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31.发明专利
公开(公告)号：NL2004362A
公开(公告)日：2010-10-12
申请号：NL2004362
申请日：2010-03-09
Applicant: ASML NETHERLANDS BV
Inventor： EUMMELEN ERIK , STEFFENS KOEN
IPC: G03F7/20
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公开(公告)号：NL2004305A
公开(公告)日：2010-09-14
申请号：NL2004305
申请日：2010-02-26
Applicant: ASML NETHERLANDS BV
Inventor： STAVENGA MARCO , SHULEPOV SERGEI , STEFFENS KOEN , LIEROP MATHIEUS , DAVID SAMUEL , BESSEMS DAVID
Abstract: A substrate table for an immersion lithographic apparatus is disclosed having a recess, configured to receive a substrate of a given size, and a fluid extraction system, configured to extract fluid from a gap between the edge of the substrate and the edge of the recess, the fluid extraction system configured such that the rate of flow of fluid extracted from a localized section of the gap is greater than the rate of flow of fluid extracted from another section of the gap.
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公开(公告)号：SG157283A1
公开(公告)日：2009-12-29
申请号：SG2009023326
申请日：2009-04-03
Applicant: ASML NETHERLANDS BV
Inventor： DIRECKS DANIEL JOZEF MARIA , PHILIPS DANNY MARIA HUBERTUS , VAN DEN DUNGEN CLEMENS JOHANNES GERARDUS , STEFFENS KOEN , VAN PUTTEN ARNOLD JAN
Abstract: A fluid handling structure is disclosed in which measures are taken to increase the speed at which meniscus breakdown occurs. Measures include the shape of a plurality of fluid extraction openings and the shape and density of a plurality of fluid supply openings in the fluid handling structure.
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公开(公告)号：NL1035816A1
公开(公告)日：2009-03-16
申请号：NL1035816
申请日：2008-08-12
Applicant: ASML NETHERLANDS BV
Inventor： BERKVENS PAUL PETRUS JOANNES , GRAAF ROELOF FREDERIK DE , LIEBREGTS PAULUS MARTINUS MARIA , HAM RONALD VAN DER , SIMONS WILHELMUS FRANCISCUS JOHANNES , DIRECKS DANIEL JOZEF MARIA , JANSSEN FRANCISCUS JOHANNES JOSEPH , SCHOLTES PAUL WILLIAM , BRANDS GERT-JAN GERARDUS JOHANNES THOMAS , STEFFENS KOEN , LEMPENS HAN HENRICUS ALDEGONDA , LIEROP MATHIEUS ANNA KAREL VAN , METSENAERE CHRISTOPHE DE , MIRANDA MARCIO ALEXANDRE CANO , SPRUYTENBURG PATRICK JOHANNES WILHELMUS , VERSTRAETE JORIS JOHAN ANNE-MARIE
IPC: G03F7/20 , H01L21/027
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公开(公告)号：NL2003575A
公开(公告)日：2010-05-03
申请号：NL2003575
申请日：2009-09-30
Applicant: ASML NETHERLANDS BV
Inventor： STEFFENS KOEN , HAM RONALD , EUMMELEN ERIK
IPC: G03F7/20
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Patent Agency Ranking36.发明专利
公开(公告)号：NL2003226A
公开(公告)日：2010-03-09
申请号：NL2003226
申请日：2009-07-17
Applicant: ASML NETHERLANDS BV
Inventor： KEMPER NICOLAAS , ANTONEVICI ANCA , KATE NICOLAAS , OTTENS JOOST , BECKERS MARCEL , POLIZZI MARCO , RIEPEN MICHEL , KUIJPER ANTHONIE , STEFFENS KOEN , BAETEN ADRIANES
IPC: G03F7/20
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公开(公告)号：NL1036631A1
公开(公告)日：2009-09-25
申请号：NL1036631
申请日：2009-02-25
Applicant: ASML NETHERLANDS BV
Inventor： DIRECKS DANIEL JOZEF MARIA , KEMPER NICOLAAS RUDOLF , LIEBREGTS PAULUS MARTINUS MARIA , HAM RONALD VAN DER , SIMONS WILHELMUS FRANCISCUS JO , PHILIPS DANNY MARIA HUBERTUS , BRANDS GERT-JAN GERARDUS JOHANNES , STEFFENS KOEN , LEMPENS HAN HENRICUS ALDEGONDA , ZANDEN MARCUS JOHANNES VAN DER , MULDER PIETER
IPC: G03F7/20
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公开(公告)号：NL2006272A
公开(公告)日：2011-11-07
申请号：NL2006272
申请日：2011-02-22
Applicant: ASML NETHERLANDS BV
Inventor： HAM RONALD , BARAGONA MARCO , GROEN ROBERTUS , MAESSEN RALPH , TOONDER JACOB , KOVACEVIC-MILIVOJEVIC MILICA , LEENDERS MARTINUS , MULKENS JOHANNES , MOERMAN RICHARD , RIEPEN MICHEL , SHULEPOV SERGEI , STEFFENS KOEN , CROMWIJK JAN , SONDAG-HUETHORST JEANNET
IPC: G03F7/20
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公开(公告)号：NL2005717A
公开(公告)日：2011-06-21
申请号：NL2005717
申请日：2010-11-18
Applicant: ASML NETHERLANDS BV
Inventor： GOSEN JEROEN , JANSEN ALBERT , KATE NICOLAAS , STAVENGA MARCO , STEFFENS KOEN , BOKHOVEN LAURENTIUS , CASTELIJNS HENRICUS , CUYPERS KOEN
IPC: G03F7/20
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公开(公告)号：NL2010762A
公开(公告)日：2013-12-02
申请号：NL2010762
申请日：2013-05-07
Applicant: ASML NETHERLANDS BV
Inventor： LAURENT THIBAULT , BLOKS RUUD , CORTIE ROGIER , HOUBEN MARTIJN , JACOBS JOHANNES , LAFARRE RAYMOND , LEMPENS HAN , OVERKAMP JIM , PIETERSE GERBEN , POLET THEODORUS , SIMONS WILHELMUS , STEFFENS KOEN , TROMP SIEGFRIED , VY VAN VUONG
IPC: G03F7/20 , H01L21/683
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