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公开(公告)号:CN101506948A
公开(公告)日:2009-08-12
申请号:CN200680055616.2
申请日:2006-09-12
Applicant: 日东电工株式会社
IPC: H01L21/301 , H01L21/52
CPC classification number: H01L24/83 , C09J7/20 , C09J2201/36 , C09J2201/606 , C09J2201/61 , C09J2203/326 , C09J2205/31 , C09J2433/00 , H01L21/67132 , H01L21/6835 , H01L21/6836 , H01L21/78 , H01L23/3142 , H01L24/27 , H01L24/29 , H01L24/48 , H01L24/85 , H01L2221/68327 , H01L2221/68336 , H01L2224/274 , H01L2224/29 , H01L2224/29101 , H01L2224/2919 , H01L2224/2929 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/29386 , H01L2224/29393 , H01L2224/48 , H01L2224/83191 , H01L2224/83855 , H01L2224/8388 , H01L2224/85 , H01L2924/00013 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01016 , H01L2924/01019 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/0105 , H01L2924/01055 , H01L2924/01073 , H01L2924/01074 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0665 , H01L2924/07802 , H01L2924/10253 , H01L2924/3025 , Y10T428/26 , H01L2924/0675 , H01L2924/0635 , H01L2924/066 , H01L2924/00 , H01L2924/3512 , H01L2924/05432 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: 本发明的切割/芯片焊接膜是在支撑基材上依次层压有粘合剂层和芯片胶粘用胶粘剂层的切割/芯片焊接膜,其特征在于,上述粘合剂层的厚度为10~80μm,23℃下的储藏弹性率为1×104~1×1010Pa。
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公开(公告)号:CN101471240A
公开(公告)日:2009-07-01
申请号:CN200810186926.9
申请日:2004-06-04
Applicant: 日立化成工业株式会社
CPC classification number: H01L24/27 , H01L2221/68336 , H01L2224/274 , H01L2224/2919 , H01L2224/83191 , H01L2224/94 , H01L2924/01005 , H01L2924/01012 , H01L2924/01029 , H01L2924/01079 , H01L2924/3512 , H01L2924/00 , H01L2224/27
Abstract: 本发明涉及粘合片、与切割胶带一体化粘合片以及半导体的制造方法。本发明提供粘合片的切割方法,该方法是通过扩张进行粘贴在半导体晶片上的粘合片的切割,其特征在于:在室温以下的温度进行所述扩张。
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公开(公告)号:CN100505254C
公开(公告)日:2009-06-24
申请号:CN200310123558.0
申请日:2003-12-26
Applicant: 株式会社半导体能源研究所
CPC classification number: H01L21/6835 , H01L21/563 , H01L24/27 , H01L24/29 , H01L24/81 , H01L24/83 , H01L29/0657 , H01L29/66757 , H01L29/78675 , H01L2221/68359 , H01L2221/68368 , H01L2224/0401 , H01L2224/04026 , H01L2224/13111 , H01L2224/13144 , H01L2224/16225 , H01L2224/274 , H01L2224/29101 , H01L2224/29111 , H01L2224/2919 , H01L2224/2929 , H01L2224/293 , H01L2224/32225 , H01L2224/73204 , H01L2224/81191 , H01L2224/81801 , H01L2224/83192 , H01L2224/838 , H01L2924/00013 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01039 , H01L2924/01042 , H01L2924/01047 , H01L2924/0105 , H01L2924/01073 , H01L2924/01074 , H01L2924/01077 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/0132 , H01L2924/014 , H01L2924/04953 , H01L2924/0665 , H01L2924/0781 , H01L2924/12042 , H01L2924/14 , H01L2924/1517 , H01L2924/15311 , H01L2924/1579 , H01L2924/3511 , H01L2924/00 , H01L2924/00012 , H01L2924/01014 , H01L2924/3512 , H01L2924/00014 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299
Abstract: 本发明提供一种崭新的半导体安装技术,该技术不依靠硅片的背面加工就可以实现半导体器件的薄型化。借助于安装集成电路膜,使安装该集成电路膜的半导体器件的薄型化成为可能。在此,“集成电路膜”指的是使用利用在玻璃衬底或石英衬底上形成的半导体膜制成的集成电路而制成的膜状的集成电路。本发明利用转移技术制作集成电路膜。
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公开(公告)号:CN101404258A
公开(公告)日:2009-04-08
申请号:CN200810099766.4
申请日:2008-06-04
Applicant: 三星电机株式会社
