公开(公告)号：NL2005309A

公开(公告)日：2011-04-14

申请号：NL2005309

申请日：2010-09-03

Applicant: ASML NETHERLANDS BV

Inventor： BEERENS RUUD ,  DONDERS SJOERD ,  PASCH ENGELBERTUS ,  VEN BASTIAAN ,  VERMEULEN JOHANNES

IPC: G03F7/20

公开(公告)号：NL2003207A1

公开(公告)日：2010-01-22

申请号：NL2003207

申请日：2009-07-16

Applicant: ASML NETHERLANDS BV

Inventor： TEGENBOSCH HENRICUS ,  STRUYCKEN ALEXANDER ,  KLEIJN JACOB ,  BEERENS RUUD ,  VANDERH IVO

IPC: G03F7/20 ,  G02B7/04

公开(公告)号：NL2010204A

公开(公告)日：2013-10-15

申请号：NL2010204

申请日：2013-01-30

Applicant: ASML NETHERLANDS BV

Inventor： BLEEKER ARNO ,  CASTENMILLER THOMAS ,  JAGER PIETER ,  MULDER HEINE ,  ZAAL KOEN ,  CADEE THEODORUS PETRUS MARIA ,  PHILIPS DANNY ,  BEERENS RUUD ,  TIMMERMANS ROGER

IPC: G03F7/20 ,  H01L21/68

Abstract: A projection system, configured to project a radiation beam onto a target, includes a rotatable frame configured to rotate about an axis defining a tangential direction and a radial direction, wherein the rotatable frame holds a lens configured to focus the radiation beam in only the tangential or radial direction; and a stationary part comprising a substantially stationary lens configured to focus the radiation beam in only the other of the tangential or radial direction.

公开(公告)号：NL2009902A

公开(公告)日：2013-07-01

申请号：NL2009902

申请日：2012-11-29

Applicant: ASML NETHERLANDS BV

Inventor： BUTLER HANS ,  BLEEKER ARNO ,  HENNUS PIETER ,  HOEKS MARTINUS ,  HOL SVEN ANTOIN JOHAN ,  SCHOOT HARMEN ,  SLAGHEKKE BERNARDUS ,  TINNEMANS PATRICIUS ,  WIJST MARC ,  ZAAL KOEN ,  CADEE THEODORUS PETRUS MARIA ,  BEERENS RUUD ,  FISCHER OLOF ,  AANGENENT WOUTER ,  BOSCH NIELS JOHANNES MARIA

IPC: G03F7/20

公开(公告)号：NL2009870A

公开(公告)日：2013-06-26

申请号：NL2009870

申请日：2012-11-23

Applicant: ASML NETHERLANDS BV

Inventor： BEERENS RUUD ,  PASCH ENGELBERTUS ,  VERMEULEN JOHANNES ,  CADEE THEODORUS PETRUS MARIA ,  LAFARRE RAYMOND

IPC: G03F7/20

公开(公告)号：NL2009357A

公开(公告)日：2013-03-28

申请号：NL2009357

申请日：2012-08-24

Applicant: ASML NETHERLANDS BV

Inventor： SPRUIT JOHANNES HENDRIKUS MARIA ,  BEERENS RUUD

IPC: G03F7/20

公开(公告)号：NL2008083A

公开(公告)日：2012-09-04

申请号：NL2008083

申请日：2012-01-05

Applicant: ASML NETHERLANDS BV

Inventor： BEERENS RUUD ,  GROOT ANTONIUS

IPC: G03F7/20

公开(公告)号：NL2008157A

公开(公告)日：2012-08-24

申请号：NL2008157

申请日：2012-01-20

Applicant: ASML NETHERLANDS BV

Inventor： BEERENS RUUD ,  GROOT ANTONIUS

IPC: G03F7/20