METHODS FOR COLLECTION, DARK CORRECTION, AND REPORTING OF SPECTRA FROM ARRAY DETECTOR SPECTROMETERS
    221.
    发明申请
    METHODS FOR COLLECTION, DARK CORRECTION, AND REPORTING OF SPECTRA FROM ARRAY DETECTOR SPECTROMETERS 审中-公开
    收集,深度校正和从阵列检测器光谱仪报告光谱的方法

    公开(公告)号:US20160356646A1

    公开(公告)日:2016-12-08

    申请号:US14728818

    申请日:2015-06-02

    CPC classification number: G01J3/0286 G01J3/027 G01J3/28 G01J3/44 G01J2003/2866

    Abstract: Methods and systems for spectrometer dark correction are described which achieve more stable baselines, especially towards the edges where intensity correction magnifies any non-zero results of dark subtraction, and changes in dark current due to changes in temperature of the camera window frame are typically more pronounced. The resulting induced curvature of the baseline makes quantitation difficult in these regions. Use of the invention may provide metrics for the identification of system failure states such as loss of camera vacuum seal, drift in the temperature stabilization, and light leaks. In system aspects of the invention, a processor receives signals from a light detector in the spectrometer and executes software programs to calculate spectral responses, sum or average results, and perform other operations necessary to carry out the disclosed methods. In most preferred embodiments, the light signals received from a sample are used for Raman analysis.

    Abstract translation: 描述了用于光谱仪暗校正的方法和系统,其实现更稳定的基线,特别是对于强度校正放大任何非零零暗结果的边缘的边缘,以及由于相机窗框的温度变化引起的暗电流变化通常更多 发音。 由此导致的基线曲率使得这些区域难以定量化。 使用本发明可以提供用于识别系统故障状态的度量,例如相机真空密封的损失,温度稳定的漂移和光泄漏。 在本发明的系统方面,处理器从光谱仪中的光检测器接收信号,并执行软件程序以计算光谱响应,总和或平均结果,并执行执行所公开方法所需的其它操作。 在最优选的实施例中,从样品接收的光信号用于拉曼分析。

    Spectral Feature Metrology of a Pulsed Light Beam
    222.
    发明申请
    Spectral Feature Metrology of a Pulsed Light Beam 有权
    脉冲光束的光谱特征计量

    公开(公告)号:US20160341602A1

    公开(公告)日:2016-11-24

    申请号:US14720207

    申请日:2015-05-22

    Applicant: Cymer, LLC

    Inventor: Joshua Thornes

    CPC classification number: G01J3/26 G01J3/027 G01J3/18 G01J3/2803 G01J9/00

    Abstract: A metrology system includes an optical frequency separation apparatus in the path of the pulsed light beam and configured to interact with the pulsed light beam and output a plurality of spatial components that correspond to the spectral components of the pulsed light beam; a plurality of sensing regions that receive and sense the output spatial components; and a control system connected to an output of each sensing region. The control system is configured to: measure, for each sensing region output, a property of the output spatial components from the optical frequency separation apparatus for one or more pulses; analyze the measured properties including averaging the measured properties to calculate an estimate of the spectral feature of the pulsed light beam; and determine whether the estimated spectral feature of the pulsed light beam is within an acceptable range of values of spectral features.

    Abstract translation: 计量系统包括在脉冲光束的路径中的光学频率分离装置,并被配置为与脉冲光束相互作用并输出与脉冲光束的光谱分量相对应的多个空间分量; 多个感测区域,其接收和感测输出空间分量; 以及连接到每个感测区域的输出的控制系统。 所述控制系统被配置为:对于每个感测区域输出,针对一个或多个脉冲测量来自所述光学频率分离装置的输出空间分量的特性; 分析测量的性质,包括对测量的性质进行平均,以计算脉冲光束的光谱特征的估计; 并且确定脉冲光束的估计光谱特征是否在光谱特征值的可接受范围内。

    Optical emission spectroscopic (OES) instrument with automatic top and bottom slit curtains
    223.
    发明授权
    Optical emission spectroscopic (OES) instrument with automatic top and bottom slit curtains 有权
    具有自动顶部和底部狭缝窗帘的光学发射光谱仪(OES)仪器

    公开(公告)号:US09494463B2

    公开(公告)日:2016-11-15

    申请号:US14293405

    申请日:2014-06-02

    Inventor: Mark A. Hamilton

    Abstract: An optical emission spectroscopic (OES) instrument includes a spectrometer, a processor and an adjustable mask controlled by the processor. The adjustable mask defines a portion of an analytical gap imaged by the spectrometer. The instrument automatically adjusts the size and position of an opening in the mask, so the spectrometer images an optimal portion of plasma formed in the analytical gap, thereby improving signal and noise characteristics of the instrument, without requiring tedious and time-consuming manual adjustment of the mask during manufacture or use.

    Abstract translation: 光发射光谱(OES)仪器包括光谱仪,处理器和由处理器控制的可调掩模。 可调节掩模定义了由光谱仪成像的分析间隙的一部分。 仪器自动调整面罩开口的尺寸和位置,因此光谱仪将分析间隙中形成的等离子体的最佳部分图像化,从而提高仪器的信号和噪声特性,而不需要繁琐乏味的手动调节 面具在制造或使用过程中。

    Noise Reduction for Pulsed Lasers Using Clustering
    225.
    发明申请
    Noise Reduction for Pulsed Lasers Using Clustering 有权
    脉冲激光器使用聚类降噪

    公开(公告)号:US20160299007A1

    公开(公告)日:2016-10-13

    申请号:US13853896

    申请日:2013-03-29

    Inventor: Adam Kleczewski

    CPC classification number: G01J3/453 G01J3/027 G01J2003/4538 H01S5/14

    Abstract: An optical measurement method in which a series of light pulses are generated using a pulsed laser having a set of different mode hop sequences (e.g., an external-cavity quantum cascade laser (EC-QCL)), the light pulses are detected with the detector to generate a respective pulse data set for each of the light pulses, and the pulse data sets are sorted into classes based on correlation coefficients. Sorting the pulse data sets into classes allows the pulse data sets originating from each of the mode hop sequences of the pulsed laser to be treated independently of the pulse data sets originating from others of the mode hop sequences in subsequent processing.

