公开(公告)号：NL2010232A

公开(公告)日：2013-03-19

申请号：NL2010232

申请日：2013-02-01

Applicant: ASML NETHERLANDS BV

Inventor： NIKIPELOV ANDREY ,  BANINE VADIM ,  IVANOV VLADIMIR ,  DIJKSMAN JOHAN ,  YAKUNIN ANDREI

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：SG182568A1

公开(公告)日：2012-08-30

申请号：SG2012052643

申请日：2010-12-08

Applicant: ASML NETHERLANDS BV

Inventor： YAKUNIN ANDREI ,  KRIVTSUN VLADIMIR ,  MEDVEDEV VIACHESLAV ,  KODENTSOV ALEXANDRE

Abstract: A spectral purity filter includes a body of material, through which a plurality of apertures extend. The apertures are arranged to suppress radiation having a first wavelength and to allow at least a portion of radiation having a second wavelength to be transmitted through the apertures. The second wavelength of radiation is shorter than the first wavelength of radiation. The body of material is formed from tungsten-molybdenum alloy or a molybdenum-rhenium alloy or a tungsten-rhenium alloy or a tungsten-molybdenum-rhenium alloy.

公开(公告)号：NL2007857A

公开(公告)日：2011-12-19

申请号：NL2007857

申请日：2011-11-24

Applicant: ASML NETHERLANDS BV

Inventor： WUISTER SANDER ,  KRIVTSUN VLADIMIR ,  YAKUNIN ANDREI

IPC: G03F7/20

公开(公告)号：NL2005463A

公开(公告)日：2011-06-20

申请号：NL2005463

申请日：2010-10-06

Applicant: ASML NETHERLANDS BV

Inventor： SCACCABAROZZI LUIGI ,  BANINE VADIM ,  IVANOV VLADIMIR ,  YAKUNIN ANDREI

IPC: G03F7/20 ,  G01N21/94

Abstract: A system and method are used to detect thermal radiation from a mask. Debris particles on the mask heat up, but do not cool down as quickly as the surrounding mask. Due to the temperature difference, the wavelength of radiation emitted by particles and the mask differs. Thus by detecting the thermal radiation, it is possible to detect the presence of particles deposited on the mask. If particles are detected, the mask can be cleaned.

公开(公告)号：NL2006604A

公开(公告)日：2011-06-09

申请号：NL2006604

申请日：2011-04-14

Applicant: ASML NETHERLANDS BV

Inventor： BANINE VADIM ,  BOEIJ WILHELMUS ,  DIJSSELDONK ANTONIUS ,  LOOPSTRA ERIK ,  MOORS ROEL ,  SCHOOT JAN ,  SWINKELS GERARDUS ,  YAKUNIN ANDREI

IPC: G03F7/20 ,  G21K1/06

公开(公告)号：NL2005166A

公开(公告)日：2011-03-17

申请号：NL2005166

申请日：2010-07-29

Applicant: ASML NETHERLANDS BV

Inventor： YAKUNIN ANDREI ,  KAMPEN MAARTEN ,  TIMOSHKOV VADIM

IPC: G21K1/06 ,  G03F7/20

Abstract: A spectral purity filter includes a substrate, a plurality of apertures through the substrate, and a plurality of walls. The walls define the plurality of apertures through the substrate. The spectral purity filter also includes a first layer formed on the substrate to reflect radiation of a first wavelength, and a second layer formed on the first layer to prevent oxidation of the first layer. The apertures are constructed and arranged to be able to transmit at least a portion of radiation of a second wavelength therethrough.

公开(公告)号：NL2005111A

公开(公告)日：2011-02-22

申请号：NL2005111

申请日：2010-07-19

Applicant: ASML NETHERLANDS BV

Inventor： JAK MARTIN ,  BANINE VADIM ,  HERPEN MAARTEN ,  SOER WOUTER ,  YAKUNIN ANDREI

IPC: G03F7/20 ,  G21K1/06

公开(公告)号：NL2005832A

公开(公告)日：2011-01-10

申请号：NL2005832

申请日：2010-12-08

Applicant: ASML NETHERLANDS BV

Inventor： MEDVEDEV VIACHESLAV ,  BANINE VADIM ,  KRIVTSUN VLADIMIR ,  SOER WOUTER ,  YAKUNIN ANDREI

IPC: G03F7/20

公开(公告)号：NL2005763A

公开(公告)日：2011-01-06

申请号：NL2005763

申请日：2010-11-26

Applicant: ASML NETHERLANDS BV

Inventor： BANINE VADIM ,  LOOPSTRA ERIK ,  MOORS JOHANNES ,  YAKUNIN ANDREI

IPC: G03F7/20

公开(公告)号：NL2004992A

公开(公告)日：2010-08-09

申请号：NL2004992

申请日：2010-06-29

Applicant: ASML NETHERLANDS BV

Inventor： SOER WOUTER ,  BANINE VADIM ,  LOOPSTRA ERIK ,  YAKUNIN ANDREI ,  JAK MARTIN

IPC: G03F7/20