Nanosheet transistor with asymmetric gate stack

    公开(公告)号:AU2021276898A1

    公开(公告)日:2022-11-10

    申请号:AU2021276898

    申请日:2021-04-30

    Applicant: IBM

    Abstract: Methods and resulting structures for nanosheet devices having asymmetric gate stacks are disclosed. A nanosheet stack (102) is formed over a substrate (104). The nanosheet stack (102) includes alternating semiconductor layers (108) and sacrificial layers (110). A sacrificial liner (202) is formed over the nanosheet stack (102) and a dielectric gate structure (204) is formed over the nanosheet stack (102) and the sacrificial liner (202). A first inner spacer (302) is formed on a sidewall of the sacrificial layers (110). A gate (112) is formed over channel regions of the nanosheet stack (102). The gate (112) includes a conductive bridge that extends over the substrate (104) in a direction orthogonal to the nanosheet stack (102). A second inner spacer (902) is formed on a sidewall of the gate (112). The first inner spacer (302) is formed prior to the gate (112) stack, while the second inner spacer (902) is formed after, and consequently, the gate (112) stack is asymmetrical.

    23.
    发明专利
    未知

    公开(公告)号:AT503252T

    公开(公告)日:2011-04-15

    申请号:AT07867608

    申请日:2007-12-04

    Applicant: IBM

    Abstract: A magnetic domain wall memory apparatus with write/read capability includes a plurality of coplanar shift register structures each comprising an elongated track formed from a ferromagnetic material having a plurality of magnetic domains therein, the shift register structures further having a plurality of discontinuities therein to facilitate domain wall location; a magnetic read element associated with each of the shift register structures; and a magnetic write element associated with each of the shift register structures, the magnetic write element further comprising a single write wire having a longitudinal axis substantially orthogonal to a longitudinal axis of each of the coplanar shift register structures.

    METHOD FOR MANUFACTURING A THIN-FILM PHOTOVOLTAIC CELL MODULE ENCOMPASSING AN ARRAY OF CELLS AND PHOTOVOLTAIC CELL MODULE
    25.
    发明申请
    METHOD FOR MANUFACTURING A THIN-FILM PHOTOVOLTAIC CELL MODULE ENCOMPASSING AN ARRAY OF CELLS AND PHOTOVOLTAIC CELL MODULE 审中-公开
    制造薄膜光伏电池模块的方法,包括电池阵列和光电池模块

    公开(公告)号:WO2011032741A3

    公开(公告)日:2012-04-05

    申请号:PCT/EP2010059849

    申请日:2010-07-09

    Abstract: The invention relates to a method for manufacturing a thin-film photovoltaic cell module (10) encompassing an array of cells (100), comprising the steps of (i) providing the array of cells (100); (ii) determining, per cell (100), an electrical performance for one or more cells (100) of the array; (iii) identifying each cell (100) by its position in the array; (iv) determining one or more electrical paths (50, 52, 54) encompassing one or more of the cells (100) according to at least one optimization criterion; and (v) combining two or more cells (100) for realizing one or more electrical paths (50, 52, 54) by maintaining or establishing electrical connections (30) between individual cells (100) of the array according to the at least one optimization criterion.

    Abstract translation: 本发明涉及一种用于制造包围电池阵列(100)的薄膜光伏电池模块(10)的方法,包括以下步骤:(i)提供电池阵列(100); (ii)每个单元(100)确定阵列的一个或多个单元(100)的电性能; (iii)通过其在阵列中的位置来识别每个单元(100); (iv)根据至少一个优化标准确定包含一个或多个所述单元(100)的一个或多个电路径(50,52,54); 以及(v)通过根据所述至少一个维持或建立阵列的各个单元(100)之间的电连接(30),组合用于实现一个或多个电路径(50,52,54)的两个或更多个单元(100) 优化标准。

    MAKING OF FUSES AND ANTIFUSES WITH A VERTICAL DRAM PROCESS
    26.
    发明申请
    MAKING OF FUSES AND ANTIFUSES WITH A VERTICAL DRAM PROCESS 审中-公开
    用垂直DRAM工艺制造熔体和抗菌剂

    公开(公告)号:WO0227784A3

    公开(公告)日:2003-04-10

    申请号:PCT/US0142293

    申请日:2001-09-25

    Abstract: A structure and process for semiconductor fuses and antifuses in vertical DRAMS provides fuses and antifuses in trench openings formed within a semiconductor substrate. Vertical transistors may be formed in other of the trench openings formed within the semiconductor substrate. The fuse is formed including a semiconductor plug (108) formed within an upper portion of the trench opening (110) and includes conductive leads (252, 254) contacting the semiconductor plug. The antifuse is formed including a semiconductor plug formed within an upper portion of the trench opening and includes conductive leads formed over the semiconductor plug, at least one conductive lead isolated from the semiconductor plug by an antifuse dielectric. Each of the fuse and antifuse are fabricated using a sequence of process operations also used to simultaneously fabricate vertical transistors according to vertical DRAM technology, the plug forming the gate of the vertical transistor.

    Abstract translation: 垂直DRAMS中的半导体熔丝和反熔丝的结构和工艺在半导体衬底内形成的沟槽开口中提供熔丝和反熔丝。 垂直晶体管可以形成在形成在半导体衬底内的其它沟槽开口中。 熔丝形成包括形成在沟槽开口(110)的上部内的半导体插塞(108),并且包括接触半导体插头的导电引线(252,254)。 反熔丝形成包括形成在沟槽开口的上部内的半导体插塞,并且包括形成在半导体插头上的导电引线,至少一个导电引线,其通过反熔丝绝缘体与半导体插塞隔离。 熔丝和反熔丝中的每一个都使用一系列工艺操作来制造,这些工艺操作也用于根据垂直DRAM技术同时制造垂直晶体管,该插头形成垂直晶体管的栅极。

    30.
    发明专利
    未知

    公开(公告)号:AT519228T

    公开(公告)日:2011-08-15

    申请号:AT00103964

    申请日:2000-02-25

    Abstract: A semiconductor device including a substrate. At least one pair of deep trenches is arranged in the substrate. A collar lines at least a portion of a wall of each deep trench. A deep trench fill fills each deep trench. A buried strap extends completely across each deep trench over each deep trench fill and each collar. An isolation region is arranged between the deep trenches. A dielectric region overlies each buried strap in each deep trench.

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