Spectroscope equipment using a slender cylindrical reflector as a substitute for a slit
    191.
    发明授权
    Spectroscope equipment using a slender cylindrical reflector as a substitute for a slit 失效
    使用SLENDER CYRINDRRORRORRORERS作为替代品的光谱设备

    公开(公告)号:US3554647A

    公开(公告)日:1971-01-12

    申请号:US3554647D

    申请日:1968-12-27

    Applicant: NASA

    CPC classification number: G01J3/02 G01J3/0205 G01J3/0208 G01J3/0272 G01J3/0291

    Abstract: IN A SPECTROMETER FOR USE IN ANALYZING A PORTION OF LIGHT EMITTED FROM A RELATIVELY LARGE LIGHT SOURCE COMPRISING A CYLINDRICAL, HIGHLY POLISHED METALLIC MEMBER THE SIZE OF A COMMON NEEDLE LOCATED AT THE FOCAL PLANE OF AN ACHROMATIC COLLIMATOR OF THE SPECTROMETER, THE CYLINDRICAL MEMBER BEING ADJUSTABLY SITUATED IN THE PATH OF A LIGHT SOURCE OF RELATIVELY LARGE AREA, SAID CYLINDRICAL MEMBER BEING ILLUMINATED BY A PORTIION OF SAID LIGHT SOURCE, SAID CYLINDRICAL MEMBER REFLECTING A PORTION OF SAID LIGHT SOURCE. IN A NARROW BEAM CONFIGURATION SUITABLE FOR COLLIMATION.

    Time-Resolved OES Data Collection
    198.
    发明公开

    公开(公告)号:US20240133742A1

    公开(公告)日:2024-04-25

    申请号:US17973083

    申请日:2022-10-24

    CPC classification number: G01J3/443 G01J3/0205

    Abstract: A method of processing a substrate that includes: exposing the substrate in a plasma processing chamber to a plasma powered by applying a first power to a first electrode of a plasma processing chamber; turning OFF the first power to the first electrode after the first time duration; while the first power is OFF, applying a second power to a second electrode of the plasma processing chamber for a second time duration, the second time duration being shorter than the first time duration, an energy of the second power over the second time duration is less than an energy of the first power over the first time duration by a factor of at least 2; and detecting an optical emission spectrum (OES) from species in the plasma processing chamber.

    ACCURATE RAMAN SPECTROSCOPY
    199.
    发明公开

    公开(公告)号:US20240085333A1

    公开(公告)日:2024-03-14

    申请号:US18452494

    申请日:2023-08-18

    Applicant: NOVA LTD.

    Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.

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