrons. The pulse enters a beam separator which deflects the electrons by 90 degrees into an electron mirror. The faster, higher energy electrons form the leading edge of the pulse and penetrate more deeply into the retarding field of the electron mirror than the lower energy electrons. After reflection, the lower energy electrons exit the electron mirror before the higher energy electrons and form the leading edge of the pulse. The reflected pulse reenters the separator and is deflected by 90 degrees towards the specimen. The fast, higher energy electrons catch up with the slow, low energy electrons as the electrons strike the specimen. The electrons are scattered by the specimen and used to form a two-dimensional image or diffraction pattern of the specimen.

Abstract translation: 一个实施例涉及一种用于压缩电子脉冲的装置。 电子源被脉冲激光照射并产生电子脉冲。 脉冲进入光束分离器，将电子偏转90度，使其成为电子反射镜。 更快，更高能量的电子形成脉冲的前沿，并且比较低能量电子更深入地进入电子反射镜的延迟场。 在反射之后，较低能量的电子在较高能量的电子之前离开电子反射镜并形成脉冲的前沿。 反射的脉冲重新进入分离器，并向样品偏转90度。 随着电子撞击样品，快速，高能量的电子赶上缓慢的低能电子。 电子被样品散射并用于形成样品的二维图像或衍射图案。

公开(公告)号：US09245722B2

公开(公告)日：2016-01-26

申请号：US14483204

申请日：2014-09-11

Applicant: Georgia Tech Research Corporation

Inventor： Andrei G. Fedorov ,  Peter Arthur Kottke

IPC: H01J49/04 ,  H01J49/00 ,  H01J37/28

CPC classification number: H01J49/0431 ,  H01J37/28 ,  H01J49/0004 ,  H01J2237/05 ,  H01J2237/2803 ,  H01J2237/2809 ,  H01J2237/285

Abstract: SMS probe imaging systems, methods of use thereof, and the like are disclosed. Embodiments of the present disclosure can use direct interrogation of objects (e.g., cells or tissue) within a small pool/droplet of liquid, optional thermal, mechanical, electrical, optical and chemical manipulation, followed immediately by liquid sampling, optional sample conditioning, and soft ionization of biomolecules.

Abstract translation: 公开了SMS探针成像系统及其使用方法等。 本公开的实施例可以使用在小池/液滴中的物体（例如，细胞或组织）的直接询问，可选的热，机械，电学，光学和化学操作，随后通过液体取样，可选的样品调节和 生物分子的软电离。

公开(公告)号：US09000369B2

公开(公告)日：2015-04-07

申请号：US14512583

申请日：2014-10-13

Applicant: Hermes Microvision Inc.

Inventor： Weiming Ren ,  Zhongwei Chen

IPC: H01J37/14 ,  H01J37/28

CPC classification number: H01J37/026 ,  H01J37/14 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/0045 ,  H01J2237/0262 ,  H01J2237/1405 ,  H01J2237/2801 ,  H01J2237/2803

Abstract: The present invention provides means and corresponding embodiments to control charge-up in an electron beam apparatus, which can eliminate the positive charges soon after being generated on the sample surface within a frame cycle of imaging scanning. The means are to let some or all of secondary electrons emitted from the sample surface return back to neutralize positive charges built up thereon so as to reach a charge balance within a limited time period. The embodiments use control electrodes to generate retarding fields to reflect some of secondary electrons with low kinetic energies back to the sample surface.

公开(公告)号：US20150060670A1

公开(公告)日：2015-03-05

申请号：US14512583

申请日：2014-10-13

Applicant: Hermes Microvision Inc.

Inventor： Weiming Ren ,  Zhongwei Chen

IPC: H01J37/14 ,  H01J37/28

CPC classification number: H01J37/026 ,  H01J37/14 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/0045 ,  H01J2237/0262 ,  H01J2237/1405 ,  H01J2237/2801 ,  H01J2237/2803

Abstract: The present invention provides means and corresponding embodiments to control charge-up in an electron beam apparatus, which can eliminate the positive charges soon after being generated on the sample surface within a frame cycle of imaging scanning. The means are to let some or all of secondary electrons emitted from the sample surface return back to neutralize positive charges built up thereon so as to reach a charge balance within a limited time period. The embodiments use control electrodes to generate retarding fields to reflect some of secondary electrons with low kinetic energies back to the sample surface.

公开(公告)号：US20150053856A1

公开(公告)日：2015-02-26

申请号：US14489108

申请日：2014-09-17

Applicant: Isis Innovation Limited

Inventor： John Charles Sinclair ,  Martin Edward Mäntylä Noble

IPC: H01J37/22 ,  G01N33/68 ,  H01J37/26

CPC classification number: H01J37/222 ,  C07K14/001 ,  C07K14/24 ,  C07K14/36 ,  C07K14/47 ,  C07K14/7151 ,  C07K19/00 ,  C07K2319/00 ,  G01N33/6803 ,  H01J37/20 ,  H01J37/261 ,  H01J37/295 ,  H01J2237/201 ,  H01J2237/2802 ,  H01J2237/2803

Abstract: Protein layers (1) repeating regularly in two dimensions comprise protein protomers (2) which each comprise at least two monomers (5), (6) genetically fused together. The monomers (5), (6) are monomers of respective oligomer assemblies (3), (4) into which the monomers are assembled to assembly of the protein layer. The first oligomer assembly (3) belongs to a dihedral point group of order O, where O equals (3), (4) or (6) and has a set of O rotational symmetry axes of order (2). The second oligomer assembly (4) has a rotational symmetry axis of order (2). Due to the symmetry of the oligomer assemblies (3), (4), the rotational symmetry axes of each second oligomer assembly (4) is aligned with one of said set of O rotational symmetry axes of a first oligomer assembly (3) with (2) protomers being arranged symmetrically therearound. Thus, an 2-fold fusion between the oligomer assemblies (3), (4) is produced and the arrangements of the rotational symmetry axes of the oligomer assemblies (3), (4) cause the protein layer to repeat regularly. The protein layer has many uses, for example to support molecular entities for biosensing, x-ray crystallography or electron microscopy.

Abstract translation: 在二维中规则重复的蛋白质层（1）包含蛋白质反转录剂（2），其每个包含至少两个基因融合在一起的单体（5），（6）。 单体（5），（6）是各自的低聚物组件（3），（4）的单体，其中单体组装成蛋白质层的组装。 第一低聚物组件（3）属于阶数为O的二面点组，其中O等于（3），（4）或（6），并具有一组O旋转对称轴（2）。 第二低聚物组件（4）具有顺序（2）的旋转对称轴。 由于低聚物组件（3），（4）的对称性，每个第二低聚物组件（4）的旋转对称轴线与第一低聚物组件（3）的所述一组O旋转对称轴线之一与（ 2）检测器在其周围对称布置。 因此，产生低聚物组件（3），（4）之间的2倍融合，并且低聚物组件（3），（4）的旋转对称轴的布置导致蛋白质层定期重复。 蛋白质层具有许多用途，例如用于支持用于生物传感，X射线晶体学或电子显微镜的分子实体。