CPC classification number: H01L23/3114 , H01L21/6835 , H01L24/11 , H01L24/12 , H01L24/24 , H01L24/27 , H01L24/82 , H01L2221/68372 , H01L2224/0231 , H01L2224/0401 , H01L2224/16 , H01L2224/24227 , H01L2224/274 , H01L2924/01006 , H01L2924/01015 , H01L2924/01029 , H01L2924/01033 , H01L2924/01059 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/014 , H01L2924/15153 , H01L2924/1517
Abstract: 本发明披露了一种制造晶片级封装的方法。该方法可以包括在晶片基板上堆叠绝缘层;在该绝缘层中加工通孔;在该绝缘层上形成种子层;在该种子层上形成抗镀层,该抗镀层与重分布图案具有对应的关系;通过电镀形成包括用于外部接触的端子的重分布图案;以及,将导电球连接至端子。因为利用便宜的PCB工艺可形成多个重分布层,因此可以降低制造成本,并且可以提高该方法的稳定性和效率。
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公开(公告)号:CN101369546A
公开(公告)日:2009-02-18
申请号:CN200810145988.5
申请日:2008-08-15
Applicant: 新光电气工业株式会社
Inventor: 风间拓也
IPC: H01L21/60
CPC classification number: H01L23/3114 , H01L24/11 , H01L24/12 , H01L24/16 , H01L24/94 , H01L2221/68377 , H01L2224/02313 , H01L2224/02321 , H01L2224/02333 , H01L2224/02351 , H01L2224/0401 , H01L2224/05556 , H01L2224/13021 , H01L2224/13099 , H01L2224/16 , H01L2224/274 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01025 , H01L2924/01029 , H01L2924/01033 , H01L2924/01045 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/14
Abstract: 本发明提供一种制造半导体器件的方法。所述方法包括如下连续步骤:(a)提供半导体基板;(b)在所述半导体基板上形成具有电极焊盘的多个半导体芯片;(c)在所述电极焊盘上形成内部连接端子;(d)在所述多个半导体芯片上形成绝缘层以覆盖所述内部连接端子;(e)在所述绝缘层上形成金属层;(f)按压所述金属层的全部区域以使所述金属层与所述内部连接端子的上端部分接触;(g)按压所述金属层的与所述内部连接端子的上端部分接触的部分,由此在所述内部连接端子中形成第一凹陷部,并且在所述金属层中形成第二凹陷部;以及(h)通过蚀刻所述金属层来形成配线图案。
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公开(公告)号:CN101365765A
公开(公告)日:2009-02-11
申请号:CN200780002072.8
申请日:2007-01-23
Applicant: 日立化成工业株式会社
IPC: C09J4/02 , C09J4/06 , C09J7/00 , C09J7/02 , H01L21/301
CPC classification number: C09J4/06 , C08K5/3417 , C09J7/22 , C09J7/38 , C09J11/06 , C09J2205/102 , C09J2423/006 , C09J2479/08 , H01L21/67132 , H01L21/6835 , H01L21/6836 , H01L23/3128 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/85 , H01L25/0657 , H01L2221/68327 , H01L2221/6834 , H01L2224/274 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/73265 , H01L2224/83101 , H01L2224/83191 , H01L2224/83856 , H01L2224/8388 , H01L2224/85 , H01L2225/0651 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01009 , H01L2924/01012 , H01L2924/01015 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/0104 , H01L2924/01047 , H01L2924/01051 , H01L2924/01057 , H01L2924/01067 , H01L2924/01074 , H01L2924/01075 , H01L2924/01079 , H01L2924/01082 , H01L2924/01084 , H01L2924/014 , H01L2924/04953 , H01L2924/0665 , H01L2924/07802 , H01L2924/09701 , H01L2924/10253 , H01L2924/15311 , H01L2924/15747 , H01L2924/181 , H01L2924/3511 , Y10T428/2896 , Y10T428/31721 , H01L2924/00 , H01L2924/00012 , H01L2924/3512 , H01L2224/45015 , H01L2924/207 , H01L2224/45099
Abstract: 本发明提供一种含有(A)热塑性树脂、(B)下述通式(I)表示的双烯丙基降冰片烯二酰亚胺以及(C)2官能以上的(甲基)丙烯酸酯化合物而成的粘接剂组合物,用于提供可以高度兼顾对被粘着体的填充性(埋入性)、低温层压性等工艺特性以及耐回流性等半导体装置的可靠性的粘接剂组合物,以及使用该组合物的薄膜状粘接剂,从切割片易剥离性等工艺特性优异的粘接片,以及生产性优异、热时的高粘接强度和耐湿性优异的半导体装置。式中,R1是包含芳香族环和/或直链、支链或环状脂肪族烃的2价有机基团。
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公开(公告)号:CN101276763A
公开(公告)日:2008-10-01
申请号:CN200710138104.9
申请日:2007-07-26
Applicant: 国家半导体公司
IPC: H01L21/50 , H01L21/82 , H01L23/36 , H01L23/495 , H01L23/31
CPC classification number: H01L23/4334 , H01L21/78 , H01L23/49548 , H01L24/97 , H01L29/0657 , H01L2224/0401 , H01L2224/04026 , H01L2224/16245 , H01L2224/274 , H01L2224/73253 , H01L2924/01078 , H01L2924/01079 , H01L2924/10155 , H01L2924/14 , H01L2924/00