    Abstract translation: 一种光学测量方法,其中使用具有一组不同模式跳跃序列的脉冲激光器(例如,外腔量子级联激光器(EC-QCL))产生一系列光脉冲,光检测器 以产生每个光脉冲的相应脉冲数据集,并且基于相关系数将脉冲数据集分类成类别。 将脉冲数据集分类成类允许在随后的处理中独立于源自其他模式跳序列的脉冲数据集来处理源自脉冲激光器的每个模跳序列的脉冲数据集。

    Microscope system, image processing apparatus, and computer readable recording medium
    228.
    发明授权
    Microscope system, image processing apparatus, and computer readable recording medium 有权
    显微镜系统,图像处理装置和计算机可读记录介质

    公开(公告)号:US09404850B2

    公开(公告)日:2016-08-02

    申请号:US13908391

    申请日:2013-06-03

    Inventor: Masanori Mitsui

    Abstract: A microscope system includes: a microscope that generates an observation image of a specimen; an image obtaining unit that obtains an RGB image of the specimen; a spectroscopic information obtaining unit that obtains spectroscopic information of the specimen; an analyzer that analyzes the RGB image; a determining unit that determines a necessity of obtaining the spectroscopic information based on a result of the analysis of the analyzer; and a control unit that controls an operation of the spectroscopic information obtaining unit based on a result of the determination of the determining unit.

    Abstract translation: 显微镜系统包括:产生样本的观察图像的显微镜; 获取样本的RGB图像的图像获取单元; 获取样本的光谱信息的光谱信息获取单元; 分析RGB图像的分析仪; 确定单元,其基于分析器的分析结果确定获得光谱信息的必要性; 以及控制单元,其基于确定单元的确定结果来控制分光信息获取单元的操作。

    High dynamic range measurement system for process monitoring
    229.
    发明授权
    High dynamic range measurement system for process monitoring 有权
    用于过程监控的高动态范围测量系统

    公开(公告)号:US09310250B1

    公开(公告)日:2016-04-12

    申请号:US14696370

    申请日:2015-04-24

    Abstract: A flashlamp control system is provided with a capacitor that is statically electrically connected to the high voltage power supply, and a current sensing component is then electrically connected to the static capacitor and digital control electronics to monitor the charge current and/or the discharge current to static capacitor. A dynamically switchable capacitor electrically may also be connected to the high voltage power supply and digital control electronics for isolating the dynamically switchable capacitor from the high voltage power supply based on the monitored charge current and/or discharge current. One or more homogenizing element, comprise of an air gap, diffusing homogenizing element, imaging element, non-imaging element or light pipe homogenizing element, may be disposed in the light path proximate to the flashlamp, such as a multichannel distributor if present, to decrease the coefficient of variation of the optical signal, either temporally and spectrally, or both.

    Abstract translation: 闪光灯控制系统设置有静电电连接到高压电源的电容器,并且电流感测部件然后电连接到静态电容器和数字控制电子器件,以监测充电电流和/或放电电流 静态电容。 电动可切换电容器还可以连接到高压电源和数字控制电子设备,用于基于所监视的充电电流和/或放电电流将动态可切换电容器与高压电源隔离。 包括气隙,扩散匀化元件,成像元件,非成像元件或光管均质元件的一个或多个匀化元件可以设置在接近闪光灯的光路中,例如多通道分配器(如果存在)到 在时间上和光谱上降低光信号的变化系数,或两者。

    HIGH-FREQUENCY POWER SUPPLY DEVICE
    230.
    发明申请
    HIGH-FREQUENCY POWER SUPPLY DEVICE 有权
    高频电源装置

    公开(公告)号:US20160066404A1

    公开(公告)日:2016-03-03

    申请号:US14825301

    申请日:2015-08-13

    Inventor: Toshiya HABU

    Abstract: A transformer is formed into a substantially U shape. The length of the transformer may thus be secured, and also the length of pattern wiring between an input terminal and an output terminal of a secondary coil of the transformer and the control terminals of a semiconductor device may be reduced. Moreover, the primary coil and the secondary coil of the transformer are arranged in parallel. The coupling coefficient between the primary coil and the secondary coil is thereby increased. An LC resonant circuit, not including the induction coil, and a switching circuit and the transformer are accommodated inside a housing. A water-cooling radiator is provided inside the housing, and also air inside the housing is circulated by a cooling fan while being guided to the radiator.

    Abstract translation: 变压器形成为大致U形。 因此可以确保变压器的长度,并且还可以减小变压器的次级线圈的输入端子和输出端子与半导体器件的控制端子之间的图案布线的长度。 此外,变压器的初级线圈和次级线圈平行布置。 因此,初级线圈和次级线圈之间的耦合系数增加。 不包括感应线圈的LC谐振电路以及开关电路和变压器被容纳在壳体内。 在壳体内设置水冷散热器,并且壳体内的空气也被冷却风扇循环,同时被引导到散热器。

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