Abstract: 具有集成热沉的集成电路装置。描述了一种以晶片级在集成电路装置的背面形成集成热沉的方法。在晶片的背面淀积第一金属层。在该第一金属层上淀积第二金属层。可选地,在该第二金属层上淀积第三金属层。第一金属层、第二金属层以及可选的第三金属层形成用于晶片的集成热沉。当晶片被切割成多个半导体装置时,每个半导体装置具有在其背面形成的集成热沉,包括第一金属层、第二金属层和可选的第三金属层。可选地,每个半导体装置通过焊球凸点或键合引线与引线框相连,以形成集成电路(IC)封装体。
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公开(公告)号:CN100416768C
公开(公告)日:2008-09-03
申请号:CN03821452.0
申请日:2003-09-05
Applicant: 飞思卡尔半导体公司
IPC: H01L21/301 , H01L21/44 , H01L21/46
CPC classification number: H01L21/561 , H01L21/304 , H01L21/3043 , H01L21/56 , H01L21/563 , H01L21/78 , H01L23/3114 , H01L24/29 , H01L24/96 , H01L24/97 , H01L2224/16 , H01L2224/274 , H01L2224/73104 , H01L2224/73203 , H01L2224/83191 , H01L2224/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01015 , H01L2924/01027 , H01L2924/01033 , H01L2924/01078 , H01L2924/10329 , H01L2924/12041 , H01L2924/14 , H01L2924/18161 , H01L2924/3511 , H01L2924/00
Abstract: 首先在晶片的有源表面侧进行划片(22)形成沟槽(38),该沟槽最终界定单个集成电路芯片边缘(39),划片仅达到晶片的部分深度。然后用底填料(40)涂敷(24)晶片的正面(36)。晶片的背面经精磨、研磨、抛光或其他处理(26)去除晶片材料直至与划切后的沟槽平齐。然后切断在涂敷步骤中沉积在沟槽中的底填料(92)以分切晶片(28),这样集成电路芯片(12)就从晶片脱离。
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公开(公告)号:CN101197338A
公开(公告)日:2008-06-11
申请号:CN200710305159.4
申请日:2007-10-31
Applicant: 三洋电机株式会社
CPC classification number: H01L24/11 , H01L23/3128 , H01L23/49816 , H01L24/94 , H01L2224/0231 , H01L2224/02319 , H01L2224/02333 , H01L2224/0401 , H01L2224/05124 , H01L2224/05144 , H01L2224/05147 , H01L2224/05647 , H01L2224/114 , H01L2224/116 , H01L2224/13099 , H01L2224/274 , H01L2924/01005 , H01L2924/01006 , H01L2924/01011 , H01L2924/01013 , H01L2924/01015 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/15311 , H01L2924/351 , H01L2924/00 , H01L2924/00014
Abstract: 本发明涉及一种半导体模块、半导体模块的制造方法及便携式设备,其提高半导体模块在电极部的连接可靠性。首先,准备在表面具有电极及保护膜的半导体基板以矩阵状形成的半导体晶片。其次,在半导体晶片(半导体基板)的表面,在半导体基板和在前端部一体形成有含有塑性区域的突起部的铜板(金属板)之间夹持绝缘层。然后,在这样夹持的状态下,使用压力装置进行加压成型,使半导体基板、绝缘层及铜板一体化。由此,突起部贯通绝缘层的同时,前端部的塑性区域在与电极的接触面处发生塑性变形,使突起部和电极电连接。
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公开(公告)号:CN100393835C
公开(公告)日:2008-06-11
申请号:CN200480016096.5
申请日:2004-06-10
Applicant: 日立化成工业株式会社
IPC: C09J7/00 , C09J7/02 , H01L21/52 , H01L21/301
CPC classification number: H01L21/6835 , C09J7/10 , C09J7/35 , C09J2201/36 , C09J2463/00 , C09J2479/08 , H01L21/67132 , H01L21/6836 , H01L24/27 , H01L24/73 , H01L24/83 , H01L2221/68327 , H01L2221/6839 , H01L2221/68395 , H01L2224/274 , H01L2224/27436 , H01L2224/2919 , H01L2224/32145 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/73265 , H01L2224/8319 , H01L2224/83856 , H01L2224/8388 , H01L2224/83885 , H01L2224/92 , H01L2224/92247 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/0102 , H01L2924/01023 , H01L2924/01025 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01045 , H01L2924/01047 , H01L2924/01067 , H01L2924/01075 , H01L2924/01077 , H01L2924/01079 , H01L2924/01082 , H01L2924/01084 , H01L2924/014 , H01L2924/04953 , H01L2924/0665 , H01L2924/07802 , H01L2924/09701 , H01L2924/10253 , H01L2924/14 , H01L2924/15311 , H01L2924/15747 , H01L2924/181 , H01L2924/351 , H01L2924/00 , H01L2924/00012 , H01L2924/3512 , H01L2924/00014
Abstract: 本发明的目的在于提供一种膜状粘接剂、贴合该膜状粘接剂和切割胶带而形成的粘接片以及半导体装置,所述膜状粘接剂能够以较极薄晶片的保护胶带或者贴合的切割胶带的软化温度低的温度在晶片背面层积,并且可以降低晶片翘曲等的热应力,可以简化半导体装置的制造工序,进而耐热性及耐湿可靠性也优异。
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